• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.219.1-219.1
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• 2014

전자소자 산업의 미세화 및 대형화에 따라 플라즈마 밀도, 전위, 온도, 균일도 등 과 같은 플라즈마 특성을 제어하는 것은 차세대 플라즈마 장치 개발에 있어 매우 중요한 요소라고 할 수 있다. 특히, 급격한 소자의 미세화에 따라 플라즈마 공정을 통해 발생할 수 있는 damage는 큰 issue가 되어 왔고, 많은 연구자들은 이를 해결하기 위해서 다각적인 노력을 진행해 왔다. 그중 높은 전자 온도는 높은 전자 에너지에 의해 공정 중 소자를 손상 시키는 주된 원인이라고 보고되고 있으며, 이에 대한 제어기술은 매우 중요하다고 할 수 있다. 본 연구에서는 서로 다른 두 개의 내/외측으로 나뉘어진 나선형 모양의 ICP 안테나를 이용 하여 연구를 진행하였다. 내측의 안테나에는 2 MHz를 연결 하였으며, 외측의 안테나에는 13.56 MHz를 연결 하였으며, 내/외측 안테나에 각각 pulse mode로 입력전력을 인가해 줌으로써 플라즈마의 특성을 관찰하였다. Pulse / CW (Continuous Wave) mode에 있어서 전자온도의 측정을 위해 emissive probe 를 이용하여 plasma potential과 floating potential을 측정하였으며, 이를 통하여 전자온도를 계산하여 구할 수 있었다. Duty ratio 및 pulsing frequency의 변화에 따른 전자온도의 변화를 확인 할 수 있었으며, 그에 따른 플라즈마 균일도를 ion saturation current를 측정함으로써 관찰할 수 있었다. 실제 식각 공정에 있어서 Pulsing 조건에 따른 식각 특성을 관찰하기 위해, SiO2, ACL (Amorphous Carbon Layer)에 대해 식각을 진행하였으며, 식각 메커니즘 분석을 위해 이온에너지 분포의 변화를 PSM (Plasma Sampling Mass-spectroscopy)을 이용하여 측정하였다.

• Proceedings of the Korean Society of Applied Pharmacology
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• 1994.04a
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• pp.276-276
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• 1994

지구 환경문제의 하나인 오존충의 파괴는 지구상에 분포되어있는 자외선량을 증가시키는 외에 지금까지 지상에 도달하지 않았던 단파장역의 자외선량의 증가를 초래하여, 이것에 피부암, 백내장등의 발병율 증가등의 건강 피해가 염려된다. 이들 발병기전은 아직 확실치 않으나 에너지가 큰 단파영역의 자외선에 폭로되면 세포내의 물분자의 이온화에 기인되어 발생하는 활성산소종이 막지질, 핵산. 단백질등에 산화적 손상을 가져와 이것에 돌연변이, 세포사를 초래하는 것이 그 원인의 하나라고 생각된다. 본 연구는 자외선 중 UVB의 조사로 인한 장해와 유도단백질을 찾아내어, 자외선의 유해성을 밝히는데 목적을 두었다. UVB를 농도별로 1회 hairless mouse에게 조사하여, 경시적으로 피부를 채취하여, UVB 조사로 인해 유도되는 단백질을 2차 전기영동법을 이용해 관찰하고. 유도단백질이 HSP인지를 면역염색을 통해 밝히고, 유도된 단백질을 protein sequence를 하여, 어떤 단백질인지 밝혔다.

• Proceedings of the KIEE Conference
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• 2004.11a
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• pp.98-100
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• 2004

In this study, PST thin films were etched with inductively coupled $Cl_2/(Cl_2+Ar)$ plasmas. The etch characteristics of PST thin films as a function of $Cl_2/(Cl_2+Ar)$ gasmixtures were analyzed by using quadrupole mass spectrometer (QMS). Systematic studies were carried out as a function of the etching parameters, including the RF power and the working pressure. The maximum PST film etch rate is 56.2 nm/min, because a small addition of $Cl_2$ to the $Cl_2$/Ar mixture increased the chemical effect. It was proposed that sputter etching is the dominant etching mechanism while the contribution of chemical reaction is relatively low due to low volatility of etching products.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.15 no.4
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• pp.289-300
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• 2002

In this study, the experiments are carried out by boron ion implantation at energies ranging from 700keV to 2MeV in silicon. The distribution of boron profiles are measured by SIMS(Cameca 6f). Boron dopants profiles after high temp]erasure annealing are also explained by comparisons of experimental and simulated data. A new electronic stopping model for Monte Carlo simulation of high energy implantation is presented. Also the comparisons of profiles by profiles boron ion implantations are demonstrated and interpreted with theoretical models. Finally range moments of SIMS and SRP profiles are calculated and compared with simulation results.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.33 no.6
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• pp.203-209
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• 2023

Cobalt sulfide nanocomposites were synthesized through a simple hydrothermal method as anode materials for sodium ion batteries (SIBs). In this work, a cobalt sulfide nanoparticle (CoS-NF) and a cobalt sulfide nanocomposite integrated with reduced graphene oxide (CoS@G-NC) were fabricated for electrochemical energy storage performance of battery. The as-prepared CoS@G-NC electrode exhibited reversible and stable cycle performance (62 % after 30 cycles at current density of 200 mA g^-1). The improved electrochemical property was attributed to the small grain growth and uniform distribution of cobalt sulfide during synthesis, which maximized the diffusion pathway for sodium ions and effectively suppressed the delamination and volume expansion of cobalt sulfide during the conversion reaction. The results provide promising anode materials for next-generation SIBs.

