• 제목/요약/키워드: 연삭깊이

검색결과 32건 처리시간 0.019초

웨이퍼 연삭 가공 기술의 동향 및 가공 정밀도 향상에 관한 연구 (The Trend of wafer Grinding Technology and Improvement of Machining Accuracy)

  • 안대균;황징연;이재석;이용한;하상백;이상직
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2002년도 춘계학술대회 논문집
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    • pp.20-23
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    • 2002
  • In silicon wafer manufacturing process, the grinding process has been adopted to improve the quality of wafer such as flatness, roughness and so on. This paper describes the effect of grinding process on the surface quality of wafer. The experiments are carried out by high precision in fred grinder with air bearing spindle. The relationship between the inclination of chuck table and the flatness of wafer is investigated, and the effect of grinding conditions including wheel speed, table speed, and feed rate on damage depth and roughness of wafer is also investigated. The experimental results show that there is close relationship between the inclination of the chuck table and the flatness of wafer, and the grinding conditions within this paper little affect the flatness of wafer and relatively high affect the damage depth of wafer.

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CBN과 WA숫돌에 의한 연삭에서 연삭력과 표면거칠기 특성 (Characteristics of Grinding Force and Surface Roughness by CBN and WA Wheel)

  • 하만경;곽재섭;양재용;정영득;심성보;류인일
    • 한국공작기계학회논문집
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    • 제11권1호
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    • pp.26-31
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    • 2002
  • In this study an experimental investigation was conducted to find the grinding characteristics of ceramics, STD11 and STS304 materials. The grinding force and the microscopic observation of the workpieces were obtained in surface grinding. Grinding characteristics of ceramics were inspected through the microscopic examination the cutting force, and the surface roughness. It has been found that the finding force of ceramics is relatively low as compared to that of steels and that CBN wheel has an excellent performance. The surface roughness was measured according to the feedrate and the depth of out.

화상처리를 이용한 연삭공구 인식 및 안면인식 응용 (Grinding disk detection with image processing and application to face recognition)

  • 백재용;송무건;유송민
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2001년도 춘계학술대회 논문집(한국공작기계학회)
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    • pp.115-118
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    • 2001
  • An image processing method was applied to characterize a shape of the flexible grinding disk. A disk surface image was taken by CCD camera. Depth of cut was changed to be 2 and 4mm. Circles marked on the disk were captured to extract the key features of the deflection. Notable correlation has been observed between the intervals and the process conditions. Same methodology has been applied to check the symmetry of the human face. Tentative results revealed that symmetry could be checked using the filtered face image.

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연삭 장비를 이용한 최적의 휠 특성분석 (A study on the Optimum Wheel Characteristics Using Grinding Machine)

  • 고준빈;김우강;전택종
    • 한국기계가공학회지
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    • 제7권4호
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    • pp.142-148
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    • 2008
  • This study aims to find the optimal cutting conditions, which are obtained by grinding condition, and the grinding characteristics and condition of constant velocity joint were investigated with respect to wheel velocity, depth of cut, feed speed. Grinding machine has been widely used in manufacturing optical reflects of metal. Such as steel are easy to be machined because of their proper material. As a result I obtained the data of grinding conditions makes good surface roughness and the optimal condition of grinding and get the mesh condition. The purpose of this study is to find the optimum grinding wheel characteristics for cutting constant velocity joint.

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탄소섬유 에폭시 복합재료 연삭온도에 의한 연삭특성 (A Study on the Grinding Characteristics of the Carbon Fiber Epoxy Composite Material Grinding Temperature)

  • 한흥삼;이동주
    • 한국생산제조학회지
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    • 제9권6호
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    • pp.65-70
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    • 2000
  • Although the net-shape molding of composites is generally recommended, molded composites frequently requires cutting or grinding due to the dimensional inaccuracy for precision machine elements. During the composite machining operations such as cutting and grinding, the temperature at the grinding area may increase beyond the allowed limit due to the low thermal conductivity of composites, which might degrade the matrix of composite. Therefore, in this work, the temperature at the grinding point during surface grinding of carbon fiber epoxy composite was measured. The grinding temperature and surface roughness were also measured to investigate the surface grinding characteristics of the composites. The experiments were performed both under dry and wet grinding conditions with respect to cutting speed, feed speed, depth of cut and stacking angle. From the experimental investigation, the optimal conditions for the composite surface grinding were suggested.

