• Proceedings of the KIEE Conference
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• 1996.07c
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• pp.1957-1959
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• 1996

In this paper, a piezoelectric micropump is fabricated and tested. The micropump consists of an actuator and two micronozzles have been made of silicon. It contains a piezoelectric polymer which allows opening and closing of the valves electrically. The actuator and the two micronozzles are fabricated by the anisotropic etch using EPW. Then, the fabricated actuator and the valves are anodically bonded with the pyrex glass which consists of the inlet and the outlet channels. The measured deflection of the piezoelectric polymer is $54\;{\mu}m$ at 1.6 kHz. The maximum pumping flow rate and the backward pressure of the micropump are $22\;{\mu}{{\ell}/min$, 8.7 Pa at 10 Hz, respectively.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.52 no.10
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• pp.487-491
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• 2003

The low-cost, simple structured micropump which is actuated by piezoelectric-discs, is fabricated with polydimethylsiloxane (PDMS) and the performances of the micropump, such as pump rate and backpressure, are characterized. The PDMS micropump with diffusers instead of passive check valves as a flow-rectifying element was fabricated. The deflection of glass diaphragm measured by atomic force microscope (AFM) is about 0.4$\mu\textrm{m}$ when applying a 150V square wave voltage at 300Hz across a 300${\mu}\ell$ thick piezoelectric disc. While the square wave driving voltage is applied to the piezoelectric disc of the actuator, the flow rate is measured by fluid displacement variation of the outlet tube. The flow rate of micropump increases with enhancing the applied voltage due to the increase of diaphragm deflection. The flow rate and the backpressure of the micropump with diffusers are about 32.9${\mu}\ell$/min and 173Pa respectively for the above mentioned deflection conditions.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1926-1928
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• 2003

The low-cost, simple structured micropump which is actuated by piezoelectricdiscs, is fabricated with polydimethylsiloxane (PDMS) and the performances of the micropump, such as pump rate and backward pressure, are characterized. The PDMS micropump with diffusers instead of passive check valves as a flow-rectifying element was fabricated. While the square wave driving voltage is applied to the piezoelectric disc of the actuator, the flow rate is measured by fluid displacement variation of the outlet tube. The flow rate of micropump increases with enhancing the applied voltage due to the increase of diaphragm deflection. The flow rate and the backward pressure of the micropump with diffusers are about $32.9{\mu}{\el}$/min and 173Pa respectively for the above mentioned deflection conditions.

• Journal of Aerospace System Engineering
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• v.12 no.4
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• pp.49-56
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• 2018

In this paper, the performance analysis and the experiment of the brake system using the small piezoelectric-hydraulic pump were performed. Initially, the 3-D modeling of the brake load components was performed for the construction of the brake system. Subsequently, modeling using the commercial program AMESim was performed. A floating caliper model was used as a load for modeling the brake system. Through the AMESim simulation, load pressure, check valve displacement and flow rate under no load state were calculated, and performance analysis and changes in dynamic characteristics were confirmed by adding brake load. A jig for use in fixing the brake load during performance test was manufactured. The flow rate was assessed under no load condition and load pressure formation experiments were performed and compared with simulation results. Experimental results revealed the maximum load pressure as about 73bar at 130Hz and the maximum flow rate as about 203cc/min at 145Hz, which satisfied the requirement of small- and medium-sized UAV braking system. In addition, simulation results revealed that the load pressure and discharge flow rate were within 6% and 5%, respectively. Apparently, the modeling is expected to be effective for brake performance analysis.

• Journal of Aerospace System Engineering
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• v.12 no.5
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• pp.32-39
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• 2018

In this paper, the calculation of the theoretical pressure transfer ratio due to the deformation of the thin-plate spring type check valve applied to the small piezoelectric-hydraulic pump was carried out. A thin-plate check valve is a flexible body that is deformed by an external force. The deformation of the check valve affects the rate at which the chamber pressure is transferred to the load pressure. The theoretical pressure transfer ratio for each model was calculated to compare the difference between the assumption that the thin-plate check valve is a rigid body and that of the flexible body model. The P-delta effect was considered for the calculation of the pressure transfer ratio of the flexible check valve model. In addition, a verification test for the calculated pressure transfer ratio obtained by considering the deformation of the flexible check valve model was carried out. The load pressure was measured by applying a thin-plate and ball-thin plate spring type check valves, respectively. The experimental pressure transfer ratio was calculated using the respective load pressure obtained from the experiments. The validity of the pressure transfer analysis of the check valve, taking into consideration the P-delta effect, was verified by comparing it with the theoretically calculated pressure transfer ratio.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.166-166
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• 2007

