• Title/Summary/Keyword: 이중 접합

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Fabrication and Electrical Characteristics of $p^{+}$-n Ultra Shallow Junction Diode with Co/Ti Bilayer Silicide (Co/Ti 이중막 실리사이드를 이용한 $p^{+}$-n극저접합 다이오드의 제작과 전기적 특성)

  • Chang, Gee-Keun;Ohm, Woo-Yong;Chang, Ho-Jung
    • Korean Journal of Materials Research
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    • v.8 no.4
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    • pp.288-292
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    • 1998
  • The p*-n ultra shallow junction diode with Co/Ti bilayer silicide was formed by ion implantation of $BF_{2}$ energy : 30KeV, dose : $5\times10^{15}cm^{-2}$] onto the n-well Si(100) region and RTA-silicidation of the evaporated Co($120\AA$)/Ti($40\AA$) double layer. The fabricated diode exhibited ideality factor of 1.06, specific contact resistance of $1.2\times10^{-6}\Omega\cdot\textrm{cm}^2$ and leakage current of $8.6\muA/\textrm{cm}^2$(-3V) under the reverse bias of 3V. The sheet resistance of silicided emitter region, the boron concentration at silicide/Si interface and the junction depth including silicide layer of ($500\AA$ were about $8\Omega\Box$, $6\times10^{19}cm^{-3}$, and $0.14\mu{m}$, respectively. In the fabrication of diode, the application of Co/Ti bilayer silicide brought improvement of ideality factor on the current-voltage characteristics as well as reduction of emitter sheet resistance and specific contact resistance, while it led to a little increase of leakage current.

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Investigation of Junctionless Transistors for High Reliability

  • Jeong, Seung-Min;O, Jin-Yong;Islam, M. Saif;Jo, Won-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.142-142
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    • 2012
  • 최근 반도체 산업의 발전과 동시에 소자의 집적화에 따른 단채널 효과가 문제되고 있다. 채널 영역에 대한 게이트 영역의 제어능력이 떨어지면서 누설전류의 증가, 문턱전압의 변화가 발생하며, 이를 개선하기 위해 이중게이트 혹은 다중게이트 구조의 트랜지스터가 제안되었다. 하지만 채널길이가 수십나노미터 영역으로 줄어듦에 따라 소스/드레인과 채널간의 접합형성이 어렵고, 고온에서 열처리 과정을 거칠 경우 채널의 유효길이를 제어하기 힘들어진다. 최근에 제안된 Junctionless 트랜지스터의 경우, 소스/드레인과 채널간의 접합이 없기 때문에 접합형성 시 발생하는 공정상의 문제뿐만 아니라 누설전류영역을 개선하며, 기존의 CMOS 공정과 호환되는 이점이 있다. 한편, 집적화되는 반도체 기술에 따라, 동작 시 발생하는 스트레스가 소자의 신뢰성에 중요한 요인으로 작용하게 되며, 현재 Junctionless 트랜지스터의 신뢰성 특성에 관한 연구가 부족한 상황이다. 따라서, 본 연구에서는 Junctionless 트랜지스터의 NBTI 특성과 hot carrier effect에 의한 신뢰성 특성을 분석하였다. Junctionless 트랜지스터의 경우, 축적모드로 동작하기 때문에 스트레스에 의해 유기되는 캐리어의 에너지가 낮다. 그 결과, 반전모드로 동작하는 Junction type의 트랜지스터에 비해 스트레스에 의한 subthreshold swing 기울기의 열화와 문턱전압의 이동이 감소하였다. 또한 소스/드레인과 채널간의 접합이 없기 때문에 hot carrier effect에 의한 게이트 절연막 및 계면에서의 열화가 개선되었다.

