• Title/Summary/Keyword: 입자 증발

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증발증착법에 의해 형성된 금속 입자를 이용한 단결정 실리콘의 습식식각

  • Go, Yeong-Hwan;Ju, Dong-Hyeok;Yu, Jae-Su
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.438-438
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    • 2012
  • 은(Ag) 또는 금(Au) 입자를 촉매로 이용하여 습식식각을 통해 선택적으로 짧은 시간동안 단결정 실리콘 웨이퍼의 표면을 텍스쳐링하여 반사방지막 특성을 효과적으로 얻을 수 있다. 일반적으로 금속입자는 주로 금속 이온이 포함된 용액이나, 전기증착법을 통해서 실리콘 웨이퍼 표면에 형성시켰지만, 금속입자의 크기와 분포를 조절하기 어려웠다. 하지만, 최근 진공장비를 이용하여 열증발증착법(thermal evaporation)과 급속열처리법(rapid thermal annealing)을 통해서 금속입자를 대면적으로 크기와 분포를 균일하게 조절할 수 있다. 이러한 현상은 열적 비젖음(thermal dewetting) 현상에 의해 실리콘 표면위에 증착된 금속 박막으로부터 나노입자로 형성할 수 있다. 본 연구에서는 실리콘 (100)기판위에 다양한 크기의 은 또는 금 나노입자를 형성시켜 식각용액에 짧은 시간동안 담그어 식각하여, 텍스쳐링 효과와 반사방지(antireflection) 특성을 분석하였다. 실험을 위해 각각 은 또는 금 박막을 열증발증착법을 이용하여 ~3-8 nm의 두께로 형성시켰으며, 급속가열장치를 이용하여 $500^{\circ}C$에서 5분 동안 열처리하였다. 그리고 탈이온수(de-ionized water)에 불화수소와 과산화수소가 혼합된 식각용액에 1-5분 동안 습식식각을 하였다. 각각의 텍스쳐링 된 샘플의 식각의 상태와 깊이를 관찰하기 위해 field emission scanning electron microscopy (FE-SEM)을 이용하여 측정하였으며, UV-vis-NIR spectrophotometer를 이용하여 300 nm에서 1,200 nm의 반사특성을 분석하였다. 또한 RCWA (rigorous coupled wave analysis) 시뮬레이션을 이용하여 텍스쳐링 된 기하학적구조에 대하여 반사방지막 특성을 이론적으로 분석하였다.

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Investigation and research trend and for SiC complex made by Si-vapor diffusion reaction on carbon surface (카본표면에서 Si 증기입자의 확산 반응에 의한 SiC 복합체형성 검토 및 연구동향)

  • Park, Jang-Sik;Hwang, Jeong-Tae
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2014.11a
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    • pp.195-195
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    • 2014
  • 탄화규소(SiC)의 복합체는 고온강도, 내식성, 내마모성, 내화학 특성, 열충격성 및 기계적 특성이 우수하며 제조공정으로 CVD 공정은 많이 연구되어져 있으나 비교적 간단한 구조로 우수한 특성을 얻을 수 Si 증발입자 확산방법에 대한 체계적인 연구가 수행되고 있지 않다. 본 논문에서는 Si 증발입자가 탄소표면에서 확산 반응으로 형성되는 SiC 복합체에 대한 검토 및 연구 개발 동향을 기술한다.

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Analysis of Pressure Drop and Heat Loss in Liquid Sodium Circulation Wick of AMTEC (AMTEC의 소디움액체 순환윅에서 압력손실 및 열손실해석)

  • Lee, Ki-Woo;Lee, Wook-Hyun;Rhi, Seok-Ho;Lee, Kye-Bock
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.36 no.9
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    • pp.953-960
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    • 2012
  • An AMTEC (alkali metal thermal electric converter) is a device that is used for the direct conversion of heat to electricity. Sodium is used as the working fluid, and its circulation is driven by a capillary wick. The wicks used for circulation include an evaporator wick, artery wick, and condenser wick, and each wick has a pressure drop because of the circulation of liquid and vapor. For the circulation of sodium, the capillary pressure of the evaporator wick must be greater than the total pressure drop in the wicks. In this study, the pressure drop in the evaporator wick, artery wick, and condenser wick and the heat loss from the evaporator to the condenser through the artery wick were analyzed for the design of a 100 W AMTEC prototype. It was found that a particle diameter of 10 ${\mu}m$ is suitable for the evaporator wick to maintain a capillary pressure greater than total pressure drop in the circulation loop.

