• Tribology and Lubricants
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• v.25 no.6
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• pp.404-408
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• 2009

In this paper, the relationship between the material removal rate and the interfacial mechanical properties at particle-surface contact situation, which can be seen in an abrasive machining process using micro/nano-sized particles, was discussed. Friction and stiffnesses were measured experimentally on an atomic force microscope (AFM) by using colloidal probes which have a silica colloid particle in place of tip to simulate a particle-flat surface contact in an abrasive machining process. From the experimental investigation and theoretical contact analysis, the interfacial contact properties such as lateral stiffness of contact, friction, the material removal rate were presented with respect to some of material surfaces and the relationship between the properties as well.

• Clean Technology
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• v.10 no.1
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• pp.47-51
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• 2004

현재 반도체 공정에서 사용되는 세정기술은 대부분이 1970년대 개발된 RCA 세정법인 과산화수소를 근간으로 하는 습식 세정으로, 표면의 입자를 제거하기 위한 SC-1 세정액은 강력한 산화제인 과산화수소에 의한 표면과 입자의 산화와 암모니아에 의한 표면의 에칭이 동시에 일어나 입자를 표면으로부터 분리시킨다. 금속 불순물을 제거하기 위한 SC-2 세정액은 염산과 과산화수소 혼합액을 사용하며 금속 불순물을 용해시켜 알칼리나 금속 이온을 형성하거나 용해 가능한 화합물을 형성시켜 제거한다. 또한 황산과 과산화수소를 혼합한 Piranha 세정액은 효과적인 유기물 제거제로서 웨이퍼에 오염된 유기물을 용해 가능한 화합물로 만들거나 과산화수소에 의해 형성되는 산화막내에 오염물을 포함시켜 불산 용액으로 산화막을 제거할 때 함께 제거된다. 최근 금속과 산화막을 동시에 제거하기 위해 희석시킨 불산에 과산화수소를 첨가한 세정공정이 사용되고 있으며 불산에 의해 표면의 산화막이 제거될 때 산화막내에 포함된 금속 불순물을 동시에 제거시킬 수 있다. 그러나 이와 같이 습식세정액 내에 공통적으로 포함되어 있는 과산화수소의 분해는 그만큼 가속화되어 사용되는 화학 약품의 양이 그만큼 증가하게 되고 조작하기 어려운 단점도 있다. 이를 해결하기 위해 환경친화적인 관점으로 화학약품의 사용을 최소화하는 등 RCA세정을 보완하는 연구가 계속 진행되고 있다. 본 연구에서는 RCA세정법을 환경적으로 대체할 수 있는 세정에 사용되는 전리수의 pH변화에 따른 전리수 분석을 하였다. 전리수의 제조를 위하여 전해질로는 NH4CI (HCI:H2O:NH4OH=1:1:1)를 사용하였다. pH 11 이상, ORP -700mV~-850mV인 환원수와 pH 3 이하, ORP 1000mV~1200mV인 산화수를 제조하였으며, 초순수를 첨가하여 pH 7.2와 ORP 351.1mV상태까지 조절하였다. 이렇게 만들어진 산화수와 환원수를 시간 변화와 pH 변화에 따라 Clean Room 안에서 FT-IR과 접촉각 측정기로 실험하였다. FT-IR분석에서 산화수는 pH가 높아질수록, 환원수는 낮아질수록 흡수율이 낮아졌다. 접촉각 실험에서는 산화수의 pH가 높아질수록 환원수의 pH가 낮아질수록 접촉각이 커짐을 확인하였다. 결론적으로 전리수를 이용하여 세정을 하면, 접촉성을 조절할 수 있어 반도체 세정을 가능하게 할 수 있으며, 환경친화적인 결과를 도출할 것으로 전망된다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.2 s.233
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• pp.341-349
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• 2005

Damage often occurs on the surface of railway wheel by wheel-rail contact fatigue. It should be removed before reaching wheel failure, because wheel failure can cause derailment with loss of life and property. The increase or decrease of the contact fatigue life by the metal removal of the contact surface were shown by many researchers, but it has not explained precisely why fatigue life increases or decreases. In this study, the effect of metal removal depth on the contact fatigue life for railway wheel has been evaluated by applying finite element analysis. It has been revealed that the residual stress and the plastic flow are the main factors determining the fatigue life. The railway wheel has the initial residual stress formed during the manufacturing process, and the residual stress is changed by thermal stress induced by braking. It has been found that the initial residual stress determines the amount of metal removal depth. Also, the effects of the initial residual stress and metal removal on the contact fatigue lift has been estimated, and an equation is proposed to decide the optimal metal removal depth for maximizing the contact fatigue life.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.10 s.241
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• pp.1384-1391
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• 2005

