• Title/Summary/Keyword: 와이어 구동

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펄스전해증착에서 첨가제가 나노쌍정구리의 형성에 미치는 영향

  • Seo, Seong-Ho;Jin, Sang-Hyeon;Choe, Jae-Wan;Park, Jae-U;Yu, Bong-Yeong
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2011.05a
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    • pp.38.2-38.2
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    • 2011
  • 구리는 현재 반도체 배선으로 가장 많이 사용되는 재료이다. 배선기술이 발전함에 따라 배선두께가 얇아지게 되었고 배선간의 간격 또한 좁아지게 되었다. 간격의 감소는 RC delay 문제점을 야기하였고 이를 해결하기 위해 배선 사이에 Low-k물질을 채우는 노력이 지속되었다. 이상적으로 가장 낮은 유전율을 나타내는 물질은 공기 즉, 아무것도 채우지 않는 것이다. 하지만 이렇게 되면 기계적인 문제가 발생하는데 이를 해결하기 위해서 구리의 강도를 향상시켜야 한다. 강도를 높이려면 Hall-Petch 관계에 의해 결정립의 크기를 작게 만들어야 한다. 그렇지만 이는 곧 전기전도도의 감소를 나타내기 때문에 소자의 구동에 문제가 되어왔다. 이 문제를 해결하기 위해 펄스전해증착을 통한 나노사이즈의 쌍정구조를 가지는 구리의 개발이 진행되었다. 나노쌍정구리는 결정립이 정합면으로 이루어져 있는 쌍정구조로 이루어져 있어 전기전도도의 감소를 최소화하고 강도를 비약적으로 향상시킬 수 있을뿐더러 연신율도 높일 수 있다는 장점을 가지고 있다. 이렇게 고강도 저저항을 나타내는 나노쌍정구리는 Via filling, Through Silicon Via(TSV)에서의 칩간 연결 배선, 2차전지의 전극 등에 적용 가능성이 매우 높다. 이들은 주로 첨가제와 함께 전해증착을 통해 제작된다. 하지만 이러한 첨가제를 넣고 나노쌍정구리를 합성하기 위해 펄스전해증착을 시행할 경우, 나노 쌍정구리의 형성이 억제되고, Off-time이 존재하지 않는 일반 전해증착에서와는 다른 현상이 나타나게 된다. 이러한 이유로 본 연구에서는 현재 가장 많이 사용되고 있는 첨가제인 Poly (ethylene glycol) (PEG, 억제제)와 bis (3-sulfopropyl) disulfide (SPS, 가속제)을 사용하여 그 이유를 알아보고 첨가제를 사용하면서 나노쌍정구리의 밀도를 높일 수 있는 방안에 대해서 실험을 진행하였다.

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A Study on Hydraulic Analysis using GIS-based RMA-2 and HEC-1 - For Stream Reach between Gongdo and Pyeongtaek Water Level Gauge Stations - (GIS 기반의 하천흐름해석모형 RMA-2와 유역유출모형 HEC-1을 이용한 하천의 수리학적 특성 분석 연구 - 공도·평택 수위관측소 구간을 대상으로 -)

  • Park, Min-Ji;Park, Geun-Ae;Kim, Seong-Joon
    • Journal of the Korean Association of Geographic Information Studies
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    • v.10 no.1
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    • pp.124-135
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    • 2007
  • The purpose of this study is to analyze the hydraulic behavior in a stream reach using SMS RMA-2 model with a series of dynamic boundary conditions of main stream and lateral flows simulated by WMS HEC-1 program. For the stream reach (10.5 km) between Gongdo and Pyeongtaek water level gauge stations of Anseongcheon, the model simulated two dimensional flow characteristics by applying dynamic flow conditions of rainfall frequencies of 50, 100, 500, and 1,000 years for the main stream and three tributaries. The temporal flow behavior successfully simulated and the results showed that the distribution of mean velocity and water level within the stream reach increased according to the increase of flow frequency. Especially, the flow velocity sensibly increased at the near downstream of lateral inflow as the width of main stream is narrower.

