• Proceedings of the KIEE Conference
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• 1999.07b
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• pp.618-620
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• 1999

웨이퍼내의 온도 균일도를 확보하는 것은 고속열처리공정장비(RTP)에 있어서 입력신호 수집을 통해 달성해야 할 중요한 제어 요소이며, 이러한 온도의 균일도를 향상시키기 위해서는 웨이퍼의 각 지점에 대한 정확한 온도 계측이 필수적으로 선행되어야 한다. 그러나 RTP의 구조적 특징과 동작특성 때문에 정확한 온도계측이 매우 어려운 면이 있다. 온도계측은 주로 고온계를 통해 이루어지는데 대류와 복사 등 여러 가지 원인에 의해서 웨이퍼내에 온도가 불균일하게 되는 경우 한정된 개수의 고온계로 온도 분포를 정확히 추정할 수 없는 한계를 지니고 있다. 본 논문에서는 RTP 공정을 열역학적으로 접근하여 단일점 온도 계측에 의한 전체 온도 분포 추정 기법을 연구하고 이것을 다중점 온도 계측에 의한 온도 분포 추정 기법으로 확장 발전시켜 웨이퍼에 상대적으로 영향을 끼치는 요소 중 예측 불가능하거나 측정 불가능한 요소까지 포함하여 최소의 측정치를 활용하여, 적절한 제어입력 유도에 필요한 형태로 웨이퍼상의 온도계측을 가능하게 하였다.

• Korean Journal of Optics and Photonics
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• v.21 no.5
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• pp.190-194
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• 2010

A hybrid grating sensing device based on a side-polished fiber Bragg grating (FBG) with a polymer overlay is proposed for simultaneous measurement of external refractive index and temperature. The side-polished FBG, which is insensitive to ambient index change, is utilized for detecting temperature variation, and the polymer overlay is coated on the side-polished FBG for measurement of ambient index change. The temperature sensitivities of the side-polished FBG and the polymer overlay were measured to be 0.01 nm/$^{\circ}C$ and -0.58 nm/$^{\circ}C$, respectively, in a temperature range from $30^{\circ}C$ to $100^{\circ}C$. The ambient index sensitivities of the polymer overlay were measured to be 498.8 nm/RIU in an ambient index range from 1.33 to 1.39, 694.9 nm/RIU from 1.39 to 1.42, and 1312 nm/RIU from 1.42 to 1.44.

• Journal of Energy Engineering
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• v.23 no.4
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• pp.247-255
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• 2014

The present study was conducted to elucidate the characteristics of temperature at the inlet and outlet pipes of a refrigerator drain condenser and suggest the method to predict the temperature of the refrigerant at the inlet and outlet pipes of the drain condenser. For this purpose, a built in style refrigerator was installed in a constant temperature chamber to measure temperatures at the inlet and outlet pipes of the drain condenser. From the results of the present analysis, it could be seen that the measured temperatures changed from $37^{\circ}C$ to $46^{\circ}C$ and the actual refrigerant temperatures were higher than the measured temperatures with the difference magnitude of $8^{\circ}C$ to $22^{\circ}C$. The present study suggested that the temperatures of the refrigerator could be calculated with the measured temperatures by introducing curve fitting of the measured temperature. The predicted refrigerant temperatures by the present study had the accuracy within 6% error of the actual refrigerant temperatures.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.17 no.5
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• pp.637-644
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• 2016

This paper is a follow-up to previous papers entitled, "Development of Tunnel-Environment Monitoring System and Its Installation" I [1] and II [2]. The target tunnel of these studies is the Solan Tunnel, which is a loop-type, single-track, 16.7-km-long tunnel located in mountainous terrain and passing through the Baekdudaegan mountain range. It is an ordinary railway tunnel designed for both freight and passenger trains. We analyzed the environmental conditions of the tunnel using temperature and humidity data recorded over approximately one year. The data were recorded using the Tunnel Rough Environment Measuring System (TREMS), which measures environmental data in subway and high-speed train tunnels and is installed in three locations inside the tunnel. Previous studies analyzed environmental conditions inside tunnels located in or near a city, whereas the tunnel in this study is located in a mountainous area. The tunnel conditions were compared with those measured outside the tunnel for each month. Hourly changes during summer and winter periods were also analyzed, and the environmental conditions at different locations inside the tunnel were compared. The results are widely applicable in studies on the thermal environment and air quality of tunnels, as well as for computer analysis of tunnel airflow such as tunnel ventilation and fire simulations.

• Journal of the KSME
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• v.23 no.5
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• pp.349-354
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• 1983

본 시험설비에서 수행되는 각종 시험마다 시험조건, 즉, 온도, 압력 및 유량등이 크게 다를 뿐만 아니라, 고온고압에 수반되는 제반 문제들이 뒤따름으로서 이들 변수의 측정 및 제어에 있어서는 특별한 어려운 점이 뒤따른다. 본 해설에서는 고온고압 유체시험설비에서 수행되는 각종 시험의 주요 변수가 되는 온도, 압력 및 유량등 시험변수의 측정 및 제어방법과 운전경험등을 기술코저 한다.