Damage often occurs on the surface of railway wheels due to wheel-rail contact fatigue. It should be removed before reaching wheel failure, because wheel failure can cause derailment with loss of life and property. The increase or decrease of the contact fatigue lift by the metal removal of the contact surface were investigated by many researchers, but they have not considered initial residual stress and traction force. The railway wheel has the initial residual stress formed during the manufacturing process, and the residual stress is changed by thermal stress induced by braking. The traction force and residual stress are operated on wheels of locomotive and electric motor vehicle. In this study, the effect of metal removal depth on the contact fatigue life for a railway wheel has been evaluated by applying lolling contact fatigue test. The effect of the traction force and metal removal on the contact fatigue life has been estimated by finite element analysis. It has been found that the initial residual stress determines the amount of metal removal depth if the traction coefficient is less than 0.15. If the traction coefficient is greater than 0.2, however, the amount of metal removal depth is independent on the intial residual stress.

• Proceedings of the Materials Research Society of Korea Conference
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• 1994.11a
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• pp.60-60
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• 1994

• Journal of the KSME
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• v.32 no.2
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• pp.184-193
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• 1992

현재의 3차원 측정기 중에서 CNC 3차원 측정기, 3차원 측정기의 데이터 처리장치 및 측정용 센서에 대해서 알아보았다 3차원 측정기는 공작기계와 많은 관계가 있지만 로봇, CAD/CAM 과도 밀접한 관계를 지니고 있다. 또한 3차원 측정기는 센서와도 밀접한 관계가 있다. 앞으로 더욱 바람직한 것은 3차원 형상의 고속연속측정이 가능하게 하는 것, 접촉점의 위치좌표가 고 정도로 구해지는 것 마찰력을 제거할 수 있는 것, 소형, 경량화 등을 열거할 수 있겠다. 한편, 비접촉 센서로서는 광학적 방법을 이용한 센서가 많이 개발되어지고 있지만 표면거칠기, 표면 반사율, 경사각 등의 영향을 받기 쉽기 때문에 고정도의 3차원 측정에 있어서 아직 많은 문제가 남아 있다. 앞으로도 이 같은 많은 문제점을 해결할 수 있는 연구가 계속 진전되기를 바란다

• Journal of Conservation Science
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• v.32 no.3
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• pp.377-384
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• 2016

There are physical and chemical method for removement of a lacquered layer existing on the surface when gilding an iron Buddha, these caused environmental pollution by surface degradation and is very noxious for conservation scientist's health. Thus, on this study, we conducted a lacquered layer removement experiments using Nd:YAG Laser which is contactless and eco-friendly. Specimens were made by polishing $5{\times}5$ size of iron(99.9%) specimens surfaces evenly and by differing of number of coating of unrefined lacquer, so there were thickness differences of $10{\mu}m$, $20{\mu}m$, and $30{\mu}m$. The laser machine used in this study was Nd:YAG Laser, and we used two wavelength modes; 1064 nm(160~180 mJ) for infrared light region and 532 nm(50~350 mJ) for ultraviolet light region. The experiment done by investigating the transition of specimens' surfaces with laser wavelength, energy, and numbers of investigation. The remain amount of lacquered layer surfaces before/after laser irradiation was investigated by stereoscopic microscope, observation by SEM, Non-contact Surface Roughness Measurement Device, and FT-IR etc. As a result of each analysis, we could verify the thickness of $10{\mu}m$, $20{\mu}m$ of lacquered layer removed without surface degradation when using 1064 nm wavelength with $1.0J/cm^2$ density. We could find out that Nd:YAG Laser is effective for removing remained lacquered layers when gilding an iron Buddha. In the future, when not only the metal has made various studies also wood lacquered furniture or the like, it seems to be utilized to remove the lacquer without surface damage.

