• Transactions of the Korean Society of Machine Tool Engineers
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• v.14 no.6
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• pp.22-30
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• 2005

This paper proposes a measurement method for the surface shape of micro-parts by using an atomic force microscope(AFM). To this end, two techniques are presented: First, the measurement range is expanded by using an image matching method based on correlation coefficients. To account for the inaccuracy of the coarse stage implemented in AFM, the image matching technique is applied to two neighboring images intentionally overlapped with each other. Second, a method to measure the shape of relatively large specimen is proposed that utilizes the inherent trigger mechanism due to the atomic force. The proposed methods are proved effective through a series of experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.568-571
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• 2005

This paper introduces a correlation-based surface matching algorithm that can be used to reconstruct the surface topography of an object that is scanned from multiple overlapping regions by an AFM. The image matching technique is applied to two neighboring images intentionally overlapped with each other. To account for the inaccuracy of the coarse stage implemented in AFM, all the six axes including the rotational degrees of freedom are successively matched to maximize the correlation coefficient. The results show that the proposed 6-axes image matching method is useful for expanding the measurement range of AFM.

• Proceedings of the Korean Vacuum Society Conference
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• 2007.08a
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• pp.164-164
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• 2007

• Journal of Korean Ophthalmic Optics Society
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• v.10 no.2
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• pp.119-126
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• 2005

The purpose of this study was analyzed to compare on the physical characters of two companies of color contact lenses. Artificial tear solution was used for measuring the rate of protein deposits and wettability. The surface roughness of lenses was measured by SEM(scanning electron microscope, Japan) and AFM(atomic force microscope, MultimodeTM, USA). As a results, The color contact lenses was not different from general soft contact lenses in a respect of other properties. However, the colored contact lenses showed a severe crack on the surface under SEM observation. There was no irregularity on the surface of the colored contact lenses in AFM photograph. The dyes were deposited in inside of lenses by microscope observation.

• Polymer Science and Technology
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• v.10 no.2
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• pp.268-276
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• 1999

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.661-662
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• 2007

• Applied Chemistry for Engineering
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• v.17 no.4
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• pp.381-385
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• 2006

We applied a new analyzing technique for the polyurethane acrylate hybrid emulsion sample composed of polyurethane resin and acrylate resin using the phase-lag mapping techniques of atomic force microscopy. For the analysis, we synthesized similarly sized pure polyurethane dispersion and acrylate emulsion particles, which were used for measuring the standard phase-lag intensities for each material. Based on these signal intensity, we could discriminate acryl particle in the polyurethane dispersion matrix with the resolution of a few tens of nanometers. Thus, the techniques show a new possibility in the analysis of the organic two-phase particles, and we believe the techniques are helpful to design organic particles.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.14 no.6
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• pp.495-502
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• 2004

This paper presents the vibration analysis and the performance evaluation of cantilevers with probing tips for non-contact scanning probe microscopy. One of the current issues of the scanning probe microscopy technology is to increase the measurement speed, which is closely tied with the dynamic characteristics of cantilevers. The primary concern in this research is to investigate the relation between the maximum possible speed of non-contact scanning probe microscopy and the dynamic characteristics of cantilevers. First, the finite element analysis is made for the vibration characteristics of various cantilevers in use. The computed natural frequencies of the cantilevers are in good agreement with measured ones. Then, each cantilever is tested with topographic measurement for a standard sample with the scanning speed changed. The performances of cantilevers are analyzed along with the natural frequencies of cantilevers. Experiments are also performed to test the effects of how to attach cantilevers in the piezo-electric actuator. Finally, measurement sensitivity has been analyzed to enhance the performance of scanning probe microscopy.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.149-150
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• 2006

We describe a novel method of scanning probe nanofabrication using a AFM(atomic force microscopy) tip with assistance of Femtosecond laser pulses to enhance fabrication capability. Illumination of the AFM tip with ultra-short light pulses induces a strong electric field between the tip and the metal surface, which allows removing metal atoms from the surface by means of field evaporation. Quantum simulation reveals that the field evaporation is triggered even en air when the induced electric field reaches the level of a few volts per angstrom, which is low enough to avoid unwanted thermal damages on most metal surfaces. For experimental validation, a Ti: sapphire Femtosecond pulse laser with 10 fs pulse duration at 800 nm center wavelength was used with a tip coated with gold to fabricate nanostructures on a thin film gold surface. Experimental results demonstrate that fine structures with critical dimensions less than ${\sim}10nm$ can be successfully made with precise control of the repetition rate of Femtosecond laser pulses.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.05a
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• pp.263-268
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• 2003

This paper presents a result of performance evaluation fur non-contact scanning probe microscopy with respect to the vibration characteristics of cantilevers with tips. One of the current issues of the scanning probe microscopy technology is to increase the measurement speed, which is closely tied with the dynamic characteristics of cantilevers. The primary concern in this research is to investigate the relation between the maximum possible speed of non-contact scanning probe microscopy and the dynamic characteristics of cantilevers. First, the finite element analysis is made fur the vibration characteristics of various cantilevers in use. The computed natural frequencies of the cantilevers are in good agreement with measured ones. Then, each cantilever is tested with topographic measurement for a standard sample with the scanning speed changed. The performances of cantilevers are analyzed along with the natural frequencies of cantilevers. Experiments are also performed to test the effects of how to attach cantilevers in the piezo-electric actuator. Finally, measurement sensitivity has been analyzed to enhance the performance of scanning probe microscopy.