• Title/Summary/Keyword: 열처리 시간

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a-SiGe:H 박막의 고상결정화에 따른 주요 결험 스핀밀도의 변화

  • 노옥환;윤원주;이정근
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.78-78
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    • 2000
  • 다결정 실리콘-게르마늄 (poly-SiGe)은 태양전지 개발에 있어서 중요한 물질이다. 우리는 소량의 Ge(x=0.05)으로부터 다량의 Ge(x=0.67)을 함유한 수소화된 비정질 실리콘-게르마늄 (a-SiGe:H) 박막의 고상결정화 과정을 ESR (electron spin resonance)방법으로 조사해보았다. 먼저 PECVD 방법으로 Corning 1737 glass 위에 a-Si1-xGex:H 박막을 증착시켰다. 증착가스는 SiH4, GeH4 가스를 썼으며, 기판온도는 20$0^{\circ}C$, r.f. 전력은 3W, 증착시 가스압력은 0.6 Torr 정도이었다. 증착된 a-SiGe:H 박막은 $600^{\circ}C$ N2 분위기에서 다시 가열되어 고상결정화 되었고, 결정화 정도는 XRD (111) peak의 세기로부터 구해졌다. ESR 측정은 상온 x-band 영역에서 수행되었다. 측정된 ESR스팩트럼은 두 개의 Gaussian 함수로써 Si dangling-bond와 Ge dangling-bond 신호로 분리되었다. 가열 초기의 a-SiGe:H 박막 결함들의 스핀밀도의 증가는 수소 이탈에 기인하고, 또 고상결정화 과정에서 결정화된 정도와 Ge-db 스핀밀도의 변화는 서로 깊은 상관관계가 있음을 알 수 있었다. 특히 Ge 함유량이 큰 박막 (x=0.21, 0.67)에서 뿐만 아니라 소량의 Ge이 함유된 박막(x=0.05)에서도 Ge dangling-bond가 Si dangliong-bond 보다 고상결정화 과정에서 더 중요한 역할을 한다는 것을 알수 있었다. 또한 초기 열처리시 Si-H, Ge-H 결합에서 H의 이탈로 인하여 나타나는 Si-dangling bond, Ge-dangling bond 스핀밀도의 최대 증가 시간은 x 값에 의존하였는데 이러한 결과는 x값에 의존하는 Si-H, Ge-H 해리에너리지로 설명되어 질 수 있다. 층의 두께가 500 미만인 커패시터의 경우에 TiN과 Si3N4 의 계면에서 형성되는 슬릿형 공동(slit-like void)에 의해 커패시터의 유전특성이 파괴된다는 사실을 알게 되었으며, 이러한 슬릿형 공동은 제조 공정 중 재료에 따른 열팽창 계수와 탄성 계수 등의 차이에 의해 형성된 잔류응력 상태가 유전막을 기준으로 압축응력에서 인장 응력으로 바뀌는 분포에 기인하였다는 사실을 확인하였다.SiO2 막을 약화시켜 절연막의 두께가 두꺼워졌음에도 기존의 SiO2 절연막의 절연 파괴 전압 및 누설 전류오 비교되는 특성을 가졌다. 이중막을 구성하고 있는 안티퓨즈의 ON-저항이 단일막과 비교해 비슷한 것을 볼 수 잇는데, 그 이유는 TiO2에 포함된 Ti가 필라멘트에 포함되어 있어 필라멘트의 저항을 감소시켰기 때문으로 사료된다. 결국 이중막을 구성시 ON-저항 증가에 의한 속도 저하 요인은 없다고 할 수 있다. 5V의 절연파괴 시간을 측정한느 TDDB 테스트 결과 1.1$\times$103 year로 기대수치인 수십 년보다 높아 제안된 안티퓨즈의 신뢰성을 확보 할 수 있었다. 제안된 안티퓨즈의 이중 절연막의 두께는 250 이고 프로그래밍 전압은 9.0V이고, 약 65$\Omega$의 on 저항을 얻을수 있었다.보았다.다.다양한 기능을 가진 신소재 제조에 있다. 또한 경제적인 측면에서도 고부가 가치의 제품 개발에 따른 새로운 수요 창출과 수익률 향상, 기존의 기능성 안료를 나노(nano)화하여 나노 입자를 제조, 기존의 기능성 안료에 대한 비용 절감 효과등을 유도 할 수 있다. 역시 기술적인 측면에서도 특수소재 개발에 있어 최적의 나노 입자 제어기술 개발 및 나노입자를 기능성 소재로 사용하여 새로운 제품의 제조와 고압 기상 분사기술의 최적화에 의한 기능성 나노 입자 제조 기술을 확립하고 2차 오염 발생원인 유기계 항균제를 무기계 항균제로 대체할 수 있다. 이와 더불

