• Title/Summary/Keyword: 접합계면 평가

Search Result 113, Processing Time 0.024 seconds

Characterization and observation of Cu-Cu Thermo-Compression Bonding using 4-point bending test system (4-point bending test system을 이용한 Cu-Cu 열 압착 접합 특성 평가)

  • Kim, Jae-Won;Kim, Kwang-Seop;Lee, Hak-Joo;Kim, Hee-Yeon;Park, Young-Bae;Hyun, Seung-Min
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.18 no.4
    • /
    • pp.11-18
    • /
    • 2011
  • The quantitative interfacial adhesion energy of the Cu-Cu direct bonding layers was evaluated in terms of the bonding temperature and Ar+$H_2$ plasma treatment on Cu surface by using a 4-point bending test. The interfacial adhesion energy and bonding quality depend on increased bonding temperature and post-annealing temperature. With increasing bonding temperature from $250^{\circ}C$ to $350^{\circ}C$, the interfacial adhesion energy increase from $1.38{\pm}1.06$ $J/m^2$ to $10.36{\pm}1.01$ $J/m^2$. The Ar+$H_2$ plasma treatment on Cu surface drastically increase the interfacial adhesion energy form $1.38{\pm}1.06$ $J/m^2$ to $6.59{\pm}0.03$ $J/m^2$. The plasma pre-treatment successfully reduces processing temperature of Cu to Cu direct bonding.

Effect of De-graphitization Heat Treatment on Interfacial Bonding Properties of Flake Graphite Cast Iron-Aluminum Dissimilar Materials Produced by High Pressure Die Casting (고압 다이캐스팅법으로 제조한 편상흑연주철 -알루미늄 이종소재의 계면접합특성에 미치는 탈흑연 열처리의 영향)

  • Yang, Ji-Ba-Reum;Kim, TaeHyeong;Jeong, JaeHeon;Kim, SangWoo;Kim, YoonJun;Kim, DongEung;Shin, JeSik
    • Journal of Korea Foundry Society
    • /
    • v.41 no.6
    • /
    • pp.535-542
    • /
    • 2021
  • In this study, to improve the interfacial bond strength of cast iron-aluminum dissimilar materials, graphite was removed to a certain depth from the cast iron surface through de-graphitization heat treatment. As the heat treatment time increased, the depth at which graphite was removed increased, showing a linear relationship between the heat treatment time and depth. Aluminum was filled to a certain depth on the de-graphitized cast iron surface through die-casting method, and no intermetallic compounds were formed on the cast iron-aluminum interface. The interfacial bonding strength showed a value of 90 MPa regardless of the heat treatment time, which is very high compared to the 12MPa bonding strength of the material without de-graphitization heat treatment. This result is thought to be due to the mechanical bonding of the undercut structure as the liquid aluminum, penetrated by the high pressure die-casting process, solidified in the de-graphitized region of the cast iron.

Joining properties and thermal cycling reliability of the Si die-attached joint with Zn-Sn-based high-temperature lead-free solders (Zn-Sn계 고온용 무연솔더를 이용한 Si다이접합부의 접합특성 및 열피로특성)

