• Journal of the Korean Vacuum Society
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• v.22 no.4
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• pp.175-180
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• 2013

We developed the contamination prevention module of an optical window for an In-Situ Particle Monitor (ISPM) system. the core part of the module is the generator of an ultrasonic wave and the module is to remove particles stuck to the window by the transfer of the wave force to the window surface. In order to enhance transfer efficiency of the waves the frequency of the ultrasonic wave was optimized and a low impedance material (plexiglass) and a soft sealing material (Si rubber) were used. The ISPM with the developed module was installed at the exhaust line of a BPSG CVD equipment and the effect of the module was verified.

• Membrane Journal
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• v.22 no.5
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• pp.332-341
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• 2012

We studied the effects of induction of natural convection instability flow (NCIF) according to the gravitational orientation (inclined angle) of the membrane cell on the reduction of membrane fouling in the constant-flow ultrafiltration (UF) of colloidal silica solutions. Five colloidal silica solutions with different silica size (average size = 7, 12, 22, 50 nm and 78 nm) were used as UF test solutions. The silica particles in colloidal solutions form cakes on the membrane surface thereby causing severe membrane fouling. The constant-flow UF performance according to the gravitational orientation of the membrane cell (from $0^{\circ}$ to $180^{\circ}$ inclined angle), was examined in an unstirred dead-end cell. We evaluate the effects of NCIF on the suppression of fouling formation by measuring the variation of transmembrane pressure (TMP) and the increase of critical flux by using the flux-stepping method. In the constant-flow dead-end UF for the smaller size (7, 12 nm and 22 nm) silica colloidal solutions, changing the gravitational orientation (inclined angle) of the membrane cell above the $30^{\circ}$ angle induces NCIF in the membrane module. This induced NCIF enhances back transport of the deposited silica solutes away from the membrane surface, therefore gives for the reduction of TMP. But in the constant-flow UF for the more larger size (50 nm and 78 nm) silica colloidal solutions, NCIF effects are not appearing. The critical flux is increased as increasing the module angle and decreasing the silica size. Those results show that the intesity of NCIF occurrence in membrane module is more higher as increasing the module angle and decreasing the silica size.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.180-180
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• 2013

반도체, 디스플레이와 같이 저압, 극청정 조건에서 진행되는 공정에서 발생한 오염입자는 수 율에 큰 영향을 미친다. 따라서 공정 중에 발생한 오염입자를 실시간으로 모니터링할 수 있는 장비에 대한 연구가 활발히 진행되고 있다. Particle Beam Mass Spectrometer (PBMS)는 저압에서 실시간으로 나노 입자의 크기를 측정할 수 있는 대표적인 장비 중 하나이다. 입자를 포함한 가스 유동이 PBMS로 유입되면, 우선 입자를 입자빔의 형태로 집속하는 공기역학렌즈를 통과하게 된다. 집속된 입자는 노즐에 의해서 가속되며, 이로 인해 충분한 관성을 가지게 된 입자는 양극과 음극, 필라멘트로 구성된 electron gun에서 전자충돌에 의해 포화상태로 하전된다. 하전한 입자는 electrostatic deflector에서 크기에 따라 분류되어 Faraday detector와 electrometer에 의해 측정된다. 그러나 공기역학렌즈는 입자의 크기가 작아질수록 집속 효율이 급격히 낮아진다는 문제점을 지니고 있다. 이는 입자가 작아질수록 점성에 의한 영향이 관성에 의한 영향보다 커짐으로써 나타나는 현상이다. 최근 이러한 문제점을 해결하기 위해 사중극자를 사용하여 입자를 집속시키는 방법이 대안으로 제시되었다. 사중극자는 서로 마주보는 쌍곡선 형태의 전극구조에 AC 전기장을 인가하는 방식을 사용한다. 사중극자의 중심은 정확히 평형점을 가지게 되며 입자는 사중극자 내에서 진동을 반복하며 평형점을 향해 모이게 된다. 입자의 크기가 작을수록 전기력에 의한 영향을 크게 받으므로 사중극자를 이용한 입자집속 방법은 나노입자의 집속에 있어 공기역학렌즈를 이용한 집속에 비해 이점을 지닌다. 또한 집속 하고자 하는 입자 대상이 바뀔 경우 구조를 바꿔야 하는 공기역학렌즈와 달리 사중극자를 이용한 방법은 AC 전기장을 조절하는 것 만으로 제어가 가능하다. 본 연구에서는 저압 조건에서 나노입자를 집속하기 위한 사중극자의 전극 구조를 이론적인 계산을 통하여 구하였다. 그 결과 0.1 torr의 압력 조건하에서 5~100 nm 범위의 기본 입자를 AC 전압과 진동수를 조절하여 집속할 수 있는 사중극자 형태를 설계하였다.