Application of PIV technique to spray behavior characteristics study in evaporative field (증발 분무 거동특성 연구에 있어서 PIV 기법의 적용)

  • Yeom, J.K.
    • Journal of Power System Engineering
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    • v.15 no.3
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    • pp.5-11
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    • 2011
  • 디젤기관의 경우는 종래부터 직분식이 주류를 이루었고, 근래에는 분사압력의 고압화가 진행중이다. 분사압력의 고압화에 의해 연소효율의 향상 및 배출가스중의 입자상물질(PM:Particulate Matter)의 저감을 유도하고 있으나, 연소가스의 고온화로 인해 질소산화물(NOx:Nitrogen Oxides)은 증가한다. 따라서, 분사기간의 지연(Retard)이나 파일럿분사(Pilot injection)등의 혼합기제어에 의해 질소산화물의 저감을 꾀하고 있다. 이와 같이 디젤기관에 있어서도 혼합기 형성의 최적화에 의한 연소제어를 시도하는 수법이 중시되고 있고, 이를 위해서는 디젤분무 구조에 기초한 혼합기의 형성기구에 대한 규명이 매우 중요하다. 그러므로 본 연구에서는 보다 고도의 혼합기형성 제어를 위한 기초연구로서 고온 고압장에서의 증발디젤자유분무구조를 해석하였으며, 계측영역은 연료와 주위기체와의 혼합이 활발히 진행되는 분무의 하류영역으로 설정하고, 입자화상속도측정법(particle Image Velocimetry:PIV)을 이용한 분무의 유동해석을 기초로 증발 디젤분무의 구조 해석을 행하였다. 실험조건으로서 분사압력을 72MPa, 112MPa로 각각 변화시켰다.

Study on the Melting Point Depression of Tin Nanoparticles Manufactured by Modified Evaporation Method (수정된 증발법을 이용하여 제작된 주석 나노입자의 녹는점 강하에 관한 연구)

  • Kim, Hyun Jin;Beak, Il Kwon;Kim, Kyu Han;Jang, Seok Pil
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.38 no.8
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    • pp.695-700
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    • 2014
  • In the present study, the melting temperature depression of Sn nanoparticles manufactured using the modified evaporation method was investigated. For this purpose, a modified evaporation method with mass productivity was developed. Using the manufacturing process, Sn nanoparticles of 10 nm size was manufactured in benzyl alcohol solution to prevent oxidation. To examine the morphology and size distribution of the nanonoparticles, a transmission electron microscope was used. The melting temperature of the Sn nanoparticles was measured using a Differential scanning calorimetry (DSC) which can calculate the endothermic energy during the phase changing process and an X-ray photoelectron spectroscopy (XPS) used for observing the manufactured Sn nanoparticle compound. The melting temperature of the Sn nanoparticles was observed to be $129^{\circ}C$, which is $44^{\circ}C$ lower than that of the bulk material. Finally, the melting temperature was compared with the Gibbs Thomson and Lai's equations, which can predict the melting temperature according to the particle size. Based on the experimental results, the melting temperature of the Sn nanoparticles was found to match well with those recommended by the Lai's equation.

Preparation and Swelling Properties of Poly(potassium acrylate-co-acrylamide) Superabsorbent Particles (폴리(아크릴산 포타슘-co-아크릴아마이드) 고흡수성 입자의 제조 및 팽윤 특성)

  • 손오건;심상준;이동현;이영관;김지홍;김덕준
    • Polymer(Korea)
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    • v.28 no.1
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    • pp.18-23
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    • 2004
  • Superabsorbent poly(potassium acrylate-co-acrylamide)s were synthesized in particle form using inverse suspension polymerization technique. Mean diameter of the prepared polymer particles decreased from 300 to 50 $\mu\textrm{m}$ with increasing surfactant concentration. The dynamic and equilibrium swelling behaviors during water absorption and drying process were investigated by weight measurement. The swelling ratio of polymer particles in water changed according to not only polymer crosslinking density, but particle size, saline concentration of aqueous medium, and copolymer compositions. Water sorption amount was increased with decreasing particle size, crosslinking agent concentration, and ion concentration in bulk solution. Being different from the water sorption process, the drying process was not significantly affected by particle size, polymer composition, or crosslinking amount.

