• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.141.2-141.2
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• 2014

크라이오 펌프는 반도체 임플란타 공정, OLED 분야, 신소재 개발, 표면분석 및 처리, 의료분야, 입자가속기, 핵융합 등 다양한 진공분야에 응용되는 고진공용 극저온펌프이다. 특히 향후 디스플레이 분야에서 OLED가 시장을 주도할 것으로 예상되는 가운데, 점점 대형화 되어가는 OLED 장비에 가장 적합한 고진공 펌프로써 크라이오 펌프가 주목을 받고 있다. OLED 디스플레이 제조공정 중에서도 화소형성 공정을 위한 챔버는 특별히 진동특성에 민감하다. 유기물 증착공정을 진행하기 위해서 글라스 전단에 쉐도우 마스크를 설치하는데, 글라스의 크기가 증가하면서 초래된 처짐문제 그리고 장비의 진동특성과 글라스와 마스크 사이의 간섭문제 등이 제품의 수율에 큰 영향을 미치면서 향수 시급히 해결해야 할 필수 과제로 주목 받고 있다. 그러나 대부분의 상용 크리이오 펌프는 G-M형식의 냉동기를 장착하기 때문에 그 원리 상 제조사에 관계없이 일반적으로 큰 진동특성을 가진다. 이에 GVT에서는 OLED 공정에 적합한 보다 정숙하고 진동특성이 개선된 550 mm구경의 크라이오 펌프 개발을 진행하였다. 그 결과 펌프의 성능은 동종 경쟁모델과 동등 이상의 수준을 유지하고 진동성분은 동종모델 대비 50%이상 개선된 펌프를 개발할 수 있었다. 그리고 시장에 보다 좋은 제품을 출시하기 위해서 현재 성능과 진동특성을 계속해서 튜닝 중에 있다. 진동개선은 크게 2가지 방향으로 진행되었는데, 첫째는 펌프 측면에서 진행한 것이고 둘째는 냉동기 측면에서 진행한 것이다. 후자는 현재 대외비로 개발을 진행 중에 있으며 본 발표에서는 전자에 관한 것으로 펌프 측면에서 진동특성을 개선한 부분이다. 결국 크라이오 펌프의 진동은 진동원인 냉동기에서 발생하는 것이므로 냉동기와 펌프를 구조적으로 고립시키는 방법을 사용하였다. 즉, 냉동기와 펌프 사이에 댐핑 시스템 플랜지를 장착하여 진동원인 냉동기로부터 진동성분이 펌프 측으로 전달되는 것을 차단한 것이 본 기술의 핵심이다. GVT에서는 당 기술로 국내특허등록을 완료하였다(특허-10-1289394_진동 저감을 위한 댐핑 플랜지 조립체 및 이를 갖는 크라이오 펌프).

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.304-304
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• 2011

열필라멘트 화학 기상 증착 공정(HWCVD, hot wire chemical deposition)은 낮은 기판 온도에서 다결정 실리콘 박막을 빠른 속도로 증착할 수 있는 방법이다. 이는 후처리가 없어도 전기적 특성이 우수한 박막을 저온에서 얻을 수 있기 때문에 녹는점이 낮은 기판에 증착을 할 수 있으며 공정비용 절감 효과가 있다. 이러한 박막 증착 공정 중 기상 핵생성에 의해 나노 입자가 생성되며, 새로운 관점에서는 그 농도와 크기가 박막 성장에 중요한 변수로 작용한다. 따라서 공정조건의 변화에 따라 생성되는 나노 입자의 크기 분포를 실시간으로 분석하여 박막 형성의 최적 조건을 찾는 연구가 필요하다. 하지만 이러한 입자 발생 특성에 관한 연구는 기존에 밝혀진 반응 메커니즘으로 인해 수치해석적 연구는 체계적으로 진행되었으나 실험적 연구의 경우 적합한 측정장비의 부재로 인해 제한이 있었다. 따라서 본 연구에서는 저압에서 실시간으로 나노입자 분포를 측정할 수 있는 PBMS (particle beam mass spectrometer)를 이용하여 열필라멘트 화학 기상 증착 공정 중 발생하는 입자의 존재를 확인하고 특성을 분석하였다. 실리콘 나노 입자의 측정은 PBMS 장비의 전단 부분을 HWCVD 배기 라인에 연결하여 진행하였으며 반응기 내 샘플링 위치, 필라멘트 온도, 챔버 압력, 작동기체의 비율을 변수로 하여 진행하였다. 그 결과 실리콘 나노 입자는 양 또는 음의 극성을 가진 하전된 상태임을 확인 하였고, 측정 조건에 따라 일부 단일 극성으로 존재하였다. 한편, 필라멘트 온도가 증가할수록 하전된 나노입자의 최빈값은 감소하였다. 또한 반응 가스인 SiH4 농도가 증가할수록 최빈값은 농도에 비례하여 증가하였다. 이런 결과는 기존 HWCVD 실험에서 투과 전자 현미경(TEM)을 이용하여 분석한 실리콘 나노 입자의 크기 분포 결과와 경향이 일치함을 확인하였다. 본 연구를 통하여 확인된 하전된 나노 입자의 존재를 실험적으로 확인하였으며 추후 지속적 연구에 의해 이러한 하전된 나노 입자가 박막 형성에 기여 하는 것을 규명하고 박막 형성 조건을 최적화하는데 중요한 역할을 할 것을 기대할 수 있다.

