• Analytical Science and Technology
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• v.18 no.6
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• pp.483-490
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• 2005

Mass resolution of the time of flight aerosol mass spectrometer for an aerosol component analysis depends on the initial direction and the initial energy of the ions. We have found that the shape of the optimum post focusing electric field is not linear. The maximum electric potential should be applied to the ions whose initial direction is 90 degree. To check on the post focusing effects, we have installed a laser ablation mass spectrometer. By using this LA-MS, we have found that the average energy distribution of the laser ablated ions is 8 eV. To establish the optimum mass resolution, a time delay and a high voltage are needed, and the results of the study show that 1500 nsec, and 3.7 kV are the optimum parameters for our system respectively. The isotope mass signals of copper show a good resolution.

• Progress in Medical Physics
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• v.13 no.4
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• pp.229-233
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• 2002

We have tested a combined CT/SPECT system with a single CZT detector for x-ray and gamma-ray medical imaging. The size of detector is 10$\times$10$\times$5 ㎣, and the anodes are pixellated as a 4$\times$4 array with a pixel dimension of $1.5\times$1.5 $\textrm{mm}^2$. The cathode was coated with a continuous Au-plated. We have characterized the system performance by scanning a radiographic resolution phantom and the Hoffman Brain phantom. Pulse counting electronics with very short shaping time (50 ㎱) are used to satisfy high photon rates in x-ray imaging, and response linearity up to 3$\times$10$^{5}$ counts per second per detector element is achieved. Energy resolution of 10.4% and 5.3% FWHM at Tc-99m 140 keV peak are obtained for the 50 ㎱ and 2 $mutextrm{s}$ shaping times, respectively. The spatial resolutions of CT and SPECT are about 1mm and 9mm, respectively. Photopeak efficiency of detector systems are 41.0% for 50㎱ and 72.5% for 2 $mutextrm{s}$ shaping time.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.197-197
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• 1999

Gate oxide 의 두께 감소는 gate의 캐패시턴스를 증가시켜 트랜지스터의 속도를 빠르게 하며, 동시에 저전압 동작을 가능하게 하기 때문에 gate oxide 두께는 MOS 공정 세대가 진행되어감에 따라 계속 감소할 것이다. 이러한 얇은 산화막은 device design에 명시된 두께의 특성을 나타내야 한다. Gate oxide의 두께가 작아질수록 gate oxide와 crystalline silicon간의 계면효과가 박막의 두께의 결정에 심각한 영향을 주기 때문에 정확한 두께 계측이 어렵다. 이러한 영향과 계측방법에 따라서 두께 계측의 차이가 나타난다. XTEM은 사용한 parameter에, Ellipsometer는 refractive index에, MEIS(Medium) Energy Ion Scattering)은 에너지 분해능에, Capacitor-Voltage 측정은 depletion effect에 의해 영향을 받는다. 우리는 계면의 원자분해능 분석에 통상 사용되어온 High Resolution TEM을 이용하여 약 30~70$\AA$ SiO2층의 두께와 계면 구조에 대한 분석을 하여 이를 MEIS와 0.015nm의 고감도를 가진 SE(Spectroscopy Ellipsometer), C-V 측정 결과와 비교하여 가장 좋은 두께 계측 방법을 찾고자 한다.

• Progress in Medical Physics
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• v.21 no.1
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• pp.93-98
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• 2010

The aim of this work was to establish the methodology for event positioning by measuring depth of interaction (DOI) information and to evaluate the system sensitivity and spatial resolution of the new detector for I-125 and Tc-99m imaging. For this purpose, a Monte Carlo simulation tool, DETECT2000 and GATE were used to model the energy deposition and light distribution in the detector and to validate this approach. Our proposed detector module consists of a monolithic CsI(Tl) crystal with dimensions of $50.0{\times}50.0{\times}3.0\;mm^3$. The results of simulation demonstrated that the resolution is less than 1.5 mm for both I-125 and Tc-99m. The main advantage of the proposed detector module is that by using 3 mm thick CsI(Tl) with maximum-likelihood position-estimation (MLPE) method, high resolution I-125 imaging and high sensitivity Tc-99m imaging are possible. In this paper, we proved that our new detector to be a reliable design as a detector for a multi-energy SPECT.

