Effects of the Integrity of Silicon Thin Films on the Electrical Characteristics of Thin Dielectric ONO Film (실리콘 박막의 Integrity가 ONO(Oxide/Nitride/Oxide) 유전박막의 전기적 성질에 미치는 영향)
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- Journal of the Korean Vacuum Society
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- v.3 no.3
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- pp.360-367
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- 1994