• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.81-81
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• 2000

본 연구는 고집적 반도체 소자의 제조 공정에 있어서 산화막을 형성하지 않고 굴곡진 표면을 균일하게 고농도로 도핑하기 위한 방안의 일환으로 기존의 PH3 대신 고체 P를 직접 이용한 2-zone 확산법으로 다결정 Si에 도핑하는 방법을 채택하고, 그 rksmdtjddmdf 검토하는데 목적이 있다. 도핑 시간에 따른 확산 경향을 살펴본 결과, 시간이 증가함에 따라 도핑이 증가하는 뚜렷한 경향을 나타내었으며, 온도가 증가할수록 시간에 따른 농도의 증가량이 커지는 것을 알 수 있었다. 따라서, 고온에 비해 저온에서 더 빨리 pile-up이 일어나며 표면 부근의 농도가 포화상태에 빨리도달하는 것을 알 수 있었다. 다결정 Si에서의 확산거동을 살펴본 결과, 결정립 크기가 적을수록 저항이 높게 나타났으며, 단결정 Si의 저항값보다 약 4~5배 가까이 높은 값을 나타내었다. 또한 동일한 온도에서 시간에 따라 표면 부근의 pile-up 현상이 증가하는 뚜렷한 경향을 보여 주었다. 온도가 감소할수록 pili-up 현상이 증가하는 경향을 나타내었으며, 입계를 통한 빠른 확산에 의해 단결정 Si에 비해 표면 pile-up의 포화가 늦게 일어나는 것을 알 수 있었다. 고체 P를 source로 사용한 경우와 PH3 (phosphine)을 source로 사용한 경우를 비교 분석한 결과, 75$0^{\circ}C$에서 PH3에 비해 고체 P를 사용한 경우의 표면농도가 약 50배 정도로 높게 도핑된 것을 알 수 있었다. 도핑된 P중에서 전기적으로 활성화되어 있는 성분을 알아본 결과, SIMS의 결과와 유사하게 고체 P의 경우가 약 50배 높은 값을 나타내었다. 실제 소자의 특성을 알아보기 위하여 커패시터를 제작하여 측정하여 본 결과, 추가의 도핑을 하지 않은 시편에 비해 고체 P를 도핑한 시편이 약 8%의 Cmin 값의 증가를 보였으며, PH3에 비해 약 3%의 증가된 값을 나타냈었다. 누설전류 특성은 2V에서 수 fA/$\mu\textrm{m}$2로 양호하게 나타났다. 실험 결과 고체 P를 이용한 경우 더 우수한 특성을 나타내었으나, 예상과는 달리 차이가 적게 나타났다. 그 원인은 소자 제조 공정에서 콘택 부분에 큰 저항 성분이 형성되어 생긴 문제로 생각된다. 또한 실험에 사용된 유전체의 두께가 두꺼워 HSG 사이의 갭 부분이 캐패시턴스 증가에 기여를 충분히 못한 것으로 사료된다. 따라서, 제조 공정 상의 문제점을 제거하고 고체 P를 사용할 경우 본 실험에 비해 보다 증진된 특성을 보여줄 것으로 기대된다. 이상의 결론을 토대로 볼 때, 2-zone 확산법을 이용한 P 도핑 방법은 저온에서 효과적으로 다결정 Si에 고농도의 도핑을 할 수 있다고 생각된다.

• Korean Journal of Microbiology
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• v.54 no.1
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• pp.87-89
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• 2018

Flavisolibacter tropicus $LCS9^T$ was isolated from a soil sample collected from tropical zone within the Ecorium of the National Institute of Ecology in Seocheon, central-western Korea. In this study, we report the complete genome sequence of the bacterium Flavisolibacter tropicus $LCS9^T$, which possesses a circular chromosome comprised of 5, 940,863 bp with the G + C mol content of 41.5%. The genome sequence annotation showed that the complete genome includes 5,075 genes, 337 pseudogenes, and 59 rRNA genes. The radiation resistance genes such as excinuclease UvrABC complex and UvdE were present in the genome.