• Korean Journal of Optics and Photonics
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• v.18 no.4
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• pp.241-245
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• 2007

In this study, a two-dimensional fiber-optic radiation sensor has been developed using water-equivalent organic scintillators for photon beam therapy dosimetry. Two-dimensional photon beam distributions and percent depth doses(PDD) are measured according to the energies and field sizes of the photon beam. This sensor has many advantages such as high resolution, real-time measurement and ease of calibration over conventional radiation measurement devices.

• Journal of Radiation Protection and Research
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• v.24 no.4
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• pp.195-203
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• 1999

It is difficult to determine dosimetric characteristics for small field photon beams since such small fields do not achieve complete lateral electronic equilibrium and have steep dose gradients. Dosimetric characteristics of small field 4, 6, and 10 MeV photon beams have been measured in water with a diamond detector and compared to measurements using small volume cylindrical and plane parallel ionization chambers. Percent depth dose (PDD) and beam profiles for 6 and 10 MeV photon beams were measured with diamond detector and cylindrical ion chamber for small fields ranging from $1{\times}1\;to\;4{\times}4cm^2$. Total scatter factors($S_{c,p}$) for 4, 6, and 10 MeV photon beams were measured with diamond detector, cylindrical and plane parallel ion chambers for small fields ranging from $1{\times}1\;to\;4{\times}4cm^2$. The $S_{c,p}$ factors obtained with three detectors for 4, 6, and 10 MeV photon beams agreed well ($\pm1.2%$) for field sizes greater than $2{\times}2,\;2.5{\times}2.5,\;and\;3{\times}3\;cm^2$, respectively. For smaller field sizes, the cylindrical and plane parallel ionization chambers measure a smaller $S_{c,p}$ factor, as a result of the steep dose gradients across their sensitive volumes. The PDD values obtained with diamond detector and cylindrical ionization chamber for 6 and 10MeV photon beams agreed well ($\pm1.5%$) for field sizes greater than $4{\times}4\;cm^2$. For smaller field sizes, diamond detector produced a depth-dose curve which had a significantly shallower falloff than that obtained from the measurements of relative depth-dose with a cylindrical ionization chamber. For the measurements of beam profiles, a distortion in terms of broadened penumbra was observed with a cylindrical ionization chamber since diamond detector exhibited higher spatial resolution. The diamond detector with small sensitive volume, near water equivalent, and high spatial resolution is suitable detector compared to ionization chambers for the measurements of small field photon beams.

• Journal of the Korean Magnetics Society
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• v.4 no.2
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• pp.179-183
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• 1994

A high efficiency small electromagnet (22 mm air gap and $40{\times}25mm^{2}$ core's cross section) suitable for measuring magnetostriction and magnetic anisotropy was biult. The magnet could be minaturized by reducing the measuring space and time. The excitation current of the electromagnet was supplied for only a few second of measuring time. Cooling system of the electromagnet could be eliminated since the dissipation energy was very small. An 0.5 T magnetic field was generated with 180 W power consumption. The values of magnetostriction and magnetic anisotropy were measured with a very sensitive capacitance cell with resolution of $10^{-8}$ and 1 nJ. The torque was calibrated using a soft magnetic ribbon's shape anisotropy.

