• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.303-303
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• 2013

표면에 부착된 나노/마이크로 입자는 다양한 분야에서 오염물질로 작용한다. 특히 형상이 미세하고 공정 단계가 복잡한 반도체 및 디스플레이 등의 전자 소자 공정에서 미치는 영향이 크다. 따라서 입자상 오염물질의 제거에 관하여 상용화된 습식 세정 방법이 다양하게 존재하지만 표면 손상, 화학 반응, 부산물, 세정 효율 등 여러 가지 문제점이 있어 새로운 세정 방법이 요구된다. 이에 건식 세정 방법, 그 중에서도 입자의 충돌을 통해 제거하는 방법인 에어로졸 세정, 필렛 세정 등이 개발되었으나 마이크로 크기로 생성되는 입자로 인하여 형상의 손상이 크다. 따라서 본 연구에서는 나노 단위로 기체/고체 혼합물만 생성하여 세정하는 가스 클러스터 세정 방법을 이용하여 이러한 문제점을 해결하고자 하였다. 클러스터 세정 장비를 이용한 표면 처리는 충돌에 의한 제거에 기반한다. 따라서 생성 및 가속되는 클러스터로부터 대상으로 전달되는 운동량의 정도가 세정 특성에 영향을 미치며 이는 생성되는 클러스터의 크기에 종속적이다. 생성 클러스터의 크기 분포는 분사 거리, 유량, 분사 각도, 노즐 냉각 온도 등의 변수에 관한 함수이다. 따라서 본 연구에서는 $CO_2$ 클러스터를 이용한 세정 특성을 정의 및 제어하기 위하여 생성되는 클러스터 특성에 관하여 이론적, 수치 해석적, 실험적 연구를 수행하였다. 먼저, $CO_2$의 물리적 특성 및 이를 이용한 특정 크기 오염 물질을 제거하는데 요구되는 임계 클러스터 크기 계산을 이론적으로 구하였다. 이는 오염물질의 부착력과 클러스터의 운동량 전달에 의한 제거력의 비교를 통해 이루어졌다. 두 번째로 클러스터 크기분포를 수치 해석적으로 예측하기 위하여 각 조건에 대하여 유동해석을 수행하고 이를 통해 구해진 노즐 내 기체의 냉각 속도를 GDE (General Dynamic Equation) 계산에 대입하여 구하였다. 마지막으로 PBMS(Particle Beam Mass Spectrometer)를 이용하여 실험적으로 클러스터 크기분포를 각 조건에 대하여 구할 수 있었다. 또한 크기 분포 경향에 대한 간접적 확인을 위하여 포토레지스트가 코팅된 웨이퍼에 클러스터의 충격으로 생성된 크레이터 크기의 경향을 분석하였다. 이와 같은 방법에 의하여 생성되는 클러스터는 노즐의 유량 증가, 온도 상승에 각각 비례하여 작아지는 것을 확인할 수 있었다.

• Journal of the Korean Society for Marine Environment & Energy
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• v.11 no.1
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• pp.13-23
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• 2008

In coastal region, eutrophication, Do deficit and red tide are frequently occurred by influx of fresh water. When the fresh water containing pollutants is discharged into the sea, the surrounding water is contaminated by dispersion of freshwater flowing into coastal waters. The prediction and analysis about the dispersion process of the discharged fresh water should be conducted. A modeling system using GUI was developed to simulate hydrodynamic flow and fresh water dispersion in coastal waters and to analyze the results efficiently. The modeling module of the system includes a tide model using a finite element method and a fresh water dispersion model using a particle-tracking method. This system was applied to predict the tidal currents and fresh water dispersion in Mokpo coastal zone. To verify accuracy of the hydrodynamic model, the simulation results were compared with observed sea level and time variations of tidal currents showing a good agreement. The fresh water dispersion was verified with observed salinity distribution. The dispersion model also was verified with analytic solutions with advection-diffusion problems in 1-dimensional and 2-dimensional simple domain. The system is operated on GUI environment, to ease the model handling such as inputting data and displaying results. Therefore, anyone can use the system conveniently and observe easily and accurately the simulation results by using graphic functions included in the system. This system can be used widely to decrease the environmental disaster induced by inflow of fresh water into coastal waters.