• Journal of the Korean Applied Science and Technology
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• v.34 no.3
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• pp.495-503
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• 2017

Wax components can be precipitated when surrounding temperature decreases below wax precipitation temperature (WAT). WAT as well as pour point are important characteristics to evaluate the behavior of waxy oils. In this study, qualitative and quantitative evaluations of waxes in waxy model oils were presented after determining WAT and pour point. In case of anhydrous waxy model oils, ASTM D2500 may be most useful to determine WAT because of the transparent nature of model oils. With same apparatus, ASTM D97 is also applicable to determine the pour point of waxy oils in a serial determination. In case of emulsified model oils, however, it is difficult to measure WAT because of its opaque nature. This study employed FTIR spectroscopy to determine wax precipitation temperature and discussed the effect of emulsion state regarding the values of WAT. Further study would be needed to conclude the effect of water contents to WAT values in case of emulsified waxy oil.

• Proceedings of the Korean Society for Emotion and Sensibility Conference
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• 2001.11a
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• pp.216-221
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• 2001

바닥급기 공조시스템은 재실자에게 신선외기를 효과적으로 공급하고 온열환경을 효과적으로 제공하기 위한 새로운 수단으로 시도되고 있다. 그러나 급기구가 인체에 너무 가까이 위치할 경우, 부분적인 열구배에 의한 불쾌감을 유발할 수 있다. 따라서 본 연구에서는 바닥급기 공조시스템이 설치된 공간내의 온도 및 기류분포 등의 온열환경을 측정하였고 적외선 카메라를 이용하여 급기구에 의한 인체 표면 온도를 측정하여 열적 쾌적성에 미치는 영향에 관하여 고찰하였다.

• Electrical & Electronic Materials
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• v.3 no.2
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• pp.123-130
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• 1990

본 논문은 페라이트의 온도특성을 측정하기 위한 다중측정시스템의 설계에 관하여 연구한 것이다. 본 시스템은 전기로의 온도를 제어하기 위한 열전대 콘트롤러, 릴레이 동작을 제어하기 위한 릴레이 콘트롤러 및 릴레이를 구동시키기 위한 스윗칭부, 그리고 GPIB를 이용한 LCR메터 제어부와 이들을 마이크로 컴퓨터와 통신하기 버스 라인으로 구성하였다. 열전대 콘트롤러와 릴레이 콘트롤러는 8255A(Intel LSI)를 주로 이용하여 설계하였으며 릴레이로는 고주파용 릴레이를 사용하여 스윗칭 트랜지스터로 구동시키는 방법을 택하였다. 그리고 LCR-메터에는 GPIB(AD50488)보드를 사용하였다. 측정시료로서는 복합첨가제방식에 의하여 제작된 Mn-Zn-Fe계 페라이트의 시편을 사용하였으며 시료의 특성측정은 자체 제작한 자동계측시스템을 이용하여 분석하였다. 측정결과 온도보상점 T$_{o}$ 와 큐리온도 T$_{c}$ 바로 아래에서 투자율의 급격한 변화를 확인할 수 있었다. 그리고 특성의 계측에 있어서 일관성이 있고 정확한 자료를 얻을 수 있었으며 따라서 본 시스템이 인터페이스와 컴퓨터 사이의 연결성이 좋은 자동다중계측시스템으로 활용 할 수 있음을 확인한다.

• Current Research on Agriculture and Life Sciences
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• v.31 no.1
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• pp.38-44
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• 2013

To estimate the radiative heat loss from greenhouses, a new equation for calculating the sky temperature is presented. The sky temperature in the Daegu region was measured using a pyrgeometer and calculated using different equations according to the cloudiness. The calculated and measured results were then compared to identify the best equation for calculating the sky temperature. The difference value between the air and sky temperature was dissimilar and increased as the cloud amount decreased. On clear days the difference value was 10~20 times greater than that on cloudy and rainy days. When analyzing the correlationship between the calculated and measured sky temperatures on clear days, Bliss's and Clark & Allen's equations were found to be superior to the other equations. However, on cloudy days, the best correlationship between the calculated and measured sky temperatures was exhibited by Fuentes's equation. Therefore, a new equation is proposed for calculating the sky temperature on a cloudy day.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.19 no.9
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• pp.2087-2092
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• 2015

Recently, use of the heat transferring machine and systems has been increasing in various industrial fields. A key technique for constructing such process is basically to measuring temperature directly to objects established on industrial plants. Particularly, a non-contact temperature measurement is very important to realize advanced heat transferring systems. This paper presents a new measurement methodology for temperature by using USN(ubiquitous sensor networks) technique including the microprocessor unit based ZigBee communication systems. This proposed system is made to be applied in monitoring systems for non-contact temperature measurement. We designed firmware based measurement systems whose main function is to save s series of temperature data sets and send it to main monitoring systems.