• Journal of Korean Society of Environmental Engineers
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• v.37 no.11
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• pp.607-618
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• 2015

This study was conducted to suggest hydraulic modification for improving evenness of inlet flow distribution into side stream type low-pressure MF (microfiltration) module using CFD (computational fluid dynamics) simulation and PIV (particle image velocimetry) techniques. From the results of CFD simulation for various typed inlet structure, it was investigated that installing internal orifice baffle in inlet the distribution channel could improve the evenness of inlet flow distribution over about 40%. Also, from the results of PIV measurements which were carried out for verifying the CFD simulation, it was observed that the momentum of the water body coming from the opposite side of the inlet was relatively larger. This momentum would generate strong shear force in the near of inlet side wall. On the other hands, occurrence of dead zone and eddy flow was confirmed in the opposite side.

• Membrane Journal
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• v.29 no.6
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• pp.329-338
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• 2019

The constant-pressure and constant-flux membrane filtration experiments of alumina colloidal solution are performed to investigate defouling effect of the natural convection instability flow (NCIF) induced in membrane module. The permeate flux at constant-pressure and the transmembrane pressure (TMP) at constant-flux experiments are measured by changes the inclined angle (0, 90 and 180°) of membrane module to the gravity, and flux results are analyzed by using the blocking filtration model. NCIF are more induced as the inclined angles increased from 0° to 180°, and the maximum induced NCIF at 180° angle enhances flux to 2.8 times and reduces TMP to 85% after two-hour operation. As a result of analyzing flux data by applying the blocking filtration model, it is more reasonable to analyze them by using the intermediate blocking model within 15-minute operation time and then thereafter times by using the cake filtration model. The induced NCIF at 180° angle reduces the intermediate blocking fouling at 52% in the early operation time of 15-minute and thereafter the cake layer fouling at 93%. The main membrane fouling control mechanism of NCIF induced in membrane module is evaluated as suppressing the formation of the cake layer of particulate colloidal materials on membrane surface.

• Proceedings of the Membrane Society of Korea Conference
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• 1994.04a
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• pp.23-23
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• 1994

환경에 대한 관심이 높아지는 가운데 용존무기염을 효과적으로 분리하기 위한 많은 기술이 연구되고 개발되었다. 이중 막분리를 이용한 무기염의 제거 방법(역삼투법)은 상변화를 수반하지 않는다는 점에서 많은 주목을 받아왔다. 최근들어서는 2가 이상의 염에 대한 선택적 분리 능력을 가지고 있고, 작동압력이 낮아 에너지 소모가 적은 나노여과법(Nanofiltration)이 폐수나 정수처리에 도입되고 있다. 본 연구는 이러한 나노여과법을 이용하여 무기 염을 제거하는 방법에 관한 것이다. 실험에 사용한 분리 막은 Filmtec사의 NF-40, NF-45 두 가지이고 사용한 모듈은 평탄형과 나관형의 두 가지이다. 대상이 되는 폐수는 소석회 처리 단계를 거친 산 폐수로 주로 $Ca^{2+},So_4^{2-}$등의 2가 이온과 Na, Cl등의 1가 이온으로 구성되어 있다. 여기서 $CaSO_4$는 스케일을 형성할 가능성이 크므로 1가 이온에 비해 제거할 필요성이 크지만, 비교적 용해도가 높고 과포화 되는 성질이 커서 처리에 어려움이 있다. 이러한 폐수를 나노여과하였을 때 NF-45 평판평 막의 경우 농축 인자 2.6 부근에서, NF-40 나관평 막의 경우 농축 인자 3 부근에서 막 투과 유속의 급격한 감소가 관찰되었다. 이 때 용액 내 전도도와 용액 내 입자의 분포 변화를 종합하여, 평판형 모듈과 나관형 모듈의 막 오염 현상에 대한 메커니즘을 제시하였다.

