• Title/Summary/Keyword: 유량 측정 방법

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RF Magnetron Sputter로 증착 한 HfN 박막의 Plasma Power 변화에 따른 Nano-electroribology 특성 변화 연구

  • Park, Myeong-Jun;Kim, Seong-Jun;Kim, Su-In;Lee, Chang-U
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.354.2-354.2
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    • 2014
  • 최근 반도체 산업의 발전에 따라 반도체 소자 내 배선재료로 사용되던 Aluminium (Al)의 대체물로 Copper (Cu)가 사용되고 있다. Cu는 Al보다 우수한 전도성과 비용이 저렴하다는 장점이 있으나 반도체 기판과의 확산으로 이를 해결해야만 하는 문제점이 있다. 이는 Si와 Cu사이에 확산방지막을 사용하여 해결할 수 있는데 Hafnium Nitride (HfN) 박막은 다른 물질과 비교해 고온에서의 안정성과 낮은 비저항을 가지고 있어 주목을 받고 있다. 본 연구에서는 rf magnetron sputter 방법으로 박막 증착 시에 인가하는 rf power가 박막의 표면 특성에 어떠한 영향을 미치는지 nano-indenter를 사용해 surface hardness와 elastic modulus의 변화를 중심으로 알아보았다. 시료는 rf magnetron sputter로 증착 시 인가하는 plasma power를 60W와 80W로 달리하여 증착하였다. 증착가스는 Ar과 $N_2$를 조절하여 사용하였고 총 유량을 40 sccm 으로 고정하였으며, 이 때 압력은 3mTorr로 유지하였다. 실험결과 plasma power를 80W로 인가하여 증착한 시료의 surface hardness (18.48 GPa)가 60W로 증착한 시료의 surface hardness (12.03 GPa)보다 큰 값을 나타내었다. 이와 마찬가지로 80W로 증착한 시료의 elastic modulus(187.16 GPa)도 60W로 증착한 시료의 탄성계수 (141.15 GPa)보다 큰 값을 나타내었다. 이는 증착 시 인가하는 plasma power의 크기가 증가하면 박막표면에 compressive stress가 생성되어 박막의 surface hardness와 elastic modulus가 상대적으로 높게 측정되는 것으로 생각된다.

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Correlation between the Potential Barrier and Variation of Temperature on SiOC thin film (탄소 주입 실리콘 산화 절연박막에서 전위장벽과 온도 변화에 대한 상관성)

  • Oh, Teresa
    • Journal of the Korea Institute of Information and Communication Engineering
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    • v.12 no.12
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    • pp.2247-2252
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    • 2008
  • The SiOC films as the carbon doped silicon oxide film were prepared with the variation of flow rater ratios by plasma enhanced chemical vapor deposition. The samples were analyzed by the fourier transform infrared spectroscopy, I-V measurement and scanning electron microscopy. The samples were shown the chemical shift according to the flow rate ratios, and the grain did not formed at the sample with hybrid properties. The leakage currents decreased according to the increasing of the substrate temperature at the sample with hybrid properties, but the potential barrier increased.

Previous road type GI/LID demonstration test facility design and construction (투수 도로형 GI/LID 실증실험시설 설계 및 구축)

  • Park, Jae Rock;Kim, Gun;Lee, Jae Hyeok;Shin, Hyun Suk
    • Proceedings of the Korea Water Resources Association Conference
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    • 2016.05a
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    • pp.171-171
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    • 2016
  • 최근 도시화가 진행되면서 지표의 불투수화가 급격하게 진행되고 강우의 지표면 유출량이 급격하게 증가하여, 강수 시 첨두유출 시간이 감소하고 단기간 집중유출이 증대되어 폭우로 인한 도시 홍수등이 발생하고 있다. 이러한 현상에 효과적으로 적응하기 위해 환경적으로 지속가능한 도시 개발을 위한 그린인프라(GI, Green Infrastructure) 및 저영향개발기법(LID, Low Impact Developpment)이 국내에 도입되고 있다. 하지만 아직까지 투수성 포장의 물순환 성능 평가 및 설계 방법에 대한 기준이 명확하지 않으며, 많은 경우 투수성 포장의 적용은 유출저감효과에 대한 정량적 해석 없이 적용되고 있는 실정이다. 이에 본 연구에서는 경남 양산시 부산대학교 제 2 캠퍼스에 있는 "한국형 GI&LID 실증실험단지"에 투수 도로형 실증실험시설을 구축하였다. 실험 시설은 불투수 아스팔트와 투수 아스팔트, 불투수 콘크리트와 투수 콘크리트 비교실험 할 수 있으며 도로표면 유출수 및 침투수에 대한 유량 및 수질 측정 모니터링을 통해 침투효과 및 특성을 분석할 수 있으며 차후 투수성 포장의 클로깅 현상으로 인한 투수성능의 감소 등 여러 가지 실험을 할 수 있을 것이다.

