• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.209-209
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• 2011

플라즈마 공정에 있어 챔버 및 웨이퍼의 표면 상태변화는 공정 결과에 큰 영향을 끼치게 된다. 챔버 표면에 대한 연구는 많이 진행되어 있지만 대부분의 연구가 챔버 표면에서 일어나는 화학적 반응에 초점을 맞추고 있다. 본 연구에서는 플라즈마 상태 변화에 따른 챔버 표면물질의 전기적 특성 변화를 관찰하였다. 프로브 표면에 Al2O3로 코팅을 하고 플라즈마에 삽입 후 AC 하모닉법을 이용하여 실시간으로 표면의 축전용량을 측정하였다. 그 결과 표면의 축전용량은 플라즈마에 인가한 전력과 표면이 플라즈마에 노출된 시간에 따라 변하는 것이 관찰되었다. 플라즈마에 인가된 전력이 증가되면 처음에는 급격이 축전용량이 증가하였고, 그 후 시간이 지날수록 천천히 수렴되었다. 유전물질의 축전용량은 그 물질의 온도와 연관이 있다. 실험 결과로 미루어 보았을 때, 플라즈마에서의 표면의 축전용량의 변화는 플라즈마로부터 표면으로의 열전달에 의한 표면의 온도 변화에 의한 것으로 이해할 수 있다. 특히, 쉬스에서 가속되는 이온의 포격에 의해 표면 격자가 크게 진동하면서서 일반적인 온도 변화에 의한 축전용량의 변화보다 더 큰 변화가 일어난 것으로 추정된다. 공정에 사용되는 많은 챔버의 표면이나 전극의 표면은 유전체로 코팅되어 있다. 이 유전체의 특성이 온도에 의해 변하게 되면 챔버의 전기적인 특성이 변하게 되어 임피던스 매칭 조건에 변화를 가져온다. 그 결과 플라즈마의 특성도 바뀌게 되어 공정 결과에 영향을 미치게 된다. 그러므로 챔버 표면의 유전특성을 관찰하고 제어하는 것이 플라즈마의 특성을 유지시키는데 중요하다고 할 수 있다.

• Journal of Sensor Science and Technology
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• v.8 no.2
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• pp.108-114
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• 1999

Surface acoustic wave (SAW) device is very attractive for gas sensor applications because of their small size, low cost, high sensitivity, and good reliability. A dual delay line surface acoustic wave $NO_2$ gas sensors have been designed and fabricated on the $LiTaO_3$ piezoelectric single crystal substrate. The capacitance of the fabricated IDTs was 326.34pF at the frequency of 79.3MHz. The maximum reflection loss of the impedence-matched IDTs was -16.74dB at the frequency of 79.3MHz. The SAW oscillator was constructed and the stable oscillation was obtained by controlling the gain of rf amplifier properly. The oscillation frequency shift of the SAW oscillator to the $NO_2$ gas was 28Hz/ppm.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.37 no.2C
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• pp.168-172
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• 2012

An UHF RFID tag is designed and fabricated using the national code in a bar-code with conductive ink. The bar-code sample was taken from a general bar-code from a general box. The conductivity of the conductive ink was measured, and the measured conductivity was used for the simulation tool to design the printed bar-code shape tag antenna. The tag antenna was fabricated using T-matching to reduce the size of the tag, and the bar-code tag antenna is recognized by both a general bar-code reader and an UHF RFID reader. The input reflection coefficient characteristic, the reading range pattern and the reading rate of the tag antenna are measured.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.47 no.8
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• pp.36-46
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• 2010

In multi-GHz RF ICs and high-speed digital interfaces, ESD protection devices introduce considerable parasitic capacitance and resistance to inputs and outputs, thereby degrading the RF performance, such as input/output matching, gain, and noise figure. In this paper, the impact of ESD protection devices on the performance of RF ICs is investigated and design methodologies to minimize this impact are discussed. With RF and ESD test results, the 'RF/ESD co-design' method is discussed and compared to the conventional RF ESD protection method which focuses on minimizing the device size.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.9 no.5
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• pp.614-620
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• 1998

