• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.46-46
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• 2000

과학기술 및 산업의 발달로 인하여 실험 중 또는 공정 상에서 in situ, 실시간으로 측정하고 분석하며 이를 되먹임하는 품질제어의 중요성이 대두되고 있다. 반도체 공정 또는 박막제조 공정 중에서 박막의 두께, 굴절율, 물질의 조성비 등을 알아내는 것이 긴요한 과제로 대두되고 있으며, 이를 위하여 공정중인 제품의 품질을 실시간으로 평가하는 장비가 요구되고 있는 것이다. 나아가 공정중의 예상하지 못한 시료의 특성변화를 그대로 감지하여 적절히 보정해 주는 되먹임 기법은 높은 수율을 보장하는 첨단기법이라 할 수 있다. 이러한요구에 부응할 수 있는 본 제품(Elli-situ 2000)은 박막의 두께 표면변화를 sub 의 정밀도를 가지고 in situ, 실시간으로 정밀 측정할 수 있는 첨단 계측장비로서 빛의 편광상태 변화를 측정하기 때문에 공정 중의 시료에 영향을 주지 않는 비간섭 특성과 비접촉 특성의 장점 뿐만 아니라 공기중에서는 물론 진공이나 액체 등의 매질에서도 사용될 수 있어서 매질에 대한 제약이 거의 없다는 장점도 가지고 있다. 편광상태의 제어 및 측정을 필요한 광학장비의 경우, 제작이 까다롭기 때문에 대부분 가격이 높은 편이고 사용방법이나 측정 데이터에 대한 해석이 어렵다는 단점이 있으나, Elli-situ 2000의 경우 상용화된 외국제품(국내제품은 없슴)과 비교하여 성능 및 가격경쟁력에 있어서도 우위에 있으며 간단, 명료한 장비조작 및 컴퓨터를 사용한 구동의 전자동화를 이룸으로써 초보자도 쉽게 측정하고 데이터를 처리할 수 있도록 하였다. 또한 취부대의 경우, 진공포트 플랜지의 표준규격(2-3" Del-Seal 플랜지 규격)에 맞춤으로써 기존의 진공챔버에 부착하여 진공에 전혀 영향을 주지 않는 상태에서 시료의 변화를 in situ, 실시간으로 정밀 측정할 수 있도록 하였다. 하였다.O 박막은 산소 가스압력과 기판온도, 인가 전류를 변화시켜가며 증착하였으며 이에 따른 박막의 결정성 변화를 알아보았다. 기판온도를 실온에서 점차 증가시켜나가면 $\Delta$$\theta$50은 급격히 감소하며 30$0^{\circ}C$에서는 결정성이 우수한 막을 얻을 수 있었다. 또한 산소 가스 압력이 0.5~1mTorr에서 $\Delta$$\theta$50은 양호한 값을 나타내었지만 그 이상에서는 c-축 배향성이 나빠짐을 확인하였다. 따라서 대향타겟식스퍼터 장치를 이용하여 ZnO 박막을 증착시 가스압력 0.5~1mTorr, 기판온도 20$0^{\circ}C$이상의 막 제작조건에서 결정성이 우수하게 나타나는 것을 확인할 수 있었다. gluten이 단단해졌음을 알수 있었다. 유화제 stearly 칼슘, 혹은 hemicellulase를 amarans 10% 대체한 밀가루에 첨가하면 확연히 비용적을 증대시킬 수 있다는 사실을 알 수 있었다. quinoa는 명아주과 Chenopodium에 속하고 페루, 볼리비아 등의 고산지에서 재배 되어지는 것을 시료로 사용하였다. quinoa 분말은 중량의 5-20%을 quinoa를 대체하고 더욱이 분말중량에 대하여 0-200ppm의 lipase를 lipid(밀가루의 2-3배)에 대하여 품질개량제로서 이용했다. 그 결과 quinoa 대량 7.5%에서 비용적, gas cell이 가장 긍정적 결과를 산출했고 반죽의 조직구조가 강화되었다. 또 quinoa 대체에 의해 전분-지질 복합제의 흡열량이 증대된 것으로부터 전분-지질복합제의 형성 촉진이 시사되었다.이것으로 인하여 호화억제에 의한 노화 방지효과가 기대되었지만 실제로 빵의 노화는 현저히 진행되었다. 이것은

