• Journal of the Korean Magnetics Society
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• v.25 no.1
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• pp.1-3
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• 2015

We demonstrate here an optical measurement technique to quantify the spin-orbit torques. The magnetization dynamics induced by the spin-orbit torques with a sinusoidal current injection is measured by use of polar magneto-optical Kerr effect. The measured signal is then analyzed based on the Landau-Lifhshitz-Gilbert equation with consideration of the spin-orbit torques. The present measurement technique is applied to Pd/Co/Pt films and then, the longitudinal and transverse components of the spin-orbit torques are successfully quantified. The present optical technique provides an alternative way to quantify the spin-orbit torques.

• Journal of the Korean Magnetics Society
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• v.8 no.3
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• pp.125-130
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• 1998

13Cr-1.5Nb-Fe alloy powder was fabricated by water atomization method, and ring-shape specimen of this composition was fabricated by oil press, and then sintered in the vacuum furnace. Powder shape, size distribution, composition (C, N, O, S) analysis and saturation magnetization of as-prepared 13Cr-1.5Nb-Fe alloy powder were investigated. Ac permeability and power loss was measured after forming and sintering process. Saturation magnetization and contents of oxygen of the alloy powder is160 emu/g and about 6000 ppm, respectively. 50 % volume fraction indicate particle size of 70$\mu$m. The ac permeability of sintered specimen increases with increasing sintering temperature and forming pressure. The power loss is 107 W/cc at sintering temperature of 1200 $^{\circ}C$, 12 ton/$\textrm{cm}^2$ forming pressure, and 20 KHz. It is the lowest among the prepared specimen.

• Korean Journal of Materials Research
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• v.4 no.1
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• pp.117-124
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• 1994

The reduction of saturation magnetization in the Mg-Mn microwave ferrites was achieved by substituting the non-magnetic A1 ion for Fe ion. It is necessary for extending the operation frequencies that there is no change in other properties of the microwave ferrites. The electrical and magnetic properties are characterized where the composition of the ferrites studied was given by the general formula $(MgO)_{1.0}(MnO)_{0.1}(Al_xFe_{1.9-x}O_{2.85}$ with x ranging from 0.1 to 0.4. The saturation magnetization and the ferromagnetic resonance linewidth was decreased by the substituting amount of $Al_2O_3$. The value of coercive field was low enough over the composition of x=O.2 and the high squareness ratio was obtained all over the amount of substitution. It is feasible to select the proper application area with the combination of various properties ; that is, low coercive field, high squareness ratio, optimum saturation magnetization and ferromagnetic resonance linewidth.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.230-230
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• 2013

플라즈마를 활용한 미세 패턴의 건식 식각은 반도체 소자 공정에 있어서 가장 중요한 기술 중 하나이다. 한편, 매년 발행되는 ITRS Roadmap 에 따르면 DRAM 의 1/2 pitch 는 감소하는 동시에 Contact A/R (Aspect Ratio) 는 증가하고 있다. 이러한 추세 속에서 기존의 공정을 그대로 활용할 경우 식각물의 프로파일 왜곡 혹은 휨 현상이 발생하고 식각 속도가 저하되며 이러한 특성들이 결과적으로는 생산성의 저하로 이어질 수 있다. 이러한 현상을 최소화하기 위해서는 무엇보다 독립된 plasma parameter 들이 식각물의 프로파일 혹은 식각 속도 등에 어떠한 영향을 주는 지에 대한 학문적 이해가 필요하다. 본 논문에서는 최소 CD (Critical Dimenstion) 100nm, 최대 A/R 30 인 HARC (High Aspect Ration Contact hole) 의 식각 특성이 plasma parameter 에 따라 어떻게 변하는지 확인해 보고자 한다. 산화물의 식각은 대표적인 high density plasma source 중의 하나인 ICP에서 진행하였으며 기존에 알려진 plasma parameter 에 더하여 자장의 인가가 산화물의 식각 특성에 어떠한 영향을 주는지 살펴보고자 전자석을 ICP 에 추가로 설치하여 실험을 진행하였다. 결과적으로, plasma parameter 에 따른 혹은 자장의 세기 변화에 따른 산화물의 식각 실험을 플라즈마 진단 실험과 병행하여 진행함으로써 다양한 인자에 따른 산화물의 식각 메커니즘을 정확하게 이해하고자 하였다. 실험 내용을 요약하면 다음과 같다. 먼저, 전자석의 전류 인가 조건에 따라 축 방향 혹은 반경 방향으로의 자장의 분포가 달라질 수 있음을 확인하였고 플라즈마 진단 결과 축 방향 혹은 반경 방향으로의 자장이 증가하였을 때 고밀도의 플라즈마가 형성될 수 있음은 물론 반경 방향으로의 플라즈마 밀도의 균일도가 향상됨을 확인할 수 있었다. 또한 ICP 조건에서 바이어스 주파수, 압력, 바이어스 파워, 소스 파워, 가스 유량 등의 plasma parameter 가 산화물의 식각 특성에 미치는 영향 및 메커니즘을 규명하였고 이 과정을 통해 최적화된 프로파일을 바탕으로 축 방향 혹은 반경 방향으로 증가하는 자장을 인가하였을 때 (M-ICP 혹은 자화 유도 결합 플라즈마) ICP 대비 산화물의 식각 속도가 증가함은 물론 PR-to-oxide 의 선택비가 개선될 수 있음을 확인할 수 있었다. 자장의 인가에 따른 산화물의 정확한 식각 메커니즘은 향후의 실험 진행을 통해 이해하고 이를 통해 궁극적으로는 산화물의 식각 공정이 나아가야 할 올바른 방향을 제시하고자 한다.