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Research on Air Flow Rate Test Method for Blower System (송풍 시스템의 공기유량측정 방법에 관한 연구)

  • Lee, Jun-Sik
    • Journal of the Korean Society of Industry Convergence
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    • v.25 no.1
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    • pp.55-60
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    • 2022
  • This study conducted the measurements of air flow rate for blower systems with experiment and numerical. A new airflow rate test method is suggested, with which it is possible to accurate measurements and calculate the air flow rate for blower systems. The blower(axial fan) is an industrial fluid machine device that supplies a large amount of air by driving an impeller with an electric motor, and it is widely used throughout the industry such as steel, power plant, chemical, semiconductor, LC D, food, and cement. The airflow from the blower is for exchanging the heat in the cooling unit or heat exchanger. The temperature of coolants and hydraulic oil primarily depends on the amount of airflow rate through the cooling package so its accurate estimation is very important. Moreover, it required a larger investment in time and cost since it could not be executed until the system is actually made. Therefore, this research is intended to examine the phenomenon of air flow pattern when testing air flow rate, suggested new test method, and show the result of the validation test.

Estimation of Antecedent Moisture Condition in Rainfall-Runoff Modeling Based on Soil Water Balance Model (Soil Water Balance 모델을 이용한 강우유출 모형의 초기함수 조건 추정)

  • Lee, Ye-Rin;Kang, Subin;Shim, Eunjeung;Kwon, Hyun-Han
    • Proceedings of the Korea Water Resources Association Conference
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    • 2021.06a
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    • pp.307-307
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    • 2021
  • 개념적 강우-유출모형에서 토양수분과 관련된 물리적 거동은 간략화 된 형태로 강우 및 온도자료를 활용하여 중간변량(state variable)으로 간접적으로 고려되고 있다. 특히 강우-유출모형에 초기함수 조건은 선행함수조건을 고려하여 수문지질학적 평가를 통하여 결정되어야 하나, 일반적으로 가정되거나 모형에서 간략화 된 분석과정을 통해 추정되고 있다. 본 연구에서는 토양의 Water Balance 모형 기반의 개념적 토양수분 추정모형을 활용하였다. 토양수분의 시간적 변동성을 평가하는데 있어서 연속적으로 측정된 In-situ 토양수분 자료를 이용하여 모형의 적합성을 평가하였다. Green-Ampt 방법과 중력식 침투방법과 온도를 활용한 증발산 추정기법을 연계한 토양함수 평가 모형을 개발하였다. In-situ 토양수분 자료와 유역의 강수량 및 온도자료를 이용한 관련 매개변수를 Bayesian 기법을 통해 추정하였으며 매개변수의 민감도를 평가하여 제시하였다. 최종적으로 제안된 모형의 활용측면에서 강우-유출모형의 초기함수 조건으로써의 역할을 평가하였다. 구체적으로 첨두유량 및 유출고와 초기함수조건과의 관계를 제시하고 강우-유출모형에서 활용방안을 제시하고자 한다.

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A Microfluidic Chip-Based Creatinine Filtration Device (마이크로 플루이딕 칩을 기반으로 한 크레아티닌 여과장치)

  • Lee, Sack;Shin, Dong-Gyu;Nguyen, Thanh Qua;Park, Woo-Tae
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.39 no.12
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    • pp.921-925
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    • 2015
  • The number of people suffering from renal disease increases every year. One of the most common treatments (clinical care options) for renal diseases is hemodialysis. However it takes a long time and has a high cost. Therefore, the importance of artificial kidney research has risen. Filtering creatinine from blood is one of the prime renal functions. Thus, we designed a novel two channel microfluidic chip focused on that function. In order to bond the individual polydimethylsiloxane layers, we have developed a housing system using acrylic plastic frame. This method has significant advantages in changing filter membranes. We use anodic aluminum oxide for the filter membrane. We analyzed the difference in the absorbance values for various creatinine concentrations using the Jaffe reaction. For the purpose of acquiring a standard equation to quantify the creatinine concentration, we interpolated the measured data and confirmed the concentration of the filtered solution. Through this experiment, we determined how the filtration efficiency depended on the flow rate and creatinine concentration.

