• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.40 no.12
• /
• pp.17-23
• /
• 2003

A sensor array (3${\times}$5$\textrm{mm}^2$ in diaphragm dimension) of 12 sensing clements with different operating temperatures was optimized with respect to thermal operation. This sensor array with single heater on a glass diaphragm over back-etched silicon bulk realizes a novel concept of a sensor array: an array of sensor clements operated at different temperatures can yield more information than single measurement. The proposed micro sensor array could provide well-integrated array structure because it had only single heater at the center of the diaphragm and used the various sensing properties of two kinds of metal oxide layers with various operating temperatures.

• Proceedings of the Korean Magnestics Society Conference
• /
• 2015.05a
• /
• pp.171-172
• /
• 2015

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2014.10a
• /
• pp.857-860
• /
• 2014

This paper proposes a human movement detection system by a thermopile array sensor. In the system, the sensor is attached to the ceiling and it acquires spatial temperatures, which is called thermal distribution. The system obtains $4{\times}4$ pixels thermal distributions from the sensor. The distributions are analyzed to extract human movement. As the experimental result, the proposed system successfully detected human movements.

• Journal of Sensor Science and Technology
• /
• v.10 no.2
• /
• pp.108-117
• /
• 2001

A sensor array with 10 discrete sensors integrated on a substrate w3s developed for discriminating the kinds and quantities of inflammable gases, like butane, propane, methane, LPG, carbon monoxide. The sensor array consisted of 10 metal oxide semiconductor gas sensors using the nano-sized $SnO_2$ as base material and had differentiated sensitivity patterns to specific gas. The sensor array was designed with uniform thermal distribution and had also high sensitivity and good reproductivity to low gas concentration through nano-sized sensing materials with different additives. By using the sensing patterns of the sensor array at $400^{\circ}C$, we could reliably discriminate the kinds and quantities of the tested inflammable gases under the lower explosion limit through the principal component analysis(PCA).

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.37 no.11
• /
• pp.9-17
• /
• 2000

A sensor array with 10 discrete sensors integrated on a substrate was developed for discriminating the kinds and quantities of explosive gases. The sensor array consisted of 10 oxide semiconductor gas sensors with $SnO_2$ as base material and had broad sensitivity to specific gas. The sensor array was designed with uniform thermal distribution and had also high sensitivity and reproductivity to low gas concentration through nano-sized sensing materials with different additives. By using the sensitivity signal of the sensor array at $400^{\circ}C$, we could reliably discriminate the kinds and quantities of explosive gases like butane, propane and methane under the lower explosion limit through the principal component analysis (PCA) method.

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.40 no.1
• /
• pp.11-19
• /
• 2003

A micro sensor array with 4 discrete sensors integrated on a microhotplate was developed for identifying the kinds and quantities of explosive gases. The sensor array consisited of four tin oxide-based thin films with the high and broad sensitivity to the tested explosive gases and uniform thermal distribution on the plate. The microhotplate, using silicon substrate with N/O/N membrane, dangling in air by Al bonding wires, and controlling the thickness by chemical mechanical process (CMP), has been designed and fabricated. By employing the sensitivity signal of the sensor array at 40$0^{\circ}C$, we could reliably classily the kinds and quantities of the explosive gases like butan, propane, LPG, and carbon monoxide within the range of threshold limit values (TLVs), employing principal component analysis (PCA).

• Proceedings of the Optical Society of Korea Conference
• /
• 2000.02a
• /
• pp.272-273
• /
• 2000

