• Transactions of the Korean Society of Mechanical Engineers
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• v.14 no.3
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• pp.747-754
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• 1990

Since Ion sputter machining can perform removing processing in atom or molecule units in vacuum state, it has the merit that high precision processing is possible. In this study, therefore, the effect of incidence ion beam is certified to processing amount and surface roughness when longtimed processing is applied. As a result, processing amount is made almost constant with time and the best processing condition is achieved when the incidencial angle of ion is 55.deg.. In addition, processing time for the good surface roughness is different respectively to the quality of material and longtimed processing has some defect for achieving good surface roughness.

• Progress in Medical Physics
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• v.26 no.1
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• pp.12-17
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• 2015

The purpose of the Monte Carlo simulation study was to provide the optimized nozzle design to satisfy the beam conditions for biomedical researches in the Korean heavy-ion accelerator, RAON. The nozzle design was required to produce $C^{12}$ beam satisfying the three conditions; the maximum field size, the dose uniformity and the beam contamination. We employed the GEANT4 toolkit in Monte Carlo simulation to optimize the nozzle design. The beams for biomedical researches were required that the maximum field size should be more than $15{\times}15cm^2$, the dose uniformity was to be less than 3% and the level of beam contamination due to the scattered radiation from collimation systems was less than 5% of total dose. For the field size, we optimized the tilting angle of the circularly rotating beam controlled by a pair of dipole magnets at the most upstream of the user beam line unit and the thickness of the scatter plate located downstream of the dipole magnets. The values of beam scanning angle and the thickness of the scatter plate could be successfully optimized to be $0.5^{\circ}$ and 0.05 cm via this Monte Carlo simulation analysis. For the dose uniformity and the beam contamination, we introduced the new beam configuration technique by the combination of scanning and static beams. With the combination of a central static beam and a circularly rotating beam with the tilting angle of $0.5^{\circ}$ to beam axis, the dose uniformity could be established to be 1.1% in $15{\times}15cm^2$ sized maximum field. For the beam contamination, it was determined by the ratio of the absorbed doses delivered by $C^{12}$ ion and other particles. The level of the beam contamination could be achieved to be less than 2.5% of total dose in the region from 5 cm to 17 cm water equivalent depth in the combined beam configuration. Based on the results, we could establish the optimized nozzle design satisfying the beam conditions which were required for biomedical researches.

• Radiation Oncology Journal
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• v.20 no.2
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• pp.179-185
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• 2002

Purpose : For the purpose of quality assurance of self-developed stereotactic radiosurgery system, a multi-purpose phantom was fabricated, and accuracy of radiation dose distribution during radiosurgery was measured using this phantom. Materials and Methods : A farmer chamber, a 0.125 cc ion chamber and a diode detector were used for the dosimetry. Six MV x-ray from a linear accelerator (CL2100C, Varian) with stereotactic radiosurgery technique (Green Knife) was used, and multi-purpose phantom was attached to a stereotactic frame (Fisher type). Dosimetry was done by combinations of locations of the detectors in the phantom, fixed or arc beams, gantry angles $(20^{\circ}\~100^{\circ})$, and size of the circular tertiary collimators (inner diameters of $10\~40\;mm$). Results : The measurement error was less than $0.5\%$ by Farmer chamber, $0.5\%$ for 0.125 cc ion chamber, and less than $2\%$ for diode detector for the fixed beam, single arc beam, and 5-arc beam setup. Conclusion : We confirmed the accuracy of dose distribution with the radiosurgery system developed in our institute and the data from this study would be able to be effectively used for the improvement of quality assurance of stereotactic radiosurgery or fractionated stereotactic radiotherapy system.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.400-400
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• 2007

In this study, we investigated liquid crystal (LC) alignment with ion beam (IB) that non contact alignment technique on polyimide and electro-optical characteristics of twisted nematic (TN)-liquid crystal display (LCD) on the polyimide under various ion beam angles. In this experiment, polyimide layer was coated on glass by spin-coating and Voltage-transmittance(VT) and response time characteristics of the TN cell were measured by a LCD evaluation system. The good characteristics of the nematic liquid crystal (NLC) alignment with the ion beam exposured polyimide surface was observed. In addition, it can be achieved the good EO properties, and residual DC property of the ion beam aligned TN cell on polyimide surface.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.283-283
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• 2011