Effect of Heat-Treatment in Se Atmosphere on the Densification of Absorber Layer Using $Cu(In,\;Ga)Se_2$ Nanoparticles ($Cu(In,\;Ga)Se_2$ 나노입자을 이용한 광흡수층 치밀화에 따른 Se 분위기의 열처리 효과)

  • Yoon, Kyung-Hoon;Kim, Ki-Hyun;Ahn, Se-Jin;Ahn, Byung-Tae
    • 한국신재생에너지학회:학술대회논문집
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    • 2006.06a
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    • pp.210-213
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    • 2006
  • 나노입자를 이용하여 치밀한 $Cu(In,\;Ga)Se_2$ 태양전지용 광흡수층을 제조하기 위해 먼저, 콜로이달 방법으로 합성된 20nm이하의 CIGS 나노입자를 저가의 스프레이 법을 이용하여 CIGS 막을 제조하였다. 제조된 CIGS막을 two-zone RTP (rapid temperature Process) 방법으로 Se 분위기 안에서 열처리를 행하였다. 입자의 치밀화를 위해 기판의 온도, Se 증발온도와 수송가스의 유량을 조절하여 CIGS 입자성장을 행하였다. 그러나, Se의 증발온도가 높을수록 CIGS와 MO 박막 사이에서 $MoSe_2$ 층이 형성되었다. 형성된 $MoSe_2$층의 부피 팽창으로 인해 하부의 유리기판과 Mo층 사이에서 peeling off 현상이 발생했다. 이러한 Peeling off현상을 억제하면서 CIGS 나노입자 성장을 하기 위해, Se 공급을 빨리 할 수 있도록 Se의 증기압을 높였으며, 최적조건에서 급속 열처리 공정을 통해 CIGS 나노입자 성장과 치밀화를 위한 소결거동을 관찰하였다.

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Analysis of Drying Efficiency for Circulating and Falling Movements on Indirected Drying Process of Food Waste (음식물류폐기물 간접건조과정에서의 순환 및 낙하이동에 따른 건조효율 평가)

  • Kim, Byung Tae
    • Journal of the Korea Organic Resources Recycling Association
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    • v.20 no.4
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    • pp.106-117
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    • 2012
  • Indirected heating dryer is used as one of the food waste treatment technologies for the production of the drier material supplied to the recycling facilities or end user. This study investigated the effect on drying efficiency for the operation of rotating screw with the circulating and falling movements on indirected drying process of food waste. The screw operating condition showed higher drying efficiency despite of the shorter drying time compared to the screw non-operating condition. The moisture content decreased to 14.4% from the initial moisture content of 77.1% after drying 5 hours in the screw operating condition. On the other hand, in the screw non-operating condition, the moisture content decreased slightly to 35.6% after drying 16 hours. During the drying process, variations of the water evaporation rate and particle size showed different tendencies depending on the moisture content regions. In the higher moisture content region above the glue zone(moisture content of about 50%-60%), the particle size increased and the water evaporation rate reached the highest peak. In the range of glue zone, the particle size maximized while the water evaporation rate decreased sharply. In the lower moisture content region below the glue zone, the water evaporation rate and particle size both decreased at the same time. The particle size distribution was widely ranged from 25.0mm to 0.25mm in the screw operating condition while it was narrowly distributed in the screw non-operating condition from 25.0mm to 3.56mm, especially highly concentrated to 25.0mm. It was regarded that the hygroscopic, capillary and gravitational water evaporated more easily from the intra-particle during the circulating and falling movement caused by the rotating of the screw and the difference of the cohesional force of water within intra-particle depending on the moisture content regions. Comparing the effect of the circulating and falling movement on drying efficiency, the water evaporation rates per time and per weight of dry solid in the screw operating condition were higher about 364% and 356%, respectively, than those of the screw non-operating condition.

Characteristic of Water Pervaporation Using Hydrophilic Composite Membrane Containing Functional Nano Sized NaA zeolites (기능성 나노 제올라이트가 분산된 친수성 복합막 제조 및 탈수 투과증발 특성 연구)

  • Oh, Duckkyu;Lee, Yongtaek
    • Korean Chemical Engineering Research
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    • v.51 no.1
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    • pp.98-105
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    • 2013
  • The NaA zeolite particles were dispersed in a poly(vinyl alcohol) (PVA) matrix to prepare a composite membrane. The nano sized zeolite particles of NaA were synthesized in the laboratory and the mean size was approximately 60 nm. Pervaporation characteristics such as a permeation flux and a separation factor were investigated using the membrane as a function of the feed concentration from 0.01 to 0.05 mole fraction and the weight % of NaA particles between 0 wt% and 5 wt% in the membrane. Also, the micro sized particles of $5{\mu}m$ were dispersed in the membrane for a comparison purpose. When the ethanol concentration in the feed solution was 0.01 mole fraction, the flux of water significantly increased from $600g/m^2/hr$ to $2000g/m^2/hr$ as the content of the nano NaA particles in the membrane increased from 0 wt% to 5 wt%, while the NaA particles improved the separation factor from 1.5 to 7.9. When the flux of water through the membrane containing nano sized particles was roughly 15% increased compared to the micro sized particles, whereas the separation factor of water was found to be approximately 5% increased. It can be said that the role of the nano sized NaA particles is quite important since both the flux and the separation factor are strongly affected.