  • Kim, Seong-Jun;Kim, Keun-Soo;Suganuma, Katsuaki
    • Proceedings of the KWS Conference
    • /
    • 2009.11a
    • /
    • pp.72-72
    • /
    • 2009
  • 전자부품의 내부접속 및 파워반도체의 다이본딩과 같은 1차실장에는 고온환경에서의 사용과 2차실장에서의 재용융방지를 위해 높은 액상선온도 및 고상선온도를 필요로 하여, Pb-5wt%Sn, Pb-2.5wt%Ag로 대표되는 납성분 85%이상의 고온솔더가 널리 사용되고 있다. 생태계와 인체에 대한 납의 유해성이 보고된 이래, 무연솔더에 대한 연구가 활발히 진행되어 왔으나, Sn-Ag-Cu계로 대표되는 Sn계 합금으로 대체 중인 중온용 솔더와는 달리, 고온용 솔더에 대해서는 대체합금에 대한 연구가 미흡한 실정이다. 대체재의 부재로 인해 기존의 납을 다량함유한 솔더로 1차실장이 지속됨으로서, 2차실장의 무연화에도 불구하고 전자부품 및 기기의 재활용에 큰 어려움을 겪고 있다. 지금까지 고온용 무연솔더로서는 융점에 근거해 Au-(Sn, Ge, Si)계, Bi-Ag계, Zn-(Al, Sn)계의 극히 제한된 합금계만이 보고되어 왔다. Au계 솔더는 현재 플럭스를 사용하지 않는 광학, 디스플레이 분야 등 고부가가치 공정에 사용되고 있으나, 합금가격이 매우 비싸며 가공성이 나빠 대체재료로서는 적합하지 않다. Bi-Ag계 솔더 또한 취성합금으로 와이어 및 박판으로 가공하는데 어려움이 크며, 솔더로서 중요한 특성중 하나인 전기전도도 및 열전도도가 나쁜 편이다. 이에 비해, Zn계 합금은 비교적 낮은 합금가격, 적절한 가공성과 뛰어난 인장강도, 우수한 전기전도도 및 열전도도를 지녀, 고온용솔더 대체재료의 유력한 후보로 생각된다.이전 연구에서, 필자의 연구그룹은 Zn-Sn계 합금을 고온용 무연솔더로서 제안한 바 있다. Zn-Sn계 합금은 충분히 높은 융점과 함께, 금속간화합물이 없는 미세조직, 우수한 기계적 특성, 높은 전기전도도 및 열전도도 등의 장점을 나타내었다. 본 연구에서는 기초합금특성상 고온솔더로서 다양한 장점을 지닌 Zn-30wt%Sn합금을 고온용 솔더의 대표적인 적용의 하나인 다이본딩에 적용하여, 접합부의 강도 및 미세조직, 열피로 신뢰성에 대해 분석을 함으로서 실제 공정에의 적용가능성에 대해 검토하였다. Zn-30wt%Sn을 이용해 Au/TiN(Titanium nitride) 코팅한 Si다이를 AlN-DBC(aluminum nitride-direct bonded copper)기판에 접합한 결과, 양측에 완전히 젖은 기공이 없는 양호한 다이접합부를 얻었으며, 솔더내부에는 금속간화합물을 형성하지 않았다. Si다이와의 계면에는 TiN만이 존재하였으며, Cu와의 계면에는 Cu로부터 $Cu_5Zn_8,\;CuZn_5$의 반응층을 형성하였다. 온도사이클시험을 통한 열피로특성평가에서, Zn-30wt%Sn를 이용한 다이접합부는 1500사이클 지점에서 Cu와 Cu-Zn금속간화합물의 사이에서 피로균열이 형성되며, 접합강도가 크게 감소하였다. 열피로특성 향상을 위해 Cu표면에 TiN코팅을 하여 Zn-30wt%Sn 솔더로 다이접합한 결과, Si다이와 기판 양측에 TiN만으로 구성된 계면을 형성하였으며, TEM관찰을 통해 Zn-30wt%Sn과 극히 미세한 접합계면이 형성하고 있음을 확인하였다. Zn-wt%30Sn솔더와 TiN층의 병용으로 2000사이클까지 미세조직의 변화 및 강도저하가 없는 극히 안정된 고신뢰성의 다이접합부를 얻을 수가 있었다.

  • PDF

Thermal Stability of Au/Nb/WNx(Si)/GaAs Schottky Contacts (Au/Nb/WNx(Si)/GaAs Schottky 접합의 열안정성)

  • Jeong, Jin-Yeong;Go, Gyeong-Hyeon;An, Jae-Hwan;Kim, Hyeong-Jun
    • Korean Journal of Materials Research
    • /
    • v.6 no.1
    • /
    • pp.79-83
    • /
    • 1996
  • Microwave용 GaAs MESFET 소자에 적용가능한 Schottky 접합구조로서 Au/Nb/WNx(Si) 다층박막의 특성을 평가하였다. WNx 증착시 co-sputtering에 의하여 첨가된 실리콘은 열처리 과정 동안 GaAs/Schottky 계면으로 확산되며 이 과정은 sputtering damage의 회복이 활성화되는 $700^{\circ}C$이상에서 활발해진다. 계면으로 축적된 실리콘은 Ga와 As의 유효한 확산 경로를 차단함으로서 Ga의 확산으로 인한 GsAs 내의 carrier 농도 증가를 최소화 할 수 있어서 WNx와 같은 Schottky 접합재료의 열적 안정특성의 향상을 기대할 수 있다. Au/Nb의 층을 적층시 Nb는 탈탈륨 등의 고융점 금속과 같이 sacrificial 형태의 확산방지막으로 작용하여 열적으로 안정하며 microwave용 소자에서 요구되는 낮은 비저항치(-10-5$\Omega$-cm)를 유지할 수 있다.

