• Proceedings of the KIEE Conference
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• 2006.10a
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• pp.26-27
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• 2006

구리와 강철의 성질을 혼합한 것과 같은 우수한 성질을 갖고 있어서 열전도율이 좋고 내마모성이 뛰어난 베릴륨동 기판(BeCu foil)에 대한 식각 특성에 관하여 연구하였다. 일반적으로 베결륨구리에 대한 식각용액은 염화제이철($FeCl_3$)이 널리 알려져 있으며, 이 용액은 농도와 온도에 따라 식각시간이 달라지게 되어 식각되는 면의 상태가 영향을 받게 된다. 염화제이철의 농도를 변화시켜 본 결과 염화제이철의 농도가 증가할수록 식각률이 증가하였고, 염화제이철에 염산(HCI)을 첨가한 결과 식각률이 증가함을 알 수 있었다. 이는 염화제이철의 성분 중에서 염산(HCl)의 농도가 식각률에 영향을 미치고 있음을 나타낸다. 또한 염화제이철의 온도가 $40^{\circ}C$일때 식각률이 가장 우수하며 식각되는 면의 상태가 매우 양호해지고 각각 되는 면의 각도도 수직에 가까워진다.

• Clean Technology
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• v.23 no.4
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• pp.393-400
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• 2017

In this study, we have developed a process for separating and recovering Ni and Fe in solution through a new solvent instead of TBP and Alamine336, which are solvents used in the conventional solvent extraction method. Experimental conditions were optimized through lab test and a $10L\;h^{-1}$ pilot plant was constructed for commercialization. In addition, the process data for mass production were obtained through pilot experiment and it was confirmed that there is no problem in product quality that can be used through the corrosion test of ferric chloride.

• Korean Chemical Engineering Research
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• v.48 no.2
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• pp.157-163
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• 2010

A new etchant formulation was developed in this study to increase the shadow mask production rate, utilizing the $Fe(ClO_4)_3$ as an additive in the aqueous $FeCl_3$ solution. The shadow mask etch rate increased substantially with the increase of $Fe(ClO_4)_3$ concentration in the etchant. The etch rate difference between Ni and Invar steel was also reduced with the addition of $Fe{(ClO_4)_3}$ for most of the operating conditions, which was caused by the enhanced etch rate of both Ni and Fe by the new etchant. The increase in etch rate with the addition of $Fe(ClO_4)_3$ to aqueous ferric chloride solution was attributed to the superior electron transfer capability of $ClO^{4-}$ ion to that of $Cl^-$ ion.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.136-137
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• 2007

LCD 패널의 전기전도에 대한 물량여부를 측정하기 위한 프르브 유니트의 핵심소자 중 하나인 블레이드 타입의 핀을 제작하는데 있어서 주 소재인 베릴륨니켈 박판의 식각 조건에 대하여 연구하였다. 사용된 베릴륨니켈 기판의 두께는 $20{\mu}m$이며, DFR을 이용하여 패터닝하였고 염화제이철 및 황산을 첨가한 용액을 이용하여 침전법으로 단면 식각을 실시하였다. 베릴륨니켈 박판은 2mol의 염화제이철에 1mol의 황산을 첨가한 용액으로 $40^{\circ}C$의 온도에서 식각하였을때 가장 빠른 식각을 보였으며, 그에 따라 식각된 면의 상태도 매우 깨끗하고 수직 가까운 식각면이 나타남을 알 수 있었다.

• Clean Technology
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• v.25 no.1
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• pp.14-18
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• 2019

In general after the etching process, waste etching solution contains metals. (ex. Nickel (Ni), Chromium (Cr), Zinc (Zn), etc.) In this work, we proposed a recycling process for waste etching solution and refining from waste liquid contained nickel to make nickel metal nano powder. At first, the neutralization agent was experimentally selected through the hydrolysis of impurities such as iron by adjusting the pH. We selected sodium hydroxide solution as a neutralizing agent, and removed impurities such as iron by pH = 4. And then, metal ions (ex. Manganese (Mn) and Zinc (Zn), etc.) remain as impurities were refined by D2EHPA (Di-(2-ethylhexyl) phosphoric acid). The nickel powders were synthesized by liquid phase reduction method with hydrazine ($N_2H_4$) and sodium hydroxide (NaOH). The resulting nickel chloride solution and nickel metal powder has high purity ( > 99%). The purity of nickel chloride solution and nickel nano powders were measured by EDTA (ethylenediaminetetraacetic) titration method with ICP-OES (inductively coupled plasma optical emission spectrometer). FE-SEM (field emission scanning electron microscopy) was used to investigate the morphology, particle size and crystal structure of the nickel metal nano powder. The structural properties of the nickel nano powder were characterized by XRD (X-ray diffraction) and TEM (transmission electron microscopy).