• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.503-504
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• 2006

Determination of elastic properties of nano-scale materials using nano-indentation tests is well established, but that of plastic properties is not yet clear. This paper presents a method to extract plastic properties from nano-indentation test, together with results from detailed elastic-plastic FE analysis. It shows that the plastic properties determined from this method are not unique, in the sense that a number of different plastic properties can give the same load-displacement response from nano-indentation test. possible ways to overcome such problems are discussed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.333-336
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• 2002

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numberical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic restoration and bur was proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1-l0nm. The result of the investigation will be applied to the fabrication of the hyper-fine pattern and mold.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.10 s.175
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• pp.167-173
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• 2005

The Berkovich nano-indentation is an indentation test method analyzing mechanical properties of materials such as hardness and elastic modulus. The length scale of the penetration is measured in nanometers. Therefore, this method becomes widely useful for analyzing the mechanical property of thin film which can not be measured before. In this paper, comparing two results of the load-displacement curve obtained by the Berkovich nano-indentation and the 3-D finite element analysis, it was confirmed that the 3-D finite element analysis is useful. The phenomenon of pile-up and sink-in due to material properties was discussed by the finite element analysis.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.311-311
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• 2012

Boron carbide (B-C) 박막은 높은 경도, 열적 안전성, 화학적 안전성이 우수한 하드 코팅 소재로 사용되고 있다. 우수한 특성을 가지는 B-C 박막에 대한 연구는 B4C 비전도성 타겟을 이용하여 RF Sputtering 법으로 증착 공정변수에 대해서 박막의 물성에 관해 일부 연구자들이 진행하였으나, Pulsed dc margnetron sputtering 법으로 증착 공정변수에 대한 물성의 연구는 미진하였다. 반면에, DLC 박막은 우수한 특성을 가지는 하드 코팅 소재이나 400도 이상에서는 내열성이 떨어지는 단점을 가지고 있다. 연구에서는 B-C 박막의 내열성이 우수한 특성을 이용하여 DLC 박막의 내열성을 높이기 위한 목적으로 B-C 박막과 DLC 박막을 다층막으로 제조함으로서 DLC 박막을 구조적으로 안정화를 시키고자 하였다. 그리고 비전도성 B4C 타겟으로 Pulsed dc 마그네트론 스퍼터링법을 이용하여 증착기술을 개발하기 위해서 공정압력과 인가전력에 따른 B-C 박막을 제조하여 그 물성을 조사하였고, B-C/DLC 다층막을 제조하여 DLC 박막의 내열성을 증가시키고자 하였다. B-C 박막과 B-C/DLC 다층막의 경도와 탄성율은 나노인덴테이션과 마이크로 비커스를 이용하였으며, 박막의 성장구조와 박막의 구조를 조사하기 위해 SEM과 FTIR 및 XRD 을 이용하여 측정하였다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2014.11a
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• pp.53-53
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• 2014

아연-마그네슘 합금은 뛰어난 내식성으로 최근 코팅소재로 가장 많이 사용되는 아연 도금을 대체할 수 있는 재료로서 주목받고 있다. 특히 PVD 방식을 통해 도금강판을 제조할 경우 도금층의 두께 제어가 용이하여 아연의 사용량을 저감할 수 있다. 그러나 이러한 PVD 방식을 통해 제조된 아연-마그네슘 도금강판을 사용하기 위해서는 내식성 이외에도 일정수준의 기계적 특성 확보가 중요하다. 본 연구에서는 마그네슘 함량을 달리하여 제조된 아연-마그네슘 도금강판을 대상으로 XRD 분석, 나노인덴테이션 시험을 실시하여, 아연-마그네슘 도금강판 도금층의 기계적 특성에 미치는 상(Phase)의 영향을 분석하였다.

• Transactions of Materials Processing
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• v.13 no.8
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• pp.731-737
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• 2004

Mechanical properties such as Young's modulus and hardness of thin film in coated steel are difficult to determine by nano-indentation from the conventional analysis using the load-displacement curve. Therefore, an analysis of the nano-indentation loading-unloading curve was used to determine the Young's modulus, hardness. A new method is recently being developed for elastic-plastic properties of materials from nano-indentation. Elastic modulus of the thin films shows relatively small influence whereas yield strength is found to have significant effect on measured data. The load-displacement curves of material tested with a Berkovich indenter and nano-indentation continuous stiffness method is used to measure the modulus and hardness through thin films, and then these are computed using the analysis procedure. The developed neural networks apply also to obtain reliable mechanical properties.

• Transactions of Materials Processing
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• v.12 no.4
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• pp.382-387
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• 2003

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behaviors of the materials during indentation were studied with numerical method by ABAQUS S/W. Brittle materials (Si, Pyrex glass 7740) were used as specimens, and forming conditions to reduce the elastic recovery and pile-up were proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1-10nm. Comparisons between the experimental data and numerical result demonstrated that the finite element approach is capable of reproducing the loading-unloading behavior of a nanoindentation test.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.246-251
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• 2004

Nano-indentation is used for measuring mechanical properties of thin films such as elastic modulus and hardness. For ductile materials, pile-up around the indenter causes the calculation of inaccurate projected contact area. This phenomenon was found by measurement of indentation shape using an atomic force microscope. In present study finite element analysis of nano-indentation was performed to compensate the effects of pile-up on the contact area. The result of finite element analysis was compared with that of nano-indentation for a ductile material. The analysis has demonstrated that the true contact area is greater than that calculated by nano-indentation. It is verified that the consideration of the effects of pile-up in nanoindentation for ductile materials using the finite element method is reasonable.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.6
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• pp.145-152
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• 2004

Depth-sensing indentation is wifely used for evaluation of mechanical properties of thin films. It is generally accepted that the most significant source of uncertainty in nanoindentation measurement is the geometry of the indenter tip. Therefore the successful application of the technique requires accurate calibration of the indenter tip geometry. The direct measurement of geometry of a Berkovich indenter was determined using a atomic force microscope. The indentation geometrical calibration of contact area was performed by analyzing the indenter tip profile. The equations of area functions were proposed for nanoscale thin films..

• Journal of the Korean Society for Precision Engineering
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• v.21 no.3
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• pp.139-146
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• 2004

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation scratch test was studied with numerical method by ABAQUS S/W. Brittle materials (Si, Pyrex glass 7740) were used as specimens, and forming conditions to reduce the elastic recovery and pile-up were proposed. The indenter was modeled as a rigid surface. Minimum mesh sizes of specimens are 1-l0nm. Variables of the nanoindentation scratch test analysis are scratching speed, scratching load, tip radius and tip geometry. The nano-indentation scratch tests were performed by using the Berkovich pyramidal diamond indenter. Comparison between the experimental data and numerical result demonstrated that the FEM approach can be a good model of the nanoindentation scratch test. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.