• Title/Summary/Keyword: 전류-전압법

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축전기의 과도 현상을 이용한 부유형 단일탐침 플라즈마 진단법 연구

  • Choe, Ik-Jin;Jeong, Jin-Uk
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.243-243
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    • 2011
  • 현재 식각이나 증착, 이온주입 등에 반도체 공정에 플라즈마를 이용하고 있다. 이런 반도체 공정용 플라즈마 용기의 경우 플라즈마에 의한 용기의 스퍼터 등에 의해 금속 입자가 생성되어 공정중인 반도체 웨이퍼에 오염을 줄 수 있기 때문에 대부분의 공정용 용기는 아노다이징 알루미늄이나 세라믹 등을 사용한 부도체 용기를 사용하게 된다. 단일탐침법은 플라즈마내 금속 도체를 삽입한 후 바이어스 전압을 인가하여 전류-전압 특성 곡선을 해석하여 측정하는 방법이다. 하지만 플라즈마와 측정 시스템의 공통된 기준전압이 있어야만 측정이 가능하다는 단점을 가지고 있다. 따라서 일반적으로 많이 사용하는 부도체 용기내의 플라즈마는 기존의 단일탐침법으로 측정이 어렵다. 또한 높은 플라즈마 전위를 가지고 있는 플라즈마의 경우 높은 전압에서 전류-전압특성의 측정시스템을 구축하기 매우 어려운 단점을 가지고 있다. 따라서 이런 경우에도 측정이 가능하도록 축전기의 과도현상을 이용하여 탐침이 전기적으로 부유된 단일탐침법을 연구하였다. 이 방법의 타당성 확인을 위하여 금속용기에서 플라즈마를 발생시켜 기존의 단일탐침법과 부유형 단일탐침법을 비교하였다. 기존의 단일탐침법과 비교 결과는 공정조건에 관계없이 상당히 유사하였다. 따라서 이 방법으로 기존 단일탐침법을 사용할 수 없는 높은 플라즈마 전위의 플라즈마나 부도체용기내의 플라즈마의 측정에 사용할 수 있을 것으로 기대된다.

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A Study on the Stability of Langmuir-Blodgett Films Mixed with Myristic Acid and Stearic Acid (미리스트산과 스테아르산 혼합 LB막의 안정성에 관한 연구)

  • Park, Keun-Ho
    • Journal of the Korean Applied Science and Technology
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    • v.34 no.2
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    • pp.376-381
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    • 2017
  • We were investigated by cyclic voltammetry to the stability through the electrochemical characteristics of Langmuir-Blodgett films mixed with myristic acid and stearic acid. Fatty acid mixture monolayer LB films was deposited by the LB method on the indium tin oxide(ITO) glass. The electrochemical properties was measured by cyclic voltammetry with a three-electrode system in 0.01 N $NaClO_4$ solution. The measuring range is continuously oxidized to 1650 mV, with an initial potential of -1350 mV was reduced. Scanning rates of 50, 100, 150, 200, and 250 mV/s was set. As a result, LB monolayer films of fatty acid mixture was appeared on irreversible processes by the oxidation current from the cyclic voltammogram. Diffusion coefficient (D) of fatty acid mixture was calculated $7.9{\times}10^{-2}cm^2s^{-1}$ at 0.01 N $NaClO_4$ solution.

Determination of Fluoroquinolone Antibacterial Agents by Square Wave Adsorptive Stripping Voltammetry (네모파 흡착 벗김 전압전류법에 의한 플루오로퀴놀론 계 항생제의 검출)

  • Boo, Han-Kil;Song, Youn-Joo;Park, Se-Jin;Chung, Taek-Dong
    • Journal of the Korean Electrochemical Society
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    • v.13 no.1
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    • pp.63-69
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    • 2010
  • Electrochemical behavior of fluoroquinolone antibacterial agents on carbon paste electrode (CPE) were investigated by cyclic voltammetry and square wave adsorptive stripping voltammetry. The fluoroquinolone antibacterial agents tested in this study were Enrofloxacin (ENR), Norfloxacin (NOR), Ciprofloxacin (CIP), Ofloxacin (OFL) and Levofloxacin (LEV). In acetate buffer at pH 4.5, the oxidation peak potentials of the fluoroquinolone antibacterial agents of ENR, NOR, CIP, OFL, and LEV were 0.952 V, 1.052 V, 1.055 V, 0.983 V, and 0.990 V (vs. Ag/AgCl), respectively. And their oxidation peak currents from square wave adsorptive stripping voltammograms are proportional to the concentration of each antibacterial agent over the range from $0.2\;{\mu}M$ to $1\;{\mu}M$.