• Fire Science and Engineering
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• v.32 no.6
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• pp.1-6
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• 2018

This study is to analyze the characteristics of the yellow insulation ring type of the CSST used for tubing when it is artificially deteriorated and damaged by burning. The CSST for tubing consists of a tube, protective coating, nut, yellow insulation ring, packing, and socket. In addition, it is thought that a yellow insulation ring and rubber packing were used to connect the tube and socket in order to improve the airtightness and insulation performance. The result of the verification of the data acquired from the tests in the 95% confidence interval shows that the Anderson-Darling (AD) and P value were analyzed to be 0.945 and 0.015, respectively. This confirms that the test data of the CSST for tubing is reliable. The analysis of the arithmetic mean of the insulation resistance of a CSST showed that the CSST damaged by burning by a torch, and the one damaged by electrical burning, was $16.7k{\Omega}$ (the greatest relatively) and $208{\Omega}$ (the lowest), respectively, while it was $1.72k{\Omega}$ in the case of a normal product. Therefore, the analysis result of the insulation resistance of the CSST collected from the scene of a fire can be utilized to examine the cause of damage by burning. In addition, it was found that when the maximum current of 97 A was applied to the CSST for about 5 s using a Primary Current Injection Test System (PCITS) the protective film and insulation ring of the CSST has no difference from that of a normal product. However, a part of the metal tube was melted.

• Journal of the Korea Institute of Information Security & Cryptology
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• v.21 no.5
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• pp.59-69
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• 2011

Since power analysis attack which uses a characteristic that power consumed by crypto device depends on processed data has been proposed, many logics that can block these correlation originally have been developed. DRP logic has been adopted by most of logics maintains power consumption balanced and reduces correlation between processed data and power consumption. However, semi-custom design is necessary because recently design circuits become more complex than before. This design method causes unbalanced design pattern that makes DRP logic consumes unbalanced power consumption which is vulnerable to power analysis attack. In this paper, we have developed new logic style which adds another discharge phase to discharge two output nodes at the same time based on DyCML to remove this unbalanced power consumption. Also, we simulated 1bit fulladder to compare proposed logic with other logics to prove improved performance. As a result, proposed logic is improved NED and NSD to 60% and power consumption reduces about 55% than any other logics.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.13 no.6
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• pp.590-596
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• 2020

In the island areas where system connection with the commercial power grid is difficult, it is quite important to find a method to efficiently manage energy produced with independent microgrids. In this paper, a prosumer management system for P2P power transaction was realized through the testing the power meter and the response rate of the collected data for the power produced in the small-scale microgrids in which hybrid models of solar power and wind power were implemented. The power network of the microgrid prosumer was composed of mesh structure and the P2P power transaction was tested through the power meter and DC power transmitter in the off-grid sites which were independently constructed in three places. The measurement values of the power meter showed significant results of voltage (average): 380V + 0.9V, current (average): + 0.01A, power: 1000W (-1W) with an error range within ±1%. Stabilization of the server was also confirmed with the response rate of 0.32 sec. for the main screen, 2.61 sec. for the cumulative power generation, and 0.11 sec for the power transaction through the transmission of 50 data in real time. Therefore, the proposed system was validated as a P2P power transaction system that can be used as an independent network without transmitted by Korea Electric Power Corporation (KEPCO).

