• Title/Summary/Keyword: 유도결합 플라즈마

Search Result 671, Processing Time 0.037 seconds

The effects of hydrogen treatment on the properties of Si-doped Ga0.45In0.55P/Ge structures for triple junction solar cells

  • Lee, Sang-Su;Yang, Chang-Jae;Ha, Seung-Gyu;Kim, Chang-Ju;Sin, Geon-Uk;O, Se-Ung;Park, Jin-Seop;Park, Won-Gyu;Choe, Won-Jun;Yun, Ui-Jun
    • Proceedings of the Korean Vacuum Society Conference
    • /
    • 2010.08a
    • /
    • pp.143-144
    • /
    • 2010
  • 3-5족 화합물 반도체를 이용한 집광형 삼중 접합 태양전지는 40% 이상의 광변환 효율로 많은 주목을 받고 있다[1]. 삼중 접합 태양전지의 하부 셀은 기계적 강도가 높고 장파장을 흡수할 수 있는 Ge이 사용된다. Ge위에 성장될 III-V족 단결정막으로서 Ge과 격자상수가 일치하는 GaInP나 GaAs가 적합하고, 성장 중 V족 원소의 열확산으로 인해 Ge과 pn접합을 형성하게 된다. 이때 GaInP의 P의 경우 GaAs의 As보다 확산계수가 낮아 태양전지 변환효율향상에 유리한 얇은 접합 형성이 가능하고, 표면 에칭효과가 적기 때문에 GaInP를 단결정막으로 선택하여 p-type Ge기판 위 성장으로 단일접합 Ge구조 제작이 가능하다. 하지만 이종접합 구조 성장으로 인해 발생한 계면사이의 전위나 미세결함들이 결정막내부에 존재하게 되며 이러한 결함들은 광학소자 응용 시 비발광 센터로 작용할 뿐 아니라 소자의 누설전류를 증가시키는 원인으로 작용하여 태양전지 변환효율을 감소시키게 된다. 이에 결함감소를 통해 소자의 전기적 특성을 향상시키고자 수소 열처리나 플라즈마 공정을 통해 수소 원자를 박막내부로 확산시키고, 계면이나 박막 내 결함들과 결합시킴으로서 결함들의 비활성화를 유도하는 연구가 많이 진행되어 왔다 [2][3]. 하지만, 격자불일치를 갖는 GaInP/Ge 구조에 대한 수소 열처리 및 불순물 준위의 거동에 대한 연구는 많이 진행되어 있지 않다. 따라서 본 연구에서는 Ga0.45In0.55P/Ge구조에 수소 열처리 공정을 적용을 통하여 단결정막 내부 및 계면에서의 결함밀도를 제어하고 이를 통해 태양 전지의 변환효율을 향상시키고자 한다. <111> 방향으로 $6^{\circ}C$기울어진 p-type Ge(100) 기판 위에 유기금속화학증착법 (MOCVD)을 통해 Si이 도핑된 200 nm의 n-type GaInP층을 성장하여 Ge과 단일접합 n-p 구조를 제작하였다. 제작된 GaInP/Ge구조를 furnace에서 250도에서 90~150분간 시간변화를 주어 수소열처리 공정을 진행하였다. 저온 photoluminescence를 통해 GaInP층의 광학적 특성 변화를 관찰한 결과, 1.872 eV에서 free-exciton peak과 1.761 eV에서 Si 도펀트 saturation에 의해 발생된 D-A (Donor to Acceptor)천이로 판단되는 peak을 검출할 수 있었다. 수소 열처리 시간이 증가함에 따라 free-exciton peak 세기 증가와 반가폭 감소를 확인하였고, D-A peak이 사라지는 것을 관찰할 수 있었다. 이러한 결과는 수소 열처리에 따른 단결정막 내부의 수소원자들이 얕은 불순물(shallow impurity) 들로 작용하는 도펀트들이나, 깊은 준위결함(deep level defect)으로 작용하는 계면근처의 전위, 미세결함들과의 결합으로 결함 비활성화를 야기해 발광세기와 결정질 향상효과를 보인 것으로 판단된다. 본 발표에서는 상술한 결과를 바탕으로 한 수소 열처리를 통한 박막 및 계면에서의 결함준위의 거동에 대한 광분석 결과가 논의될 것이다.