• Korean Journal of Optics and Photonics
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• v.16 no.6
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• pp.508-515
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• 2005

We propose a fabrication method for refractive lens by variable velocity moving mask lithography and slit pattern. Distribution of exposure dose should be controlled for the curved photoresist surface that works as a refractive surface. We analyze theoretically the distribution of exposure dose by change of moving velocity, moving direction of mask and the shape of mask pattern, and confirm for the curved surface experimentally. The lens could have sag height of a few of hundreds ${\mu}m$, by using thick photoresist or Deep RIE process.

• Journal of the Korean Vacuum Society
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• v.16 no.2
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• pp.79-90
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• 2007

Prototype of $800{\ell}$ vacuum web coater (Vic Mama) consisting of ion source with low energy less than 250 eV for high speed surface modification and 4 magnetron sputter cathodes was designed and constructed. Its performance was evaluated through fabricating the adhesiveless flexible copper clad laminate (FCCL). Pumping speed was monitored in both upper noncoating zone pumped down by 2 turbo pumps with 2000 l/sec pumping speed and lower surface modification and sputter zone vacuumed by turbo pumps with 450 1/sec and 1300 1/sec pumping speed respectively. Ion current density, plasma density, and uniformity of ion beam current were measured using Faraday cup and the distribution of magnetic field and erosion efficiency of sputter target were also investigated. With the irradiation of ion beams on polyimide (Kapton-E, $38{\mu}m$) at different fluences, the change of wetting angle of the deionized water to polyimide surface and those of surface chemical bonding were analyzed by wetting anglometer and x-ray photoelectron spectroscopy. After investigating the deposition rate of Ni-Cr tie layer and Cu layer was investigated with the variations of roll speed and input power to sputter cathode. FCCL fabricated by sputter and electrodeposition method and characterized in terms of the peel strength, thermal and chemical stability.

• Progress in Medical Physics
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• v.21 no.1
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• pp.60-69
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• 2010

For treatment of Total Skin Electron beam Therapy (TSET), measurement of dose at various conditions is need on the contrary to usual radiotherapy. When treating TSET with modified Stanford technique based on linear accelerator, the energy of treatment electron beam, the spatial dose distribution and the actual doses deposited on the surface of the patient were measured by using EBT2. The measured energy of the electron beam was agreed with the value that measured by ionization chamber, and the spatial dose distribution at the patient position and the doses at several point on the patient's skin could be easily measured by EBT2 film. The dose on the patient that was measured by EBT2 film showed good agreement with the data measured simultaneously by TLD. With the results of this study, it was proven that the EBT2 film can be one of the useful dosimeter for TSET.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.4 no.1
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• pp.63-70
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• 1994

Single crystals of the superionic conductor ${\beta}-Ag_3SI$ were prepared by thermal treatmentr from the reactant mixture of AgI and $Ag_2S$. The growing single crystals were made to spherical shape of $200{mu}m$ in diameter. The detailed structures analyses revealed that $Ag^+$ in ${\beta}-Ag_3SI$ distribute on 12h site of 4-coordination inpreference to 3c site of 6-coordination. The effective one-particle potential (o.p.p.). of $Ag^+$ along [110] direction was evaluated from the probability density function(p.d.f.) Activation energy calculated from the o.p.p. curve has been found to be 0.012 eV for the diffusion of $Ag^+$ on (001) plane in the ${\beta}-Ag_3SI$ structure.

• Journal of Radiation Protection and Research
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• v.13 no.2
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• pp.29-40
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• 1988

A spectrum-exposure rate conversion operator G(E) for a portable HPGe detector used for field environmental radiation survey was theoretically developed on the basis of a space distribution function of gamma flux emitted from a disk source and an areal efficiency of the detector. The radiation exposure rates measured using this G(E) and the portable HPGe. detector connected to a portable multichannel analyzer were compared with those measured by a 3' ${\phi}\;{\times}$3' NaI(Tl) scintillation detector with the reported G(E) and a pressurized ionization chamber. A comparison of the three results showed that the result obtained using the HPGe detector was lower than those determined using the NaI(Tl) detector and ionization chamber by 17% to 29%, The difference obtained is close to that reported in literature. The method developed here can be easily applicable to obtain a G(E) factor suitable to any detector for detecting the exposure rate of environmental gamma radiation, since the spectrum-exposure rate conversion operator can be calculated by a hand calculator.