• 한국산학기술학회논문지
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• 제11권2호
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• pp.443-448
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• 2010

기능이 극대화된 초소형 전자기기를 제조하기 위해 사용되는 적층형 소자들 중, 적층 세라믹 콘덴서(MLCC: Multi Layer Ceramic Capacitor)는 휴대전화, 노트북 등에 전자회로의 평활, 안정화, 노이즈 제거, 커플링 등 다양한 용도로 사용되고 있다. 적층형 세라믹 콘덴서는 생산과정에서 압축소결된 미세 다층구조의 적층형 소자 바(bar)를 하나 하나의 칩으로 절단하여야 한다. 현재 적용되고 있는 cutting, dicing 등의 방법을 대신하여 수율의 향상을 도모하기 위해 진동절삭법을 적용하여 그 특성을 조사하였다. 유연 힌지구조를 이용한 진동 절단 구조를 설계하고 해석하여 적층형 세라믹 콘덴서의 절단에 알맞은 진동절단기구를 제안한다. 또한, 설계결과를 바탕으로 제작된 진동절단 기구의 절단가공 특성을 조사하여 기존 절단법과의 성능비교를 통해 힌지 구조를 이용한 진동 절단의 타당성을 검증하였다.

• 대한기계학회논문집A
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• 제35권12호
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• pp.1599-1606
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• 2011

축소화된 사각형 및 패들형 블레이드, 금속재 및 복합재 허브와 같은 물리적인 축소형 형상의 변화에 따른 실물크기 무힌지 로터의 하중특성에 대하여 연구하였다. 이를 위하여 축소형 로터 모델을 활용한 정적시험, 지상 및 풍동시험을 수행하였다. 정적시험은 구조강성 및 관성특성, 고유진동수 및 감쇄율을 확인하기 위해 수행하였으며, 지상 및 풍동시험은 정지 및 전진 비행조건에서 안정성 및 공력특성을 확인하기 위해 수행하였다. 시험결과에 따르면, 동일한 조건에서 축소형 복합재 허브와 패들형 블레이드를 결합한 경우가 수직하중이 더 높았다. 축소형 복합재 허브와 패들형 블레이드가 결합된 형태가 금속재 허브의 결합된 형태보다 패들형 블레이드의 운동을 더 유연하게 구속하고 있음을 확인할 수 있었다.

• 한국생산제조학회지
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• 제19권3호
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• pp.419-425
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• 2010

To machine the micro hole, laser machining system is widely used, however, the system cannot fabricate the micro hole with high aspect ratio and good surface finish. To break the obstacles, the high frequency vibration mechanism with PZT (Piezoelectric Transducers) is proposed in this paper. The mechanism will vibrate the laser beam in vertical direction so that the aspect ratio and surface finish may be higher than the conventional. The mechanism vibrates the eyepiece of laser optics. In addition to the benefits, the mechanism enables us to have high precision and flexibility. It decreases burr and debris during machining. And it is able to machine various materials of workpiece. This research include high frequency and large travel range of the proposed mechanism. The PZT motion of mechanism and analysis on the sensitivity of design parameters are extracted from a finite element method (FEM) simulation. In the analysis, the target vibration mode without parasitic motion is designated to have the target frequency and high amplitude.

• Design & Manufacturing
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• 제16권3호
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• pp.22-27
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• 2022

The demand for new processing technology that can improve productivity is increasing in industries that require large-scale and various products. In response to this demand, a robot machining system with flexibility is required. Because of the low rigidity of the robot, the robot machining system has a large error during machining and is vulnerable to vibration generated during machining. Vibration generated during machining deteriorates machining quality and reduces the durability of the machine. To solve this problem, a stage for fixing the spindle during machining is required. In order to compensate for the robot's low rigidity, a system combining a piezoelectric actuator for generating a large force and a guide mechanism to actuate with a desired direction is required. Since the rigidity of flexible hinges varies depending on the structure, it is important to optimal design the flexible hinge and high-rigidity system. The purpose of this research is to make analytic model and optimize a flexible hinge and to design a high rigidity stage. In this research, to design a flexible hinge stage, a concept design of system for high rigidity and flexure hinge modeling is carried out. Based on analytic modeling, the optimal design for the purpose of high rigidity is finished and the optimal design results is used to check the error between the modeling and actual simulation results.