• Tunnel and Underground Space
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• v.31 no.5
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• pp.309-332
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• 2021

Natural barrier systems surrounding the geological repository for the high-level radioactive waste should guarantee the hydraulic performance for preventing or delaying the leakage of radionuclide. In the case of the behavior of a crystalline rock, the hydraulic performance tends to be decided by the existence of discontinuities, so the coupled hydro-mechanical(HM) processes on the discontinuities should be characterized. The discontinuum modelling can describe the complicated behavior of discontinuities including creation, propagation, deformation and slip, so it is appropriate to model the behavior of a crystalline rock. This paper investigated the coupled HM processes in discontinuum modelling such as UDEC, 3DEC, PFC, DDA, FRACOD and TOUGH-UDEC. Block-based discontinuum methods tend to describe the HM processes based on the fluid flow through the discontinuities, and some methods are combined with another numerical tool specialized in hydraulic analysis. Particle-based discontinuum modelling describes the overall HM processes based on the fluid flow among the particles. The discontinuum methods that are currently available have limitations: exclusive simulations for two-dimension, low hydraulic simulation efficiency, fracture-dominated fluid flow and simplified hydraulic analysis, so it could be improper to the modelling the geological repository. Based on the concepts of various discontinuum modelling compiled in this paper, the advanced numerical tools for describing the accurate coupled HM processes of the deep geological repository should be developed.

• Journal of the Korean Magnetics Society
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• v.13 no.1
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• pp.41-46
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• 2003

This study deals with the Benard flow of magnetic fluids in a rectangular cavity. The ratio of height to length of the cavity is 1 : 4 and the bottom of the cavity is assumed to be a heating face while the other sides are to be cooling faces. When magnetic field was equally impressed, considering the internal rotation of the elementary ferromagnetic particle, we found the following result from the numerical analysis of the GSMAC algorithm applied to the equations for the magnetic fluid. Benard flow was controled by the intensity and the direction of magnetic fields, and a critical point was appeared when the magnetic field near H=-7000 was applied.

• Korean Chemical Engineering Research
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• v.46 no.1
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• pp.56-62
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• 2008

Characteristics of heat transfer were investigated in a three-phase swirling fluidized bed whose diameter was 0.102 m and 2.5 m in height. Effects of gas and liquid velocities, particle size and liquid swirling ratio ($R_S$) on the immersed heater-to-bed overall heat transfer coefficient were examined. The heat transfer characteristics between the immersed heater and the bed was well analyzed by means of phase space portraits and Kolmogorov entropy(K) of the time series of temperature difference fluctuations. The phase space portraits of temperature difference fluctuations became stable and periodic and the value of Kolmogorov entropy tended to decrease with increasing the value of liquid swirling ratio from 0.1 to 0.4. The value of Kolmogorov entropy exhibited its minimum with increasing liquid swirling ratio. The value of overall heat transfer coefficient (h) showed its maximum with the variation of liquid velocity, bed porosity or liquid swirling ratio, but it increased with increasing gas velocity and particle size. The value of K exhibited its maximum at the liquid velocity at which the h value attained its maximum. The overall heat transfer coefficient and Kolmogorov entropy were well correlated in terms of dimensionless groups and operating variables.

• Journal of the Korean Geotechnical Society
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• v.27 no.6
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• pp.49-61
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• 2011

This paper presents the applicability of rheological models for describing fine-laden debris flows and analyzes the flow characteristics as a function of grain size. Two types of soil samples were used: (1) clayey soils - Mediterranean Sea clays and (2) silty soils - iron ore tailings from Newfoundland, Canada. Clayey soil samples show a typical shear thinning behavior but silty soil samples exhibit the transition from shear thinning to the Bingham fluid as shear rate is increased. It may be due to the fact that the determination of yield stress and plastic viscosity is strongly dependent upon interstructrual interaction and strength evolution between soil particles. So grain size effect produces different flow curves. For modeling debris flows that are mainly composed of fine-grained sediments (<0.075 mm), we need the yield stress and plastic viscosity to mimic the flow patterns like shape of deposition, thickness, length of debris flow, and so on. These values correlate with the liquidity index. Thus one can estimate the debris flow mobility if one can measure the physical properties.

