• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.28-28
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• 2011

우리나라의 주력산업인 반도체 및 디스플레이의 경우 그 생산 설비의 1/3이상이 진공 장비이며 진공 공정을 통해 만들어진다. 이들 산업 분야에서는 우리나라가 세계 최고의 생산 기술을 가지고 있으므로 자체적인 기술 개발 확보가 중요하다. 최근에는 기존에 개발되어 있는 장비의 성능을 뛰어넘어야 하는 공정 기술력이 요구되면서, 진공 공정 기술 개발이 매우 중요한 이슈가 되었다. 반도체나 디스플레이 산업 등 기존 주력산업의 전후방 산업의 경쟁력 강화 측면에서뿐 아니라 태양전지, LED 등 진공기술을 이용한 신성장 동력 산업의 생산 시스템 경쟁력 확보 측면에서도 진공 공정 기술 개발 중요성은 매우 크다. 지금까지 양산에 적용되는 증착, 식각, 확산 등 진공 공정 운영은, 사전 시험을 통해 얻은 최적 공정의 입력 파라미터들을 정해 놓고 그대로 공정을 진행한 뒤, 생산되어 나오는 제품의 상태를 사후 측정하여 공정 이상 여부를 점검하고 미세 조정하는 형태로 진행되고 있다. 실질적으로 현재 진행 중인 진공 공정에 대한 직접적인 정보가 없으므로 공정 중 발생되는 문제들에 대한 대처는 그 공정이 끝난 후에 이루어지는 상황이다. 공정 미세화 및 대구경화에 따라 기존의 wafer to wafer 제어 개념 보다 발전된 개념으로 센서 기반 실시간 공정 진단 제어 기술의 필요성이 대두되었으며 이를 위한 오류 인식 및 예지기술 (Fault Detection & Classification, FDC) 그리고 이 정보를 이용한 첨단 제어 기술(Advanced Process Control, APC)을 개발하는 노력들이 시작되었다. 한국표준과학연구원에서는 수요기업인 대기업과 장비업체, 센서 개발 중소기업 및 학교 연구소와 공동으로 진공 공정 실시간 측정 진단 제어와 관련된 연구를 하고 있다. 진공 공정 환경측정 기술, 플라즈마 상태 측정 기술, 진공 공정 중 발생하는 오염입자 측정 원천 기술 개발과 이를 구현하기 위한 센서 개발, 화학 증착 소스 및 진공 공정 부품용 소재에 대한 평가 플랫폼 구축, 배기 시스템 진단기술 개발 등 현재 진행되고 있는 기술 개발 내용과 동향을 소개한다. 진공 공정 실시간 측정 기술이 확보되면 차세대 반도체 제작에 필요한 정밀 공정 제어가 가능해지고, 공정 이상에 바로 대응 혹은 예방 할 수 있으며, 여유분으로 필요 이상으로 투입되던 자원(대기시간, 투입 재료, 대체용 장비)을 절감하는 등 생산성을 향상을 기대할 수 있다. 또한 진공 환경에서 이루어지는 박막 증착, 식각 공정 과정에 대한 이해가 높아지고, 공정을 개발하고 최적화하는데 유용한 정보를 제공할 수 있으므로, 기존 장비와 차별화된 경쟁력을 가진 고품위 진공 장비 및 부품 개발에 기여할 수 있을 것으로 기대하고 있다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.43 no.8
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• pp.699-705
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• 2015

Aircraft needs high lift-to-drag ratio and weight reduction of the structure for long endurance flight with a small power. Generally high aspect ratio wing is applied to HALE(High Altitude Long Endurance) aircraft. Also high modulus, and high strength CFRP(Carbon Fiber Reinforced Plastic) has been used in primary structures. and thin mylar(membrane material) film has been applied to skin of wing. As a result, wing is more flexible than the other structures. and the stiffness of thin mylar film has an affect on dynamic stability. In this study, the membrane characteristic of mylar film has been simulated using nonlinear gap elements. And equivalent modeling method using shell elements is presented using the nonlinear simulation result. The linear equivalent model has verified using the results of nonlinear membrane method. Proposed linear equivalent shell model has applied to mode analysis for estimate the effect of mylar mechanical properties on natural frequency.