• The Journal of the Acoustical Society of Korea
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• v.23 no.7
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• pp.514-520
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• 2004

There are many techniques for underwater source localization. These are the methods based on TDOA (Time Difference Of Arrival) estimation. beamforming techniques and high resolution techniques, etc. In this Paper we estimate the underwater source position using MCPSP (Modified Cross Power Spectrum Phase) function that is calculated on frequency domain using sensors of small number. However, the performances of the localizing method based on MCPSP function drops greatly in the case of CW (Continuous Wave) signal . In this Paper we proposed the TDOA estimation method for pulsed CW signal. In the Proposed method we composed of new segment including a edge of ping. This segment was computed by short-time energy detection. With theoretical representation the performances of the proposed method were analyzed under various environment.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.474-474
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• 2010

현재 반도체시장의 확장으로 인해서 기존의 300mm 웨이퍼에서 450mm의 웨이퍼를 사용하는 공정으로 변화하는 추세이다. 450mm 웨이퍼로 대면적 화되면서 기존 300mm 공정 때보다 훨씬 효율적인 플라즈마 소스 즉, 고밀도이고, 고균등화(high uniformity) 플라즈마 소스를 필요로 한다. 본 논문에서는 고밀도 플라즈마 소스인 유도 결합형 플라즈마(Inductively Coupled Plasma ; ICP)에 축 방향의 약한 자기장을 인가시킨 자화된 유도결합형 플라즈마(Magnetized Inductively Coupled Plasma : MICP)[1]를 제안하여 기존 ICP와의 차이점을 살펴보았다. 실험 방법으로 레이저 유기 형광법(Laser Induced Fluorescence : LIF)[2]을 이용하여 플라즈마 쉬스(Sheath) 내의 전기장을 외부 자기장의 변화에 따라 높이별로 측정하고 그 결과로부터 쉬스의 전기적 특성을 살펴보았다. 플라즈마의 특성상 탐침이나 전극에 전압을 인가하면 그 주위로 디바이 차폐(Debye Shielding)현상이 일어나서 플라즈마 왜곡이 일어난다. 그렇기에 플라즈마, 특히 플라즈마 쉬스의 특성을 파악하기 위해서 레이저라는 기술을 사용하였다. 레이저는 고가의 장비이고 그 사용에 많은 경험지식(know-how)를 필요로 하지만 플라즈마를 왜곡시키지 않고, 플라즈마의 밀도, 온도, 전기장 등 많은 상수(parameter)들을 얻어 낼 수 있다. 또한 3차원적으로 높은 분해능을 가지고 있는 장점이 있다. 강한 전기장이 있는 곳에서 입자들의 고에너지 준위가 전기장의 세기에 비례하여 분리되는 Stark effect[3] 이론을 이용하여 플라즈마 쉬스내의 전기장을 측정하였다. 실험은 헬륨가스 700mTorr 압력에서 이루어졌다. 기판의 파워를 50W에서 300W까지 변화시키면서 기판에 생기는 쉬스의 전기장의 변화를 살펴보았고, 자기장을 인가한 후 동일한 실험을 하여 자기장의 유무에 따른 플라즈마 쉬스의 전기장 변화를 살펴보았다. 실험결과 플라즈마 쉬스의 전기장의 변화는 기판의 파워와 플라즈마 밀도에 크게 의존함을 알았다. 기판의 파워가 커질수록 쉬스의 전기장은 커지고, 기판에 생기는 Self Bias Voltage역시 음의 방향으로 커짐을 확인 하였다. 또한 자기장을 걸어주었을 경우 쉬스의 두께가 얇아짐으로써 플라즈마의 밀도가 증가했음을 확인 할 수 있었다.

• Journal of Astronomy and Space Sciences
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• v.24 no.2
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• pp.155-166
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• 2007

We have designed a high resolution proton and electron telescope for the detection of high energy particles, which constitute a major part of the space environment. The flux of the particles, in the satellite orbits, can vary abruptly according to the position and solar activities. In this study, a conceptual design of the detector, for adapting these variations with a high energy resolution, was made and the performance was estimated. In addition, a parallel processing algorithm was devised and embodied using FPGA for the high speed data processing, capable of detecting high flux without losing energy resolution, on board a satellite.