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The Effect of Troglitazone on Thermal Sensitivity in Uterine Cervix Cancer Cells (자궁 경부암 세포에서 Troglitazone이 온열감수성에 미치는 영향)

  • Lee, Ji-Hye;Kim, Won-Dong;Yu, Jae-Ran;Park, Woo-Yoon
    • Radiation Oncology Journal
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    • v.28 no.2
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    • pp.91-98
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    • 2010
  • Purpose: Troglitazone (TRO), a PPAR-$\gamma$ agonist, can reduce heat shock protein (HSP) 70 and increase the antioxidant enzymes, such as superoxide dismutase (SOD) and catalase, which might affect thermal sensitivity. Here, we investigated whether TRO modifies thermal sensitivity in uterine cervical cancer cells, which is most commonly treated by hyperthermia (HT). Materials and Methods: HeLa cells were treated with $5{\mu}M$ TRO for 24 hours before HT at $42^{\circ}C$ for 1 hour. Cell survival was analyzed by clonogenic assay. The expression of HSPs was analyzed by Western blot. SOD and catalase activity was measured and reactive oxygen species (ROS) was measured using 2',7'-dichlorofluorescin diacetate and dihydroethidium. Results: The decreased cell survival by HT was increased by preincubation with TRO before HT. Expression of HSP 70 was increased by HT however, it was not decreased by preincubation with TRO before HT. The decreased Bcl-2 expression by HT was increased by preincubation with TRO. SOD and catalase activity was increased by 1.2 and 1.3 times,respectively with TRO. Increased ROS by HT was decreased by preincubation with TRO. Conclusion: TRO decreases thermal sensitivity through increased SOD and catalase activity, as well as scavenging ROS in HeLa cells.

Antimicrobial Characteristics of Metabolites of Lactic Acid Bacteria Isolated from Feces of Newborn Baby and from Dongchimi (신생아 분변 및 동치미에서 분리한 젖산균 대사산물의 항균특성)

  • Lee, Ji-Young;Park, Yeong-Soo;Kim, Yong-Suk;Shin, Dong-Hwa
    • Korean Journal of Food Science and Technology
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    • v.34 no.3
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    • pp.472-479
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    • 2002
  • The antimicrobial effects of metabolites from isolated strains from feces of Korean newborn baby and from Dongchimi against six food-borne microorganisms, and characteristics of the metabolites were investigated.. The metabolites from isolated strains adjusted pH to 3.5, 4.0, and 4.5 showed strong growth inhibition against S. Typhimurium, and S. Enteritidis. The metabolites has kept its inhibition activities to the pathogens after catalase, trypsin or pepsin treatment. In addition, antimicrobial activity of metabolites was not decreased by heat treatment at $121^{\circ}C$ for 15 min. D2 and F35-2 strains were confirmed homofermentative and F20-3 was heterofermentative bacteria identified by final organic acid and gas production. The amount of lactic acid produced by D2 and F35-2 strains after 24 h of incubation was 1.84 and 1.85% respectively, but F20-3 strain produced acetic acid (0.22%) and lactic acid (0.91%).