ZnO는 육방정계(wurtzite) 결정구조를 지니며 상온에서 3.37eV의 wide band gap을 갖는다. ZnO의 엑시톤 결합 에너지는 GaN에 비해 2.5배 높은 60meV로서 고효율의 광소자 적용 가능성이 높다. 또한 고품위의 박막합성이 가능하다. 이러한 특성 때문에 display소자의 투명전극, 광전소자, 바리스터, 압전소자, 가스센서 등에 폭 넓게 응용되고 있다. ZnO박막의 제조는 스퍼터링, CVD, 진공증착법, 열분해법 등이 있다. 본 논문에서는 RF 마그네트론 스퍼터에 의해 제작된 ZnO 박막에 CMP공정을 수행하여 연마율과 비균일도 특성 및 광투과 특성을 연구하였다. ZnO박막은 $2{\times}2Cm$의 Corning glass위에 증착되었다. 로터리 펌프와 유확산 펌프를 이용하여 초기진공을 $2{\times}10^{-6}$ Torr까지 도달시킨 후 Ar과 $O_2$를 주입하였다. 증착은 상온에서 이루어졌으며 공정압력은 $6{\times}10^{-2}$Torr이였다. 초기의 불안정한 상태의 풀라즈마를 안정시키기 위해 셔터를 이용하여 pre-sputtering을 하였다. CMP 공정조건은 플레이튼 속도, 슬러리 유속, 압력은 칵각 60rpm, 90ml/min, $300g/cm^2$으로 일정하게 유지하였으며 헤드속도는 20rpm에서 100rpm까지 증가시키면서 연마특성을 조사하였다. 실리카슬러리의 적합성을 알아보기 위해 DIW와 병행하여 CMP공정을 수행하고 비교 분석하였다. CMP공정 결과 광투과도는 굉탄화된 표면의 확보로 인해 향상된 특성을 보였다. 실리카 슬러리를 사용하여 CMP를 할 경우는 헤드속도는 저속으로 하여야 양호한 연마특성을 얻을 수 있었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.185-185
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• 2009

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein. The finite elements analysis on the proposed pump model is carried out to verify its operation principle and design by the commercial FEM software. Components of piezopump were made, assembled, and tested to validate the concepts of the proposed pump and confirm the simulation results. The performance of the proposed piezopump the highest pressure level of 83.4kHz.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.159-159
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• 2009

Existence of physical moving parts (ex. check valve) produces several problems (mechanical abrasion, deterioration of reliability, limited temperature performances etc.) in driving pumps. To overcome such problems, we proposed a valveless piezoelectric micro-pump which has new type volume transferring mechanism. The proposed micro-pump has a double faced disk type vibrator that can generate peristaltic motion formed by traveling wave in each surface of a disk. This type of micro-pump is able to apply to a fluid supply system that provides two different kinds of fluid simultaneously. In this paper, we propose a simple and novel design of piezoelectric micro-pump that is peristaltically by piezoelectric actuators and allows the removal of the need for valves of other physically moving parts. The finite elements analysis on the proposed pump model was carried out to verify its operation principle using the commercial analysis software.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.44 no.11
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• pp.981-988
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• 2016

Dynamometer is a device for testing the performance of the brake and it is composed of a test zone, the mechanical inertia zone, the electric motor and the control zone. Hybrid dynamometer is a way to compensate for the loss of mechanical inertia in accordance with the brake operation by using an electric motor to reduce the size of the mechanical inertia with the advantage that can be tested in the relatively small size of the mechanical inertia and low cost. In this paper, design the proper size of hybrid dynamometer in the laboratory level with the space constraints, analysed the effect of critical parameter on the braking performance of hybrid dynamometer such as changing the friction coefficient. With this study, could get the results of guideline to judge the poor friction material by measuring the torque of the electric motor to compensate the energy loss due to a reduced mechanical inertia.

• The Journal of the Acoustical Society of Korea
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• v.26 no.1
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• pp.42-47
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• 2007

In this paper. we have studied improvement in sensitivity by increasing the frequency of SAW sensors for detecting the immobilization and hybridization of DNA. The sensor consists of twin SAW delay lines operating at 200MHz, a sensing channel and a reference channel. fabricated on $36^{\circ}$ rotated Y-cut X-propagation $LiTaO_3$ crystals. The optimum concentration of probe and target DNA was decided for the improvement of detection mechanism. and digital syringe pump system was used to reduce the human errors. The hybridization between immobilized probe DNA and target DNA on the gold-coated delay line results in mass loading on the delay line of the sensing channel. Thus, the relative frequency change was monitored in relation to the mass loading. The measurement results showed a good response of the sensor to the DNA hybridization with a maximum sensitivity level up to 0.066ng/m1/Hz.