• Journal of the Korea institute for structural maintenance and inspection
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• v.22 no.5
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• pp.55-63
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• 2018

Recently, the use of duplex stainless steel which with a two-phase microstructure (equal mixture of ferrite and austenite) has been increased in a variety of industrial fields due to higher strength leading to weight saving, greater corrosion resistance(particularly, stress corrosion cracking) and lower price. However, currently, stainless steels are not included in the structural materials of Korean Building Code and corresponding design standards are not specified. In this paper, experimental studies have been performed to investigate the structural behaviors of duplex stainless steel (STS329FLD) bolted connection with two bolts for providing the design data. Main variables are shear connection type (single shear and double shear) and end distance parallel to the direction of applied force. Fracture modes at the final step of test were classified into typical block shear fracture, tensile fracture and curling. Curling occurrence in single shear connection led to ultimate strength drop by up to 20%. Test strengths were compared with those by current design specifications such as AISC/AISI/KBC, EC3 and AIJ and proposed equations by existing studies. For specimens with no curling, Clement & Teh's equation considering the active shear plane provided a higher strength estimation accurancy and for specimens with curling, Kim & Lim's equation considering strength reduction by curling was also overly unconservative to predict the ultimate strength of curled connections.

• Journal of the Korean Recycled Construction Resources Institute
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• v.3 no.3
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• pp.220-227
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• 2015

Ultra high performance concrete (UHPC) uses large quantities of steel fiber, silica fume, filler and superplasticizer for a low water-to-binder ratio (W/B). Despite of exceptional mechanical performances, UHPC exhibits increased viscosity due to the adoption of silica fume and its fabrication cost is costlier than ordinary concrete because of the use of large quantities of expensive materials. Following, this study evaluates the mechanical properties of 180MPa-UHPC using zirconium silica fume (Zr) instead of silica fume with respect to the quantity and type of superplasticizer (SP) and the size of filler. The results reveal that the Zr-UHPC using W/B of 20%, 100% of Zr, amount of SP-L of 2 to 3% and $4{\mu}m$-filler with steel fiber in 1.5 vol.% can develop better fluidity than the traditional mix composition using silica fume and secure a compressive strength higher than 180 MPa. In addition, the proposed mix composition is shown to enable a reduction of the fabrication cost by 33% compared to traditional UHPC.

• Korean Journal of Construction Engineering and Management
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• v.9 no.4
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• pp.193-205
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• 2008

Quality is an important keyword representing the corporate competitiveness and image in today' s construction industry. Especially in concrete construction, any problems or defects in fresh concrete can significantly degrade the entire quality and performance of the facility built. Thus, adequate quality inspection and testing must be exercised over the fresh concrete, if concrete with the required strength, durability and appearance is to be obtained. The testing of concrete delivered to the construction job site involves testing of fresh concrete and performing strength tests on hardened concrete. The principal tests conducted on fresh concrete include the slump test and tests for air and salt content. The temperature of fresh concrete should be checked out hot or cold weather concreting. The 7-day and 28-day strength of hardened concrete are also determined by compression tests on usually cylinder samples. However, it is very complex and time-consuming process requiring a lot of efforts to document those on-site concrete testing results and to accumulate their historical data. The primary objective of this study is to suggest a unique PDA and web-based system which enables an on-site quality manager to effectively conduct the concrete inspection and testing, automatically document and accumulate the collected historical data, and promptly obtain the approval from supervisors. Finally, it is anticipated that the effective use of the proposed PDA and web-based system would be able to improve reliability of the concrete quality inspection and testing data as well as significantly reduce the approval process.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.9 no.6
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• pp.1726-1732
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• 2008

Injection molding is one of plastic forming technology which can easily mass-produce plastic parts with various and even complex shape. The technology has lots of difficulties in making a good part due to phase change of material, high applied pressure, and fast melt flow speed in the cavity. To overcome the problems, they had to make trial and error method until the CAE(Computer Aided Engineering) could be a tool for concurrent engineering. In this paper, we investigate the optimal design for a plastic DVD tray part by systematic approach of the commercial CAE program. In design, we should consider two objectives which are both dimensional stability and cost-down. The dimension of the part is crucial because the tray should carry a DVD correctly, but the part is too thin to injection-mold easily. In order to improve the moldability, the mold is designed in the form of stack mold which is a kind of 4 hot runner system. In first, we changed the stack-mold system with one hot-runner to cost down, and decided the optimal position of the gate. After that, we investigate the effect of both the layout of cooling channels and the cooling temperature on the shrinkage of the DVD tray. A optimal simulation approach, the gate design is 2Gate#3 and the layout is Case2 cooling line as the optimal temperature of $70^{\circ}C$. The Moldflow and PC+ABS are used for the CAE program and material respectively.