본 연구에서는 XRR 측정에 있어 박막두께 표준보급을 하기 위하여 표준물질을 이온빔 스퍼터링 증착법을 이용하여 제작하였다. 시편제작 시 공기 중 노출에 의해 산화가 되지 않는 산화물 박막과 산화물 기판을 선택하였다. 기판 및 타겟물질 등을 변화시키면서 제작된 시편의 특성을 살펴보았다. 사용된 타겟 물질로는 HfO2, Ta2O5, Cr2O3를 사용하였으며, 기판으로는 glass, sapphire, quartz, SiO2(1 ${\mu}m$-thermal oxidation)를 사용하였다. 산화물 타겟을 사용하여 증착 시 타겟 주위로 생기는 전하들의 charge build-up 되는 현상은 neutralizer를 사용함으로써 문제를 해결하였다. 제작된 시편은 XRR을 이용하여 측정하였고, XRR simulation과 curve fitting을 통하여 박막의 두께, 표면 및 계면의 거칠기, 밀도를 평가하였다. 기판으로 사용된 glass, quartz는 타겟 물질과 관계없이 표면 거칠기가 좋지 않아 XRR 반사율이 급격히 떨어지면서 측정되는 각도의 영역이 작아졌다. sapphire로 제작한 시편에서는 측정된 데이터와 simulation의 curve fitting이 양호하지 않았다. 이 문제는 현재 조사중에 있다. SiO2 기판으로 제작한 시편의 경우 타겟 물질과 관계없이 XRR curve fitting 결과가 양호 하였다. 그 중 Cr2O3의 결과가 다른 타겟 물질에 비해 x 2 값이 작았고 반사율 곡선에서의 거칠기와 진폭도 양호하였다. 위 연구결과로써 SiO2 기판을 사용한 Cr2O3 타겟 물질로 제작된 시편이 XRR 박막 두께 표준물질로써 적합한 것으로 판단된다.

• Journal of the Korean Magnetics Society
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• v.18 no.5
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• pp.180-184
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• 2008

The relation of ferromagnet anisotropic magnetization and the antiferromagnet atomic spin configuration has been investigated for variously angles of unidirectional deposition magnetic field of FeMn layer in Corning glas/Ta(5 nm)/NiFe(7 nm)/FeMn(25 nm)/ Ta(5 nm) multilayer prepared by ion beam deposition. Three unidirectional deposition angles of FeMn layer are $0^{\circ},\;45^{\circ}$, and $90^{\circ}$, respectively. The exchange bias field ($H_{ex}$) obtained from the measuring easy axis MR loop was decreased to 40 Oe in deposition angle of $45^{\circ}$, and to 0 Oe in the angle of $90^{\circ}$. One other side hand, $H_{ex}$ obtained from the measuring hard axis MR loop was increased to 35 Oe in deposition angle of $45^{\circ}$, and to 79 Oe in the angle of $90^{\circ}$. Although the difference of uniderectional axis between ferromagnet NiFe and antiferromagnet FeMn was 90o, the strong antiferromagnetic dipole moment of FeMn caused to rotate the weak ferromagnetic dipole moment of NiFe in the interface. This result implies that one of origins for exchange coupling mechanism depends on the effect of magnetic field angle during deposition of antiferromgnet FeMn layer.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.04a
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• pp.44-44
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• 2008

