Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Fabrication of a Micropump using Piezoelectric Actuator

압전 구동기를 이용한 마이크로 펌프의 제작

  • Ji, Y.H. (School of Electrical and Electronic Engineering, AJOU University) ;
  • Yang, S.S. (School of Electrical and Electronic Engineering, AJOU University)
  • 지영훈 (아주대학교 전기전자공학부) ;
  • 양상식 (아주대학교 전기전자공학부)
  • Published : 1996.07.22
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Abstract

In this paper, a piezoelectric micropump is fabricated and tested. The micropump consists of an actuator and two micronozzles have been made of silicon. It contains a piezoelectric polymer which allows opening and closing of the valves electrically. The actuator and the two micronozzles are fabricated by the anisotropic etch using EPW. Then, the fabricated actuator and the valves are anodically bonded with the pyrex glass which consists of the inlet and the outlet channels. The measured deflection of the piezoelectric polymer is $54\;{\mu}m$ at 1.6 kHz. The maximum pumping flow rate and the backward pressure of the micropump are $22\;{\mu}{{\ell}/min$, 8.7 Pa at 10 Hz, respectively.

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