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Structural Optimization for LMTT-Mover Using the Kriging Based Approximation Model (크리깅 근사모델 모델을 이용한 LMTT 이동체의 구조최적설계)

  • Lee, Kwon-Hee;Park, Hyung-Wook;Han, Dong-Seop;Han, Geun-Jo
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • v.29 no.1
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    • pp.385-390
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    • 2005
  • LMTT (Linear Motor-based Transfer Techn-ology) is a horizontal transfer system for the yard automation, which has been proposed to take the place of AGV (Automated Guided Vehicle) in the maritime container terminal. The system is based on PLMSL (Permanent Magnetic Linear Synchronous Motor) that consists of stator modules on the rail and shuttle car. It is desirable to reduce the weight of LMTT in order to control the electronic devices with minimum energy. In this research, the DACE modeling, known as the one of Kriging interpolation, is introduced to obtain the surrogate approximation model of the structural responses. Then, the GRG(Generalized Reduced Gradient) method built in Excel is adopted to determine the optimum. The objective function is set up as weight. On the contrary, the design variables are considered as transverse, longitudinal and wheel beam's thicknesses, and the constraints are the maximum stresses generated by four loading conditions.

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A Study on Calculating Inductance Characteristics of Switched Reluctance Motor (스위치드 리럭턴스 전동기의 인덕터스 산정에 관한 연구)

  • 최경호;김동희;노채균;김민희
    • The Transactions of the Korean Institute of Power Electronics
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    • v.6 no.4
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    • pp.333-340
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    • 2001
  • This paper presents a calculating method for inductance of the Switched Reluctance Motor(SRM) for torque characteristics and driving by analytical model. The torque generating characteristics of the SRM depend on the phase current and the inductance variation features, but Its nonlinear magnetic characteristics make it difficult to calculating inductance. Recently, The approaches for calculating inductance have taken vary from detailed finite element method(FEM) and Fitting method in magnetization curves using complex nonlinear magnetic circuit models. But those methods have not satisfactory approach for machine performance calculations, because of having a long time and remodeling for analyses, therefore thus an alternative approach is required. So it is suggested simply calculating method of the inductance based on designed data of machinery by analytical model in unaligned and aligned rotor. In order to prove the calculating, there are compare with analytical FEM. direct measurement, this method, and simulation. The compared result is shown to obtain good accuracy.

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Design of a 7-bit 2GSPS Folding/Interpolation A/D Converter with a Self-Calibrated Vector Generator (자체보정 벡터 발생기를 이용한 7-bit 2GSPS A/D Converter의 설계)

  • Kim, Seung-Hun;Kim, Dae-Yun;Song, Min-Kyu
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.48 no.4
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    • pp.14-23
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    • 2011
  • In this paper, a 7-bit 2GSPS folding/interpolation A/D Converter(ADC) with a Self-Calibrated Vector Generator is proposed. The ADC structure is based on a folding/interpolation architecture whose folding/interpolation rate is 4 and 8, respectively. A cascaded preprocessing block is not only used in order to drive the high input signal frequency, but the resistive interpolation is also used to reduce the power consumption. Based on a novel self-calibrated vector generator, further, offset errors due to device mismatch, parasitic resistors. and parasitic capacitance can be reduced. The chip has been fabricated with a 1.2V 0.13um 1-poly 7-metal CMOS technology. The effective chip area including the calibration circuit is 2.5$mm^2$. SNDR is about 39.49dB when the input frequency is 9MHz at 2GHz sampling frequency. The SNDR is improved by 3dB with the calibration circuit.

Anodic bonding Characteristics of MLCA to Si-wafer Using Evaporated Pyrex #7740 Glass Thin-Films for MEMS Applications (파이렉스 #7740 유리박막을 이용한 MEMS용 MLCA와 Si기판의 양극접합 특성)

  • Chung, Gwiy-Sang;Kim, Jae-Min;Yoon, Suk-Jin
    • Journal of Sensor Science and Technology
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    • v.12 no.6
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    • pp.265-272
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    • 2003
  • This paper describes anodic bonding characteristics of MLCA (Multi Layer Ceramic Actuator) to Si-wafer using evaporated Pyrex #7740 glass thin-films for MEMS applications. Pyrex #7740 glass thin-films with same properties were deposited on MLCA under optimum RF magneto conditions(Ar 100%, input power $1\;W/cm^2$). After annealing in $450^{\circ}C$ for 1 hr, the anodic bonding of MLCA and Si-wafer was successfully performed at 600 V, $400^{\circ}C$ in - 760 mmHg. Then, the MLCA/Si bonded interface and fabricated Si diaphragm deflection characteristics were analyzed through the actuation test. It is possible to control with accurate deflection of Si diaphragm according to its geometries and its maximum non-linearity is 0.05-0.08 %FS. Moreover, any damages or separation of MLCA/Si bonded interfaces do not occur during actuation test. Therefore, it is expected that anodic bonding technology of MLCA/Si wafers could be usefully applied for the fabrication process of high-performance piezoelectric MEMS devices.