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금속결합제 연삭숫돌의 방전트루잉에서 기준전류와 절입깊이가 방전에너지에 미치는 영향 (Effect of Reference Current and Depth of Cut on Electro-Discharge Energy in Electro-Discharge Truing Process for Metal-Bonded Grinding Wheel)

  • 신건휘;곽태수;정명원;곽인실
    • 한국정밀공학회지
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    • 제33권6호
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    • pp.485-490
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    • 2016
  • This study focused on developing an electro-discharge truing method for the ELID grinding process using a metal-bonded grinding wheel. The truing process in grinding plays important roles in enhancing the quality of the ground surface. In this study, a reference current in the electro-discharge truing process was confirmed to be a viable solution for efficient truing through performance experiments. Current and voltage variation experiments were carried out and the variation output data were collected with a monitoring program to understand the electrodischarge phenomenon that occurs between metal-bonded grinding wheels and copper electrodes. The experimental results showed that as the reference current decreased, the average electro-discharge energy decreased. Therefore, the reference current can be used as an indicator to estimate the size of the gap between the truer and grinding wheel.

초경합금재의 내면연삭에서 가공능률 향상에 관한 연구 (A Study on the Internal Grinding of Tungsten Carbide Materials to Improve the Machining Performance)

  • 허성중
    • 한국정밀공학회지
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    • 제13권6호
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    • pp.52-58
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    • 1996
  • This paper described on the effect of residual stocks in internal grinding of tungsten carbide materials in order to improve the grinding efficiency as well as grinding accuracy. Through the fundamental investigation is carried out for tungsten carbide materials using electroplated diamond wheel, the residual stock after grinding process is effective to the grinding efficiency. The obtained results are as follows: (1) Under the depth of cut(t) is constant and decreasing the workpiece velocity(Vw), the residual stock after grinding is increased, but the difference is little less than the difference by table speed. (2) Increasing the wheel velocity, the residual stock after grinding is decreased. Therefore in order to minimize the residual stock, the wheel velocity should be increased as far as possible. (3) The surface roughness and out-of roundness increased with depth of cut and table speed, and decreased with wheel velocity, but it may as well adopt as much as possible under the dimensional tolerance which is required for high efficiency grinding. (4) In order to remove residual stock, the spark-out grinding shoule be done, and it also can be improved about 20~25% throughout spark-out grinding, and the number of optimal spark-out times were within 10 times.

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연삭공정에서의 가공탄성계수에 관한 연구 (A Study on the Mchining Elasticity Parameter in the Grinding Process)

  • 임관혁;김강
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 1995년도 추계학술대회 논문집
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    • pp.3-7
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    • 1995
  • Force generated during grinding process causes elastic defomation. The effect of this deforms a workpiecs. So grinding system is explainable using the concept of macining elasticity phenomenon. Machining elasticity is defined as ratio between the true depth of c ut, and an importnat factor to affect material removal mchanism and productivity. Generally, to produce accurate surface and dimensionally precise components operators depend on their experiences. Because of these, productivity is reduced and time is wasted. The objective of this reserch is to study the effect of grinding conditions, such as table speed, depth of cut on the machining elasticity parameter.

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탄소섬유 에폭시 복합재료 연삭숫돌 선정에 관한 연구 (A Study on the Grinding Characteristics of the Carbon Fiber Epoxy Composite Materials with the Vitrified Bonded Wheel)

  • 한흥삼
    • Composites Research
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    • 제13권5호
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    • pp.44-49
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    • 2000
  • Although the net-shape molding of composites is generally recommended, molded composites frequently requires cutting or grinding due to the dimensional inaccuracy for precision machine elements. The surface roughness and cutting force were also measured to investigate the surface grinding characteristics of the composites using the vitrified bonded wheel (WA, GC). The experiments were performed dry grinding conditions with respect to cutting speed, feed speed, depth of cut of the stacking sequence $[O]_{nT.}$ From the experimental investigation, the optimal conditions both the vitrified bonded wheel WA and GC for the surface grinding are suggested.

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탄소섬유 에폭시 복합재료의 평면 연삭온도 특성에 관한 연구 (A Study on the Surface Grinding Temperature Characteristics of the Carbon Fiber Epoxy Composite Materials)

  • 한흥삼
    • 한국공작기계학회:학술대회논문집
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    • 한국공작기계학회 2000년도 춘계학술대회논문집 - 한국공작기계학회
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    • pp.441-446
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    • 2000
  • Although the net-shape molding of composites is generally recommended, molded composites frequently required cutting or grinding due to the dimensional inaccuracy for precision machine elements. During the composite machining operations such as cutting and grinding, the temperature at the grinding area may increase beyond the allowed limit due to the low thermal conductivity of composites, which might degrade the matrix of composite. Therefore, in this work, the temperature at the grinding point during surface grinding of carbon fiber epoxy composite was measured. The grinding temperature and surface roughness were also measured to investigate the surface grinding characteristics of the composited. The experiments were performed both under dry and wet grinding conditions with respect to cutting speed, feed speed, depth of cut and stacking angle. From the experimental investigation, the optimal conditions for the composite plain grinding were suggested.

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