  • PDF

Determination of Heavy Metals in Sanitary Products of Women (여성용 위생용품의 유해중금속 분석)

  • Shin, Jeoung-Hwa;Lee, Kyu-Keon;Chung, Myung-Hee
    • Journal of the Korean Society of Clothing and Textiles
    • /
    • v.33 no.6
    • /
    • pp.853-859
    • /
    • 2009
  • Endometriosis becomes the most common cause of pelvic pain and infertility women. The cause of endometriosis has ever been entirely proven. However, an increased use of commercial feminine hygiene products such as tampons and sanitary napkins was considered one of the major affect. Harmful substances in feminine hygiene products was analyzed and evaluated. Samples of commercial products obtained from Korea, Japan, America, Germany, and China were analyzed for six hazardous inorganic elements (chromium, cobalt, nickel, copper, cadmium and lead). In the extractable heavy metals of napkins, Cr, Ni and Cu were found in all of the samples, while Cd was detected only in two samples. In the tampons, Cr, Ni and Cu were found in all of the samples. The presence of Co and Cd was not detected in all samples The concentrations of extractable heavy metals in the tampons were lower than those in the sanitary napkins. The content of extractable heavy metals in the sanitary products was compared with the criteria of the 100 $\ddot{O}KO$ TEX Standard. It was confirmed that the level of heavy metals in the sanitary products posed no serious risk to health, based on the human-ecological criteria defined by the 100 $\ddot{O}KO$ TEX Standard.

Heavy Metal Contents in Ginseng and Ginseng Products (인삼 및 인삼제품류의 중금속 함량)

  • Hu, Soo-Jung;Kim, Mee-Hye;Park, Sung-Kug;Lee, Jong-Ok
    • Korean Journal of Food Science and Technology
    • /
    • v.37 no.3
    • /
    • pp.329-333
    • /
    • 2005
  • Contents of heavy metals, mercury (Hg), lead (Pb), cadmium (Cd), arsenic (As), manganese (Mn), zinc (Zn), and copper (Cu), In ginsengs and ginsengs products their safety were evaluated using a mercury analyzer, atomic absorption spectrophotometer and Inductively coupled plasma spectrometer. Contents of heavy metals in ginsengs were [min-max(mean), mg/kg]; Hg 0.002-0.02(0.007), Pb 0.018-0.39(0.106), Cd 0.004-0.413(0.106), As ND-0.094(0.013), Cu 0.24-5.5(3.2), Mn 3.18-50.4(20.09), Zn 0.76-44.27(13.42). Ginseng products values were; Hg 0.0001-0.002(0.001), Pb 0.001-0.133(0.017), Cd ND-0.07(0.004) As ND-0.181(0.008), Cu ND-1.1(0.13), Mn 0.73-30.15(1.61). Zn 0.02-13.42(1.02), similar to those reported by other countries. Average weekly Intakes of Hg, Pb and Cd from ginseng and ginseng products were 0,003, 0.01 and 0,02% of provisional tolerable weekly intake established by FAO/WHO, respectively. Our result could be utilized as important references to establish the standard of lead in ginseng and ginseng products.

Evaluation of Corrosivity of Antifreeze for Automobiles Containing Non-amine Type Corrosion Inhibitors for Copper (Non-amine계 부식방지제를 포함하는 자동차용 부동액의 구리 부식성 평가)

  • Soh, Soon-Young;Chun, Yong-Jin;Park, In-Ha;Han, Sang-Mi;Jang, Hee-Jin
    • Journal of the Korea Academia-Industrial cooperation Society
    • /
    • v.21 no.2
    • /
    • pp.619-626
    • /
    • 2020
  • The development of new antifreeze mixtures containing non-amine-type corrosion inhibitors, which considers environmental protection, has become a major issue. In this study, four non-amine-type corrosion inhibitors were synthesized and used to produce five kinds of new antifreeze for automobiles to evaluate the rate of copper corrosion. The effects were evaluated by the weight change, surface observation, roughness measurement, and measurement of copper elution in the solution. The amount of copper eluted measured by ICP from Sample 4 was small, and the elution rate was prolonged. Sample 4 showed the best anti-corrosion performance owing to a corrosion suppression effect by passivating copper because the metal surface was smooth after the test, and the corrosion product layer was formed evenly on the surface as small local corrosion was observed. The major corrosion inhibitor added to Sample 4 was 1-aminomethyl(N',N'-di(2-hydroxyethyl)benzotrazole, which contained a certain amount in Sample 5 to show relatively high local corrosion but passivation in progress. Therefore, among the four corrosion inhibitors, 1-aminomethyl(N',N'-di(2-hydroxyethyl)benzotrazole had the highest corrosion inhibitory effect. This corrosion inhibitor prevents corrosion by promoting the passivation of copper on the antifreeze.