Evaluation of 12nm Ti Layer for Low Temperature Cu-Cu Bonding (저온 Cu-Cu본딩을 위한 12nm 티타늄 박막 특성 분석)

  • Park, Seungmin;Kim, Yoonho;Kim, Sarah Eunkyung
    • Journal of the Microelectronics and Packaging Society
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    • v.28 no.3
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    • pp.9-15
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    • 2021
  • Miniaturization of semiconductor devices has recently faced a physical limitation. To overcome this, 3D packaging in which semiconductor devices are vertically stacked has been actively developed. 3D packaging requires three unit processes of TSV, wafer grinding, and bonding, and among these, copper bonding is becoming very important for high performance and fine-pitch in 3D packaging. In this study, the effects of Ti nanolayer on the antioxidation of copper surface and low-temperature Cu bonding was investigated. The diffusion rate of Ti into Cu is faster than Cu into Ti in the temperature ranging from room temperature to 200℃, which shows that the titanium nanolayer can be effective for low-temperature copper bonding. The 12nm-thick titanium layer was uniformly deposited on the copper surface, and the surface roughness (Rq) was lowered from 4.1 nm to 3.2 nm. Cu bonding using Ti nanolayer was carried out at 200℃ for 1 hour, and then annealing at the same temperature and time. The average shear strength measured after bonding was 13.2 MPa.

Isolation of a Pseudoalteromonas sp. JH-1 Producing Agarase and Characterization of its Agarase (Agarase를 생산하는 Pseudoalteromonas sp. JH-1의 분리·동정 및 agarase의 특성 연구)

  • Lee, Dong-Geun;Kim, Ju-Hui;Lee, Sang-Hyeon
    • Journal of Life Science
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    • v.31 no.5
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    • pp.496-501
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    • 2021
  • In this study, the marine agar-degrading bacterium Pseudoalteromonas sp. JH-1 was isolated, and its growth and agarase properties were investigated. Seawater was collected from the offshore of the Yonggung Temple in Busan, and agar-degrading bacteria were isolated and cultured with marine agar medium. The bacterium Pseudoalteromonas sp. JH-1 was isolated through 16S rRNA gene sequencing. The extracellularly secreted enzyme was obtained from the culture broth of Pseudoalteromonas sp. JH-1 and was used to characterize its agarase. The extracellular agarase exhibited a maximum activity of 116.6 U/l at 50℃ and pH 6.0 of 20 mM Tris-HCl buffer. Relative activities were 31, 59, 94, 100, 45, and 31% at 20, 30, 40, 50, 60, and 70℃, respectively. Relative activities were 49, 85, 100, 86, 81, and 67% at pH 4, 5, 6, 7, 8, and 9, respectively. Residual activity was more than 85% after exposure at 20, 30, and 40℃ for 2 hr, and more than 82% after exposure at 50℃ for 2 hr. Zymogram analysis confirmed that Pseudoalteromonas sp. JH-1 produced at least two agarases of 55 and 97 kDa. As the products of α-agarase and β-agarase have antioxidation, antitumor, skin-whitening, macrophage activation, and prebiotic effects, further studies are needed on the agarase of Pseudoalteromonas sp. JH-1.

The Isolation of Agarolytic Agarivorans sp. HY-1 and the Characterization of Its Agarase (한천분해 Agarivorans sp. HY-1의 분리와 한천분해효소의 특성)

  • Lee, Dong-Geun;Cho, Ha-Yeon;Kim, Andre;Lee, Sang-Hyeon
    • Journal of Life Science
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    • v.32 no.4
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    • pp.285-289
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    • 2022
  • In this study, the growth characteristics of an agar-degrading bacterium isolated from seawater samples collected from Yeongheungdo, Incheon, and the characteristics of its agarase were analyzed. The 16S rRNA gene sequence of the isolated strain was 95% similar to that of the genus Agarivorans, and thus the isolated strain was named Agarivorans sp. HY-1. When Agarivorans sp. HY-1 was cultured in a marine broth 2216 medium at 27℃ and 250 rpm, it showed maximum growth on day 1 and showed maximum enzymatic activity on day 2. A crude enzyme solution was prepared from secreted agarase in the culture medium. The extracellular agarase of the Agarivorans sp. HY-1 strain showed maximal activity at 40℃ and pH 7.0 (20 mM Tris-HCl) with 591.91 U/l. The agarase exhibited relative activities of 64, 91, 100, 97, 89, and 60% at 20, 30, 40, 50, 60, and 70℃, respectively. At pH 5, 6, 7, and 8, the relative activities were 79, 95, 100, and 55%, respectively. Furthermore, the agarase exhibited >86% residual activity at 20, 30, and 40℃ for 2 hr and >44% residual activity at 50℃ after 2 hr. A TLC analysis confirmed that Agarivorans sp. HY-1 produced α-agarase. As the degradation products of α-agarase have anticancer and antioxidant effects, Agarivorans sp. HY-1 and its agarase may well prove useful.

