• Proceedings of the Korean Society Of Semiconductor Equipment Technology
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• 2006.10a
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• pp.145-149
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• 2006

반도체의 고집적화와 LCD의 대형화로 인해 웨이퍼 및 LCD 검사용 스테이지의 성능 향상이 요구된다. 본 논문에서는 고속의 검사속도, 서브마이크론의 검사 정밀도, 그리고 대행정 구동을 위한 이중 서보 시스템을 제안하였다. 이중 서보 시스템은 선형모터로 구동되고 공기베어링으로 가이드 되는 조동 구동부와 보이스 코일 모터(VCM)로 구동되고 공기베어링으로 가이드 되는 미세 구동부로 구성된다. 검사 효율을 향상시키기 위한 고속 세틀링을 위한 제어기로서 시간 최적 제어 기법과 시간 지연 제어기를 결합한 모드 변경 제어기를 제안하고 이중 서보 시스템에 구현하여 성능을 평가하였다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.47 no.2
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• pp.153-160
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• 2019

Electro-mechanical actuator system for aircraft has advantages in compactness and its lightweight, compared to the hydraulic actuator system. Hinge line actuator has low air resistance and is suitable for special purpose such as stealth. This paper describes design contents of 10,000 lbf-in class dual redundant hinge line electro-mechanical actuator system for performance test. The control structure was designed to minimize impact of torque fighting. A mathematical model is proposed to analyze and validate the performances of actuator by comparison with experiment results.

• Journal of Aerospace System Engineering
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• v.15 no.3
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• pp.1-10
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• 2021

The electro-hydrostatic actuators (EHA) are widely used in various industrial fields since they can independently execute the function of the hydraulic power source and have high efficiency. Particularly, in the aviation field, the EHA is mainly designed as dual redundant asymmetric tandem actuator to mitigate failure and minimize installation space. However, aviation EHAs designed in the form of dual redundant asymmetric tandem actuator have the disadvantage of decreased durability performance due to the occurrence of force fighting. In this paper, the controller is designed based on backstepping technique to improve control performance and reduce force fighting for aviation EHA. The augmented state observer is proposed to estimate the states required for control. Through simulation, it was verified that the proposed controller had superior control performance and significantly reduces the force fighting compared to the general PI controller.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.357-360
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• 2002

Nowadays, the improvement and development of Multi-media, information and communication technology are rapidly processed. And many products, for example, digital camera, digital camcorder, and PDA, are used for them. They need large data storage capacity and small size, light storage system. Due to that, many studies and researches in data storage system have been carried out. Especially, micro drive system was presented by IBM.(1) However, its system is expensive and uneasy to be portable. In ODD technologies, 1 inch drive system is not yet or in processing status.(2) If to be possible and to be come up, it is cheap than HDD system and easy to transfer information. In this paper, a miniaturized actuator(about linch) is designed and tested for ODD system. Specially, it is adapted for NFR(Near-field Recoding) system using SIL(Solid Immersion Lens). It is the dual-servo actuator which consists of a coarse actuator and fine actuator. Its actuating force generation method is VCM(Voice Ceil Motor). The fine actuator has 4-wire suspensions and bobbin wrapped by coil and includes focusing motion as well as tracking motion. The coarse actuator has an actuating coil and V-grooved guide mechanism. Also, the characteristics of the designed actuator is estimated by sine-swept mode and LDV(Laser Doppler Vibro-meter).

• Journal of the Korean Society for Precision Engineering
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• v.18 no.4
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• pp.203-208
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• 2001

In this paper, a novel dual-type positioning mechanism using a voice coil motor(VCM) and a piezoelectric actuator is proposed for optical disk drive or near-field recording type drive. The VCM is used for a coarse motion actuator and the piezoelectric actuator, "S" configuration deflection motion when voltage applied, is used for a fine motion actuator with self-sensing technique, which allows it to sense and actuate simultaneously in a closed loop frame work. When the VCM rotates and stops, a position feedback control algorithm is adopted to further control residu vibration. The performance of the control scheme is confirmed through simulations and experiments.

• Proceedings of the KSME Conference
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• 2001.06b
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• pp.754-758
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• 2001

A new kind of piezoelectric actuation structure named double amplified multilayer actuator is proposed. Double amplified multilayer actuator combines both dimentional and flextensional amplification concepts. As a result the displacement of the actuator can be more than one hundred times larger than the displacement of multilayer actuator and can be used in in-pipe locomation robot such as an endoscope actuator. This paper studied the dependence of displacement on actuator parameters theoretically and experimentally.

• Proceedings of the KIEE Conference
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• 2003.07d
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• pp.2435-2437
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• 2003

원자력발전소의 노내 중성자 분포 측정 설비는 고장이 발생하여 기능을 상실하면 발전소를 정지하여야 하는 매우 중요한 설비이다. 국내 가압 경수로형 원전에 사용되고 있는 노내 중성자 분포 측정 방식은 이동식과 고정식으로 구분되며, 고리 1, 2, 3, 4호기, 영광 1, 2호기 및 울진 1, 2호기처럼 미국 웨스팅하우스사와 프랑스 프라마톰사가 공급한 원전은 이동식 측정 방식을 채택하고 있고, 그밖에 미국 CE사가 공급한 원전 및 한국 표준형 원전은 고정식 측정 방식을 채택하고 있다. 이동식의 경우 측정 설비의 검출기 구동시스템은 원자로 내부에 설치되어 있는 심블에 검출기를 삽입 또는 인출하면서 검출기가 중성자 분포 정보를 취득한 수 있도록 기계적인 구동 메커니즘을 제공한다. 기존 설비는 협소한 공간에 통로선택기를 복층으로 배치하여 검출기가 지나가는 통로의 구배가 심한 관계로 마찰이 커져 구동설비에 잦은 고장이 발생하였고, 구조적으로도 신뢰성이 떨어지는 문제점을 갖고 있었다. 본 논문에서는 신뢰성이 높고 통로에서의 마찰이 적은 새로운 개념의 이중색인 통로선택기와 구동장치의 설계와 제작 및 적용 결과 등을 다룬다.

• Journal of Aerospace System Engineering
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• v.16 no.5
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• pp.62-69
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• 2022

EHA (Electro-Hydrostatic Actuator) is more energy efficiency than a centralized hydraulic system. In particular, the EHA used for aircraft has a redundant design in preparation for failure scenario. Also, due to the aircraft's internal space limitation, the actuator's length must be optimized. Therefore, a series configuration of double rod and single rod cylinder is advantageous. However, due to the asymmetry of the cross-sectional area of the piston, the force fighting phenomenon between the two cylinder areas occurs during redundant operation with a general control system. In this paper, the force fighting phenomenon of redundant EHA was simulated. A controller with load compensation and a force control-based position controller as a method to suppress its stimulation

• Journal of Korea Multimedia Society
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• v.10 no.9
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• pp.1209-1219
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• 2007

It is difficult to run 3D graphics based application on the embedded system with hardware constraints. Therefore, such a system must have a systematic infrastructure which can process various operations with respect to 3D graphics through any graphic acceleration module. In this paper, we present a method to implement 3D graphics acceleration device driver on Tiny X platform which provide an open source graphics windowing environment. The proposed method is to initialize the driver step by step so that the direct rendering infrastructure can use it properly. Moreover, we evaluated overall 3D graphics performance of an implemented driver through a simple but effective benchmark program.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.