Calibration of the WASP4 Model Applied to Lake Paldang (WASP4 모형의 매개변수 추정 - 팔당호(八堂湖)를 중심으로 -)

  • Cho, Hong Yeon;Jun, Kyung Soo;Lee, Kil Seong;Han, Kwang Suk
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.13 no.4
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    • pp.177-188
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    • 1993
  • Model parameters of the WASP4 applied to Lake Paldang were estimated. The methodology is based on grouping water quality constituents and relevant parameters and successively estimating each group of parameters by a trial-and-error procedure. Chlorophyll a, nitrogen cycles, phosphorus cycles, BOD and DO were simulated at the complexity level 4. A water budget analysis using the monthly records of reservoir inflows and outflows in 1989 and 1990 was made to determine seasonally-averaged flowrates at model boundaries. Estimated flowrates were used, together with the seasonal average of water quality measurements in 1989 and 1990 for the calibration and verification, respectively, of the model. Grouping water quality constituents and associated parameters proved to be efficient in estimating a number of model parameters. From the results of model calibration and verification, it was found that quantitative evaluations of nonpoint and benthic sources of organic matters are essential. Benthic sources near the entrance of the Kyeongancheon were the most significant.

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Experimental Study on Failure Characteristics of Riprap Revetments in Meandering Channel (만곡부 흐름특성을 고려한 사석호안공 붕괴 수리실험 연구)

  • Bae, Deok-Won;Kim, Hyung-Jun;Yoon, Kwang-Seok
    • Proceedings of the Korea Water Resources Association Conference
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    • 2012.05a
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    • pp.696-696
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    • 2012
  • 호안은 유수의 침입으로부터 제방 및 하안의 침식 피해를 방지하기 위해 제방에 설치되는 구조물이다. 침식에 의한 제방 및 호안의 대표적인 붕괴특성 중에는 만곡부, 하천 급경사, 지형의 간섭효과 등이 있다. 특히, 만곡부는 원심력, 2차류 등에 의한 수위상승 및 유속증가로 제체에 응력 집중이 발생되어 안정성 저하를 유발할 수 있다. 또한, 만곡부의 흐름 방향전환 현상은 하도내 통수능 저하를 발생시켜 홍수피해를 가중시킬 수 있다. 따라서 하천특성상 만곡부에 의해 발생할 수 있는 홍수피해 요소를 저감시킬 수 있도록 적합한 피해저감대책을 마련할 필요가 있다. 제방의 보강대책으로서 활용되고 있는 호안은 역학적인 측면에서 외력과 저항력의 크기에 따라 안정성이 평가되어야 하며 지역여건 등에 따른 만곡부의 수위상승 및 제방 침식 등을 고려한 설계가 수행되어야 한다. 국내 실무에서 적용되고 있는 호안설계방법은 하천설계기준 해설(2009)을 참고하고 있는데, 흐름현상 및 만곡부 특성 등에 대하여 경험과 이론의 양면을 고려한 설계를 수행하도록 제안하고 있다. 이는 호안 안정성에 대한 역학적 검토 방법의 한계로 비합리적 설계가 될 우려가 있다. 따라서 만곡부에 의한 유속 및 소류력 등 흐름특성을 고려한 정량적인 평가기법이 요구되는 상황이다. 본 연구에서는 수리실험을 통해 만곡에 의한 흐름영향과 수리학적 거동 및 설계요소를 파악하고자 만곡부에 사석호안공을 설치하여 흐름전환 및 유속변화에 따른 사석호안공의 이탈현상을 재현하였다. 실험수로는 곡률반경( )이 4.5 m인 만곡부가 3개소 발생하는 폭 2.3 m, 길이 25 m의 다중 사행수로 형태이다. 실험수로 우안의 1V:2H 경사면에 10, 20, 30, 40, 50 mm 사석을 크기별로 설치하여 만곡에 의한 유속변화 등 흐름현상과 호안공 이탈을 관찰하였다. 수리실험은 고정상으로 수행되었으며 정상류 흐름조건에서 공급유량별 하류단 수위 조절을 통해 만곡부내 호안 공 이탈을 발생시키는 설계인자를 도출하고자 유속과 수심을 측정하였다. 실험결과를 바탕으로 사석호안공 설계시 1차원 접근유속에 만곡 영향을 고려하여 대표유속으로 적용하는 방법의 특성을 파악하고, 사석호안공의 이탈유속과 만곡에 의한 흐름특성간의 상관관계를 분석하여 제원결정기법을 제안하였다.

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Comparison of Single-Breath and Intra-Breath Method in Measuring Diffusing Capacity for Carbon Monoxide of the Lung (일산화탄소 폐확산능검사에서 단회호흡법과 호흡내검사법의 비교)