Temperature Dependent Creep Properties of Directionally Solidified Ni-based Superlloy CM247LC (일방향 응고 니켈기 초내열 합금 CM247LC의 온도에 따른 크리프 특성)

  • Choi, Baig-Gyu;Do, Jeonghyeon;Jung, Joong Eun;Seok, Woo-Young;Lee, Yu-Hwa;Kim, In Soo
    • Journal of Korea Foundry Society
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    • v.41 no.6
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    • pp.505-515
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    • 2021
  • Creep properties of directionally solidified Ni-based superalloy CM247LC under various temperature and stress conditions have been investigated. In the heat-treated specimen, some portion of eutectic γ-γ' remained, and uniform cubic γ' was observed in the dendrites. At low temperature (750℃) and high stress condition, a large amount of deformation occurred during the primary creep, while the tertiary creep region accounted for most of the creep deformation under high temperature and low stress condition. γ' particles are sheared by dislocation dissociated into super lattice partial dislocations separated by stacking faults at 750℃. No stacking faults in γ' were found at and above 850℃ due to the temperature dependence of the stacking fault energy. Raft structure of γ' was found after creep test at high temperature of 950℃ and 1000℃. At 850℃, the deformation mechanism was shown to be dependent on the stress condition, and so rafting was observed only under low stress condition.

Characteristics and Sensory Optimization of Taro (Colocasia esculenta) under Different Aging Conditions for Food Application of Black Taro (흑토란의 식품재료화를 위한 숙성 조건에 따른 토란의 특성 및 관능 최적화)

  • Jeon, Yu-Ho;Lee, Ji-Won;Son, Yang-Ju;Hwang, In-Kyeong
    • Korean Journal of Food Science and Technology
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    • v.48 no.2
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    • pp.133-141
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    • 2016
  • The physicochemical properties, antioxidant capacities, and sensory optimization of taro (Colocasia esculenta) under different aging conditions were investigated to develop black taro. Black taro was processed in three steps (steaming: $95{\pm}3^{\circ}C$ for 1 h; aging: 85, 90, $95^{\circ}C$ for 20, 40, and 60 h; drying: $60^{\circ}C$ for 24 h) and ground into a powder for all experiments. Black taro showed an increased crude fiber content and browning index compared to raw taro. Calcium oxalate contents, reducing sugar contents, moisture contents, and lightness values were decreased during the processing of taro. Improvements in total polyphenol content and antioxidant activity (DPPH, ABTS, FRAP) were observed in the black taro samples aged at higher temperature. Response surface methodology was used for sensory optimization, and the optimum aging conditions with the highest acceptance values were found to be $88.73^{\circ}C$ for 39.50 h for taste, and $88.82^{\circ}C$ for 42.60 h for overall acceptance.

Reliability of a Cobalt Silicide on Counter Electrodes for Dye Sensitized Solar Cells (코발트실리사이드를 이용한 염료감응형 태양전지 상대전극의 신뢰성 평가)