• Journal of the Korean Magnetics Society
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• v.4 no.2
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• pp.114-121
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• 1994

A $Ba_{2}Co_{2-x}Zn_{x}Fe_{12}O_{22}(x\;=\;0.0~2.0,\;Co_{2-x}Zn_{x}Y)$ powder was prepared by a oxidation--coprecipitation method and sintered at $1150~1250^{\circ}C$ for 4 hours. The microstructures and magnetic properties(saturation magnetization, Curie temperature), complex permeability of sintered body were measured As increasing Zn content from x = 0 to 2.0 in $Co_{2-x}Zn_{x}Y$, the real value of complex permeased from 7 GHz to 1 GHz. Because of resonance in few GHz range, Y-type hexagonal ferrite is rmre applicalble than spinel ferrite in high frequency range, and more research would be necessary to find the mechanism of the second resonance observed in higher frequency.

• Journal of the Korean Magnetics Society
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• v.3 no.2
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• pp.115-120
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• 1993

The relationship between magnetic parameter and microwave absorbing performance evaluation factor of electomagnetic wave absorber such as matching frequency, matching thickness were investigated for Ni-Zn ferrite composites. It was identified that the maximum value of ${\mu}_{r}$" is shift to low frequency with decrese Ni/Zn ratio and the value of ${\mu}_{r}$" is maximum in the case of Ni/Zn=1. All Ni-Zn ferrite composites in this study have two matching frequencies in 1-12 GHz frequency. It can be suggested that $f_{m1}$ is proportional to resonance frequency and $f_{m2}$ is proportional to the saturation magnetization.

• Journal of the Korean Institute of Telematics and Electronics
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• v.20 no.4
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• pp.55-60
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• 1983

A new type of digital phase-locked loop (DPLL) that employs a multilevel quantified timing error detector (TED) is proposed and analyzed under the assumption of negligible quantizing effect and no noise. Since the timing error is quantized uniformly, the TED has a linear characteristic. From the linear characteristic of TED, a first order difference equation describing the behavior of the loop is derived. Using the system equation, the loop is analyzed mathematically for phase step and frequency step input. Desired locking condition for the loop to be locked and the lock range for the DPLL's to achieve exact locking independently of initial conditions are ob-tained. And these analyses are confirmed by timing error plane plots and computer simulation.

• Journal of the Korean Magnetics Society
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• v.21 no.4
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• pp.121-126
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• 2011

Spin dynamics of magnetic tunnel junctions with free and fixed reference layers is investigated by ferromagnetic resonance micromagnetic simulations. First, in magnetic tunnel junctions with an exchange biased synthetic ferrimagnetic reference layer, a magnetization direction of each layer and the tunneling magnetoresistance are calculated for a DC magnetic field. To investigate the spin exciting modes in magnetic tunnel junctions, we simulate the ferromagnetic resonance frequency spectra with small RF magnetic fields. Exciting modes of the tunneling magnetoresistance calculated by an included angle between free and reference layers is interpreted from those of each layer. Spin exciting modes are different according to a signs of the DC magnetic field. In a negative magnetic field, FMR frequency spectra of free and reference layers are well elucidated by the modified Kittel's equation. However, in a positive magnetic field, there is no simple analytic solution related to FMR frequency spectra due to the coupled modes. Since ferromagnetic layers in magnetic tunnel junctions are interactive each other, careful considerations of the reference and fixed layer as well as the free layer are required for understanding on the spin dynamics of magnetic tunnel junctions with an exchange biased synthetic ferrimagnetic reference layer.

• Journal of the Korean Magnetics Society
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• v.6 no.1
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• pp.36-39
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• 1996

We have constructed a disp1acerrent sensor for measuring dynamic magnetostriction of an arrvrphous ribbon under alternating magnetic field using fiber optic Fabry-Perot interferorreter. The signal of the sensor was depen¬dent on the index matching oil and the optical isolator. The resolution of the sensor was $30{\AA}$ and the measured peak to peak magnetostriction of the amorphous ribbon $Fe_{81}B_{13.5}Si_{3.5}C_{2}$ was $28{\times}10^{-6}$.

• Proceedings of the IEEK Conference
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• 2000.06b
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• pp.302-305
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• 2000

It is important to control the electron energy distribution to have high quality plasma process. A conventional inductively coupled plasma(ICP) source with 13.56MHz power is not adequate for low damage sub-half micron patterning process due to higher electron temperature. Only the pulsed plasma technique seems to provide low electron temperature, and thus low process damage. Recently, a novel method proposed by us, named as ‘Enhanced-ICP’, which uses periodic weak axial magnetic field added to a normal ICP source, has shown great improvement in etch characteristics. changes of plasma characteristics according to the frequency of time-varying axial magnetic field have been observed by probe-time-averaged Langmuir probe.