• 발명특허
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• v.29 no.6 s.336
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• pp.36-40
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• 2004

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.12
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• pp.591-596
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• 2006

we have been developed on the ultra high concentration ozone generator system which is the core technology in the realization of the semiconductor photoresist strip process using the ozone-vapor chemistry. The proposed ozone generator system has the structure of the surface discharge type which adopt the high purity ceramic dielectric tube. We investigate the performance of the proposed ozone generator system experimentally and the results show that the system has very high ozone concentration characteristics of $19.7[wt%/O_2]$ at the flow rate of $0.3[{\ell}/min]$ of each discharge cell. As a result of the silicon wafer photoresist strip test, we obtained the strip rate of about 400[nm/min] at the ozone concentration of $16[wt%/O_2]$ and flow rate of $8[{\ell}/min]$. So, we confirmed that it's possible to use the proposed high concentration ozone generator system for the ozone-vapor photoresist strip process in the semiconductor and FPD industry.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.16 no.6
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• pp.119-125
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• 2002

The temperature decrease of discharge space was very important to generate the high concentration of ozone in silent discharge type ozone generator. At this time, binding materials and methods between dielectric barrier and ground electrode affected to the discharge importantly in electrical and thermal point of view. So, above two factors become very important parameters should be considered before designing the ozone generator. In this study, binders of silicone compound, electroconductive resin and charcoal were used for variations of binders properties. Resultantly, when the binding materials were used, better ozone generation characteristics were shown(maximum ozone generation 28044［ppmV］ at 6.0［kV］) in comparison with the non-used case (maximum ozone generation 15944［ppmV］ at 4.0［kV］). In addition, when the binding materials were used, the case of pure silicone compound showed better characteristics(maximum ozone generation 28044［ppmV］ at 6.0［kV］) than the cases of conductive binding materials(maximum ozone generation 25842［ppmV］ at 5.5［kV］ and including the charcoal 5%).

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.52 no.5
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• pp.226-226
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• 2003

When an excessive voltage is applied to the discharge gap in ozone generator, the discharge room temperature becomes higher. As is well own, the efficiency of the ozone generation is deteriorated by the excessively hot temperature because of the decomposition reaction. In this paper, the simple small capacity ozone generating controller has been introduced, which provides effective and stable silent discharge characteristics over wide range input power. The proposed power controller has two important advantages, which imply that the production rate of ozone can be controlled linearly according to the delivered power and the surplus energy is recovered to the source. The experimental results are given to verify the performance of the pre proposed controller.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.5
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• pp.226-230
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• 2003

When an excessive voltage is applied to the discharge gap in ozone generator, the discharge room temperature becomes higher. As is well own, the efficiency of the ozone generation is deteriorated by the excessively hot temperature because of the decomposition reaction. In this paper, the simple small capacity ozone generating controller has been introduced, which provides effective and stable silent discharge characteristics over wide range input power. The proposed power controller has two important advantages, which imply that the production rate of ozone can be controlled linearly according to the delivered power and the surplus energy is recovered to the source. The experimental results are given to verify the performance of the pre proposed controller.

• Korean Journal Plant Pathology
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• v.12 no.1
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• pp.132-136
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• 1996

오존에 의한 식물체의 가시피해 발현 이전에 나타나는 비가시적 피해를 찾아내기 위하여 적외선 열화상장치(infrared thermography)를 이용하여 하루 8시간씩 0.3 ppm 오존에 노출된 나팔꽃(Ipomoea purpurea)잎표면의 온도분포 변화를 조사하였다. 노출 첫날에는 온도분포의 뚜렷한 변화를 볼 수 없었다. 노출 2일째, 오존 노출 2시간 결과후, 완전히 자란 제3엽의 특정 부분에서 급격한 온도분포 변화를 보였으며, 그로부터 약 4시간 경과 후에 동일 지점에서 최초의 가시적 피해가 발생했다. 급격한 온도분포 변화를 보인 부분과 최초 가시피해가 발생한 부분이 일치한 점은 가시피해 발생과 그 이전의 온도분포 변화가 밀접하게 상관되어 있다는 것을 의미한다고 하겠다. 잎표면의 열화상 분석방법을 대기오염원에 의한 식물체의 가시피해 발현 이전에 진행되고 있는 비가시적 반응의 조기진단에 적용할 수 있으며 생태환경 친화적인 대기 환경관리를 위한 대기오염원은 배출조절용 생체반응기(biosensor)로 이용 가능하겠다.

• The Journal of Natural Sciences
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• v.10 no.1
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• pp.93-102
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• 1998

In order to study on the bleaching efficiency of flex fabrics, ozone which has been produced by an ozone generator, has been contacted with flex fabrics in water at various conditions. The equipments used for the ozone reatment of flex fabrics were the ozone generator and a liquor/ozone contactor. For the study of the bleaching efficiency on flex fabrics, the Hunter's whiteness, tensile strength, microscopic properties of the ozone treated flex fabrics were measured. The concentration of generated ozone was increased, as the voltage increase, flow ratio decrease and oxygen amount increase. The bleaching efficiency of ozone treated fabrics was increased with increasing the net concentration of ozone. The whiteness ozone of treated fabrics was found to be best when treated temperature was $0-15^{\circ}C$ and treated time was 20 min. The tensile strength of treated fabrics decreased as the treating time increased, and as the temperature raised.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.19 no.8
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• pp.94-101
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• 2005

The silent discharge type ozonizer with three electrodes(central electrode, internal electrode, and external electrode) and one discharge gap(discharge gap between internal electrode and external electrode) has been designed and manufactured. It is a silent discharge type ozonizer for which the AC high frequency voltages applied to the central electrode within vacuum discharge tube and the internal electrode for which the external electrode is a ground Ozone is generated by silent discharge in discharge gap. At the moment, discharge characteristics and ozone generation characteristics were investigated in accordance with vacuum of discharge tube, frequency of AC power source, discharge power of ozonizer, and quantity of supplied oxygen gas. In consequence, ozone characteristics proportional to vacuum of discharge tube and frequency of AC power source. The maximum value of ozone can be obtained 7,700[ppm], 460[mg/h] and 70[g/kwh].

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2000.11a
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• pp.205-208
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• 2000

In this paper, a plate type ozonizer has been designed and manufactured to minimize the size of ozonizer. This ozonizer have following benefits: convenience of shift and installation maximize space utility. Therefore, ozone generation characteristics have been investigated by varying flow rate, supplied power and gap spacing of plate electrodes.

• Journal of Bio-Environment Control
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• v.23 no.3
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• pp.250-255
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• 2014

Sterilization is an important factor in reprocessing of drained nutrient solution (RDN). To evaluate the suitability of ozone microbubble for RDN in protected horticulture and plant factory, strong fungicidal activity of ozone and microbubble were applied. This experiment was taken advantage of ozonated water (OW) and ozone gas (OG). The Fusarium oxysporum (FO), Phytophthora capsici (PC) and Colletotrichum gloeosporioides (CG) were treated with OW 0.5, 1.0 and 2.0 ppm and OG $3.0g{\cdot}h^{-1}$ for 0, 30, 60, 120 and 180 sec. Results of this experiment can be summed up as follows : In the OW, FO was sterilized by 0.5 ppm in 60 sec and PC was sterilized by 2.0 ppm in 30 sec. In the OG, FO and PC both of them were sterilized in 180 sec. However, CG was not sterilized using OW and OG. Overall, ozone microbubble showed possibility of sterilization in RDN. However, CG is required to more ozone concentration and processing time.