• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.232-232
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• 2012

반도체 공정에서 일반적으로 오염입자를 측정하는 방법은 테스트 웨이퍼를 ex-situ 방식인 surface scanner를 이용하여 분석하는 particle per wafer pass (PWP) 방식이 주를 이루고 있다. 이러한 오염입자는 반도체 수율에 결정적인 역할을 하는 것으로 알려져 있으며 반도체 선폭이 작아지면서 제어해야하는 오염입자의 크기도 작아지고 있다. 하지만, 현재 사용하는 PWP 방식은 실시간 분석이 불가능하기 때문에 즉각적인 대처가 불가능 하고 이는 수율향상에 도움이 되지 못하는 후처리 방식이다. 따라서 저압에서 오염입자를 실시간으로 측정할 수 있는 장비에 대한 요구가 늘어나고 있는 실정이다. 저압에서 나노입자를 측정할 수 있는 장비로 PBMS가 있다. PBMS는 electron gun을 이용하여 입자를 하전시킨 후 편향판을 이용하여 크기를 분류하고 Faraday cup으로 측정된 전류를 환산하여 입자의 농도를 측정하는 장비이다. 편향판에 의하여 Faraday cup으로 이동되는 입자들은 농도 차에 의한 확산현상이 발생한다. 본 연구에서는 Faraday cup 이동 시 발생하는 확산현상을 여러 크기의 Faraday cup과 polystyrene latex (PSL) 표준입자를 이용하여 분석하였다. Faraday cup을 고정 식이 아닌 이동 식으로 설계를 하여 축의 원점을 기준으로 이동시켜 가면서 입자 전류량을 측정하였으며, 이를 기준 (reference) Faraday cup의 측정량과 비교하여 효율을 계산하였다. PSL 표준 입자 100, 200 nm 크기에 대하여 cup의 크기를 바꿔 가면서 각각 평가 하였다. 그 결과 입자의 크기가 작을 수록 더 넓은 구간으로 확산되었고 크기가 작은 Faraday cup의 경우에 정밀한 결과를 얻을 수 있었다. 본 연구를 통하여 편향판을 지나면서 발생하는 입자의 확산현상에 대한 정량적 평가를 수행할 수 있었으며, 추후 PBMS 설계 시 Faraday cup 크기를 결정하고 Faraday cup array 기술을 적용하는데 유용하게 활용 될 수 있을 것으로 기대 된다.

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2002.11a
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• pp.314-315
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• 2002

대기중에는 다양한 크기와 모양, 그리고 화학성분을 가진 입자들이 존재한다. 이러한 입자들은 발생원이 다양하고 대기중에 존재하면서 광화학적인 변화를 거쳐 형성되기도 한다. 입자의 화학조성과 크기는 발생원을 구분하기 위한 일반적인 척도로 쓰이고 있다. 대기 에어러솔의 크기분포특성은 에어러솔의 변화 요소인 발생원과 제거 그리고 동역학적인 과정을 이해하는데 중요한 역할을 한다. (중략)

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2002.11a
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• pp.434-435
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• 2002

에어로졸 입자의 크기 분포를 측정하는: 방법은 여러 가지가 있다. 이중 광학 입자계수기(Optical Particle Counter)는 직경 0.3-25$\mu\textrm{m}$의 입자의 산란광의 강도를 측정하여 입자의 크기별 개수를 측정하는 기기로 청정지역의 대기 중 부유하는 입자의 측정에 널리 사용되고 있다 (전영신 등, 1999). 본 연구에서는 기상청 기상연구소에서 측정한 광i부 입자계수기(HYAC/ROYCO 5230)의 측정자료를 이용하여 2001년도 1년간 서울의 대기 에어로졸의 특성과 경향을 분석하였다. 측정결과는 대기환경월보(환경부, 2001) (중략)

• Analytical Science and Technology
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• v.28 no.1
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• pp.33-39
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• 2015