• Applied Chemistry for Engineering
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• v.22 no.6
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• pp.653-657
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• 2011

Conversion characteristics of $CH_4$ and $CO_2$ was studied using an atmospheric pressure plasma for the preparation of synthesis gas composed of $H_2$ and CO. The effects of delivered power, total gas flow rate, and gas residence time in the reactor on the conversion of $CH_4$ and $CO_2$ were evaluated in a plasma reactor with the type of dielectric barrier discharge. The increase of reactor temperature did not affect on the increase of conversion if the temperature does not reach to the appropriate level. The conversion of $CH_4$ and $CO_2$ largely increased with increasing the delivered power. As the $CH_4/CO_2$ ratio increased, the $CH_4$ conversion decreased, whereas the $CO_2$ conversion increased. Generally, the $CH_4$ convesion was higher than the $CO_2$ conversion through the variation of the process parameters.

• Korean Journal of Optics and Photonics
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• v.31 no.6
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• pp.321-327
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• 2020

We investigated the light reflection from thin films coated on substrates. Using a prism with a high refractive index as the incident medium, the phenomena of the total internal reflection (TIR) of the prism/film/substrate system and the light coupling into the optical waveguide formed by the air/film/substrate system were comprehensively studied and compared. If the refractive index of the thin film is greater than that of the substrate, within the TIR region of the substrate, sharp reflection minima occur at specific angles where the waveguide modes are excited, that can be used to accurately measure the refractive index and thickness of a thin film. On the other hand, if the refractive index of the thin film is smaller than that of the substrate, such waveguide modes do not exist. In this case, although not so distinct as a bulk medium, the TIR effect of the thin film is still observable, accompanied by an interference pattern. In this study we analyzed the overall reflection phenomena occurring from prism/film/substrate structures, to investigate the possibility of measuring the refractive index of a thin film in both cases.

• Journal of Korean Dental Hygiene Science
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• v.4 no.2
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• pp.77-88
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• 2021

Background: In this study, the Capstone Design was applied to the clinical dental hygiene course of the Department of Dental Hygiene, and its effect was confirmed by qualitatively evaluating the students' reflection on the capstone design class experience. Methods: This study was conducted for the "Clinical Dental Hygiene and Practice III" course, in which third year students develop the ability to judge and plan dental hygiene based on problem-solving ability and critical thinking. By applying the Capstone Design within the core curriculum of the class, the students analyzed problems based on their major knowledge of dental hygiene in order to improve their ability to manipulate periodontal instruments, and focusedon the process of developing the contents of periodontal instruments by using them. Results: The application of Capstone Design on clinical dental hygiene and practice III classes increased students' active class participation, and through the problem-solving process, students' learning and confidence improved. Conclusion: The Capstone Design can be viewed as a teaching method that promotes the participation of students in the dental hygiene department and can effectively help their learning and confidence through a problem-solving process.

• The Korea Journal of Herbology
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• v.34 no.6
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• pp.91-97
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• 2019

Objective : To establish a reliable tool between for the distinction of original plants of Sanguisorbae Radix, we analyzed the complete chloroplast genome sequence of Sanguisorbae Radix and identified single nucleotide polymorphisms (SNPs). Materials and methods : The chloroplast genome sequence of Sanguisorba officinalis, Sanguisorba tenuifolia f. alba (Trautv. & Mey.) Kitam and Sanguisorba tenuifolia Fisch. ex Link obtained using next-generation sequencing technology were described and compared with those of other species to develop specific markers. Candidate genetic markers were identified to distinguish species from the chloroplast sequences of each species using Modified Phred Phrap Consed and CLC Genomics Workbench programs. Results : The structure of the chloroplast genome of each sample that had been assembled and verified was circular, and the length was about 155 kbp. Through comparative analysis of the chloroplast sequences, we found 220 nucleotides, 158 SNPs, and 62 Indel (insertion and/or deletion), to distinguish Sanguisorba officinalis, Sanguisorba tenuifolia f. alba (Trautv. & Mey.) Kitam and Sanguisorba tenuifolia Fisch. ex Link. Finally, 15 specific SNP genetic markers were selected for the verification at positions. Avaliable primers for the dried herb, which is used as medicine, were used to develop the PCR amplification product of Sanguisorbae Radix to assess the applicability of PCR analysis. Conclusion : In this study, we found that Fendel-qPCR analysis based on the chloroplast DNA sequences can be an efficient tool for discrimination of Sanguisorba officinalis, Sanguisorba tenuifolia f. alba (Trautv. & Mey.) Kitam and Sanguisorba tenuifolia Fisch. ex Link.