• Journal of Internet of Things and Convergence
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• v.9 no.3
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• pp.93-98
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• 2023

In this paper, an artificial neural network based on simulated annealing was constructed. The mapping relationship between the parameters of micro-scaled flow channels electrochemical machining and the channel shape was established by training the samples. The depth and width of micro-scaled flow channels electrochemical machining on stainless steel surface were predicted, and the flow channels experiment was carried out with pulse power supply in NaNO3 solution to verify the established network model. The results show that the depth and width of the channel predicted by the simulated annealing artificial neural network with "4-7-2" structure are very close to the experimental values, and the error is less than 5.3%. The predicted and experimental data show that the etching degree in the process of channels electrochemical machining is closely related to voltage and current density. When the voltage is less than 5V, a "small island" is formed in the channel; When the voltage is greater than 40V, the lateral etching of the channel is relatively large, and the "dam" between the channels disappears. When the voltage is 25V, the machining morphology of the channel is the best.

• Journal of the Institute of Electronics and Information Engineers
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• v.53 no.11
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• pp.114-122
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• 2016

EIS (Electro interstitial scan) is a non-invasive and simple method to find the physio-pathological information inferred by electric current response with respect to low direct current applied between remote sites of the body. Although a few EIS-based devices for diagnosing diabetes were commercialized, they were not successful in offering clinical validity nor in confirming diagnostic principle. In this study, we measured the voltage responses of diabetic patients and normal subjects with a commercialized EIS device to test the usefulness of EIS in screening diabetes. For this purpose, voltage was measured between pairs of electrodes contacted at both palm, both soles of the feet and left and right forehead above both eyes. After feature extraction of voltage signals, the AUC (area under the curve) between the two groups was calculated and we found that seven variables were appropriately shown above 60% of accuracy. In addition, we applied the k-NN (k-nearest neighbors) method and found that the accuracy of classification between the two groups reached the accuracy of 76.2%. This result implies that the voltage response analysis based on EIS has potential as a diabetics screening method.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.29-29
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• 2009

현재 고집적 비휘발성 메모리 소자로는 MRAM (Magnetic Random Access Memory)과 PRAM (Phase Magnetic Random Access Memory)이 활발하게 미국과 일본, 한국 등에서 다양한 연구가 진행되어 오고 있다. 이 중에서 MRAM은 DRAM과 비슷한 10 ns의 빠른 읽기/쓰기 속도와 비휘발성 특성을 가지고 있으며, 전하를 저장할 커패시터가 필요 없고, 두 개의 자성충에 약 10 mA 정도의 전류를 가하면 그때 발생하는 약 10 Oe의 자장을 개개의 비트를 write하고, read 시에는 각 비트의 자기저항을 측정함으로써 데이터를 저장하고 읽을 있으므로, 고집적화가 가능성하다 [1]. 현재 우수한 박막 재료가 개발 되었으나, 고집적 MRAM 소자의 양산에는 해결 하여야 하는 문제점이 있다. 특히 다층 박막으로 구성되어 있으므로 식각 공정의 개발이 필수적이다. 지금까지 MRAM 재료의 식각은 주로 Ion milling, ICP, ECR등의 플라즈마 장치를 되었고, 식각 가스로는 할로겐 기체와 금속카보닐 형성을 위한 Co/$NH_3$와 $Ch_3OH$ 기체가 이용되고 있다. 그러나 할로겐 계열의 기체를 사용할 경우, 식각 부산물들의 높은 끓는점 때문에 식각 부산물이 박막의 표면에서 열적 탈착에 의하여 제거되지 않기 때문에 높은 에너지를 가지는 이온의 도움에 의한 식각이 필요하다. 또한 Cl 계열의 기체를 사용할 경우, 식각 공정 후, 시료가 대기에 노출되면 대기 중의 수분과 식각 부산물이 결합하여 부식 현상이 발생하게 된다. 그러므로 이를 방지하기 위한 추가 공정이 요구된다. 최근에는 부식 현상이 없고, MTJ 상부에 사용되는 Ta 또는 Ti Hard mask와의 높은 선택비를 가지는 $CH_3OH$ 또는 CO/$NH_3$가 사용되고 있다. 하부 박막에 따른 식각 특성에 연구와 다층의 박막의 식각 공정에 발생에 관한 발표는 거의 없다. MRAM을 양산에 적용하기 위하여서는 Main etch 공정에서 빠른 식각 공정이 필요하고, Over etch 공정에서 하부박막에 대한 높은 선택비가 요구된다. 그러므로 본 논문에서는 식각 변수에 따른 플라즈마 측정과 표면 반응을 비교하여 각 공정의 식각 메커니즘을 규명하고, Main Etch 공정에서는 $Cl_2$/Ar 또는 $BCl_3$/Ar 가스를 이용하여 식각 실험을 수행하고, Over etch 공정에는 낮은 Ta 박막 식각 속도를 가지는 $Ch_4/O_2$/Ar 또는 $Ch_3OH$/Ar 가스를 이용하고자 한다. 플라즈마 내의 식각종과 Ta 박막과의 반응을 XPS와 AES를 이용하여 분석하고, 식각 공정 변수에 따른 식각 속도, 식각 선택비와 식각 프로파일 변화를 SEM을 이용하여 관찰한다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.12
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• pp.5647-5654
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• 2012