• Journal of the Korea institute for structural maintenance and inspection
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• v.20 no.4
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• pp.120-127
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• 2016

Due to the enlargement and high-rise of reinforced concrete structure, the application of high functional material is required. However, high-strength bar is recently introduced to the country and the material is insufficient to measure the variation of quantity of rebar quantitatively when using high-strength bar. For these reasons, this study is to provide useful data in cost decision making when applying high-strength bar at a stage of architectural project planning. For residence-commerce complex buildings, we set up six types of conditions such as in case of using only rebar, in case of using only high-strength bar, in case of using rebar mixed with high-strength bar and so on. With the standard of study model 1 that applies only SD400 regardless of rebar diameter, the analyzed result of rebar variation and the cost change of construction in other study model is as follows. When the rebar amount and cost in study model I was 100%, each ratio was 88.3% and 90.5% in study model II, 80.2% and 83.4% in study model III, 91.9% and 93.5% in study model IV, 88.9% and 87.7% in study model V and 82.4% and 85.5% in study model VI. Therefore, in case of rebar amount and construction cost, study model III was evaluated as the best that was applied only SD600.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.78-78
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• 2000

다결정 실리콘-게르마늄 (poly-SiGe)은 태양전지 개발에 있어서 중요한 물질이다. 우리는 소량의 Ge(x=0.05)으로부터 다량의 Ge(x=0.67)을 함유한 수소화된 비정질 실리콘-게르마늄 (a-SiGe:H) 박막의 고상결정화 과정을 ESR (electron spin resonance)방법으로 조사해보았다. 먼저 PECVD 방법으로 Corning 1737 glass 위에 a-Si1-xGex:H 박막을 증착시켰다. 증착가스는 SiH4, GeH4 가스를 썼으며, 기판온도는 20$0^{\circ}C$, r.f. 전력은 3W, 증착시 가스압력은 0.6 Torr 정도이었다. 증착된 a-SiGe:H 박막은 $600^{\circ}C$ N2 분위기에서 다시 가열되어 고상결정화 되었고, 결정화 정도는 XRD (111) peak의 세기로부터 구해졌다. ESR 측정은 상온 x-band 영역에서 수행되었다. 측정된 ESR스팩트럼은 두 개의 Gaussian 함수로써 Si dangling-bond와 Ge dangling-bond 신호로 분리되었다. 가열 초기의 a-SiGe:H 박막 결함들의 스핀밀도의 증가는 수소 이탈에 기인하고, 또 고상결정화 과정에서 결정화된 정도와 Ge-db 스핀밀도의 변화는 서로 깊은 상관관계가 있음을 알 수 있었다. 특히 Ge 함유량이 큰 박막 (x=0.21, 0.67)에서 뿐만 아니라 소량의 Ge이 함유된 박막(x=0.05)에서도 Ge dangling-bond가 Si dangliong-bond 보다 고상결정화 과정에서 더 중요한 역할을 한다는 것을 알수 있었다. 또한 초기 열처리시 Si-H, Ge-H 결합에서 H의 이탈로 인하여 나타나는 Si-dangling bond, Ge-dangling bond 스핀밀도의 최대 증가 시간은 x 값에 의존하였는데 이러한 결과는 x값에 의존하는 Si-H, Ge-H 해리에너리지로 설명되어 질 수 있다. 층의 두께가 500 미만인 커패시터의 경우에 TiN과 Si3N4 의 계면에서 형성되는 슬릿형 공동(slit-like void)에 의해 커패시터의 유전특성이 파괴된다는 사실을 알게 되었으며, 이러한 슬릿형 공동은 제조 공정 중 재료에 따른 열팽창 계수와 탄성 계수 등의 차이에 의해 형성된 잔류응력 상태가 유전막을 기준으로 압축응력에서 인장 응력으로 바뀌는 분포에 기인하였다는 사실을 확인하였다.SiO2 막을 약화시켜 절연막의 두께가 두꺼워졌음에도 기존의 SiO2 절연막의 절연 파괴 전압 및 누설 전류오 비교되는 특성을 가졌다. 이중막을 구성하고 있는 안티퓨즈의 ON-저항이 단일막과 비교해 비슷한 것을 볼 수 잇는데, 그 이유는 TiO2에 포함된 Ti가 필라멘트에 포함되어 있어 필라멘트의 저항을 감소시켰기 때문으로 사료된다. 결국 이중막을 구성시 ON-저항 증가에 의한 속도 저하 요인은 없다고 할 수 있다. 5V의 절연파괴 시간을 측정한느 TDDB 테스트 결과 1.1$\times$103 year로 기대수치인 수십 년보다 높아 제안된 안티퓨즈의 신뢰성을 확보 할 수 있었다. 제안된 안티퓨즈의 이중 절연막의 두께는 250 이고 프로그래밍 전압은 9.0V이고, 약 65$\Omega$의 on 저항을 얻을수 있었다.보았다.다.다양한 기능을 가진 신소재 제조에 있다. 또한 경제적인 측면에서도 고부가 가치의 제품 개발에 따른 새로운 수요 창출과 수익률 향상, 기존의 기능성 안료를 나노(nano)화하여 나노 입자를 제조, 기존의 기능성 안료에 대한 비용 절감 효과등을 유도 할 수 있다. 역시 기술적인 측면에서도 특수소재 개발에 있어 최적의 나노 입자 제어기술 개발 및 나노입자를 기능성 소재로 사용하여 새로운 제품의 제조와 고압 기상 분사기술의 최적화에 의한 기능성 나노 입자 제조 기술을 확립하고 2차 오염 발생원인 유기계 항균제를 무기계 항균제로 대체할 수 있다. 이와 더불