To date, rubbing has been widely used to align LC molecules uniformly. Although rubbing can be simple, it has fundamental problems such as the generation of defects by dust and static electricity, and difficulty in achieving a uniform LC alignment on a large substrate. Therefore, non contact alignment has been investigated. Ion beam induced alignment method, which provides controllability, nonstop process, and high resolution display. In this study, we investigated liquid crystal (LC) alignment with ion beam (IB) that non contact alignment technique on polyimide and electro-optical characteristics of twisted nematic (TN)-liquid crystal display (LCD) on the polyimide under various ion beam angles. In this experiment, Polyimide layer was coated on glass by spin-coating and Voltage-transmittance(VT) and response time characteristics of the TN cell were measured by a LCD evaluation system. The good characteristics of the nematic liquid crystal (NLC) alignment with the ion beam exposure polyimide surface was observed. The tilt angle of NLC on the PI surface with ion beam exposure can be measured under $1^{\circ}$ for all of irradiation angles. In addition, it can be achieved the good EO properties, and residual DC property of the ion beam aligned TN cell on polyimide surface.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.11a
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• pp.329-329
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• 2008

To date, rubbing has been widely used to align LC molecules uniformly. Although rubbing can be simple, it has fundamental problems such as the generation of defects by dust and static electricity, and difficulty in achieving a uniform LC alignment on a large substrate. Therefore, noncontact alignment has been investigated. Ion beam induced alignment method, which provides controllability, nonstop process, and high resolution display. In this study, we investigated liquid crystal (LC) alignment with ion beam (IB) that non contact alignment technique on polyimide and electro-optical characteristics of twisted nematic (TN)-liquid crystal display (LCD) on the poly imide under various ion beam angles. In this experiment, Polyimide layer was coated on glass by spin-coating and Voltage-transmittance(VT) and response time characteristics of the TN cell were measured by a LCD evaluation system. The good characteristics of the nematic liquid crystal (NLC) alignment with the ion beam exposure poly imide surface was observed. The tilt angle of NLC on the PI surface with ion beam exposure can be measured under $1^{\circ}4 for all of irradiation angles. In addition, it can be achieved the good ED properties, and residual DC property of the ion beam aligned TN cell on polyimide surface.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.04a
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• pp.43-43
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• 2008

Recently, it is widely studied to liquid crystal (LC) alignment using ion-beam exposure. Because conventional rubbing method has some problems such as defects from dust and electrostatic charges and rubbing scratch during rubbing process. Moreover rubbing method needs cleaning process to remove these defects. Therefore rubbing-free techniques like ion-beam method are strongly required. We studied LC alignment by controlling ion-beam irradiation angles and electro-optical (EO) characteristics of twisted nematic LC on the polyimide surface. In this experiment, a good uniform alignment of the nematic liquid crystal (NLC) with the ion-beam exposure on the polyimide (PI) surface was observed. We also achieved low pretilt angle as function of ion-beam irradiation angles. X-ray photoelectron spectroscopic (XPS) analysis provided chemical evidence for LC alignment by controlling ion-beam irradiation angles. In addition, it can be achieved the good EO properties of the ion-beam-aligned twisted nematic liquid crystal display (TN-LCD) on PI surface. Some other experiments results and discussion will be included in the presentation.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.398-398
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• 2007

The Liquid Crystal (LC) alignment uniformity is very important in LC devices. The alignment mechanism of LC molecules on a rubbed polyimide (PI) surface is very important for both LC fundamental research and application. So, Generally a rubbing method to align LC has been widely used to mass-produce LCD panels. But because rubbing method is contact method between rubbing fabric and indium-tin-oxide glass or flexible substrate, rubbing method has some defects, such as the electrode charges and the creation of contaminating particles. Thus we strongly recommend a non-contact alignment technique for getting rid of some defects of rubbing method. Most recently, the LC aligning capabilities achieved by ion-beam exposure on the organic and nonorganic thin film surface have been reported successfully. In this research, we studied the tilt angle generation and electro-optical performances for a NLC on homeotropic polyimide surfaces with ion-beam exposure. The LC aligning capabilities of a nematic liquid crystal (NLC) on a homeotropic PI surface using a new ion-beam method were studied. On the homeotropic PI surface, the tilt angle of the NLC by exposure ion-beam had a tendency to decrease as increased ion-beam energy density. And, on the homeotropic PI surface, the alignment character of the NLC with respect to ion-beam energy was good. And we achieved satisfactory result for EO character.