• Journal of Convergence for Information Technology
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• v.9 no.8
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• pp.155-163
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• 2019

Laminar mixed convection of a nanofluid consists of water and $Al_2O_3$ in a horizontal circular tube has been studied numerically. Two-phase mixture model has been used to investigate hydrodynamic and thermal behaviors of the nanofluid with variables physical properties. Three dimensional Navier-Stokes, energy and volume fraction equations have been discretized using the finite volume method. The Brownian motions of nanoparticles have been considered to determine the thermal conductivity and dynamic viscosity of $Al_2O_3$-Water nanofluid, which depend on temperature. The calculated results show good agreement with the previous numerical data. Results show that in a given Reynolds number (Re), increasing solid nanoparticles volume fraction and Richardson number (Ri) increases the convective heat transfer coefficient and wall shear stress.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.1
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• pp.77-82
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• 2010

Our study aims to understand the flow of liquid in an open-top rectangular microchannel that can be used in micro total analysis systems ($\mu$-TAS) because it has advantages in terms of light transmission and energy efficiency. We measured the liquid velocity using particle tracking technique and conducted a simulation with computational fluid dynamics by altering the area of channel cross section and channel length for the capillary-driven flow in the open-top rectangular microchannel. When liquid water drops to an entrance of the fabricated microchannel with a height of 20 μm and a width of 20 ${\mu}m$, it flows along the microchannel by only capillary force. In the wetting behavior of the liquid, important parameters of this flow are channel size, contact angle and liquid properties such as surface tension and viscosity, which are used to control the flow of liquid in the microchannel.

• Tunnel and Underground Space
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• v.23 no.6
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• pp.493-505
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• 2013

This numerical study investigates seismicity and fault slip induced by fluid injection in deep geothermal reservoir with pre-existing fractures and fault. Particle Flow Code 2D is used with additionally implemented hydro-mechanical coupled fluid flow algorithm and acoustic emission moment tensor inversion algorithm. The output of the model includes spatio-temporal evolution of induced seismicity (hypocenter locations and magnitudes) and fault deformation (failure and slip) in relation to fluid pressure distribution. The model is applied to a case of fluid injection with constant rates changing in three steps using different fluid characters, i.e. the viscosity, and different injection locations. In fractured reservoir, spatio-temporal distribution of the induced seismicity differs significantly depending on the viscosity of the fracturing fluid. In a fractured reservoir, injection of low viscosity fluid results in larger volume of induced seismicity cloud as the fluid can migrate easily to the reservoir and cause large number and magnitude of induced seismicity in the post-shut-in period. In a faulted reservoir, fault deformation (co-seismic failure and aseismic slip) can occur by a small perturbation of fracturing fluid (<0.1 MPa) can be induced when the injection location is set close to the fault. The presented numerical model technique can practically be used in geothermal industry to predict the induced seismicity pattern and magnitude distribution resulting from hydraulic stimulation of geothermal reservoirs prior to actual injection operation.

• Journal of computational fluids engineering
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• v.20 no.2
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• pp.46-51
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• 2015

In this paper, we have developed numerical model for particulated flow through narrow slit using Eulerian-Granular method. Commercial software (FLUENT) was utilized as simulation tool and main focus was to identify the effect from various numerical options for modeling of solid particles as continuos phase in granular flow. Gidaspow model was chosen as basic model for solid viscosity and drag model. And lun-et-al model was used as solid pressure and radial distribution model, respectively. Several other model options in FLUENT were tested considering the cross related effect. Mass flow rate of the particulate through the slit was measured to compare. Due to the high volume density of the stacked particulates above the slit, effect from various numerical options were not significant. The numerical results from basic model were also compared with experimental results and showed very good agreement. The effects from the characteristics of particles such as diameter, angle of internal friction, and collision coefficient were also analyzed for future design of velocity resistance layer in solar thermal absorber. Angle of internal friction was found to be the dominat variable for the particle mass flow rate considerably. More defined 3D model along with energy equation for complete solar thermal absorber design is currently underway.