• Transactions of the Korean Society of Mechanical Engineers B
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• v.30 no.4 s.247
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• pp.350-357
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• 2006

A new valveless micropump for bi-directional application has been developed and tested. The micropump was fabricated on silicon and glass substrates by micromachining process. The micropump in this study consists of a membrane actuator, a pumping chamber, fluidic channels and two piezoelectric ceramic films. The channels and pumping chamber were etched on a glass wafer and the membrane was made on a silion wafer which is actuated by a piezoelectric ceramic (PZT) film. The geometry of the micropump was optimized by numerical analysis and the performance of the micropump was investigated by the experiments. The maximum flow rate was $323{\mu}L/min$ and the maximum back pressure was 294 Pa when the membrane actuator of $10{\times}10mm^2$ was driven at 130 Hz and 385 V.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.16 no.8
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• pp.707-713
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• 2004

A numerical analysis has been conducted for flow characteristics of piezoelectric micropumps. In the present study, FSI (Fluid-Structure Interaction) model and grid deform model have been employed for each of two different geometries of the micropumps with two different frequencies in the piezoelectric diffuser/nozzle based micropumps. The displacement of piezo disk and flow rates have been closely examined at the inlet and outlet. It has been found that the motion of the piezo disk investigated with FSI model is not in accordance with that with grid deform model. The results show that the time averaged flow rate calculated with FSI model is larger than that with grid deform model. This study presents the performance analysis of piezoelectric micropumps with two different numerical models for different types of pumps.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2788-2793
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• 2008

A numerical analysis has been conducted for flow characteristics and performance of a micropump with piezodisk and MHD(Magnetohydrodynamics) fluid. Various micro systems which could not be considered in the past have been recently growing with the development of MEMS(Micro Electro Mechanical System) and micro machining technology. Especially, micropumps, essential part of micro fluidic devices, are being lively studies by many researchers. In the present study, the piezo electric micropump with electromagnetic resistance for electrically conducting fluids is considered. The prescribed grid deformation method is used for the displacement of the membrane. The change of the performance of the micropump and flow characteristics of the electrically conducting fluid with the magnitude of the magnetic fields, duct size, the position of the inlet and outlet duct are investigated in the present study.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.41 no.1
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• pp.25-30
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• 2013

The piezoelectric-based hydraulic actuator is a hybrid device consisting of a hydraulic pump driven by piezoelectric stacks that is coupled to a conventional hydraulic cylinder via a set of fast-acting valves. Nowadays, such hybrid actuators are being researched and developed actively in many developed countries by requirement of high performance and compact flight system. In this research, operation principle and performance testing of the hybrid actuator were introduced. Output velocities have been measured in both loaded case and not loaded case and the blocking force also has been measured in external loaded case. The maximum velocity of the actuator is 53.3 mm/s, blocking force is 240.7 N and corresponding power output is 3.2 W.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.931-932
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.595-596
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.141-142
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• 2008

• Journal of Drive and Control
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• v.6 no.2
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• pp.17-25
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• 2009

• Journal of Drive and Control
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• v.9 no.4
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• pp.105-118
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• 2012

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.17 no.1
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• pp.33-38
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• 2005

This study has been conducted to investigate flow characteristics of a micropump with piezoelectric materials. In this study, the change of flow rates has been investigated for different positions of the inlet and outlet and for different distances between them. The FSI(Fluid Structure Interaction) method has been employed for numerical analysis of the piezoelectric diffuser/nozzle based micropump. It has been found that time averaged flow rate is greater in the case that distance between the inlet and outlet is longer. For the cases where the positions of the inlet are different with the position of the fixed outlet at the center, the flow rate is increased as the inlet is located farther from the center. This study may supply fundamental understandings for the design and analysis of the prototypes of piezoelectric micropumps.