대용량의 정보처리에 필요한 새로운 광원에 대한 연구가 활발히 진행되고 있는 가운데, 광원과 광변조 능력을 동시에 가지고 있는 VCSEL이 상당한 주목을 받아 왔지만, 이 소자는 발진하는 레이저의 파장이 활성층의 온도 변화에 따라 천이하는 점과, 편광의 변질 등으로 인해 8$\times$8이상의 고집적 어레이 제작이 어려운 단점이 있어 실용화에 어려움을 겪고 있다. 마이크로 디스크의 위스퍼링 갤러리 모드를 응용한 광양자테 (PQR) 레이저가$^{[l,2]}$ 지닌 몇 가지 특성들은 VCSEL이 가진 문제들을 해결할 수 있는 가능성을 제시하고 있다. 수 $\mu$A에서 nA급의 문턱전류로 구동할 수 있어 주입전류에 의한 활성층의 온도변화 통제가 가능하며, VCSEL이 온도가 증가에 따라 출력파장이 선형적으로 증가하는 반면, PQR 레이저의 출력 파장은 (equation omitted)에 비례하여 증가하므로 온도-파장 관계가 포화되는 영역에서는 주입전류나 외기 온도에 의한 영향을 거의 받지 않는 안정성 때문에 고집적 어레이 광원 제작시 유리하다. 또, 레이저 출력면의 각도에 따라 각각 다른 파장의 빛을 방출하므로, 각도에 따른 각 파장별 필터를 이용하면 광센서 등 여러 가지 용도에 응용할 수 있을 것으로 기대된다. (중략)

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.6 no.2
• /
• pp.315-322
• /
• 2002

A thin film oxide semiconductor micro gas sensor array which shows only 60㎽ of power consumption at an operating temperature of 30$0^{\circ}C$ has been fabricated using microfabrication and rnicrornachining techniques. Excellent thermal insulation of the membrane is achieved by the use of a double la! or structure of 0.1${\mu}{\textrm}{m}$ thick Si$_3$N$_4$ and 1${\mu}{\textrm}{m}$ thick phosphosilicate glass(PSG) prepared by low pressure chemical vapor deposition(LPCVD) and atmospheric－pressure chemical-vapor deposition(APCVD), respectively. The sensor way consists of such thin film oxide semiconductor sensing materials as 1wt.％ Pd-doped SnO$_2$, 6wt.% AI$_2$O$_3$-doped ZnO, WO$_3$ and ZnO. The thin film oxide semiconductor micro gas sensor array exhibited resistance changes usable for subsequent data processing upon exposure to various gases and the sensitivity strongly depended on the sensing layer materials. Heater Part of the sensor structure has been modified in order to improve the process yield of the sensor, and as a result of modified heater structure improved process yield has been achieved.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.4 no.3
• /
• pp.705-711
• /
• 2000

A thin film oxide semiconductor micro gas sensor array which shows only 60 mW of power consumption at an operating temperature of $300^{\circ}C$ has been fabricated using microfabrication and micromachining techniques. Excellent thermal insulation of the membrane is achieved by the use of a double-layer structure of $0.1\mum\; thick\; Si_3N_4 \;and\; 1 \mum$ thick phosphosilicate glass (PSG) prepared by low-pressure chemical-vapor deposition (LPCVD) and atmospheric-pressure chemical-vapor deposition (APCVD), respectively. The sensor array consists of such thin film oxide semiconductor sensing materials as 1 wt.% Pd-doped $SnO_2,\; 6 wt.% A1_2O_3-doped\; ZnO,\; WO_3$/ and ZnO. Baseline resistances of the four sensing materials were found to be stable after the aging for three days at $300^{\circ}C$. The thin film oxide semiconductor micro gas sensor array exhibited resistance changes usable for subsequent data processing upon exposure to various gases and the sensitivity strongly depended on the sensing layer materials.

• Journal of the Korea Institute of Information and Communication Engineering
• /
• v.19 no.9
• /
• pp.2087-2092
• /
• 2015

Recently, use of the heat transferring machine and systems has been increasing in various industrial fields. A key technique for constructing such process is basically to measuring temperature directly to objects established on industrial plants. Particularly, a non-contact temperature measurement is very important to realize advanced heat transferring systems. This paper presents a new measurement methodology for temperature by using USN(ubiquitous sensor networks) technique including the microprocessor unit based ZigBee communication systems. This proposed system is made to be applied in monitoring systems for non-contact temperature measurement. We designed firmware based measurement systems whose main function is to save s series of temperature data sets and send it to main monitoring systems.