CdS-QD particles are a nano-sized semiconducting crystal that emits light. Their optical properties show great potential in many areas of applications such as disease-diagnostic reagents, optical technologies, media industries and solar cells. The wavelength of emitting light depends on the particle size and thus the quality control of CdS-QD particle requires accurate determination of the size distribution. In this study, CdS-QD particles were synthesized by a simple ${\gamma}$-ray irradiation method. As a particle stabilizer polyvinyl pyrrolidone (PVP) were added. In order to determine the size and size distribution of the CdS-QD particles, sedimentation field-flow fractionation (SdFFF) was employed. Effects of carious parameters including the the flow rate, external field strength, and field programming conditions were investigated to optimize SdFFF for analysis of CdS-QD particles. The Transmission electron microscopy (TEM) analysis show the primary single particle size was ~4 nm, TEM images indicate that the primarty particles were aggregated to form secondary particles having the mean size of about 159 nm. As the concentration of the stabilizer increases, the particle size tends to decrease. Mean size determined by SdFFF, TEM, and dynamic light scattering (DLS) were 126, 159, and 152 nm, respectively. Results showed SdFFF may become a useful tool for determination of the size and its distribution of various types of inorganic particles.

• Journal of Bio-Environment Control
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• v.6 no.3
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• pp.183-189
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• 1997

This study was performed to Investigate size of droplet sprinkled from mini-sprinkler. Twelve different kinds of the sprinkler having various structures and sizes of nozzle orifices were selected and tested. Diameters of the droplet reached at several distances from a sprinkler were measured by a machine vision system and the volume median diameters (VMM) were determined statistically. The size of droplet was not affected much by the size of nozzle orifice of a sprinkler but was rather more affected by structure of the sprinkler, especially by the shape of spreader of the sprinkler. Experiment of varying pressure of sprinkling water validated that the size of droplet was inversely proportional to water pressure powered by 1/3. Hence the size of droplet at any water pressure could be easily estimated from experimental data. The size of droplet increased as travel distance of the droplet increases in a relationship of and order function. The size of droplet of the tested sprinkler were in the ranges of 100-300fm within 1m of droplet travel distance, 230~470${\mu}{\textrm}{m}$ within 1~2m of droplet travel distance and 300~770${\mu}{\textrm}{m}$ within 2~3m of droplet travel distance.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.9
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• pp.1013-1018
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• 2014

Magnetic Abrasive Polishing (MAP) process is a nontraditional method for polishing the surface of workpiece by using the flexibility of tool. At present, a mixture of polishing abrasives and ferrous particles is used as the tool in the MAP process. Previously, an experiment was conducted with different sizes of polishing abrasives with an aim to improve the polishing accuracy. However, the sizes of ferrous particles are also expected to have a dominant effect on the process, warranting a study on the effect of the size of ferrous iron particles. In this study, an experiment was conducted using three different sizes of ferrous particles. Iron powder of average diameters 8, 78 and $250{\mu}m$ was used as ferrous particles. The effect of each ferrous particle size was evaluated by comparing the improvements in surface roughness. The particle size of a ferrous iron was found to play a significant role in MAP and particles of $78{\mu}m$ facilitated the best improvement in surface roughness.

• Journal of the Korean GEO-environmental Society
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• v.16 no.10
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• pp.33-38
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• 2015

This study conducted experimental observations of the settling velocity of a coarse particle in water varying material type and particle size and compared the results with preexisting empirical equations. Three types of materials, which are polyacetal, glass and steel, were used in this study and the diameter of particle ranged from 1 mm to 20 mm. Experiment results showed that the settling velocity of coarse particle had a significant difference from Stokes equation which is known applicable for a fine particle smaller than $50{\mu}m$. In addition, the observed particle velocity showed a significant difference when compared with other empirical equations, which was proposed for estimating the settling velocity of a particle regardless of particle size, depending on the material type and particle size. The results from experimental observations indicated that the settling velocity of a coarse particle was relatively in smaller difference to other empirical equations for the particle size smaller than 3 mm, but as the size increased the difference in the settling velocity also increased. This study clearly showed that the settling velocity of a coarse particle velocity can be significantly different depending on particle size and density and the empirical equations may not reliably estimate the settling velocity of a coarse particle so that they should not be used as it is and a verification of them is necessarily before any use. The study results would provide a useful information for a better understanding of settling velocity of a particle in water.

