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신영재;이응숙;김경웅;김영민
- Proceedings of the Korean Society of Precision Engineering Conference
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- 2003.06a
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- pp.557-560
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- 2003
Magnetorheological finishing(MRF) is a newly developed and recently commercialized for finishing optical components. The magnetorheological fluid consists of a water based suspension of carbonyl iron, nonmagnetic polishing abrasives, and small amounts of stabilizer. This magnetorheological fluid is pumped from conditioner on the rotating wheel and suctioned back to the conditioner, where it cooled to setpoint temperature and evaporative losses are replaced. This method could produce some problems in suction. So newly designed MRF tools is proposed in which MR fluid is not circulated and conditioned by the slurry. The new polishing mechanism is experimented. Measured surface roughness supports the validity of this mechanism.
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이승환;김욱배;민병권;이상조
- Proceedings of the Korean Society of Precision Engineering Conference
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- 2003.06a
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- pp.1873-1876
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- 2003
Magneto-rheological polishing is a new technology used in precision polishing. It utilizes magneto-rheological fluid. nonmagnetic polishing abrasive, aqueous carrier fluids in magnetic field to remove material from a part surface. Silicon micro channel as work piece is fixed in the slurry which is made of MR fluid and CeO$_2$(10 vol%) abrasive particles. And permanent magnet rotate in the slurry to transfers magnetic force to abrasive particles by increasing yield strength of MR fluid. so, the obtained bottom surface roughness of micro channel by experiment reduced to Ra 0.010 $\mu\textrm{m}$ Rmax 0.103 $\mu\textrm{m}$ and finwall surface roughness of micro channel reduced to Ra 0.018 $\mu\textrm{m}$ Rmax 0.468 $\mu\textrm{m}$. At optimum conditions of variables, the workpiece as silicon micro channel have about 24 times smaller surface roughness than before polishing.
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김영민;신영재;이응숙;이동주
- Proceedings of the Korean Society of Machine Tool Engineers Conference
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- 2003.10a
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- pp.324-328
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- 2003
The Magnetoeheological fluid has the properties that it's viscosity has dramastic changed under some magnetic fields therefore, Magnetorhlogical fluids has been used for micro polishing of the micro part( for example, a aspherical surface in a micro lens). The polishing process may appears as follows. A part rotating on the spindle is brought into contact with an Magnetorhological finshing(MRF) fluids which is set in motion by the moving wall. In the region where the part and the MRF fulid ate brought into contact, the applied magnetic field creates the conditions necessary for the material removal from the part surface. The material removal takes place in a certain region contacting the surface of the part which can be called the polishing spot or zone. The polishing mechanism of the material removal in the contact zone is considered as a process governed by the particularities of the Bingham flow in the contact zone. Resonable calculated and experimental magnitudes of the material removal rate f3r glass polishing lends support the validity of the approach.
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