• Title/Summary/Keyword: 액체금속

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Beam stability improvement of liquid metal ion source (액체 금속 이온원의 빔 안정도 향상)

  • Hyun J. W.;Yim Youn Chan;Kim Seuong Soo;Oh Hyun Joo;Park Cheol Woo;Lee Jong Hang;Choi Eun Ha;Seo Yunho;Kang Seung Oun
    • Journal of the Korean Vacuum Society
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    • v.13 no.4
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    • pp.182-188
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    • 2004
  • Previous studies on the liquid Gallium ion sources used an electro-chemically etched tungsten wire with a coil-type heater. Such a structure requires excessive power consumption in the course of heating the liquid metal. In this work, a new structure is proposed that replaces the coil-type heater. It uses a Gallium reservoir made of six pre-etched 250$\mu\textrm{m}$ tungsten wires that surround the needle electrode. Gallium trading at the reservoir is observed to be much more stable, resulting in an improved beam stability.