Arsenic Speciation Aanalysis in Bamboo Salts by Hydride Generation-ICP-AES (수소화물 발생-유도결합 플라즈마 원자 방출 분광법을 이용한 죽염중의 비소 종분리 분석)

  • Yu, Byung-Kyu;Lyu, Mu-Sang;Sun, Yle-Shik;Cho, Ki-Sung
    • Journal of the Korean Society of Food Science and Nutrition
    • /
    • v.41 no.5
    • /
    • pp.674-680
    • /
    • 2012
  • As(III) and As(V) were analyzed in bamboo salts by hydride generation ICP-AES. In order to quantify the total amount of As in bamboo salts, $AsH_3$ was producted by reacting with 6 mol/L hydrochloric acid and $NaBH_4$, which was then analyzed by hydride generation ICP-AES. As(V) was quantified simultaneously after selectively quantifying As(III). As(III) was quantified by determining the total amount of As and then correcting for the amount of As(III). To improve the reliability of the analysis we repeated the experiment several times to check the detection limit, quantification limit, and measurements of our testing methods. According to the result of our quantification analysis of As existing in bamboo salt, the range of total As content was 0.05 mg/kg~0.2 mg/kg and As(V) was over 90% of the total As.

Plasma Etching Characteristics of Sapphire Substrate using $BCl_3$-based Inductively Coupled Plasma ($BCl_3$ 계열 유도결합 플라즈마를 이용한 사파이어 기판의 식각 특성)

  • Kim, Dong-Pyo;Woo, Jong-Chang;Um, Doo-Seng;Yang, Xue;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
    • /
    • 2008.11a
    • /
    • pp.363-363
    • /
    • 2008
  • The development of dry etching process for sapphire wafer with plasma has been key issues for the opto-electric devices. The challenges are increasing control and obtaining low plasma induced-damage because an unwanted scattering of radiation is caused by the spatial disorder of pattern and variation of surface roughness. The plasma-induced damages during plasma etching process can be classified as impurity contamination of residual etch products or bonding disruption in lattice due to charged particle bombardment. Therefor, fine pattern technology with low damaged etching process and high etch rate are urgently needed. Until now, there are a lot of reports on the etching of sapphire wafer with using $Cl_2$/Ar, $BCl_3$/Ar, HBr/Ar and so on [1]. However, the etch behavior of sapphire wafer have investigated with variation of only one parameter while other parameters are fixed. In this study, we investigated the effect of pressure and other parameters on the etch rate and the selectivity. We selected $BCl_3$ as an etch ant because $BCl_3$ plasmas are widely used in etching process of oxide materials. In plasma, the $BCl_3$ molecule can be dissociated into B radical, $B^+$ ion, Cl radical and $Cl^+$ ion. However, the $BCl_3$ molecule can be dissociated into B radical or $B^+$ ion easier than Cl radical or $Cl^+$ ion. First, we evaluated the etch behaviors of sapphire wafer in $BCl_3$/additive gases (Ar, $N_2,Cl_2$) gases. The behavior of etch rate of sapphire substrate was monitored as a function of additive gas ratio to $BCl_3$ based plasma, total flow rate, r.f. power, d.c. bias under different pressures of 5 mTorr, 10 mTorr, 20 mTorr and 30 mTorr. The etch rates of sapphire wafer, $SiO_2$ and PR were measured with using alpha step surface profiler. In order to understand the changes of radicals, volume density of Cl, B radical and BCl molecule were investigated with optical emission spectroscopy (OES). The chemical states of $Al_2O_3$ thin films were studied with energy dispersive X-ray (EDX) and depth profile anlysis of auger electron spectroscopy (AES). The enhancement of sapphire substrate can be explained by the reactive ion etching mechanism with the competition of the formation of volatile $AlCl_3$, $Al_2Cl_6$ or $BOCl_3$ and the sputter effect by energetic ions.

  • PDF

Physical, Morphological, and Chemical Analysis of Fly Ash Generated from the Coal Fired Power Plant (석탄 화력발전소에서 발생되는 석탄회 특성과 형성 분석에 관한 연구)

  • 이정언;이재근
    • Journal of Energy Engineering
    • /
    • v.7 no.1
    • /
    • pp.146-156
    • /
    • 1998
  • Fly ash produced in coal combustion is a fine-grained material consisting mostly of spherical, glassy, and porous particles. A physical, morphological, and chemical characteristic of fly ash has been analyzed. This study may contribute to the data base of domestic fly ash, the improvement of combustion efficiency, ash recycling and ash collection in the electrostatic precipitator. The physical property of fly ash is determined using a particle counter for the measurement of ash size distribution and gravimeter. Morphological characteristic of fly ash is performed using a scanning electron micrograph and an optical microscope. The chemical components of fly ash are determined using an inductively coupled plasma emission spectrometry (ICP). The distribution of fly ash size was ranged from 15 to 25 $\mu$m in mass median diameter. Exposure conditions of flue gas temperature and duration within the combustion zone of the boiler played an important role on the morphological properties of the fly ash such as shape, relative opacity, coloration, cenosphere and plerosphere. The spherical fly ash might be generated at the condition of complete combustion. The size of fly ash was found to be increased the with particle-particle interaction of agglomeration and coagulation. Fly ash consisted of $SiO_2\;Al_2O_3\;and\;Fe_2O_3$ with 85% and carbon with 3~10% of total mass.