The Transmit Method for Fingerprint sensing using Differential Pulse in Mutual Capacitance Touch Screen Panel for improving security of computer information (컴퓨터의 보안향상을 위한 상호정전용량 터치스크린패널의 차동펄스를 이용한 지문인식을 위한 송신법)

  • Kim, Seong Mun;Choi, Eun Ho;Ko, Nak Young;Bien, Franklin
    • Journal of the Institute of Electronics and Information Engineers
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    • v.54 no.7
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    • pp.55-60
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    • 2017
  • This paper is proposed on the transmit Method Finger-Printer Scanning of Mutual Capacitance Touch Screen Panel Using Differential Pulse for improving the security of computer information. This system is composed of differential pulse generator and Ring-Counter, also Supply voltage is 5V. this system generates the Pulse wave which is composed of In-Phase and Out of Phase at 1MHz while period of 2m/s. it is designed and be able to operate four channels. overall power consumption is approximately 78.08nW. This prototype is implemented in 0.25um CMOS Process and Chip area is $870um{\times}880um$.

Numerical study on fluid characteristics due to disc shape in a novel mechanical ballast water treatment system (신개념 기계식 선박평형수 처리장치의 디스크 형상에 따른 유동특성에 관한 수치해석 연구)

  • Sohn, Sang-Ho;Kim, Young-Chul;Choi, Kung-Kwan
    • Journal of Advanced Marine Engineering and Technology
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    • v.39 no.1
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    • pp.19-27
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    • 2015
  • As the recent regulation of Internaional Maritime Organization (IMO) is enforced, the advanced technology of Ballast water treatment system (BWTS) is needed to meet its requirements. Until now, there are two kinds of the BWTS technologies such as physical methods (Membrane and UV) and chemical methods (Chlorin and Ozone). However, these conventional methods have some limitations of auxiliary power, low productivity, residual treatment and etc. In order to overcome these problems, this paper introduces the new kind of BWTS based on mechanical principle and investigates the effect of rotating disc shapes on flow characteristics between rotating and stationary discs by computational fluid dynamics (CFD). Planar and Step types can make the local cavitation generated along radius, and Circular type can increase the intensity of shear stress.

A Study on the 2-stage dry and pyrolysis system for reduction of sewage sludge (하수슬러지 감량화를 위한 one구동 2단형 열풍건조/열분해에 관한 연구)

  • Ha, Sang-An;Kim, Seung-Ho
    • Journal of the Korea Organic Resources Recycling Association
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    • v.12 no.2
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    • pp.52-60
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    • 2004
  • The basic approach to sewage sludge is organic waste minimization, promotion of energy recovery; volume and weight reduction by final treatment, and environmentally final disposal of natural circulation. Dry and pyrolysis of maize was experimentally investigated in full-scale rotary kiln in semi-continuous operation. The operational parameters varied are the operating temperature $160{\sim}175^{\circ}C$ of dry and $450{\sim}800^{\circ}C$ of pyrolysis, the solids residence time 9 min for pyrolysis. Important parameters studied include the running time, water content of sewage sludge, solids amount of sewage sludge(TS%) by the varied temperature. Also, with the increasing of temperature, how the yield of oil and char product change was observed, and the distribution of gas production components was observed. The gas of $C_1{\sim}C_3$ yield increased and oil of $C_4{\sim}C_6$ yield decreased along with pyrolysis temperature of $670^{\circ}C$ by the run time of 9 min.

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Performance Evaluation System for Tow-Channel Ring-Core Flux-Gate Compass (2-체널 링-코어 프럭스-게이트 콤파스의 성능평가 시스템 개발)

  • 임정빈;김봉석
    • Proceedings of the Korean Institute of Navigation and Port Research Conference
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    • 2002.11a
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    • pp.13-19
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    • 2002
  • Design and implementation methodologies on the performance evaluation system of two-channel ring-core Flux-Gate Compass (FG-Compass) are described, with evaluation procedures and methods based on the polynomial regression models. Performance evaluation system is consists of a step motor driving unit, a bearing transmitting unit and, evaluation programs using polynomial regression formulae. Through performance evaluation tests, total residual deviation tests, total residual deviation of $\pm$4$^{\circ}$ and eigen residual deviation of $\pm$2$^{\circ}$ are obtained from the FG-Compass. The result is more accurate values than the typical FG-Compass with eigen residual deviation of $\pm$4$^{\circ}$ and is provide a possibility to develop a high performance FG-Compass. In addition, the design methodology of a smart FG-Compass with the self estimation and correction of residual deviations is also discussed.

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