Determination of Ag(Ⅰ) Ion with a Chemically Modified Carbon Paste Electrode Containing Cinchonidine (Cinchonidine으로 변성된 Carbon Paste 전극을 사용한 은이온의 정량)

  • Kim, Sin Hui;Won, Mi Suk;Sim, Yun Bo
    • Journal of the Korean Chemical Society
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    • v.38 no.10
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    • pp.734-740
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    • 1994
  • Electrochemical determination of Ag(I) ion was carried out by cyclic voltammetry (CV) and differential pulse voltammetry (DPV) with the carbon paste electrode (CPE) containing cinchonidine. The detection limit for Ag(I) ion was shown to be $1.0 {\times}10^{-6}$ M in conventional CV and up to $8.0{\times}10^{-9}$ M (${\pm}$0.6%) using DPV. The optimum analytical condition of Ag(I) ion was determined as follows: pH 7, 20 minutes of deposition time, and 50% (w/w) cinchonidine to carbon powder composition of electrode. The interference effect of various metal ions added to the deposition solution was also studied. The peak current of Ag(I) ion except Hg(II) ion was decreased roughly 25% compare to Ag(I) ion only. When Mn(II) ion was present in sample solution at pH 9, shown a large interference effect.

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Adsorptive Stripping Voltammetry of Indium-Morin Complex (Indium-Morin 착물에 관한 흡착벗김전압전류법적 연구)

  • Se Chul Sohn;Tae Yoon Eom;Yeong Kyeong Ha;Ki-Suk Jung
    • Journal of the Korean Chemical Society
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    • v.35 no.5
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    • pp.506-511
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    • 1991
  • A sensitive adsorptive stripping voltammetric study was investigated on the complex of indium with morin at a hanging mercury drop electrode in 0.1 M acetate buffer (pH 3.20) solution. The adsorption phenomena were observed by differential-pulse voltammetry. The effects of various analytical conditions were discussed on the reduction peak current of the adsorbed complex on the surface of HMDE. Interferences by other trace metals and surfactant were also discussed. Detection limit was 2.6 nM of indium after 90 second deposition time, and the relative standard deviation (n = 7) at 4TEX>${\mu}g$/l indium was 2.0%.

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Analysis and Mechanistic Investigation of Redox Process of 2-Amino-1-cyclopentene-1-dithiocarboxylate by Adsorptive Stripping Voltammetry on Glassy Carbon Electrode (Glassy Carbon 전극에서의 벗김 전압-전류법을 이용한 2-Amino-1-cyclopentene-1-dithiocarboxylate 의 분석과 전극 반응 메카니즘의 연구)

  • Yoon-Bo Shim;Duk-Soo Park;Sung-Nak Choi;Mi-Sook Won
    • Journal of the Korean Chemical Society
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    • v.32 no.1
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    • pp.37-47
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    • 1988
  • The electrochemical behavior of 2-Amino-1-cyclopentene-1-dithiocarboxylate (acdc) was investigated by the use of polarography, cyclic voltammetry and cathodic stripping voltammetry at glassy carbon electrode. In this study, it was found that the dimer of the acdc was deposited on the glassy carbon electrode via one-electron oxidation process at +0.25V vs. SCE. The ring formation between two dithio group occurs along with the elimination of one sulfur atom. The elimination of sulfur atom occurs via two electron oxidation process at +0.8V vs. SCE. The most sensitive cathodic stripping peak due to the formation of the dimer was observed at -0.85V vs. SCE. The peak relationship between current and concentration was fairly linear in the range of 3${\times}10^{-5}{\sim}1.0{\times}10^{-6}$M. The preconcentration procedure enhanced the sensitivity about 100 times for the analysis of acdc using diffusion current. Detection limit was found to be $2.5{\times}10^{-7}$M and relative standard deviation was ${\pm}$4.1 % at $5.0{\times}10^{-6}$M DC polarography.