• KOREAN JOURNAL OF CROP SCIENCE
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• v.57 no.1
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• pp.41-50
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• 2012

The study was carried out to analyze the relationship between analysis of antioxidant activity and the level of functional components according to particle size of corn silk. Particle size was classified into 5 groups. By particle size distribution and color difference, the total phenol content and DPPH radical scavenging activity were observed. The particle sizes of corn silk were $199.17{\mu}m$, $178.27{\mu}m$, $85.48{\mu}m$, $27.4{\mu}m$ and $20.97{\mu}m$, respectively. The lightness of colored pigments was increased when the particle size was decreased. The contents of free sugar (fructose, glucose, galactose, sucrose, and maltose) of corn silk were analyzed using a HPLC. The total phenol contents by the particle sizes of corn silk were 2.01 mg/g, 2.02 mg/g, 2.06 mg/g, 2.26 mg/g and 2.26 mg/g, respectively. DPPH radical scavenging activities of samples were 21.00%, 21.75%, 22.90%, 24.35% and 23.67%, respectively. Antioxidative activities of Trolox and Fe(II) in corn silk were measured by ferric reducing antioxidant power (FRAP) assay and Trolox equivalent antioxidant capacity (TEAC) assay. TEAC values of samples were $2.36{\mu}mol$ TE / g dw, $2.81{\mu}mol$ TE / g dw, $3.20{\mu}mol$ TE / g dw, $3.36{\mu}mol$ TE / g dw, and $3.44{\mu}mol$ TE / g dw, respectively. FRAP values of samples were $11.67{\mu}mol$ Fe(II) / g dw, $12.80{\mu}mol$ Fe(II) / g dw, $13.43{\mu}mol$ Fe(II) / g dw, $13.85{\mu}mol$ Fe(II) / g dw and $15.95{\mu}mol$ Fe(II) / g dw, respectively. Total phenolic content and antioxidantive activities based on FRAP assay and TEAC assay were increased with decreasing particle size. In addition, DPPH radical scavenging activity was also increased. A significant correlation was also noted between DPPH radical scavenging activities and the content of phenolic compounds.

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2000.11a
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• pp.429-431
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• 2000

에어로졸의 물리적, 화학적 특성은 주로 입자의 크기 분포와 밀접한 관련이 있다. 따라서 시간에 따른 입자의 크기분포의 변화를 아는 것은 중요한 문제로서, 입자에 작용하는 중력이나, 전기적인 힘, 입자간의 상대속도 등에 의해 입자의 크기분포는 달라질 수가 있다. 이러한 입자간의 상호작용으로 인해 서로 충돌하여 합쳐지는 것으로 이를 응집(Coagulation)이라 한다. (M.M.R. Williams, 1988) (중략)

• Korean Chemical Engineering Research
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• v.60 no.4
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• pp.613-619
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• 2022

The extended Maxwell-Wagner polarization model is employed to describe the ER(Electrorheological) behavior of bi-dispersed ER suspensions, and solutions to the equation of motion are obtained by dynamic simulation. Under the same particle volume fraction, it is found that the dynamic yield stresses of uniform size suspensions do not depend on the particle size. Compared with uniform size suspensions, the dynamic yield stress is reduced for ER fluids consisting of two kinds of particles with different sizes. Compared with the dynamic yield stress behavior, for ${\dot{\gamma}}^*$≧0.01 the shear stress shows different behaviors depending on the particle sizes and the raio of different size particles. The simulation results show the nonlinear ER behavior (∆_𝛕 ∝ Eⁿ, n ≈ 1.55) of the conducting particle ER suspensions.