• Journal of the Korean Society for Precision Engineering
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• v.19 no.5
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• pp.64-71
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• 2002

A new model utilizing a transfer function was proposed in the previous paper fur analizing motion errors of hydrostatic tables. Validity of the proposed method was theoretically verified as the calculated motion errors were compared with the results by conventional multi pad method. In this paper, relationship between form error of rail and motion errors of hydrostatic table is analized theoretically in order to comprehand so-called ‘averaging effect of oil film’. Experiments on the motion errors of hydrostatic table is conducted with 3 different rails, and the results are compared with the results calculated by Transfer Function Method. The results show good agreement. From the results, it is verified that TFM is very effective to analize the motion errors of hydrostatic table.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.454-458
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• 2001

A new model utilizing a transfer function was proposed in the previous paper for analizing motion errors of hydrostatic tables. Validity of the proposed method was theoretically verified as the calculated motion errors were compared with the results by conventional multi pad method. In this paper, relationship between form error of rail and motion errors of hydrostatic table is analized theoretically in order to comprehand so-called 'averaging effect of oil film'. Experiments on the motion errors of hydrostatic table is conducted with 3 different rails, and the results are compared with the results calculated by Transfer Function Method. The results show good agreement. From the results, it is verified that TFM is very effective to analize the motion errors of hydrostatic table.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.05a
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• pp.658-662
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• 2000

In order to achieve systematical method for improving motion accuracy of hydrostatic table, an algorithm using finite element method is proposed in this paper. Quantification of averaging effect of oil film on motion error is performed theoretically by analysis on the relationship between spacial frequency of rail form error and motion error of table. Influences of film stiffness and pocket size on the motion error of table are also analyzed theoretically Validity of the algorithm is verified experimentally from the test on the motion error of table with three types of rail which have different form profile. Experimental results show that the algorithm is very effective to analyze theoretically the motion error of hydrostatic table.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.04b
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• pp.142-145
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• 1993

유정압베어링은 공기베어링과같은 유막의 평균화 효과를 얻을 수 있어 구성부품의 형상오차보다 우수한 회전정도를 기대 할 수 있으며 상대적으로 높은 강성, 부하용량 및 우수한 감쇠특성을 보유하고 있으면서도 비접촉에 의한 무보수, 반영구적 인 수명등의 장점이 있어 정밀도와 강성이 함께 요구되는 연삭기를 중심으로 공작기계 분야에 활발히 응용되고 있다. 본 연구에서는 고정밀도가 요구되는 연삭기용 유정압주축을 시작하고 정특성, 회전특성, 열특성등을 실험적으로 해석함으로서 실용화에 필요한 제변수들의 영향을 정량적으로 얻고자 하였다.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.12
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• pp.137-144
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• 2000

In order to achieve systematical method for improving motion accuracy of hydrostatic table, an algorithm using finite element method is proposed in this paper. Quantification of averaging effect of oil film on motion error is performed theoretically by analysis on the relationship between spacial frequency of rail form error and motion error of table. Influences of film stiffness and pocket size on the motion error of table are also analyzed theoretically. Validity of the algorithm is verified experimentally from the test on the motion error of table with three types of rail which have different form profile. Experimental results show that the algorithm is very effective to analyze theoretically the motion error of hydrostatic table.