  • PDF

Evaluation of MWCNT Exposure and the Wear Characteristics of MWCNT-containing PC/ABS Composites (다중벽 탄소나노튜브를 함유한 PC/ABS 복합재의 마모 특성 및 다중벽 탄소나노튜브의 유출 평가)

  • Lee, Hyun-Woo;Kim, Kyung-Shik;Lee, Jae-Hyeok;Kim, Hyo-Sop;Kim, Jae-Ho;Oh, Dong-Hoon;Ryu, Sang-Hyo;Jang, Young-Chan;Kim, Jae-Hyun;Lee, Hak-Joo;Kim, Kwang-Seop
    • Tribology and Lubricants
    • /
    • v.30 no.5
    • /
    • pp.278-283
    • /
    • 2014
  • Carbon nanotubes (CNTs) are used in various composite materials to enhance electrical, thermal and mechanical properties of composite materials. In this study, we investigate the wear characteristics of polycarbonate/acrylonitrile-butadiene-styrene (PC/ABS) blends containing multi-walled carbon nanotubes (MWCNTs). PC/ABS blends are commonly used in many industrial applications such as cellular phones and display cases and MWCNTs have been added to the PC/ABS blends to improve their electromagnetic interference shielding (EMS). We performed wear tests on PC/ABS blends containing MWCNTs under reciprocating linear sliding conditions with chrome steel balls as a counterpart material. The normal loads were 10, 30, 50, 70, 100 N, the sliding speed was 10 mm/s, the stroke length was 15 mm, and the tests lasted 900 s. The MWCNTs included in the PC/ABS blends lower the wear volume and friction coefficient of the composites. We analyzed the wear debris collected from the composites during the tests in terms of the MWCNT concentration using inductively coupled plasma optical emission spectroscopy. The results show that the quantity of MWCNTs in the debris is proportional to the concentration of MWCNTs in the composite, indicating that the exposure of the MWCNTs to environments by wear could be increased with their concentration in the composite.

Copper Isotope Measurements Using a Neptune MC-ICP-MS (다검출기 유도결합 플라즈마 질량분석기를 이용한 구리 동위원소 분석법)

  • Park, Sanghee;Ryu, Jong-Sik;Shin, Hyung Seon;Kil, Youngwoo;Jo, Yunsoo
    • Journal of the Mineralogical Society of Korea
    • /
    • v.29 no.4
    • /
    • pp.221-227
    • /
    • 2016
  • Copper is an essential transition metal involving in various biogeochemical processes. With the recent advances in analytical techniques and mass spectrometry, such as MC-ICP-MS, it is possible to measure Cu isotopes, which allows us to understand various biogeochemical processes in detail. Nonetheless, few studies have been performed in South Korea. In this study, we compared two purification methods previously reported using an anion exchange resin ($AG^{(R)}$ MP-1M), developed the best method in our lab environment, and then verified it by measuring Cu isotopic compositions in two USGS geological reference materials (BHVO-2 and BIR-1a). Although all matrix cations causing mass bias were effectively removed through both two methods with the yield of better than 95%, the method using the mixture of HCl and $H_2O_2$ only displays Cu isotopic compositions, in excellent agreement with reported values within the error. The method developed in this study is expected to be commonly applied to earth and environmental sciences.

Heavy Metal Contents of Vegetables from Korean Markets (국내에서 유통 중인 채소류의 중금속 함량에 관한 연구)

  • Yoo, Ha-Young;Jung, Jin-Joo;Choi, Eun-Ju;Kang, Sung-Tae
    • Korean Journal of Food Science and Technology
    • /
    • v.42 no.4
    • /
    • pp.502-507
    • /
    • 2010
  • This study estimated the heavy metal contents of vegetables grown in Korea (n=234). The samples were digested using the microwave method. The contents of heavy metals (Pb, Cd, As, Cr, Cu, Mn, and Zn) were determined using inductively-coupled plasma spectrometry (ICP). The average values of heavy metals in vegetables were as follows [mean (minimum-maximum), mg/kg)]; Pb 0.0026 (ND-0.0313), Cd 0.0017 (ND-0.0280), As 0.0005 (ND-0.0332), Cr 0.0156 (0.0010-0.1798), Cu 0.3767 (0.0556-1.3980), Mn 3.0214 (0.0182-26.4100), and Zn 3.5796 (0.8300-14.4600). The heavy metal contents of vegetables available on the domestic market were almost the same as or lower than those reported in other studies. Further, the weekly average intake of heavy metals was lower than the Provisional Tolerable Weekly Intake (PTWI) or the Provisional Maximum Tolerable Daily Intake (PMTDI), which was established by the FAO/WHO. Our results can be utilized as a reference to establish specific standards for various vegetables in Korea.