• 대한기계학회논문집B
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• 제30권4호
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• pp.350-357
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• 2006

A new valveless micropump for bi-directional application has been developed and tested. The micropump was fabricated on silicon and glass substrates by micromachining process. The micropump in this study consists of a membrane actuator, a pumping chamber, fluidic channels and two piezoelectric ceramic films. The channels and pumping chamber were etched on a glass wafer and the membrane was made on a silion wafer which is actuated by a piezoelectric ceramic (PZT) film. The geometry of the micropump was optimized by numerical analysis and the performance of the micropump was investigated by the experiments. The maximum flow rate was $323{\mu}L/min$ and the maximum back pressure was 294 Pa when the membrane actuator of $10{\times}10mm^2$ was driven at 130 Hz and 385 V.

• 설비공학논문집
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• 제16권8호
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• pp.707-713
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• 2004

A numerical analysis has been conducted for flow characteristics of piezoelectric micropumps. In the present study, FSI (Fluid-Structure Interaction) model and grid deform model have been employed for each of two different geometries of the micropumps with two different frequencies in the piezoelectric diffuser/nozzle based micropumps. The displacement of piezo disk and flow rates have been closely examined at the inlet and outlet. It has been found that the motion of the piezo disk investigated with FSI model is not in accordance with that with grid deform model. The results show that the time averaged flow rate calculated with FSI model is larger than that with grid deform model. This study presents the performance analysis of piezoelectric micropumps with two different numerical models for different types of pumps.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회B
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• pp.2788-2793
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• 2008

A numerical analysis has been conducted for flow characteristics and performance of a micropump with piezodisk and MHD(Magnetohydrodynamics) fluid. Various micro systems which could not be considered in the past have been recently growing with the development of MEMS(Micro Electro Mechanical System) and micro machining technology. Especially, micropumps, essential part of micro fluidic devices, are being lively studies by many researchers. In the present study, the piezo electric micropump with electromagnetic resistance for electrically conducting fluids is considered. The prescribed grid deformation method is used for the displacement of the membrane. The change of the performance of the micropump and flow characteristics of the electrically conducting fluid with the magnitude of the magnetic fields, duct size, the position of the inlet and outlet duct are investigated in the present study.

• 한국항공우주학회지
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• 제41권1호
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• pp.25-30
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• 2013

집적형 하이브리드 구동장치는 적층형 압전재료(압전스택)를 이용한 마이크로 펌프에서 토출되는 유체로 피스톤을 구동시키는데 크기는 작으면서도 큰 구동력과 높은 속도를 동시에 출력할 수 있는 새로운 개념의 통합 구동장치로서 현재 소형화 및 고출력을 요구하는 항공 우주, 유도무기 등 다양한 분야에서 광범위하게 연구되고 있다. 본 연구에서는 이러한 하이브리드 구동장치의 구동원리 및 성능 시험에 대해 소개하였다. 우선 구동장치의 주 동력인 압전 스택의 성능 시험을 수행함으로써 압전 스택의 구동전력과 구동시간에 따른 성능 변화를 관찰하였고 다음 구동장치의 성능 시험을 통해 구동장치의 최대 이송속도와 최대 구동력을 측정하였다. 구동장치의 최대 이송속도는 53.3 mm/s로, 최대 구동력은 240.7 N으로, 최대 일률은 3.2 W로 측정되었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2010년도 춘계학술대회 논문집
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• pp.931-932
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• 2010

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.595-596
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• 2008

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.141-142
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• 2008

• 드라이브 ㆍ 컨트롤
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• 제6권2호
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• pp.17-25
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• 2009

• 드라이브 ㆍ 컨트롤
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• 제9권4호
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• pp.105-118
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• 2012

• 설비공학논문집
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• 제17권1호
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• pp.33-38
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• 2005

This study has been conducted to investigate flow characteristics of a micropump with piezoelectric materials. In this study, the change of flow rates has been investigated for different positions of the inlet and outlet and for different distances between them. The FSI(Fluid Structure Interaction) method has been employed for numerical analysis of the piezoelectric diffuser/nozzle based micropump. It has been found that time averaged flow rate is greater in the case that distance between the inlet and outlet is longer. For the cases where the positions of the inlet are different with the position of the fixed outlet at the center, the flow rate is increased as the inlet is located farther from the center. This study may supply fundamental understandings for the design and analysis of the prototypes of piezoelectric micropumps.