  • Lee, Jae-Ho;Chung, Hee-Soon;Shim, Young-Soo
    • Tuberculosis and Respiratory Diseases
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    • v.42 no.4
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    • pp.555-568
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    • 1995
  • Background: It is most physiologic to measure the diffusing capacity of the lung by using oxygen, but it is so difficult to measure partial pressure of oxygen in the capillary blood of the lung that in clinical practice it is measured by using carbon monoxide, and single-breath diffusing capacity method is used most widely. However, since the process of withholding the breath for 10 seconds after inspiration to the total lung capacity is very hard to practice for patients who suffer from cough, dyspnea, etc, the intra-breath lung diffusing capacity method which requires a single exhalation of low-flow rate without such process was devised. In this study, we want to know whether or not there is any significant difference in the diffusing capacity of the lung measured by the single-breath and intra-breath methods, and if any, which factors have any influence. Methods: We chose randomly 73 persons without regarding specific disease, and after conducting 3 times the flow-volume curve test, we selected forced vital capacity(FVC), percent of predicted forced vital capacity, forced expiratory volume within 1 second($FEV_1$), percent of forced expiratory volume within 1 second, the ratio of forced expiratory volume within 1 second against forced vital capacity($FEV_1$/FVC) in test which the sum of FVC and $FEV_1$ is biggest. We measured the diffusing capacity of the lung 3 times in each of the single-breath and intra-breath methods at intervals of 5 minutes, and we evaluated which factors have any influence on the difference of the diffusing capacity of the lung between two methods[the mean values(ml/min/mmHg) of difference between two diffusing capacity measured by two methods] by means of the linear regression method, and obtained the following results: Results: 1) Intra-test reproducibility in the single-breath and intra-breath methods was excellent. 2) There was in general a good correlation between the diffusing capacity of the lung measured by a single-breath method and that measured by the intra-breath method, but there was a significant difference between values measured by both methods($1.01{\pm}0.35ml/min/mmHg$, p<0.01) 3) The difference between the diffusing capacity of the lung measured by both methods was not correlated to FVC, but was correlated to $FEV_1$, percent of $FEV_1$, $FEV_1$/FVC and the gradient of methane concentration which is an indicator of distribution of ventilation, and it was found as a result of the multiple regression test, that the effect of $FEV_1$/FVC was most strong(r=-0.4725, p<0.01) 4) In a graphic view of the difference of diffusing capacity measured by single-breath and intra-breath method and $FEV_1$/FVC, it was found that the former was divided into two groups in section where $FEV_1$/FVC is 50~60%, and that there was no significant difference between two methods in the section where $FEV_1$/FVC is equal or more than 60% ($0.05{\pm}0.24ml/min/mmHg$, p>0.1), but there was significant difference in the section, less than 60%($-4.5{\pm}0.34ml/min/mmHg$, p<0.01). 5. The diffusing capacity of the lung measured by the single-breath and intra-breath method was the same in value($24.3{\pm}0.68ml/min/mmHg$) within the normal range(2%/L) of the methane gas gradient, and there was no difference depending on the measuring method, but if the methane concentration gradients exceed 2%/L, the diffusing capacity of the lung measured by single-breath method became $15.0{\pm}0.44ml/min/mmHg$, and that measured by intra-breath method, $11.9{\pm}0.51ml/min/mmHg$, and there was a significant difference between them(p<0.01). Conclusion: Therefore, in case where $FEV_1$/FVC was less than 60%, the diffusing capacity of the lung measured by intra-breath method represented significantly lower value than that by single-breath method, and it was presumed to be caused largely by a defect of ventilation-distribution, but the possibility could not be excluded that the diffusing capacity of the lung might be overestimated in the single-breath method, or the actual reduction of the diffusing capacity of the lung appeared more sensitively in the intra-breath method.

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High Speed Direct Bonding of Silicon Wafer Using Atmospheric Pressure Plasma (상압 플라즈마를 이용한 고속 실리콘 웨이퍼 직접접합 공정)

  • Cha, Yong-Won;Park, Sang-Su;Shin, Ho-Jun;Kim, Yong Taek;Lee, Jung Hoon;Suh, Il Woong;Choa, Sung-Hoon
    • Journal of the Microelectronics and Packaging Society
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    • v.22 no.3
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    • pp.31-38
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    • 2015
  • In order to achieve a high speed and high quality silicon wafer bonding, the room-temperature direct bonding using atmospheric pressure plasma and sprayed water vapor was developed. Effects of different plasma fabrication parameters, such as flow rate of $N_2$ gas, flow rate of CDA (clear dry air), gap between the plasma head and wafer surface, and plasma applied voltage, on plasma activation were investigated using the measurements of the contact angle. Influences of the annealing temperature and the annealing time on bonding strength were also investigated. The bonding strength of the bonded wafers was measured using a crack opening method. The optimized condition for the highest bonding strength was an annealing temperature of $400^{\circ}C$ and an annealing time of 2 hours. For the plasma activation conditions, the highest bonding strength was achieved at the plasma scan speed of 30 mm/sec and the number of plasma treatment of 4 times. After optimization of the plasma activation conditions and annealing conditions, the direct bonding of the silicon wafers was performed. The infrared transmission image and the cross sectional image of bonded interface indicated that there is no void and defects on the bonded wafers. The bonded wafer exhibited a bonding strength of average $2.3J/m^2$.