In this paper, we developed an electro impedance spectroscopy (EIS) device, which are primarily used for the analysis of fuel cells or batteries, to widen its coverage to the next generation super capacitor EDLC characterization. The developed system was composed of a signal generator that can generate various signal patterns, a potentiostatic generator, and a high speed digital filter for signal processing and measurement program. The developed system is portable, which is not only suitable laboratory use but also for mass production line. The special features of the system include a patterned output signal from 0.01 to 20 kHz, and a fast Fourier transform (FFT) analysis of current signals, both of which are acquired simultaneously. Our tests showed similar results after comparing the analysis from our newly-developed device showing the characteristics of EDLC complex impedance and the analysis from an equivalent impedance which was applied to an equivalent circuit. Now, we can expect a fast inspection time from the application of the present system to the super capacitor production line, based on time-varying changes in electrochemical impedance.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.6
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• pp.2484-2490
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• 2012

This study reports on the development and performance verification of cell simulation boards of simulator and the embedded program for board control of the battery management system (BMS) of electric vehicle (EV) cars, which manages the next-generation automotive lithium-ion battery pack. Here, we have improved the speed of the simulator by using operational (OP) amplifier and transistors that were connected in series. In addition, using a digital analog converter (DAC) in each channel, we have improved the performance by channel-to-channel isolation (isolation) as compared to the traditional methods. Furthermore, by constructing a current-limiting protection circuit, one can be protected from disturbance and, by utilizing a precision shunt resistor for the current sensor, we have increased the precision of the current control. In order to verify the performance of the developed simulator, we have performed the experiment 10 times, with values ranging from 0.5 V to 5 V, and a voltage drop step of 0.5 V. Significance analysis of experimental data, and repeatability tests were performed, showing an average standard deviation of 0.001~0.004 V, indicating high repeatability and high statistical significance of the current method and system.

• Progress in Medical Physics
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• v.19 no.1
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• pp.42-48
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• 2008

Bio-implantable devices such as heart pacers, gastric pacers and drug-delivery systems require power for carrying out their intended functions. These devices are usually powered through a battery implanted with the system or are wired to an external power source. This paper describes an inductive power transmission link, which was developed for an implantable stimulator for direct stimulation of denervated muscles. The carrier frequency is around 1MHz, the transmitter coil has a diameter of 46mm, and the implant coil is 46mm. Data transmission to the implant with amplitude shift keying (ASK) and back to the transmitter with passive telemetry can be added without major design changes. We chose the range of coil spacing (2 to 30mm) to care for lateral misalignment, as it occurs in practical use. If the transmitter coil has a well defined and reliable position in respect to the implant, a smaller working range might be sufficient. Under these conditions the link can be operated in fixed frequency mode, and reaches even higher efficiencies of up to 37%. The link transmits a current of 50 mA over a distance range of 2-15 mm with an efficiency of more than 20% in tracking frequency. The efficiency of the link was optimized with different approaches. A class E transmitter was used to minimize losses of the power stage. The geometry and material of the transmitter coil was optimized for maximum coupling. Phase lock techniques were used to achieve frequency tracking, keeping the transmitter optimally tuned at different coupling conditions caused by coil distance variations.