• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.72-72
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• 2015

메모리 반도체 세계 시장 점유율 1위 뿐만 아니라 국내 전체 산업 가운데 가장 중추적인 역할을 하는 반도체 산업의 지속적인 성장과 국가 경제의 발전을 위해서 소자 업체 뿐만 아니라 장비, 소재, 부품 산업의 동반 성장은 반드시 필요하다. 그 중에서 특히 소재, 부품 산업을 발전시키는 것이 국산 반도체 장비의 시장 점유율이 낮은 현 시점에서 가장 필요한 선택이다. 반도체 소재, 부품 산업의 발전을 위해서 제일 먼저 해야할 일은 영세한 국내 반도체 소재, 부품 산업을 활성화 시키는 것이며, 지속 적인 연구 개발, 성능 평가 방안 확보, 수요 업체와의 연계 방안 확보 등이 주요 현안이다. 반도체 소자 업체, 장비 업체에서 원하는 소재 및 부품의 성능을 만족하는 제품을 만들기 위해서는 우선 소재 및 부품의 기본 특성을 만족하는지에 대한 평가가 필요하고, 더 나아가서는 디바이스의 특성을 만족시켜줄 수 있는 한 단계 상향된 수요자의 요구 조건을 만족 시켜줄 수 있어야 한다. 본 연구에서는 그 중 특히 중요한 요소인 성능 평가에 대해서 논하고자 한다. 우선 반도체 공정용 소재에 대해서 살펴 보면 대표적인 반도체 소재로 증착용 Precursor, Photo Resistor, Sputter Target 등이 있다, 평가 방법으로는 ALD용 Precursor의 경우 대기 노출시 폭발, 화염 발생 등의 위험 요소를 안고 있어 특별한 주의가 요구 된다. PR이나 Sputter Target은 상대적으로 위험성은 적으며, 다양한 성능 평가 들이 가능하다. 다음으로 부품 평가에 대해서 살펴 보자. 본 원에서 가장 많이 진행된 부품 평가는 개발된 Pump의 성능 평가이다. 개발된 Pump는 1차적으로 KRISS 진공센터 에서 기본 Pumping 능력 평가를 실시하고, 다음으로 공정 평가를 실시한다. Pump마다 특성이 달라서 각 펌프의 성능 평가에 적합한 공정과 장비를 우선 선정하고 그에 합당한 공정을 진행하여 평가를 실시한다. 고 진공용인 Cryo Pump는 순수한 물질의 증착이 중요한 Metal Sputter 공정 장비에 장착하여 공정용 Gas를 흘리면서 Pump의 구동에 따른 성능 평가를 하고, 다음으로 실제로 Metal Sputter를 실시해서 Wafer에 증착된 물질의 특성을 확인한다. 다음으로 Turbo Pump의 경우 Etch 장비에 장착하여 Etch Uniformity, Etch Rate, By-product 배출 정도에 대해서 평가를 한다. Dry Pump는 비교적 공정 압력이 낮은 PECVD 공정 장비에서 평가를 진행 한다. 마지막으로 공정 진단, 챔버 상태 진단 등을 할 수 있는 별도의 부품 또는 장치로 PBMS, PCDS, OES 등의 평가에 대해서 논한다. 본 장치들은 실제 반도체 공정 장비와 환경에서 평가가 되어야지만 최종 사용자 입장에서 신뢰를 가지고 결과에 대해서 접근할 수 있다. 위에 논의된 장치들은 현재 공정 장비에 부착되어서 판매 되고 있는 것이 아니라 수요가 많지 않으나, 자체 성능 개선과 적합한 평가를 통해서 장치의 성능이 인정되면 300 mm 이상 Wafer 공정에서 반드시 필요한 실시가 공정 진단을 위해서 폭발적인 수요를 창출할 수 있으리라 본다.

• KSCE Journal of Civil and Environmental Engineering Research
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• v.26 no.1D
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• pp.13-16
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• 2006

Recently, ITS has been deployed nationwide and at the same time, the demand for the better accuracy and higher quality of traffic information has been increased. Yet, there is no standard evaluation methods or evaluation equipments to verify ITS device's performance, being unable to secure reliable traffic data. In this study, the standard evaluation methods for ITS device's performance are studied by reviewing other nations' evaluation methods and the evaluation system is developed.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 1999.11a
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• pp.368-371
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• 1999

본 논문에서는 이더넷 장비의 단대단(End-to-end) 성능시험에 기반한 시험 방법론을 기술하고 이것을 이용하여 실제로 이더넷 허브를 시험한 결과를 제시한다. 시험대상장비에 입력과 출력을 통해 장비만의 성능을 측정하는 방법과 달리 클라이언트-서버모델 기반의 단대단 성능시험은 시험대상장비에 연결된 사용자의 입장에서 장비의 성능을 측정하므로 사용자 관점에서 객관적이고 직관적인 비교 데이터를 제시해줄수 있는 장점이 있다. 본 논문에서는 단일 네트워크 장비, 특히 이더넷 장비의 성능시험에 이러한 클라이언트-서버 모델을 적용하기 위해 여러 가지 사용자 응용. 예를 들면 파일 업로드(File Upload), 파일 다운로드(File Download), 질의(Inquiry), 신용 확인(Credit Check) 등을 수행할 때 처리율(Throughput)이나 응답시간(Response Time)을 측정하여 결과를 분석한다. 그리고 본 논문에서는 단대단 성능평가 방법론과 함께 시험대상 장비만의 처리율을 측정하여 단대단 성능평가의 단점을 보완하는 방법도 제시한다.