• Analytical Science and Technology
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• v.14 no.3
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• pp.266-273
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• 2001

One pulp manufacture facility was selected as surveying facilities to examine the discharged rate and generation mechanism of dioxin in bleaching stag wastewater. The analytical method was established in the wastewater and the sample was collected and analyzed. The outlet concentration of bleaching stage was increased 5 times for 2,3,7,8-TCDF and 7 times for OCDD, and the discharged ratio between PCDFs and PCDDs was surveyed about 2:3. The 2,3,7,8-TCDF and 2,3,7,8-TCDD were mainly detected in acid wastewater of bleaching stage that is known as the typical discharged patterns of chlorine bleaching stage.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.13 no.8
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• pp.3764-3773
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• 2012

In this study, modeling and optimization works were completed for the separation of 99.9 mol% of methyl ethyl ketone from water through a pressure-swing distillation process since the azeotropic composition varies very sensitively with the change of system pressure. PRO/II with PROVISION release 9.1 was used for the computer simulation and Wilson activity coefficient model was chosen as a modeling equation. A pressure-swing distillation process can be classified into a low-high pressure columns configuration and a high-low pressure columns configuration. In this work, each configurations were optimized for the minimization of steam consumptions, respectively and were compared.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.39 no.3
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• pp.327-335
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• 2015

In this paper, we propose an independent cooling control (ICC) scheme for high strength and atmosphere corrosion resisting steel to obtain the desired temperature and properties along the longitudinal direction of the steel in the run-out table (ROT) process. A temperature model of the independent process is developed to divide the ROT into front and back sections. The control concept uses field data, problem analysis, and a time-temperature transformation diagram. The effectiveness of the proposed control is verified using simulation results under a temperature disturbance by the transformation in the middle of the ROT. The results of a hot strip mill field test show that the temperature control performance is significantly improved by the proposed control scheme.

• Membrane Journal
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• v.11 no.2
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• pp.83-88
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• 2001

A methodology for enhancing the bond strength of a coating layer with a support has been established in preparing low-pressure reverse osmosis mO) hollow fiber which would experience shear badly in flowing feed un it. Prior to coating process, the support membrane, ultrafiltratiun polysulfone(PS) hollow fibers was pretreated with a reaction solution containing glutaraldehyde (GAl which has a good affinity to the suppurt membrane material as well as a reactivity to some of the cunstituents of cuating layer subsequently formed on the support by interfacial polymerization. Therefore, the reactant GA distributed unifonnly over the support layer through the pretreatment could provide a strong adhesive bond between the coating layer and the support, sticking fast to the support membrane through physical bond and, at the same time, connecting its functional group with the coating laycr by chemical bonding. Due to the strong adhesive bond, the resulting hollow fiber membrane showed an excellent long-tcnn stability in pcnneation.

• Journal of Adhesion and Interface
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• v.16 no.1
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• pp.15-21
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• 2015

In this study, rheological properties and flow dynamics in roll coating process of basecoat paints have been investigated for automotive precoated metal (PCM) sheet applications. Various rheological properties for basecoats with three colors (black, blue, and silver), such as shear viscosity data at room temperature and elastic/viscous moduli under thermal curing condition, have been measured using a rotational rheometer. It is found that the relative portion of function groups inside basecoats and their viscosity level have greatly affected the formation of crosslinked networks by thermal curing. Also, operability coating windows for basecoats have been established in three-roll coating process system by observing their flow instabilities such as ribbing and cascade. It is confirmed that rheological approaches applied in this study have been usefully applied to develop environmentally-friendly PCM coating technology and optimally control the coating operations for non-Newtonian PCM paints.

• Journal of Korea Foundry Society
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• v.27 no.1
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• pp.31-35
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• 2007

In order to develop the semi-solid forming technology for magnesium alloy the rheological and thixotropic behavior of Mg alloy slurry with varying shear rates and cooling rates was investigated and simulated with considering the viscosity based on microstructures and processing variables. The viscosity of slurry of Mg alloy (AZ91D) in semi-solid region was exponentially increased with a solid fraction, and was decreased with increasing a shear rate. In order to analyze precisely the rheological behavior, the ANYCAST program modified with the Carreau model and the different heat transfer coefficient between the cast and mold was used to simulate the flow behavior of Mg semi-solid slurry during the injection into a casting mold in a high pressure diecasting machine. The simulated rheological behavior of Mg alloy slurry was matched well with the experimental results.

• Journal of Korean Tunnelling and Underground Space Association
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• v.17 no.1
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• pp.11-23
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• 2015

In this study, the new segment assembling method using cable tensible force was developed to improve the problem of bolt assembling method of shield tunnel. In the field test construction, cable assembling method reduced the assembling time of segment in comparison with bolt assembling method because of guide role of segment shear-key. In the result of measuring the necessary time for segment assembling process, it took 420sec to assemble one segment in bolt method and 400sec to assemble one segment in cable method, but in case of using the cable automatic feeder, it could reduce the necessary time as 60sec in comparison with bolt assembling method. The cable automatic system modeling using BIM, that connected shield TBM also will be utilized in the area of design TBM, excavation plan, method process understanding, construction management and so on.

• Composites Research
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• v.34 no.2
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• pp.108-114
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• 2021

Graphene flakes are generally mass-produced by converting graphene oxide into reduced graphene oxide using chemical or thermal reduction. These graphene flakes can be stacked to form a free-standing graphene paper, which can be used for various applications. However, a graphene paper lacks stretchability, which hinders its application in stretchable devices. In this work, we introduced wrinkles in a graphene paper to make it stretchable. A graphene paper fabricated by vacuum-filtering a graphene dispersion was placed on a pre-stretched adhesive film. When the pre-stretched adhesive film returned to the original state, the graphene paper was wrinkled. The effect of the pre-stretching and wet condition of the graphene papers was experimentally investigated by using scanning electron microscopy. In addition, we observed the change of the period of the wrinkles in the graphene paper depending on the pre-stretching.