• Journal of the Korean Society for Railway
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• v.15 no.2
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• pp.141-146
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• 2012

The rail surface defects which are generated on repeated rolling contact fatigue are getting increased according to high speed, high density, and minimum weight. In addition, Increasing noise and vibration are affected by these also impact load generated as well. Because of this phenomenon, more serious and critical damages were occurred. In fact, in order to control them, the rail grinding amount in Korea. This study evaluated how depth of hardening on rail surface is formed and suggested optimal rail grinding amount by RCF(rolling contact fatigue) test with generated contact pressure between KTX wheel and UIC60 rail by applying FEM analysis. Therefore, the amount was generated approximately 0.2mm/20MGT to maintain integrity of rail surface by getting rid of depth of hardening on rail according to rail accumulated passing tonnage.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.38 no.4
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• pp.337-346
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• 2014

This study aimed to understand the mode characteristics of a droplet subject to periodic forced vibration and the detachment of a droplet placed on a plate surface. An surface was coated with Teflon to clearly observe the behavior of a droplet. The contact angle between the droplet and surface and the hysteresis were found to be approximately $115^{\circ}C$ and within $25^{\circ}C$, respectively. The coating process was performed in a clean room that had an environment with a low level of contaminants and impurities such as air dust, detergents, and particles. To predict the resonance frequency of a droplet, theoretical and experimental approaches were applied. Two high-speed cameras were configured to acquire side and top views and thus capture different characteristics of a droplet: the mode shape, the detachment, the separated secondary droplet, and the waggling motion. A comparison of the theoretical and experimental results shows no more than 18 discrepancies when predicting the resonance frequency. These differences seem to be caused by contact line friction, nonlinear wall adhesion, and the uncertainty of the experiment. For lower energy inputs, the contact line of the droplet was pinned and the oscillation pattern was axisymmetric. However, the contact line of the droplet was de-pinned as the oscillation became more vigorous with increased energy input. The size of each lobe at the resonance frequency is somewhat larger than that at the neighboring frequency. A droplet in mode 2, one of the primary mode frequencies, exhibits vertical periodic movement as well as detachment and secondary ejection from the main droplet.

• Proceedings of the Materials Research Society of Korea Conference
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• 2011.05a
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• pp.32.2-32.2
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• 2011

반도체 생산공정에서 CMP (Chemical-mechanical planarization) 공정은 우수한 전기전도성 재료인 Cu의 사용과 다층구조의 소자를 형성하기 위해서 도입되었으며, 최근 소자의 집적도가 증가함에 따라 CMP 공정 비중은 점점 높아지고 있다. Cu CMP 공정에서 연마제인 슬러리는 금속 표면과의 물리적 화학적 반응을 동시에 사용하여 표면을 연마하게 되며, 연마특성을 향상시키기 위해 산화제, 부식방지제, 분산제 및 다양한 계면활성제가 첨가된다. 하지만 슬러리는 Cu 표면을 평탄화하는 동시에 오염입자, 유기오염물, 스크레치, 표면부식 등을 발생시키며 결과적으로 소자의 결함을 야기시킨다. 특히 부식방지제로 사용되는 BTA (Benzotriazole)은 Cu CMP 공정 중 Cu-BTA 형태로 표면에 흡착되어 오염원으로 작용하며 입자오염을 증가시시고 건조공정에서 물반점 등의 표면 결함을 발생시킨다. 이러한 문제점을 해결하기 위해 Cu 표면에서 식각과 부식반응을 최소화하며, 오염입자 제거 및 유기오염물을 효과적으로 제거하기 위한 Post-CMP 세정 공정과 세정액 개발이 요구된다. 본 연구에서는 오염입자 및 유기물 제거와 동시에 표면 거칠기와 부식현상을 제어할 수 있는 post Cu CMP 세정액을 개발 평가하였다. 오염입자 및 유기오염물을 제거하기 위해서 염기성 용액인 TMAH 사용하였으며, Cu 이온을 용해할 수 있는 Chelating agent와 표면 부식을 억제하는 부식 방지제를 사용하여 세정액을 합성하였다. 접촉각 측정과 FESEM(field Emission Scanning Electron Microscope) 분석을 통하여 CMP 공정에서 발생하는 유기오염물과 오염입자의 흡착과 제거를 확인하였으며 Cu 웨이퍼 세정 전후의 표면 거칠기의 변화와 식각량을 AFM(Atomic Force Microscope)과 4-point probe를 사용하여 각각 평가하였다. 또한 세정액 내에서의 연마입자의 zeta-potential을 측정 및 조절하여 세정력을 향상시켰다. 개발된 세정액과 Cu 표면에서의 화학반응 및 부식방지력은 potentiostat를 이용한 전기화학 분석법을 통해서 chelating agent와 부식방지제의 농도를 최적화 시켰다. 개발된 세정액을 적용함으로써 Cu-BTA 형태의 유기오염물과 오염입자들이 효과적으로 제거됨을 확인하였다.