• Journal of the Korean Society of Marine Environment & Safety
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• v.26 no.5
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• pp.474-482
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• 2020

To ensure the safe operation of offshore plants, a system is needed for evaluating the equipment performance and for monitoring the results. Currently, owing to the operating environments of of shore plants situated far from the land, measurement data must be periodically stored in storage devices and carried on the land for evaluating the equipment performance. Consequently, it is difficult to prevent equipment failure because the performance evaluation cycle is long. Furthermore, until the next performance evaluation is conducted, it is difficult to determine the equipment's degree of performance degradation. Hence, it is necessary to install an onboard equipment performance monitoring system within the offshore plant. In this study, to evaluate and visualize the results of equipment performance within an offshore plant, a database was designed as the initial step towards the development of an equipment performance monitoring system. The tag data of major equipment were selected and analyzed. Furthermore, in order to store and manage the data measured in real time within the offshore plant, a database was developed for the onboard equipment performance monitoring system.

• Journal of the Society of Disaster Information
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• v.17 no.1
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• pp.39-52
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• 2021

Purpose: Recently, due to increasing usage of high-tech equipment for facility inspection, the need of verifying high-tech equipment is being emphasized. Therefore, the purpose of this paper is to develop performance evaluation methodology of tunnel scanners that inspect tunnel facilities. Method: This paper describes literature reviews regarding the performance evaluation methodology of high-tech based equipment for facility inspection. Based on these investigations and expert advisory meetings, this paper suggests a performance evaluation methodology of tunnel scanner. Result: First evaluation indicator states minimum performance standards of tunnel scanners. Second evaluation indicator is related to tunnel scanner quality. Conclusion: The performance evaluation methodology can provide reliable equipment performance catalogues, helping users to make a proper selection of equipment. Also, developers of equipment can get authorized verification of performances, preventing poor maintenance of facilities.

• Proceedings of the Korean Institute Of Construction Engineering and Management
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• autumn
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• pp.634-637
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• 2003

A tele-operated hume concrete pipe laying machine has been developed to solve several problems on safety, quality, productivity, etc. It is required to propose a performance evaluation model and methodology in order to measure productivity, economic feasibility, quality and safety. The primary objective of this study is to propose a model and methodology for the performance evaluation of the developed tele-operated hume concrete pipe laying machine. Furthermore, this study evaluates its performance compared with the existing hume pipe laying work by using data which obtained in field trials. It is anticipated that the proposed model and methodology might be effectively used in analyzing the performance of other automation robots.

• Korean Journal of Construction Engineering and Management
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• v.5 no.1 s.17
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• pp.157-167
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• 2004

In developing an automated construction system, it is essential to propose a performance evaluation model and methodology, which can measure productivity, quality, safety and economic feasibility in order to verify its superiority. Recently, a tele-operated hume concrete pipe laying machine has been developed to solve several problems related to safety, quality, productivity in conventional method. The primary objective of this study is to propose a model and methodology for the performance evaluation of the developed tele-operated hume concrete pipe laying machine. Furthermore, this study evaluates the automation machine's performance compared with the existing hume pipe laying work by using data which obtained in many field trials. It is anticipated that the proposed model and methodology might be effectively used in analyzing the performance of other automation robots.

• Proceedings of KOSOMES biannual meeting
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• 2017.04a
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• pp.169-169
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• 2017

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.21 no.1
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• pp.64-75
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• 2022

The ITS performance evaluation has been performed in the evaluation of traffic data collection equipment. However, evaluation of the data collection equipment alone cannot guarantee the reliability of the traffic information. So, ITS service evaluation has to be implemented institutionally. In this study, an evaluation method has been prepared to evaluate the accuracy of travel time information in road sections. In addition, a piece of portable reference equipment was developed to collect travel time data on the road. Field tests were performed on two national road sections managed by the Seoul Construction and Management Administration (SCMA) to prepare an evaluation method considering field conditions and evaluate the reference equipment's performance. Based on the test results, the improvement of the reference equipment to collect more samples and the adjustment of collection points were discussed.

• Journal of the Society of Disaster Information
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• v.16 no.1
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• pp.178-191
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• 2020

Purpose: This paper proposes a performance evaluation method for state-of-the-art facility inspection/diagnostic equipment through a trend survey of equipment and standardization systems of US, Japan, and Korea. This paper also suggests the priority of developing a performance evaluation method through expert interviews and surveys. Method: In this study, report for the last 5 years of FMS, state-of-the-art equipment of facility maintenance companies/safety diagnosis specialist agencies and papers/research reports/patents of NTIS were analyzed to identify recent trends of facility inspection/diagnostic equipment usages. standardization system of US, Japan, and Korea were analyzed to figure out a suitable form of a performance evaluation method for the domestic situation. And expert interview and survey were conducted to identify the priority of developing a performance evaluation method. Result: The performance evaluation method must be developed by the shape that only evaluates performance, regardless of types of equipment, on inspection item level for creative technology development. The priority of developing the performance evaluation method was identified as crack detection of concrete for durability evaluation and displacement/deformation/fatigue detection of concrete and steel for stability evaluation. Conclusion: The performance evaluation method will be developed firstly for the crack detection of concrete for durability evaluation and displacement/deformation/fatigue detection of concrete/steel for stability evaluation. In order to promote creative technology development, the performance evaluation method should be developed in a form that provides standardized specimens or testbeds and can be applied regardless of types of technologies.