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Improvement and Evaluation of Seismic Performance of Reinforced High-Strength Concrete Beam-Column Joints with Advanced Reinforcing Detailings and High Ductile Fiber-Reinforced Mortar (고성능 배근상세 및 HDFRM을 활용한 고강도 철근콘크리트 보-기둥 접합부 내진성능 평가 및 개선)

  • Ha, Gee-Joo;Sin, Jong-Hak;Yi, Dong-Ryul;Hong, Kun-Ho
    • Proceedings of the Korea Concrete Institute Conference
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    • 2008.11a
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    • pp.5-8
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    • 2008
  • In this dissertation, experimental research was carried out to study the hysteretic behavior of reinforced high-strength concrete beam-column joints designed by high performance techniques, such as application of high-strength concrete, reducing of joint regions damage, moving of beam plastic hinge, advanced reinforcing detailings and High Ductile Fiber-Reinforced Mortar.(HDFRM) Specimens(HJCI), designed by the development of earthquake-resistant performance, moving of beam plastic hinge, and new design approach, were attained the moving of beam plastic hinge and developed significantly earthquake-resistant performance of such joints. Specimens(HJRP), designed with HDFRM, were indicated more stable hysteresis behavior, high load carrying capacity, and distributed crack pattern of specimens HJRP when compared to the control specimen.

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A Case Study on Seismic Response of Haunch Repaired Steel MRFs (헌치로 보강된 철골모멘트골조의 지진응답 사례연구)

  • 이철호
    • Journal of the Earthquake Engineering Society of Korea
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    • v.1 no.2
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    • pp.69-78
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    • 1997
  • Recent test results of steel moment connections repaired with a haunch on the bottom side of the beam have been shown to be a very promising solution to enhancing the seismic performance of steel moment-resisting frames. Yet, litle is known about the effects of using such a repair scheme on the system seismic performance of structures. To investigate the effects of haunch repair on the system seismic performance, a case study was conducted for a 13-story steel frame building damaged during the 1994 Northridge earthquake. When haunches are incorporated in a steel moment frame, the response prediction is complicated by the presence of "dual" panel zones in the column. A new analytical modeling technique for the dual panel zone recently developed by the author was incorporated in the analysis. Incorporating the behavior of dual panel zone was among the most significant consideration in the analyses. Both the inelastic static and dynamic analyses did not indicate detrimental side effects resulting from the repair.he repair.

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A Study on Design and Manufacturing Methods of Dual-Polarization Monopulse Feed Structure in Millimeter-wave(W band) (밀리미터파(W대역) 이중편파 모노펄스 급전 구조 설계 및 제작 방안 연구)

  • Jong-Gyun Baek;Hyeong-Ki Lee;Young-Wan Kim;Hee-Duck Chae;Ji-Han Joo;Jaesik Kim
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.23 no.6
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    • pp.47-53
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    • 2023
  • In this paper, We designed a waveguide-type feed structure that converts millimeter wave dual-polarized signals into monopulse signals and presented a manufacturing method. At millimeter-wave such as the W band, the size of the waveguide is very small, making it very difficult to manufacture complex structures. Therefore, because manufacturability is important for the waveguide-type feed structure in the millimeter-wave, electro forming and diffusion bonding were proposed and verified in this study. The designed monopulse feed structure consists of eight 180° hybrids that combine 90° hybrids and self-compensating phase shifters, and four OMTs to separate dual polarization. The designed feed structure was designed to facilitate electro forming and diffusion bonding, and the manufactured feed structure was verified through a network analyzer. It was confirmed that the two proposed production methods produce a monopulse signal well through the measured magnitude and phase of the port.

A Study on the Torque Transmission Characteristics of Adhesively Bonded Composite Drive Shafts (접착제로 접합된 복합재료 구동축의 토크 전달특성에 관한 연구)

  • 김원태;김기수;이대길
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.17 no.8
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    • pp.1980-2000
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    • 1993
  • The stresses and torque transmission capabilities of adhesively bonded circular, hexagonal and elliptical lap joints were analyzed by the finite element and compared with the experimental results. The adherends of the joints were composed of carbon fiber/epoxy composite shafts and steel shafts. In calculating the torque transmission capabilities, the linear laminate properties of the composite material and the nonlinear shear properties of the adhesive were used. Using this method, the torque transmission capabilities of adhesively bonded lap joints could be obtained within 10% error compared to the experimental results except some single lap joints. The experiments revealed that the hexagonal joint had the best torque transmission capability from the single lap joints and the double lap joint had better torque transmission than the single lap joint.

