• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.64-64
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• 2003

고집적화된 시스템 LSI 반도체 소자 제조 공정에서 소자의 고속화 및 고성능화에 따른 배선층수의 증가와 배선 패턴 미세화에 대한 요구가 갈수록 높아져, 광역평탄화가 가능한 STI CMP(Shallow Trench Isolation Chemical-Mechanical-Polishing)공정의 중요성이 더해가고 있다. 이러한 STI CMP 공정에서 세리아 슬러리에 첨가되는 계면활성제의 농도에 따라 산화막과 질화막 사이의 연마 선택비를 제어하는 것이 필수적 과제로 등장하고 있다. 일반적인 CMP 공정에서 압력 증가에 따른 연마 제거량이 Prestonian 거동을 나타내는 반면, 연마 입자의 크기를 변화시켜 계면활성제의 농도를 달리 하였을 경우, 압력 변화에 따라 Non-Prestonian 거동이 나타나는 것을 고찰할 수 있었다. 따라서 본 연구에서는 세리아 슬러리 내에 첨가되는 계면활성 제의 농도와 연마입자의 크기를 달리한 후, 압력을 변화시킴으로 나타나는 non-Prestonian 거동에 미치는 영향에 대하여 연구하였다.

• Analytical Science and Technology
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• v.19 no.5
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• pp.394-399
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• 2006

The polishing performance and the relationships of electrochemistry depending upon oxidizers and additives in the tungsten CMP slurry used in semiconductor industry were investigated. Hydrogen peroxide, ferric nitrate and potassium iodate were used as oxidizers and they showed different oxidation reactions on tungsten film depending on the kind of oxidizers and pH of slurry. The differences influenced the polishing performance. Etching reaction was predominated in the hydrogen peroxide. However, passivation reaction was prevailed in ferric nitrate and potassium iodate. TMAH and KOH raised the potential energy and removal rate of tungsten, and improved a dispersion characteristic of slurry by increasing absolute value of zeta potential. Addition of 100 ppm of poly(acrylic acid) of M.W. 250,000 improved dispersion ability.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.198-201
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• 2002

An internal finishing process by the application of magnetic abrasive machining has been developed as a new technology to obtain a fine inner surface of pipe. In this paper, a slurry circulation system was designed and manufactured. Its finishing characteristics was experimently investigated by various effective factors such as dry, water flow, oil flow with a slurry. From the experimental results, it was found that the materal removal and surface roughness were good in oil flow with slurry. The slurry circulation system is effective on the internal finishing of non-ferromagnetic pipe(SUS304).

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.541-541
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• 2008

반도체 소자가 차세대 초미세 공정 기술 도입의 가속화를 통해 고속화 및 고집적화 되어 감에 따라 나노(Nano) 크기의 회로 선폭 미세화를 극복하고자 최적의 CMP (Chemical Mechanical Polishing) 공정이 요구되어지고 있다. 이처럼 CMP 공정이 반도체 제조 공정에 적용됨으로써 공정 마진 확보에 진일보 하였으나 CMP 장비의 공정 조건, 슬러리의 종류, 연마패드의 종류 등에 의해 CMP 성능이 결정된다. 특히 슬러리는 연마 공정의 성능에 중요한 영향을 미치는 요인이다. 고가의 슬러리가 차지하는 비중이 40% 이상을 넘고 있어 슬러리 원액의 소모량을 줄이기 위한 연구들이 현재 활발히 진행되고 있다. 본 연구에서는 새로운 연마제의 특성을 알아보기 위해 탈이온수(De-ionized water; DIW) 에 $CeO_2$, 연마제를 첨가한 후 분산시간에 따른 연마 특성과 AFM, EDX, XRD, TEM분석을 통해 그 가능성을 알아보았다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.17 no.8
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• pp.722-727
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• 2016

In this study, we attempted to reduce the generation of waste acids in the electropolishing process by improving the current efficiency. The optimum conditions of the electropolishing process when using the round bus bar were determined by the Taguchi method. The current density, polishing time, electrolyte temperature and flow rate were selected as the control factors for the current efficiency in the electropolishing process. An orthogonal array was created by considering three levels for each factor and experiments were carried out. The larger-the-better SN ratios were calculated by the Taguchi method. The current density was the most important factor affecting the current efficiency and the polishing time was the least important one. The optimum conditions to minimize the generation of waste acids were a current density of $45A/dm^2$, polishing time of 4 min, electrolyte temperature of $65^{\circ}C$ and flow rate of 7 L/min. The results of the ANOVA confirmed that the effects of the current density, electrolyte temperature and flow rate are significant at the 95% confidence level. The increase in the contact area and contact force afforded by using the round bus bar improved the current efficiency which, in turn, reduced the amount of waste acids generated. Further research is planned to investigate the effect of the type of bus bar on the current efficiency.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2012.05a
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• pp.303-304
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• 2012

공업적으로 널리 사용되는 내식강의 전해연마는 주로 고농도의 인산염 전해액 기반에 황산과 질산 첨가된 용액에서 $70^{\circ}C$ 이상의 고온에서 행해지다 보니 폐액 처리와 작업 환경이 좋지 않아 기피 기술로 인식 되어 있다. 본 연구에서는 환경 친화적인 상온 공정을 개발 하고자 에틸렌 글리콜 용액에 여러 가지 첨가제를 첨가하여 그 효과를 살펴보고 최적 조성과 공정 조건을 확립 하고자 하였다. 틸렌 글리콜에 물과 질산 암모니움을 첨가하여 점도와 pH, 전류 전압 특성을 구하고 여기에 첨가제인 설파메이트와 암모니움 클로라이드 첨가량을 정하고 각각의 효과를 확인 하였다. 이러한 결과를 바탕으로 SUS 316 재질에 대한 최적 연마조건을 설정하기 위해 조도 변화, 광택도 및 표면 조직 변화와 전해연마기구를 비교 검토하였다.