• FLOWER RESEARCH JOURNAL
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• v.19 no.3
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• pp.144-150
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• 2011

This study was carried out to develop the soil amendment practice by phosphate solubilizing bacteria application in greenhouse chrysanthemum cultivation area with high salt accumulation. The experimental site (ShinWoo Flower, GwangJu) has been cultivated chrysanthemum for 15 years and showed significant salt accumulation. The phosphate solubilizing bacteria, Pseudomonas putida (KSJ11), Acinetobacter calcoaceticus (KSJ3) and Acinetobacter calcoaceticus (WP20) formulated on vermiculite for easy use, were applicated. Each 250L of phosphate solubilizing bacteria was applied for $82m^2$ before planting. Acinetobacter calcoaceticus (KSJ3; WP20) increased the amount of soluble phosphorus in an effective level. Particularly, Acinetobacter calcoaceticus (WP20) increased not only the level of soluble phosphorus but also potassium, calcium and magnesium resulting in the increase of EC in the soil. The level of nematode was also decreased with the non-treated increased. As a result, we suggest that selected phosphate solubilizing bacteria (WP20) could be a useful practice for soil amendment in chrysanthemum plantation soil and provided an opportunity to reduce the use of the fertilizer during the cultivation period.

• Journal of the Korean Recycled Construction Resources Institute
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• v.9 no.4
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• pp.642-649
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• 2021

Energy saving standard for buildings are strengthened, the application of exterior insulation finishing system and thickness of insulation materials are increasing. Most buildings with exterior insulation finishing system is applied organic insulating material. Organic insulating material have workability, economic feasibility, reduction in construction cost, and excellent thermal insulation performance. However, Organic insulating material is very vulnerable to heat, so when a fire occurs, rapid fire spread and toxic gas are generated, causing many casualties. Inorganic insulating material can be non-combustible performance, but it is heavy and has low thermal insulation performance. Mineral wool has higher thermal insulation performance than other types of inorganic insulating material, but mineral wool is disadvantageous to workability and vulnerable to moisture. Glass bubble are highly resistant to water and chemically stable substances. In addition, the density of the glass bubble is very low and the particles are spherical, fluidity is improved by the ball bearing effect. Glass bubbles can be used with cement-based ino rganic insulating material to impro ve the weight and thermal insulatio n perfo rmance o f cement-based inorganic insulation. This study produced a inorganic insulating materials were manufactured using cement-based materials and glass bubble. In order to evaluate the insulation performance and flame retardant performance of cement-based super light-weight inorganic insulating materials using with glass bubble, insulation performance or flame retardant and non-combustible performance were evaluated after manufacturing insulating materials using micro cement and two types of glass bubbles. From the test result, Increasing the mixing ratio of glass bubbles improved the insulation performance of cement-based super light-weight inorganic insulating materials, and when the mixing ratio of glass bubbles was 10%, it sho wed sufficient flame retardant and no n-co mbustible perfo rmance.