A Study on Exchange bias of Seed layer Etching on NiFe/FeMn/NiFe Multilayers (NiFe/FeMn/NiFe 다층박막의 씨앗층 에칭에 의한 교환 바이어스에 대한 연구)

  • 임재준;윤상민;호영강;이영우;김철기;김종오
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.11a
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    • pp.221-221
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    • 2003
  • 본 연구에서는 스핀밸브 다층박막에서 교환 바이어스에 영향을 끼치는 요인 중 하나인 강자성층과 반강자성층사이의 접합 계면에서의 표면 거칠기 [1,2]를 줄이기 위해 현재 반도체 공정에 사용되고 있는 이온빔 에칭 장비를 사용하여 스핀 밸브 다층박막의 씨앗층 에칭에 따른 교환 바이어스를 알아보고자 하였다. 스핀밸브 구조는 강자성층/비자성층/강자성층의 기본구조를 갖는데 이중 하나의 강자성층의 스핀방향이 반강자성층에 의해 고정되는 구조[3]로써 이러한 고정 효과를 교환 바이어스(exchange bias)라 부른다. 교환 바이어스(exchange bias)현상은 강자성과 반강자성의 접합계면에서 강한 상호 교환결합력에 의해 나타나는 현상으로 이러한 교환 바이어스 특성은 하드드라이브의 고밀도 자기헤드소자 및 비휘발성 자기 메모리소자에 응용되어 기존의 자기저항 소자의 특성을 크게 향상시킬 수 있게 되었다.

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Electrochemical Properties of Carbon Nanofiber Electrode with Different PVDF Binder Concentration (PVDF 접합제 농도 변화와 탄소나노섬유 전극의 전기화학적 특성)

  • Choi, Weon-Kyung;Cho, Tae-Hwan
    • Transactions of the Korean hydrogen and new energy society
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    • v.18 no.4
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    • pp.446-451
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    • 2007
  • Physicochemical properties of carbon nanofibers were evaluated as a supercacitor electrode materials could store electrochemical energy reversibly. A capacitance of carbon nanofiber electrode was increased gradually, depending on the PVDF binder ratio. A feasibility of EDLC electrode was estimated with specific surface area measurement by BET method and mesopore structure of carbon nanofiber surface could be explained electrochemical absorption-desorption in aqueous electrolyte. PVDF 5 wt.% ratio in electrode was observed a suitable binder amount by CV result.

Stress Distribution and Strength Evaluation of Adhesive Bonded Single-lap Joints (단일겹침 접착제 접합부의 응력분포와 강도평가)

  • 이중삼;임재규;김연직
    • Journal of Welding and Joining
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    • v.19 no.3
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    • pp.342-347
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    • 2001
  • Recently, adhesive-bonding technique is wifely used in manufacturing structures. Stress and strain analysis of joints are essential to design adhesive-bonded joints structure. The single-lap adhesive joint is the design dominating the range of adhesive joints. In this study, single-lap specimens with different joint dimensions were used for the tensile-shear test and finite element calculation in of order to investigate the effect of overlap length and adhesive-bonding thickness on adhesive strength and stress distribution of the joints. Consequently, it was found that overlap lap size and thickness can be important parameters of structure joints using adhesive bonding, which is effected on adhesive strength.

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Measurement of Interfacial Crack Length by Ultrasonic Scattering Compensation Depending on Thickness Variations of Bonded Dissimilar Components (이종 접합부재의 두께 변화에 따른 초음파 산란 보정에 의한 계면균열 길이의 측정)

  • Chung, Nam-Yong
    • Transactions of the Korean Society of Automotive Engineers
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    • v.14 no.2
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    • pp.67-75
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    • 2006
  • In this paper, the compensation of ultrasonic scattering on interface crack depending on thickness variations of A1/Epoxy bonded dissimilar components was applied to improve measuring accuracy by using ultrasonic attenuation coefficient. The optimum conditions of theoretical value and experimental measuring accuracy by the ultrasonic method in A1/Epoxy bonded dissimilar components have been investigated. From the experimental results, the measurement method of interfacial crack lengths by using ultrasonic attenuation coefficient was proposed and discussed. After the ultrasonic scattering compensation depending on thickness variations of bonded dissimilar components was carried out, the measuring accuracy of interfacial crack length was improved by 5%.