• Title/Summary/Keyword: 유효평면

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Effectiveness of Beam-propagation-method Simulations for the Directional Coupling of Guided Modes Evaluated by Fabricating Silica Optical-waveguide Devices (광도파로 모드 간의 방향성 결합현상에 대한 빔 진행 기법 설계의 효율성 및 실리카 광도파로 소자 제작을 통한 평가)

  • Jin, Jinung;Chun, Kwon-Wook;Lee, Eun-Su;Oh, Min-Cheol
    • Korean Journal of Optics and Photonics
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    • v.33 no.4
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    • pp.137-145
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    • 2022
  • A directional coupler device, one of the fundamental components of photonic integrated circuits, distributes optical power by evanescent field coupling between two adjacent optical waveguides. In this paper, the design process for manufacturing a directional coupler device is reviewed, and the accuracy of the design results, as seen from the characteristics of the actual fabricated device, is confirmed. When designing a directional coupler device through a two-dimensional (2D) beam-propagation-method (BPM) simulation, an optical structure is converted to a two-dimensional planar structure through the effective index method. After fabricating the directional coupler device array, the characteristics are measured. To supplement the 2D-BPM results that are different from the experimental results, a 3D-BPM simulation is performed. Although 3D-BPM simulation requires more computational resources, the simulation result is closer to the experimental results. Furthermore, the waveguide core refractive index used in 3D-BPM is adjusted to produce a simulation result consistent with the experimental results. The proposed design procedure enables accurate design of directional coupler devices, predicting the experimental results based on 3D-BPM.

Simulation of Time-Domain Acoustic Wave Signals Backscattered from Underwater Targets (수중표적의 시간영역 음파 후방산란 신호 모의)

  • Kim, Kook-Hyun;Cho, Dae-Seung;Seong, Woo-Jae
    • The Journal of the Acoustical Society of Korea
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    • v.27 no.3
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    • pp.140-148
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    • 2008
  • In this study, a numerical method for a time-domain acoustic wave backscattering analysis is established based on a physical optics and a Fourier transform. The frequency responses of underwater targets are calculated based on physical optics derived from the Kirchhoff-Helmholtz integral equation by applying Kirchhoff approximation and the time-domain signals are simulated taking inverse fast Fourier transform to the obtained frequency responses. Particularly, the adaptive triangular beam method is introduced to calculate the areas impinged directly by acoustic incident wave and the virtual surface concept is adopted to consider the multiple reflection effect. The numerical analysis result for an acoustic plane wave field incident normally upon a square flat plate is coincident with the result by the analytic time-domain physical optics derived theoretically from a conventional physical optics. The numerical simulation result for a hemi-spherical end-capped cylinder model is compared with the measurement result, so that it is recognized that the presented method is valid when the specular reflection effect is predominant, but, for small targets, gives errors due to higher order scattering components. The numerical analysis of an idealized submarine shows that the established method is effectively applicable to large and complex-shaped underwater targets.

Suppression of misfit dislocations in heavily boron-doped silicon layers for micro-machining (마이크로 머시닝을 위한 고농도로 붕소가 도핑된 실리콘 층의 부정합 전위의 억제)

  • 이호준;김하수;한철희;김충기
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.33A no.2
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    • pp.96-113
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    • 1996
  • It has been found that the misfit dislocations in heavily boron-doped layers originate from wafer edges. Moreover, the propagation of the misfit dislocation into a heavily boron-doped region can be suppressed by placing a surrounding undoped region. Using a surrounding undoped region the disloction-free heavily boron-deoped silicon membranes have been fabricated. The measured surface roughness, fracture strength, and residual tensile stress of the membrane are 20.angs. peak-to-peak, 1.39${\times}$10$^{10}$ and 2.7${\times}$10$^{9}$dyn/cm$^{2}$, while those of the conventional heavily boron-doped silicon membrane with high density of misfit dislocations are 500 peak-to-peak, 8.27${\times}$10$^{9}$ and 9.3${\times}$10$^{8}$dyn/cm$^{2}$ respectively. The differences between these two membranes are due to the misfit dislocations. Young's modulus has been extracted as 1.45${\times}$10$^{12}$dyn/cm$^{2}$ for both membranes. Also, the effective lattice constant of heavily boron-doped silicon, the in-plane lattice constant of the conventional membrane, and the density of misfit dislocation contained in the conventional membrane have been extracted as density of misfit dislocation contained in the conventional membrane have been extracted as density of misfit dislocation contained in the conventional membrane have been extracted as 5.424.angs. 5.426.angs. and 2.3${\times}$10$^{4}$/cm for the average boron concentration of 1.3${\times}$10$^{20}$/cm$^{-23}$ cm$^{3}$/atom. Without any buffer layers, a disloction-free lightly boron-doped epitaxial layer with good crsytalline quality has been directly grown on the dislocation-free heavily boron-doped silicon layer. X-ray diffraction analysis revealed that the epitaxial silicon has good crystallinity, similar to that grown on lightly doped silicon substrate. The leakage current of the n+/p gated diode fabricated in the epitaxial silicon has been measured to be 0.6nA/cm$^{2}$ at the reverse bias of 5V.

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