  • Kim, Kwangbae;Park, Taeyeul;Song, Ohsung
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.4
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    • pp.1-7
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    • 2017
  • Cobalt silicide was used as a counter electrode in order to confirm its reliability in dye-sensitized solar cell (DSSC) devices. 100 nm-Co/300 nm-Si/quartz was formed by an evaporator and cobalt silicide was formed by vacuum heat treatment at $700^{\circ}C$ for 60 min to form approximately 350 nm-CoSi. This process was followed by etching in $80^{\circ}C$-30% $H_2SO_4$ to remove the cobalt residue on the cobalt silicide surface. Also, for the comparison against Pt, we prepared a 100 nm-Pt/glass counter electrode. Cobalt silicide was used for the counter electrode in order to confirm its reliability in DSSC devices and maintained for 0, 168, 336, 504, 672, and 840 hours at $80^{\circ}C$. The photovoltaic properties of the DSSCs employing cobalt silicide were confirmed by using a simulator and potentiostat. Cyclic-voltammetry, field emission scanning electron microscopy, focused ion beam scanning electron microscopy, and energy dispersive spectrometry analyses were used to confirm the catalytic activity, microstructure, and composition, respectively. The energy conversion efficiency (ECE) as a function of time and ECE of the DSSC with Pt and CoSi counter electrodes were maintained for 504 hours. However, after 672 hours, the ECEs decreased to a half of their initial values. The results of the catalytic activity analysis showed that the catalytic activities of the Pt and CoSi counter electrodes decreased to 64% and 57% of their initial values, respectively(after 840 hours). The microstructure analysis showed that the CoSi layer improved the durability in the electrolyte, but because the stress concentrates on the contact surface between the lower quartz substrate and the CoSi layer, cracks are formed locally and flaking occurs. Thus, deterioration occurs due to the residual stress built up during the silicidation of the CoSi counter electrode, so it is necessary to take measures against these residual stresses, in order to ensure the reliability of the electrode.

The CH3CHO Removal Characteristics of Lightweight Aggregate Concrete with TiO2 Spreaded by Low Temperature Firing using Sol-gel Method (Sol-gel법으로 이산화티탄(TiO2)을 저온소성 도포시킨 경량골재콘크리트의 아세트알데히드(CH3CHO) 제거 특성)

  • Lee, Seung Han;Yeo, In Dong;Jung, Yong Wook;Jang, Suk Soo
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.31 no.2A
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    • pp.129-136
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    • 2011
  • Recently studies on functional concrete with a photocatalytic material such as $TiO_2$ have actively been carried out in order to remove air pollutants. The absorbtion of $TiO_2$ from those studies is applied by it being directly mixed into concrete or by suspension coated on the surface. When it comes to the effectiveness, the former process is less than that of the latter compared with the $TiO_2$ use. As a result, the direct coating of $TiO_2$ on materials' surface is more used for effectiveness. The Surface spread of it needs to have a more than $400^{\circ}C$ heat treat done to stimulate the activation and adhesion of photocatalysis. Heat treat consequently leads hydration products in concrete to be dehydrated and shrunk and is the cause of cracking. The study produces $TiO_2$ used Sol-gel method which enables it to be coated with a low temperature treat, applies it to pearlite using Lightweight Aggregate Concrete fixed with a low temperature treat and evaluates the spread performance of it. In addition to this, the size of pearlite is divided into two types: One is 2.5 mm to 5.0 mm and the other is more than 5.0 mm for the benefit of finding out the removal characteristics of $CH_3CHO$ whether they are affected by pearlite size, mixing method and ratio with $TiO_2$ and elapsed time. The result of this experiment shows that although $TiO_2$ produced by Sol-gel method is treated with 120 temperature, it maintains a high spread rate on the XRF(X ray Florescence) quantitative analysis which ranks $TiO_2$ 38 percent, $SiO_2$ 29 percent and CaO 18 percent. In the size of perlite from 2.5 mm to 5.0 mm, the removal characteristic of $CH_3CHO$ from a low temperature heated Lightweight concrete appears 20 percent higher when $TiO_2$ with Sol-gel method is spreaded on the 7 percent of surface. In other words, the removal rate is 94 percent compared with the 72 percent where $TiO_2$ is mixed in 10 percent surface. In more than 5.0 mm sized perlite, the removal rate of $CH_3CHO$, when $TiO_2$ is mixed with 10 percent, is 69 percent, which is similar with that of the previous case. It suggests that the size of pearlite has little effects on the removal rate of $CH_3CHO$. In terms of Elapsed time, the removal characteristic seems apparent at the early stage, where the average removal rate for the first 10 hours takes up 84 percent compared with that of 20 hours.