In this paper, we analyze theoritically the propagation and radiation characteristics for elliptical corrugated waveguides. The solutions of wave equations in an elliptic cylinder system are obtained in terms of Mathieu functions of 1st and 2nd kind. The electromagnetic fields in the elliptical corrugated waveguide can be represented by series and products of angular and radial Mathieu functions. By using impedence matching at the boundary between the inner region and the slot region, characteristic equations are derived. Then the characteristic equation is solved for $HE_{11}$ mode which is dominant mode in the elliptical corrugated waveguide and the fields in the aperture is calculated. And the propagation pattern for the elliptical corrugated waveguides is calculated through the field equivalence principle.

• 전자공학회논문지 IE
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• v.47 no.1
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• pp.1-5
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• 2010

This paper presents new results of the impact of gate structure on hot-carrier-induced performance degradation in SOI low noise amplifier. Circuit simulations were carried out using the measured S-parameters of H--gate and T-gate SOI MOSFETs and Agilent's Advanced Design System (ADS) to compare the performance of H-gate LNA and T-gate LNA before and after stress. We will discuss the figure of merit for the characterization of low noise amplifier in terms of impedance matching (S11), noise figure, and gain as well as the relation between device degradation and performance degradation of LNA.

• The Journal of The Korea Institute of Intelligent Transport Systems
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• v.13 no.2
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• pp.50-56
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• 2014

This paper describes the design, fabrication, and measurement of a 4-port femtocell MIMO antenna for LTE 700MHz(Band12, 13, 14, 17, 28, 44) applications. Based on microstrip patch antenna, an impedance matching is achieved by short pin. In order to obtain sufficient bandwidth and isolation between antenna elements in a limited dimension, a cross decoupler is used. With a Voltage Standing Wave Ratio (VSWR)${\leq}2$, the measured result of the fabricated antenna provides 105MHz(0.698~0.803MHZ) bandwidth and shows the gain with 1.97dBi and isolation above 13dB. As one of the key parameters for MIMO performance evaluation, correlation coefficient of MIMO is achieved within 0.2.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.27 no.4
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• pp.399-402
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• 2016

We propose a thin electromagnetic wave absorber using varactor diodes combined with intentionally introduced multiple slits, which enables continuous sweep of an absorption frequency band throughout relatively wide frequencies. The absorption frequency range of conventional electrically tunable absorbers has been restricted by high capacitance of varactor diodes. In order to overcome the problem, we introduce parasitic capacitance and connect them with varactors in series, which reduces the total capacitance dramatically. As a result, we can raise the operating absorption frequency up to the X-band region. Moreover, we can also control the operating frequencies by modifying the number of slits with little change in an entire frequency sweep range. Good agreement between simulated and measured results show the validity of our proposal.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.20 no.6
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• pp.43-48
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• 2006

In this paper, the rectenna converting 2.45[GHz] microwave into DC power is designed and fabricated for wireless power transmission using microwave and the methode for impedance matching and tuning are proposed in order to maximize RF-DC conversion efficiency. The fabricated rectenna can be easily tuned by using a broad open stub and has the RF-DC conversion efficiency up to 59[%] when the 5[dBm] input power is applied. The 2.2[V], 1.5[mW] DC level, in the 1[m] distance between the transmitter and the receiver can be obtained and this value is avaliable in the small power digital system.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2010.05a
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• pp.540-543
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• 2010

POWER PC series are common to the Central Processing Unit for Military Single Board Computer. Among them, G4 group, which contains the 74xx series supported by Freescale manufacturer is mainly used in the Military applications. We focus on the Interface between memory and controller. PCB stacking method, component routing, impedance matching and harsh environment for Military spec are the main constraints for implementation. Also, we developed memory as a module for the consideration of Military environments. The overall type of SBC should be designed by the form of 6U VME or 3U VME.