Browse > Article

Effect of Fe(ClO4)3 Addition in the Aqueous Ferric Chloride Etchant on the Increase of Shadow Mask Etch Rate  

Kim, Young Wook (School of Display and Chemical Engineering, Yeungnam University)
Park, Mooryong (LG Innotek, Co., Ltd.)
Lee, Hyung Min (School of Display and Chemical Engineering, Yeungnam University)
Park, Gwang Ho (LG Innotek, Co., Ltd.)
Park, Chinho (School of Display and Chemical Engineering, Yeungnam University)
Publication Information
Korean Chemical Engineering Research / v.48, no.2, 2010 , pp. 157-163 More about this Journal
Abstract
A new etchant formulation was developed in this study to increase the shadow mask production rate, utilizing the $Fe(ClO_4)_3$ as an additive in the aqueous $FeCl_3$ solution. The shadow mask etch rate increased substantially with the increase of $Fe(ClO_4)_3$ concentration in the etchant. The etch rate difference between Ni and Invar steel was also reduced with the addition of $Fe{(ClO_4)_3}$ for most of the operating conditions, which was caused by the enhanced etch rate of both Ni and Fe by the new etchant. The increase in etch rate with the addition of $Fe(ClO_4)_3$ to aqueous ferric chloride solution was attributed to the superior electron transfer capability of $ClO^{4-}$ ion to that of $Cl^-$ ion.
Keywords
Etching; Aqueous Ferric Chlroride Solution; Etchant; $Fe(ClO_4)_3$; Shadow Mask; Invar Steel;
Citations & Related Records
연도 인용수 순위
  • Reference
1 Ueda, R., "Chemical Machining by Ferric Chloride Etchant," Corrosion Eng., 38, 231-237(1989).   DOI
2 Maynard, R. B., Moscony, J. J. and Saunders, M. H., "Ferric Chloride Etching of Low Carbon Steels," RCA Rev 45, 73(1984).
3 Visser, A., Weissinger, D. and Ullmann, E., "Pray Etching, Mechanism of Removal, Removal Rate, and Surface Structure During Spray Etching of Stainless Steel with Ferric Chloride Part II.," Galvanotechnik, 75, 14(1984).
4 Yoon, Y., Amy, G., Cho, J. and Pellegrino, J., "Systematic Bench-Scale Assessment of Perchlorate $(ClO^-_4)$ Rejection Mechanisms by Nanofiltration and Ultrafiltration Membranes," Sep. Sci. Technol., 39, 2105-2135(2004).
5 Maynard, R. B., Moscony, J. J. and Saunders, M. H., "Ferric Chloride Etching of Low Carbon Steels," RCA Review, 45, 73 (1992).
6 Allen, D. M., et al., "Surface Textures and Process Characteristics of the Electrolytic Photoetching of Annealed AISI 304 Stainless Steel in Hydrochloric Acid," Precision Engineering, 5, 51 (1983).   DOI   ScienceOn
7 Yoon, D., Lee, G. and Park, C., "Studies on the Ferric Chloride Etching of Shadow Masks," HWAHAK KONGHAK, 38(3), 393-397(2000).
8 Allen, D. M. and Hegarty, A. J., "Surface Textures of Annealed AISI 304 Stainless Steel Etched by Aqueous Ferric Chloridehydrochloric Acid Soution," T. I. Met. Finish., 59, 25-29(1981).   DOI
9 Moscony, J. J., Maynard, R. B., Wetzel, C. M., Eshleman, C. C. and Saunders, M. H., "Optimization of the Ferric Chloride Etching of Shadow Masks," J. SID, 4, 231(1996).
10 Taube, H., Myers, H. and Rich, R. L., "Observations on the Mechanism of Electron Transfer in Solution," J. Am. Chem. Soc., 75, 4118-4119(1953).
11 Visser, A., Weissinger, D. and Ullmann, E., "Material Processing by Spray Etching. Part III. Etching Precision," Galvanotechnik, 76, 442(1985).
12 Allen, D. M., Hegarty, A. J. and Horne, D. F., "Surface Textures of Annealed AISI 304 Stainless Steel Etched by Aqueous Ferric Chloride-Hydrochloric Acid Solutions," Trans. Inst. Met. Finish., 59, 25(1981).   DOI
13 Holleman, A. F. and Wiberg, E., "Inorganic Chemistry," Academic Press: San Diego(2001).
14 Fischer, R. B. and Peters, D. G., "A Brief Introduction to Quantitative Chemical Analysis," W. B. Saunders Company, Philadelphia (1969).
15 Lewis, R. J. Sir., "Sax's Dangerous Properties of Industrial Materials," 8th ed., Van Norstrand Reinhold, New York(1992).
16 Moscony, J. J., Matthies, D. L. and Nosker, R. W., "The Evolution of the Shadow-Mask Tube," J. SID, 7, 6(1991).
17 Ueda, R., Asakura, S., Tanozaki, Y. and Sugiura, T., "Analysis of Spray Etching Rate of Ferric Chloride Etchant," Hyoman Gijutsu, 43, 48(1992).