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Modeling and Motion Control of the Precision Positioning Stage with Flexible Hinge Mechanism  

Kim, Yeung-Shik (금오공과대학교 기계공학과)
Kim, Jai-Ik (금오공과대학교 기계공학부)
Kim, In-Soo (금오공과대학교 기계공학부)
Publication Information
Journal of the Korean Society of Manufacturing Process Engineers / v.9, no.6, 2010 , pp. 51-58 More about this Journal
Abstract
This paper suggests a control technique of the two axes precision stage. The stage is supported by four flexible spring hinges and driven by two piezoelectric actuators. The dynamic motion of the stage is analysed by the finite element method and identified by the frequency domain modeling technique based on the experimental data. The sliding mode control with integrator is applied to improve the tracking ability of the stage to the complex reference input signal. Experimental results demonstrate that the proposed modeling schemes and control algorithm can be used effectively for the two axes stage.
Keywords
Two Axes Stage; Piezoelectric Actuator; Sliding Mode Control; Frequency Domain Modeling;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
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