  • PDF

Plastic Flow Direction and Strength Evaluation of Dissimilar Fiction Bonding Interface Joints (이종마찰 접합계면부의 소성유동 방향성 및 강도 평가)

  • Oh, Jung-Kuk;Sung, Back-Sub
    • Journal of the Korean Society for Precision Engineering
    • /
    • v.19 no.5
    • /
    • pp.43-50
    • /
    • 2002
  • Friction welding has many merits such as energy efficiency, simple processing, etc butt difficult to obtain good weld at the welded interface and heat affected zone. To date, the continuum mechanics and fracture mechanics are utilized to analyse stresses at the interface and propagation of cracks. In this study. STS304 and SM15C are selected because they can be differentiated distinctively from metallic point of view and crack can be observed easily. It is ovserved during friction welding that STS304, rotary part is hatter than SH15C, fixed part. The last fracture occurs around the center because the surface of fatigue fracture has smooth regions, due to the separation phenomenon in plastic flows layers and striation dimple pattern.

A novel hemispherical microbond specimen for evaluating the interfacial shear strength of single fiber composite (복합재료의 계면 전단강도를 평가하기 위한 새로운 반구형 미소접합 시험편)

  • Park, Joo-Eon;Choi, Nak-Sam
    • Composites Research
    • /
    • v.21 no.2
    • /
    • pp.25-30
    • /
    • 2008
  • A hemispherical microbond specimen adhered onto single carbon fiber has been proposed for evaluating the interfacial shear strength between epoxy and carbon fiber. Hemispherical microbond specimens showed low interfacial shear strength data and its small standard deviation as compared with the droplet one, which seemed to be caused by the reduction of the meniscus effects and of the stress concentration in the region contacting with the tip of pin hole. In comparison with the droplet specimen the hemispherical specimen showed the shear stress distribution similar to the cylindrical one in that low stress concentration arose around the contacting region. Average interfacial shear strength obtained by the hemispherical ones represented a good correlation with the hardness of the epoxy matrix.

Effects of Post-annealing and Temperature/Humidity Conditions on the Interfacial Adhesion Energies of ALD RuAlO Diffusion Barrier Layer for Cu Interconnects (후속열처리 및 고온고습 조건에 따른 Cu 배선 확산 방지층 적용을 위한 ALD RuAlO 박막의 계면접착에너지에 관한 연구)

  • Lee, Hyeonchul;Jeong, Minsu;Bae, Byung-Hyun;Cheon, Taehun;Kim, Soo-Hyun;Park, Young-Bae
    • Journal of the Microelectronics and Packaging Society
    • /
    • v.23 no.2
    • /
    • pp.49-55
    • /
    • 2016
  • The effects of post-annealing and temperature/humidity conditions on the interfacial adhesion energies of atomic layer deposited RuAlO diffusion barrier layer for Cu interconnects were systematically investigated. The initial interfacial adhesion energy measured by four-point bending test was $7.60J/m^2$. The interfacial adhesion energy decreased to $5.65J/m^2$ after 500 hrs at $85^{\circ}C$/85% T/H condition, while it increased to $24.05J/m^2$ after annealing at $200^{\circ}C$ for 500 hrs. The X-ray photoemission spectroscopy (XPS) analysis showed that delaminated interface was RuAlO/$SiO_2$ for as-bonded and T/H conditions, while it was Cu/RuAlO for post-annealing condition. XPS O1s peak separation results revealed that the effective generation of strong Al-O-Si bonds between $AlO_x$ and $SiO_2$ interface at optimum post-annealing conditions is responsible for enhanced interfacial adhesion energies between RuAlO/$SiO_2$ interface, which would lead to good electrical and mechanical reliabilities of atomic layer deposited RuAlO diffusion barrier for advanced Cu interconnects.

Fracture Mechanical Characterization of Bi-material Interface for the Prediction of Load Bearing Capacity of Composite-Steel Bonded Joints (복합재료-탄소강 접착제 결합 조인트의 하중지지 능력 예측을 위한 이종 재료 접합 계면의 파괴 역학적 분석)

  • Kim, Won-Seok;Shin, Kum-Chel;Lee, Jung-Ju
    • Composites Research
    • /
    • v.19 no.4
    • /
    • pp.15-22
    • /
    • 2006
  • One of the primary factors limiting the application of composite-metal adhesively bonded joints in structural design is the lack of a good evaluation tool for the interfacial strength to predict the load bearing capacity of boned joints. In this paper composite-steel adhesion strength is evaluated in terms of stress intensity factor and fracture toughness of the interface corner. The load bearing capacity of double lap joints, fabricated by co-cured bonding of composite-steel adherends has been determined using fracture mechanical analysis. Bi-material interface comer stress singularity and its order are presented. Finally stress intensities and fracture toughness of the wedge shape bi-material interface corner are determined. Double lap joint failure locus and its mixed mode crack propagation criterion on $K_1-K_{11}$ plane have been developed by tension tests with different bond lengths.

Interfacial Fracture Toughness Measurement of Composite/metal Bonding (복합재료/금속 접착 계면의 파괴인성치 측정)

  • Kim, Won-Seock;Lee, Jung-Ju
    • Composites Research
    • /
    • v.21 no.4
    • /
    • pp.7-14
    • /
    • 2008
  • Prediction of the load-bearing capacity of an adhesive-bonded Joint is of practical importance for engineers. This paper introduces interface fracture mechanics approach to predict the load-bearing capacity of composite metal bonded joints. The adhesion strength of composite/steel bonding is evaluated in terms of the energy release rate of an interfacial crack and the fracture toughness of the interface. Virtual track closure technique (VCCT) is used to calculate energy release rates, and hi-material end-notched flexure (ENF) specimens are devised to measure the interfacial fracture toughness. Bi-material ENF specimens gave consistent mode II fracture toughness $(G_{IIc})$ values of the composite/steel interface regardless of the thickness of specimens. The critical energy release rates of double-lap joints showed a good agreement with the measured fracture toughness. Therefore. the energy-based interfacial fracture characterization can be a practical engineering tool for predicting the load-bearing capacity of bonded joints.

An Experimental Study on the Bonding Shear Performance Evaluation of the UHPC According to an Bonding Interface Treatment of the Construction Joint (시공이음부 계면처리방법에 따른 초고성능 콘크리트의 전단부착성능 평가에 관한 실험적 연구)

  • Jang, Hyun-O;Kim, Bo-Seok;Lee, Han-Seung
    • Journal of the Korea Institute of Building Construction
    • /
    • v.16 no.3
    • /
    • pp.237-245
    • /
    • 2016
  • Structural performance and durability of ultra high performance concrete could demonstrate optimal performance when unity was kept. Accordingly, it is necessary to involve the characteristics and quantitative surface treatment at the same time in order to retain oneness of Ultra-High-Performance Concrete(UHPC) according to construction joint occurrence. Therefore, this study derives a reasonable surface treatment method in a material's point of view through the shear adhesion performance evaluation according to the construction joints surface processing method as a part for securing the adhesion performance of the construction joints when casting UHPC. 180 MPa of required average strength was used for mix of UHPC and surface treatment method was set to totally 7 level that MN, GR-10-0, GR-20-0, GR-30-0, SH-30-5, SH-30-10. After the specimen were manufactured to a size of $150{\times}150{\times}150mm$, Direct shear test was performed to evaluate the shear adhesion strength. As a result, it was confirmed that the adhesion performance was improved when executing a surface treatment for the construction joint interface and standard of failure mode of specimen was over Type C. Also, It was considered that interface of cross section and depth of concavo-convex should be concerned.