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네모파 전압전류법에 의한 텔루륨(Ⅳ) 정량

  • Seo, Mu Yeol;Seo, Mu Yeol;Eom, Tae Yun;Choe, In Gyu
    • Journal of the Korean Chemical Society
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    • v.38 no.7
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    • pp.496-501
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    • 1994
  • Square-wave voltammetric behavior for tellurium(Ⅳ) was studied in hydrochloric acid medium using a hanging mercury drop electrode. The reduction of tellurium(Ⅳ) was found to be irreversible and catalized by acid. Analytical conditions for the determination of tellurium(Ⅳ) and effects of diverse ions were also investigated. The detection limit of tellurium(Ⅳ) was $4.2\;ppb (3.3{\tiems}10^{-8}M)$. The amount of tellurium(Ⅳ) on the electrode surface was ${\Gamma}=(7.2{\pm}1.4){\times}10^{-11}\;mol\;cm^{-2}$.

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Parameters Estimation for Pseudo Loudspeaker attached to Closed-Box and Enhanced Closed-Box Modeling (밀폐박스 상태의 가상 라우드스피커 매개변수 규명법 및 개선된 밀폐박스 모델링)

  • Park, Seok-Tae
    • Transactions of the Korean Society for Noise and Vibration Engineering
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    • v.17 no.10
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    • pp.983-992
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    • 2007
  • It was proposed to identify Thiele Small Parameters for loudspeaker attached to closed-box using known dynamic mass of moving parts. Also, enhanced PSPICE circuit model for closed-box loudspeaker system was proposed to more accurately simulate real closed-box loudspeaker system. Frequency dependent parameters were used to model voice coil inductor. Acoustic pressure response curves and electrical impedance curves were simulated and investigated by PSPICE circuit model according to compensation filter's parameters. Finally, proposed method is expected to be utilized for identification of pseudo Thiele Small parameters of microspeaker.

Application and Experimental Investigation of the Search Needle Method for the Measurement of the Eddy Current (와 전류 측정을 위한 탐심법의 적용 및 실험적 검토)

  • Um, Yong-Su;Ebihara, Daiki
    • Proceedings of the KIEE Conference
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    • 2003.04a
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    • pp.3-8
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    • 2003
  • 일반적으로 와 전류를 포함하는 자계의 특성 해명은 실험적으로 검증하는 것이 곤란한 이유로 유한 요소 법 또는 경계 요소 법등의 수치 해석 법에 의존하고 있다. 본 연구에서는 그러한 실험적 검증의 어려움을 극복하기 위해 전압 강하의 원리를 이용한 탐심 법을 이용, 와 전류의 계측을 수행하고 있다.

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$^{51}V$ NMR and Cyclic Voltammetry Studies on the Interaction of Vanadate and N-Benzyliminodiacetate in Aqueous Solution (Vanadate와 N-Benzyliminodiacetate 리간드의 상호작용에 대한 $^{51}V$ 핵자기공명분광법과 순환전압 - 전류법 연구)

  • Park, Chul-Jin;Park, Sam-Su;Lee, Man-Ho
    • Analytical Science and Technology
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    • v.12 no.3
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    • pp.184-189
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    • 1999
  • $^{51}V$ NMR and cyclic voltammetry studies on the interaction of vanadate and N-benzyliminodiacetate (Bz-IDA) in aqueous solution have been studied. From the NMR spectra two $^{51}V$ NMR peaks resulting at -515.5 and -500.1 ppm, due to the complexations between vanadate(V) and Bz-IDA at pH 5. has been observed. From the cyclic voltammograms the reduction-oxidation of the vanadate(V) complex has been found to be one-electron reaction.

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