• Membrane Journal
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• v.21 no.1
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• pp.84-90
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• 2011

We studied the effects of induction of natural convection instability flow (NCIF) according to the gravitational orientation (inclined angle) of the membrane cell on the reduction of membrane fouling in ultrafiltration (UF) of colloidal silica solutions. Five colloidal silica solutions with different silica size (average size = 7, 12, 22, 50 and 78 nm) were used as UF test solutions. The silica particles in colloidal solutions form cakes on the membrane surface thereby causing severe reduction in the flux. The UF performance according to the gravitational orientation of the membrane cell (from 0 to $180^{\circ}$ inclined angle), was examined in an unstirred dead-end cell. We evaluate the effects of NCIF on membrane performance as the flux enhancement ($E_i$). In the dead-end UF of smaller size (7, 12 and 22 nm) silica colloidal solutions, changing the gravitational orientation (inclined angle) of the membrane cell induces NCIF in the membrane module and higher inclined angle and smaller size silica colloidal solution offer more stronger NCIF. This induced NCIF enhances back transport of the deposited silica solutes away from the membrane surface, therefore gives for the improvement of permeate flux. But in UF of more larger size (50 and 78 nm) silica colloidal solutions, NCIF effects are not appearing. These results suggest that the size of colloidal particle affects the extent of NCIF occurrence.

• Membrane Journal
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• v.13 no.3
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• pp.174-181
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• 2003

In this study the formation of the particle layer near the membrane surface was observed for the crossflow micro filtration module by the high speed video system. The microfiltration membrane of 0.2 {\mu}m$ nominal pore size and the 0.05 wt% solution of the polyacryl-copolymer particle distributed between 100 and 180 {\mu}m$ were used for the experiment. The feed rates were changed to 0.5, 0.75, 1.0, 1.25 and 1.5 cm/sec while the permeate rates were maintained at $20{\pm}3%$ of the feed rates, respectively, It was observed that the particles were accumulated rapidly on the membrane surface as the feed flow rate increased, but the particles were not accumulated at 0.5 cm/sec, Also, it was confirmed that almost all of the particles in the layer already formed during filtration were removed within 30 seconds as the feed flow rate increased to 1.88 cm/sec.

• Membrane Journal
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• v.18 no.1
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• pp.65-74
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• 2008

NOM and fine particles are the main target materials in water treatment using membranes. Particularly, humic substances extracted from soils are frequently used in many fundamental studies representing natural organic matter in raw water for drinking water treatment. In this study, ultrafiltration (UF) of artificial humic water and natural river water was conducted and the characteristics of removal efficiency and permeability were compared. In the UF of river water, the transmembrane pressure increased in the same pattern with that of 5 mg/L humic water. For the removal of organic matter and fine particles, however, two types of feed water had shown different trends. Kaolin particles and humic acids added to artificial water were better removed, while colloids and organics in natural water were relatively poorly removed. From the $UV_{254}$ and GPC analyses, it seemed that the hydrophobicity and size of humic substances contributed to the greater removal of organic matter. The UF membrane applied for humic water also showed a higher flux recovery by caustic chemical cleaning than that for river water.

• Membrane Journal
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• v.23 no.2
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• pp.185-188
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• 2013

This study was carried out for microfiltration tubular membrane module equipped with self-designed air injection nozzle in order to determine the permeate flux due to the effect of membrane fouling reduction. The 0.1 wt% yeast particle solution was used as a feed solution and permeation tests were performed for the cases with and without air injection. Permeation fluxes were measured and analyzed to examine the effect of membrane fouling reduction. While the permeation flux without air injection decreased continuously, that with air injection was improved more than 30 percent than that of no air injection case.