• KNOM Review
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• v.22 no.2
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• pp.39-47
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• 2019

There are several big data-driven advanced research activities such as meteorological climate information, high energy physics, astronomy research, satellite information data, and genomic research data on KREONET. Since the performance degradation occurs in the environment with the existing network security equipment, methods for preventing the performance degradation on the high-performance research-only network and for high-speed research collaboration are being studied. In addition, the recent issue of quantum computers has been a threat to security using the existing encryption system. In this paper, we construct quantum cryptography-based communication network through environment construction and high-performance transmission test that build physical security through quantum cryptography-based communication network in end-to-end high-speed research network. The purpose of this study is to analyze the effect on network performance when performing physical encryption and to use it as basic data for constructing high-performance research collaboration network.

• Journal of IKEEE
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• v.27 no.1
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• pp.19-24
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• 2023

Since silicon having a band gap energy of about 1.12 eV are limited to a maximum operating temperature of less than 250 ℃, the sample with MIS structure based on the SiC substrate of wide-band gap energy was manufactured and the hydrogen response characteristics at high temperatures were investigated. The dielectric layer applied here is a tantalum oxide layer that is highly permeable to hydrogen gas and shows stability at high temperatures. It was formed by RTO at a temperature of 900 ℃ with tantalum. The thickness, depth profiles, and leakage current of the tantalum oxide layer were analyzed through TEM, SIMS, and leakage current characteristics. For the hydrogen gas response characteristics, the capacitance change characteristics were investigated in the temperature range from room temperature to 400 ℃ for hydrogen gas concentrations from 0 to 2,000 ppm. As a result, it was confirmed that the sample exhibited excellent sensitivity and a response time of about 60 seconds.

• Journal of the Korean Society of Radiology
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• v.81 no.3
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• pp.467-487
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• 2020

Anatomical imaging is the basis of the diagnosis and treatment response assessment of brain tumors. Among the existing imaging techniques currently available in clinical practice, diffusion-weighted imaging and perfusion imaging provide additional information. Recently, with the increasing importance of evaluation of the genomic variation and heterogeneity of tumors, clinical application of imaging techniques using radiomics and deep learning is expected. In this review, we will describe recommendations for magnetic resonance imaging protocols focusing on anatomical images that are still important in the clinical application of brain tumor imaging, and the basic principles of diffusion-weighted imaging and perfusion imaging among the advanced imaging techniques, as well as their pathophysiological background and clinical application. Finally, we will review the future perspectives of radiomics and deep learning applications in brain tumor imaging, which have been studied to a great extent due to the development of computer technology.

• Korean Journal of Medicinal Crop Science
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• v.8 no.4
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• pp.334-341
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• 2000

This study was conducted to determine the effects and optimum concentrantion of chemical mutagens, colchicine, EMS (ethyl methan sulfonate), MNU (1-methyl-3-1­-nitrosoguanidinenitro), sodium azide $(NaN_3)$ for induction of mutant plants. In order to induce the mutants of Dianthus superbus L, immature seed were pre-soaked in the warter adding each mutagens and concentration of EMS, colchicine, MNU, and sodium azide $(NaN_3)$. Comparision of morphological characteristic and seed germination in each mutant plants differed depending on mutagen sources and their concentrations. When 0.2% EMS were treated on seed, germination decreased to 12% while untreated control was germinated 76.6% for twenty days. Treatments of colchicine appeared higher germination than other mutagen but not survived. The survival rate was extremely decreased in MNU treatment at 0.5mM and chlorophyll-mutant plantlets were obtained by sodium azide treatment at 0.2mM. Chlorophyll mutants were produced by pre-soaking the immature seed of Dianthus superbus L. with mutagen, sodium azide. The control plants appeared normal green leaf color, while mutant plant after mutagenic treatment of immature seed results in yellow­-green stripes and albino in normal green leaf tissue. RAPD was carried out to check the genetic modification of regenerated plants by mutagen treatments at 0.2mM sodium azide. Three polymorphic DNA fragments out of thirty-seven obtained by RAPDs were observed in regenerated plants using five decamer primers.