• Journal of the Korean Vacuum Society
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• v.14 no.3
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• pp.103-109
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• 2005

A new medium vacuum primary standard using the static expansion method was developed in KRISS. In order to evaluate the performance of the equipment, we compared the medium vacuum standard with an ultrasonic interferometer manometer using two capacitance diaphragm gauges, the measuring ranges of which were 133 Pa and 1,333 Pa respectively. The result, Error normalized values, showed that the two standards are coincident each other within the range of combined uncertainty at calibrated pressure of $3pa\;\sim\;100pa$.