• Proceedings of the Korean Society of Laser Processing Conference
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• 2006.06a
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• pp.123-128
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• 2006

We constructed a micro-patterning system that build patterns on a photoresist coated wafer using laser direct writing system. Confocal microscope system was adapted for real-time auto-focusing of the laser writing lens to generate lines of uniform width.

• Proceedings of the Optical Society of Korea Conference
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• 1995.06a
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• pp.68-74
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• 1995

한국전자통신연구소에서 개발된 바 있는 KrF 엑시머 레이저 스탭퍼의 개발 과정과 그 결과를 보이고, 동시에 현재 개발중인 ArF 엑시머 레이저 스텝퍼의 진행상황을 보고한다. 본 논문에서는 스탭퍼의 주요 구성요소인 조명계, 투영광학계, 웨이퍼 자동초점 및 자동정렬 시스템을 중심으로 설명하여, KrF와 ArF 에시머 레이저 스탭퍼간의 차이점과 그 특성들을 상호 비교한다.

• Journal of the Institute of Electronics and Information Engineers
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• v.54 no.7
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• pp.81-89
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• 2017

Autofocus(AF) Method is essential to overcome the performance degradation due to motion measurement errors under airborne SAR environment. In this paper, back-projection algorithm(BPA) is applied to SAR raw data acquired under the squinted mode, and preprocessing algorithm of AF for BPA is investigated. To apply AF to SAR image effectively, image backplane rotation method and doppler location alignment function for BPA are proposed. The proposed method is applied to SAR raw data acquired in a flight test and shows excellent performance improvement in real data.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.28 no.11
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• pp.894-901
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• 2017

In the existence of motion, azimuth phase error due to accuracy limitation of GPS/IMU and system delay is unavoidable and it is essential to apply autofocus to estimate and compensate the azimuth phase error. In this paper, autofocus algorithm using MWLS(Modified WLS) is proposed. It shows the robust performance compared with original WLS using new target selection/sorting metric and iterative azimuth phase estimation technique. SAR raw data obtained in a captive flight test is used to validate the performance of the proposed algorithm.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.2
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• pp.70-77
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• 2010

This study proposed an auto focusing method for a multi-focus image in assembling lens modules in digital camera phones. A camera module in a camera phone is composed of a lens barrel, an IR glass, a lens mount, a PCB board and aspheric lenses. Alignment among the components is one of the important factors in product quality. Auto-focus is essential to adjust image quality of an IR glass in a lens holder, but there are two focal points in the captured image due to thickness of IR glass. So, sharpness, probability and a scale factor are defined to find desired focus from a multi-focus image. The sharpness is defined as clarity of an image. Probability and a scale factors are calculated using pattern matching with a registered image. The presented algorithm was applied to a lens assembly machine which has 5 axes, two vacuum chucks and an inspection system. The desired focus can be determined on the local maximum of the sharpness, the probability and the scale factor in the experiment.

• Korean Journal of Optics and Photonics
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• v.15 no.6
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• pp.583-590
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• 2004

The autofocus is one of the important processes in the automated vision inspection or measurements using optical microscopes, because it influences the measuring accuracy. In this paper, we used the confocal microscope configuration based on not a pinhole but a single-mode optical fiber. A single mode fiber has the functions of source and detector by applying the reciprocal scheme. As a result, we acquired a simple system configuration and easy alignment of the optical axis. Also, we embodied a fast autofocus system by acquiring the focus error signal through a source modulation technique. The source modulation technique can effectively reduce physical disturbances compared with objective lens modulation, and it is easily applicable to general optical microscopes. The focus error signal was measured with respect to the modulation amplitude, reflectance of the specimen and inclination angle of the measuring surface. The performance of the proposed autofocus system was verified through autofocusing flat mirror surface. In addition, we confirmed that source modulation rarely degrades the depth resolution by the comparison between the FWHMs of axial response curves.

• Korean Journal of Optics and Photonics
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• v.4 no.1
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• pp.15-21
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• 1993

This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

• Korean Journal of Optics and Photonics
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• v.18 no.1
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• pp.31-36
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• 2007

In order to evaluate the performance of phone camera lenses, we have developed equipment for measuring the modulation transfer function(MTF) for small size lenses. The equipment is composed of an an image analyzer, object generator, and a lens mount. The object generator is rotated for on and off-axis measurement. The lens mount is of horizontal type and tiltable for precise alignment to the optical axis. After the initial alignment process, the measurement is done within 10 seconds automatically

• Journal of the Korean Society for Precision Engineering
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• v.27 no.2
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• pp.34-39
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• 2010

In order to achieve and maintain dimensional accuracy in laser micro-machining, dominant parameters such as laser power and laser focus position need to be monitored and controlled real time. Also, in order to selectively machine multi-layered materials, the material being presently machined need to be recognized. This paper presents an auto-focusing (AF) module to keep laser focus on a large-area surface; a real-time laser power stabilizing module based on optical attenuation; and a laser-induced breakdown spectroscopy (LIBS) module. With these monitoring modules, position error in laser focus on a 4" silicon wafer was kept below $4{\mu}m$, initially $51{\mu}m$, and laser power stability of a UV laser source was improved from 1.6% to 0.3%. Also, the material transition from polyimide to copper in machining of FCCL (flexible copper clad laminate) was successfully observed.

• Journal of Aerospace System Engineering
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• v.12 no.4
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• pp.64-74
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• 2018

Small high-resolution Earth observation satellites require precise optical alignment at the submicron level. However, misalignments can occur due to the influence of external factors during the launch and operation despite the sufficient alignment processes that take place before the launch. Thus, satellites need to realign their optical elements in orbit in what is known as a refocusing process to compensate for any misalignments. Refocusing algorithms developed for satellites have only considered de-space, which is the most sensitive factor with respect to image quality. However, the existing algorithms can cause correction error when inner and external forces generate tilt amount in an optical system. The present work suggests an improved online refocusing algorithm by considering the tilting effect for application in the case of a de-spaced and tilted optical system. In addition, the algorithm is considered to be efficient in terms of time and cost because it is designed to be used as an online method that does not require ground communication.