• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.1117-1118
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• 2011

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.841-842
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• 2011

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.1103-1104
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• 2011

• Journal of the Korean Society for Precision Engineering
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• v.24 no.9
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• pp.60-67
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• 2007

A signal conditioning circuit for capacitive displacement sensors was developed using a high frequency modulation/demodulation method, and its performance was evaluated. Since capacitive displacement sensors can achieve high resolution and linearity, they have been widely used as precision sensors within the range of several hundred micrometers. However, they inherently have a limitation in low frequency range and some nonlinearity characteristics and so a specially designed signal conditioning circuit is needed to handle these properties. The developed signal processing circuit consists of three parts: linearization, modulation/demodulation, and nonlinearity compensation. Each part was constructed discretely using several IC chips and passive elements. An evaluation system for precision displacement sensors was developed using a laser interferometer, a precision stage, and a PID position controller. The signal processing circuit was tested using the evaluation system in the respect of resolution, repeatability, linearity, and so on. From the experimental results, we know that a highly linear voltage output can be obtained successfully, which is proportional to displacement and the nonlinearity of output is less than 0.02% of full range. However, in the future, further investigation is required to reduce noise level and phase delay due to a low-pass filter. The evaluation system also can be applied effectively to calibration and evaluation of precision sensors and stages.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.5
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• pp.437-443
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• 2010

SAW device is widely used as band pass filters, chemical or physical sensors, and actuators. In this paper, we propose the capacitive gap measurement system with high precision using SAW device. The research process is mainly composed of theoretical and experimental part. In the theoretical part, equivalent circuit model was used to predict the SAW response by the change of load impedance. In the experimental part, commercialized capacitor was used to see the SAW response by the change of load capacitance to check the feasibility as a sensor unit. After that, experimental setup to measure and adjust the gap was made and the SAW response by the change of gap which caused the capacitance change was measured. Finally, resolution and stroke was decided compared with the signal change and basic measurement noise level.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.30 no.11 s.254
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• pp.1369-1375
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• 2006

In this work, mechanical characteristics of stainless steel diaphragm have been studied as a potential robust substrate and a diaphragm material for micromachined devices. Lamination process techniques combined with traditional micromachining processes have been adopted as suitable fabrication technologies. To illustrate these principles, capacitive pressure sensors based on a stainless steel diaphragm have been designed, fabricated and characterized. The fabrication process for stainless steel micromachined devices keeps the membrane and substrate being at the environment of 8.65MPa pressure and $175^{\circ}C$ for a half hour and then subsequently cooled to $25^{\circ}C$. Each sensor uses a stainless steel substrate, a laminated stainless steel film as a suspended movable plate and a fixed, surface micromachined back electrode of electroplated nickel. The finite element method is adopted to investigate residual stresses formed in the process. Besides, out-of-plane deflections are calculated under pressures on the diaphragm. The sensitivity of the device fabricated using these technologies is 9.03 ppm $kPa^{-1}$ with a net capacitance change of 0.14 pF over a range 0$\sim$180 kPa.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.276-279
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• 2005

This paper presents a novel cylindrical capacitive sensor (CCS) for both radial and axial motion measurements. Although the new CCS has almost the same geometric configuration as the conventional CCS, the unused axial area of the CCS is utilized to measure the axial motion of the rotor, which can affords more compact design and reduction of the system complexity. First, a theoretical model of the proposed CCS is derived. Based on the derived theoretical model, compensation methods to decouple the radial and axial motion measurements are proposed. In addition, error analysis is performed and a design rule is proposed to guarantee the same accuracy in measuring both radial and axial motions. Finally, a test rig and electronics for the proposed CCS are built and the effectiveness of the proposed CCS is verified with experiments and simulations.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.31-32
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• 2006

A signal conditioning circuit for capacitive sensors was developed using a commercial single chip solution. Since capacitive displacement sensors can achieve high resolution and linearity, they have been widely used as precision sensors within the range of several hundred micrometers. However, they inherently have a limitation in low frequency range and some nonlinearity characteristics and so a specially designed signal conditioning circuit is needed to handle these properties. Up to now, several companies already have succeeded in the development of the capacitive sensors system and they are commercially available in the market. In this research, to construct the signal processing circuits more easily and simply, we used a universal LVDT signal conditioner (AD698). Since the AD698 provides one chip solution for a basic signal processing including modulation and demodulation using various internal components, we can build the processing circuits successfully with minimal additional circuits: a compensation circuits for the drift caused by the bias current of OP amplifiers and a fine adjustment circuit for the elimination of nonlinearity. The signal processing circuits shows nonlinearity less than 0.05% in the comparison with a laser interferometer.

• Journal of KIISE
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• v.42 no.3
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• pp.399-407
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• 2015

Wireless sensor networks are used for data collection and processing from the surrounding environment for various applications. Since wireless sensor nodes operate on low computing power, restrictive battery capacity, and low network bandwidth, their architecture model has greatly affected the performance of applications. If applications have high computation complexity or require the real-time processing, the centralized architecture in wireless sensor networks have a delay in data processing. Otherwise, if applications only performed simple data collection for long period, the distributed architecture wasted battery energy in wireless sensors. In this paper, the energy consumption and processing delay were analyzed in centralized and distributed sensor networks. In addition, we proposed a new hybrid architecture for wireless sensor networks. According to the characteristic of applications, the proposed method had the optimal number of wireless sensors in wireless sensor networks.

• Applied Chemistry for Engineering
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• v.21 no.5
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• pp.495-499
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• 2010

To develop chemical and biosensors, this paper studies sensing characteristics of bulk carbon nanotube (CNT) electrodes by means of their electrical impedance properties due to their large surface area and excellence chemical absorptivity. The sensors were fabricated in the form of film and nano web style by using composite process for mass production. The bulk composite electrodes were fabricated with singlewall and multi-wall carbon nanotubes based on host polymers such as Nafion and PAN, using a solution-casting and an electrospinning technique. The resistance and the capacitance of electrodes were measured with LCR meter under the various amounts of buffer solution to study the electrical impedance change properties of them. On the experimental of sensor electrode, impedance characteristics of the composite electrode are affected by its host polymer and nanofiller and its sensing response showed saturated result after applying some amounts of buffer solution for test chemical. Especially, the capacitance values showed drastic changes while the resistance values only changed within few percent range. It is deduced that the ions in the solution penetrated and diffused into the electrodes surface changed the electrical properties of the electrodes much like a doping effect.