• Journal of Soil and Groundwater Environment
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• v.12 no.4
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• pp.78-85
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• 2007

This study provides an attempt to evaluate sanding wastes, generated from a chemical company as a reused adsorbent. Organic impurities in the raw sanding wastes were removed by calcination at $550^{\circ}C$. Aluminum was a major inorganic composition in the raw sanding wastes and increased from 29.09% to 52.73% after calcination. Dissolved concentrations of heavy metals from the calcined sample were below 0.3 mg/L in a stability test at pH 2. From the pH-edge adsorption experiments with the calcined sanding wastes, As (V) was found to follow an anionic-type adsorption. Adsorption isotherm obtained with variation of the dosage of the calcined sanding wastes was better described by Freundlich equation than Langmuir one. Freundlich constants of K and 1/n were 4.244 and 0.316, respectively. The As (V) adsorption capacity of calcined sanding wastes estimated from Langmuir isotherm was 13.25 mg/g. From this study, the calcined sample was identified as a good reusable adsorbent in the view point of stability and adsorption capacity on As (V).

• Journal of the Korean Society of Marine Environment & Safety
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• v.25 no.5
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• pp.609-616
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• 2019

When the fouling of a vessel occurs, its resistance at sea increases and there is a corresponding increase in fuel consumption. The maintenance cost of the vessel also increases because it is time-consuming to remove the fouling. To solve this problem and minimize environmental contamination of sea-water, there have been recent developments in anti-fouling paints as self-polishing copolymers that not include toxic elements such as tin. When these conventional techniques are applied to vessels, polishing is promoted during the operation whereby friction or vibration with seawater occurs. This leads to enhanced anti-fouling performance. However, when fouling is intensified such as during an anchorage, there is no flow of seawater and polishing is suppressed. This leads to a deterioration of the performance of anti-fouling. To solve these problems, we developed a system that induces vibration in a vessel during anchorage. As such, the deterioration of polishing due to insuf icient flow of seawater is inhibited. The reliability of the ultrasonic antifouling system was evaluated by calculating its repeatability. The removal efficiency of fouling of the proposed system was qualitatively evaluated using test specimens. The test revealed that the value of the coefficient of variation for the reproducibility of the frequency and amplitude was 0.2 % and 4.0 % on average. The degree of fouling of the specimens was the highest at 73.3 g in the No.5 sepcimen. Moreover, efficiency of fouling removal was 93.2 % on average compared to the specimens without the proposed system.

• Journal of the Korea institute for structural maintenance and inspection
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• v.24 no.6
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• pp.42-49
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• 2020

This paper is a basic study to improve durability by imparting hydrophobicity to the surface and sphere of cement-based materials. A cement mortar to which a silane/siloxane-based mixed water repellent was added was prepared, and its initial hydration performance, flow performance, and compressive strength were measured. In addition, after the surface was abraded, the water contact angle and water absorption were measured. The flow of cement mortar to which the water repellent was added was found to decrease up to 1.5% in the addition amount of the water repellent agent, and increased at 3.0% in the addition amount. It was found that the setting time of the cement paste was delayed in both the initial setting and the termination when the water repellent was added. It was found that the compressive strength decreased from 3.0% of the maximum added amount of the water repellent to a maximum of 30%. The contact angle was found to increase when the water repellent was added to the cement mortar, and the contact angle after surface polishing was found to be larger than before surface polishing. The addition of the water repellent showed hydrophobicity not only on the surface but also on the surface and cross section damaged by polishing. The water absorption rate was found to decrease when the water repellent was added to the cement mortar, and the water absorption rate after surface polishing was found to be greater than before surface polishing.

• Tunnel and Underground Space
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• v.8 no.4
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• pp.332-341
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• 1998

Conventional polishing of stone panel edges has been done by hand. While this has changed somewhat with the advent of automatic machines, it is still very much a hand finishing technology. For the development of edge shape milling tool, the primary test on characteristics of edge shape milling tool was carried out. This paper presents the results of tests focused upon the milling capability that was varied by the variables of operation parameters. Author tried to confirm the effect of six operation parameters of equipment such as rotation speed, advance speed, applied load, water flow rate and rotational direction. The result from test was described in term of shape milling capability that was defined as cutting volume of rock by unit weight of tool wear. The variance of the results could indicate the optimum level of each operating parameters. The test was also carried out to determine the abrasion resistance varied according to the abrasive flow rate. The abrasion resistance was increased with the abrasive flow rate, but over some rate it was not changed.