• 한국생산제조학회지
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• 제21권2호
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• pp.324-330
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• 2012

In this paper, we presents a robust control system design for compensating hysteresis of a piezoelectric actuator-based actuation unit. First, the dynamics between the input voltage and the output displacement of the actuation unit are unravelled via a non-parametric system identification method. From the dynamic characteristics of those experimental transfer functions, a parametric model is then derived, whose dynamics match those of the non-parametric ones under various conditions on input voltages. A robust controller is constructed on the basis of this parametric model in order not only to effectively compensate the hysteresis of the actuation unit but also to guarantee the robust stability. Extensive experiments show that the proposed robust control system successfully mitigate the effect of the hysteresis and improve the tracking capability of the actuation unit.

• 한국기계가공학회지
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• 제9권6호
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• pp.51-58
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• 2010

This paper suggests a control technique of the two axes precision stage. The stage is supported by four flexible spring hinges and driven by two piezoelectric actuators. The dynamic motion of the stage is analysed by the finite element method and identified by the frequency domain modeling technique based on the experimental data. The sliding mode control with integrator is applied to improve the tracking ability of the stage to the complex reference input signal. Experimental results demonstrate that the proposed modeling schemes and control algorithm can be used effectively for the two axes stage.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2009년도 춘계학술대회 논문집
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• pp.239-244
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• 2009

This paper suggests a precision positioning control technique of a precision positioning stage with coupling effects. The precision positioning stage is supported by four flexible spring hinges and driven by two piezoelectric actuators. The dynamic characteristics of the precision positioning stage is modeled and identified by the FEM analysis. The dynamic characteristics of the stage are also identified by the frequency domain modeling technique based on the experimental data. Reliability of two modeling methods is examined by comparing the numerically and experimentally produced responses of the stage. This paper proposes a sliding mode control technique with integrator to improve the tracking ability of the precision positioning stage to the complex input signal using. To demonstrate the effectiveness of the proposed modeling schemes and control algorithm, experiment validations are performed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.539-542
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• 1997

We present a micro-positioning stage that has minimized geometrical error and can drive in the 4-axis. This stage divided into two parts: $Z\theta_x$ $\theta_y$, motion stage and$\theta_z$ motion stage. These stages are constructed in flexure hinges, piezoelectric actuators and displacement scnsors. The dynamic model for each stage is obtained and their FE (finite element) models are made. Using the Lagrange's equation, the motion of equation is found. Through the parametric analysis and FE analysis, sensitiv~ty of the design parameters is executed. Finally, fundamental frequencies, maximum stress, and displacement sensitivity for each stage are obtained. We expect that this micro-positioning stage be a useful micro-alignment device for various applications.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.648-651
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• 2003

This paper presents a 3-axis fine positioning stage. All the procedure concerning the design and fabrication of the stae are described. The stage considered here is composed of flexure hinges, piezoelectric actuators and their peripherals. A special flexure hinge is adopted to be able to actuate the single stage in three axes at the same time. A ball contact mechanism is introduced into the piezoelectric actuator to avoid the cross talk among the axes. The final design is obtained with the theoretical analysis on the stage. An actual fine stage is developed and the design specifications are verified through an experiment.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1207-1210
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• 2003

This paper deals with experiments for dynamic characteristics and performance evaluation of the 3-axis fine positioning stage developed in [1]. The features of the developed fine positioning stage are the long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design. The dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the actuator and the stage design. Performance evaluation is also made for the PZT actuators as well as the stage positioning accuracy. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning.