• 한국소음진동공학회논문집
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• 제15권7호
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• pp.878-884
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• 2005

This paper presents an algorithm for the precision motion control based on the dynamic characteristics of piezoelectric actuators in the inchworm. The dynamic characteristics are identified by the frequency domain modeling technique using the experimental data. For the motion control, the hysteresis behavior is compensated by the inverse hysteresis model. The dynamic stiffness of an inchworm is generally low compared to its driving condition, so mechanical vibration may degenerate the motion accuracy of the inchworm. The Sliding mode controller and the Kalman filter are designed for motion control of the inch-worm.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 추계학술대회논문집
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• pp.195-200
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• 2008

This paper presents motion control of the Inchworm composed of the piezoelectric actuators and mechanical elements. Piezoelectric actuator shows nonlinear response characteristics including hysteresis due to the ferroelectric characteristics. This paper proposes feedback control scheme to improve the ability of tracking response to complex input signal and suppress the phenomenon of hysteresis using the sliding mode control technique with the integrator. The sliding mode control system has the limit to minimize both the settle time and overshoot. For making up this limit, this paper also suggests input shaping technique suitable to the inchworm control system.

• 한국정밀공학회지
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• 제18권8호
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• pp.157-163
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• 2001

This paper presents the new linear notion device so called \"inch-werm\" which gets large displacement by incrementally summing small displacements of PZT actuators. Dynamic stiffness of inch-worm is generally low compared to its driving condition due to the requirement of inch-worm like small size and light weight. This low stiffness may degenerate the positional precision of inch-worm. An inch-worm is realized using three PZT actuators, a monolithic moving device and a guide way frame. Finite element method and experimental approach are used to analyse the static and dynamic motion of the designed inch-worm. Command reference input is shaped to reduce the residual vibration of inch-worm. The practical feasibility of inch-worm is also examined by running tests.ing tests.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.877-880
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• 2001

This paper presents the new linear motion device so called "inch-worm" which gets large displacement by incrementally summing small displacements of PZT actuators. Dynamics stiffness of inch-worm is generally low compared to its driving condition due to the requirement of inch-worm like small size and light weight. This low stiffness may degenerate the positional precision of inch-worm. An inch-worm is realized using three PZT actuators, a monolithic moving device and a guide way frame. Driving input signal is shaped to reduce the residual vibration of inch-worm by LQG controller and cycloid step input. The practical feasibility of inch-worm is also examined by running test.ning test.

• 한국소음진동공학회논문집
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• 제15권7호
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• pp.871-877
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• 2005

This paper proposes a new modeling scheme to describe the hysteresis between input voltage and displacement of piezoelectric actuators in the inchworm. From the experimental analysis of Piezoelectric actuator behaviors. the hysteresis characteristics including residual displacement can be modeled by second order functions of a maximum Input voltage and preload. Various experiments are performed to demonstrate the effectiveness and validation of the proposed modeling scheme.

• 한국소음진동공학회논문집
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• 제18권7호
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• pp.756-763
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• 2008

This paper presents an inchworm with three piezoelectric actuators. The dynamic stiffness of the inchworm is generally low compared to its driving condition, so mechanical vibration may degenerate the motion accuracy of the inchworm. The dynamic model of inchworm is identified by curve fitting technique based on the experimental frequency response function. For the precision motion control and low residual vibration of inchworm, driving input signal is designed by using cycloid step input and LQG control technique. Experimental result shows that proposed input shaping method is applicable effectively to the inchworm.

• 한국정밀공학회지
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• 제19권9호
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• pp.179-185
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• 2002

Solid state deformation of PZT is effective for the micron scale displacement. Inch-worm gets large linear displacement by incrementally summing displacements of PZT actuators. Dynamic stiffness of inch-worm is generally low compared to its driving condition due to the small size and light weight of inch-worm. Mechanical vibration induced by low stiffness may degenerate the motion accuracy of the inch-worm. In this paper, dynamic characteristics of the inch-worm are modeled by using the frequency domain curve fitting based on the experimental frequency response function. SMC (sliding mode control) is examined for motion control of the inch-worm. Simulation and experimental results show that the inch-worm with SMC scheme is feasible for the precise displacement device.

• 한국소음진동공학회논문집
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• 제19권2호
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• pp.169-175
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• 2009

This paper presents motion control of the Inchworm composed of the piezoelectric actuators and mechanical elements. Piezoelectric actuator shows nonlinear response characteristics including hysteresis due to the ferroelectric characteristics. This paper proposes feedback control scheme to improve the ability of tracking response to complex input signal and suppress the phenomenon of hysteresis using the sliding mode control technique with the integrator. The sliding mode control system has the limit to minimize both the settle time and overshoot. For making up this limit, this paper also suggests input shaping technique suitable to the inchworm control system.

• 한국정밀공학회지
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• 제22권11호
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• pp.151-158
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• 2005

Micro-machine tool is essential in the micro/meso cutting for the sake of saving of space, resources, and energy. In this research, a micro-turning lathe was fabricated with piezoelectric feed drive mechanism, and motion of each axis was generated by stepwise mechanism with two piezo actuators. The resolution to drive the axis was $0.05{\mu}m$ and position accuracy less than $2{\mu}m$ was assured. From the positioning experiment, piezo feed mechanism is good enough for the micro machine tools. Many fuming experiments were carried out with diamond-cutting tools to evaluate cutting capability of a machine tool. Continuous flow type chip could be obtained even if the cutting speed was very low due to small diameter of workpiece. However, thorough investigation about machineability in micro/meso cutting is inevitable to assure high quality surface roughness in micro machine tool.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 추계학술대회논문집
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• pp.630-637
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• 2003

This paper proposes a new modeling scheme to describe the hysteresis and the dynamic characteristics of piezoelectric actuators in the inchworm and develops a control algorithm for the precision motion control. From the analysis of piezoelectric actuator behaviors, the hysteresis can be described by the functions of a maximum input voltage. The dynamic characteristics are also identified by the frequency domain modeling technique based on the experimental data. For the motion control, the hysteresis behavior is compensated by the inverse hysteresis model. The dynamic stiffness of an inchworm is generally low compared to its driving condition, so mechanical vibration may degenerate the motion accuracy of the inchworm. Therefore, the sliding mode control and the Kalman filter are developed for the precision motion control of the inch-warm. To demonstrate the effectiveness of the proposed modeling schemes and control algorithm, experiment validations are performed.