• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.744-749
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• 2005

In this paper, a lens actuator for mobile devices is proposed using stack type piezoelectric materials. In general, the deformation of PZT actuators is not enough for lens motion when the allowed voltage is applied. The small stroke problem can be solved by accumulating a lot of small displacements in high frequency. In this paper, a new inch-worm type model for focusing actuator is suggested based on the interaction of inertial and frictional forces. Theoretical analysis and simulation using ANSYS are performed to verify the feasibility of the inch-worm PZT actuator model. Various types of clamps are considered to determine the effect of frictional force on the motion, and appropriate clamp-actuator models are proposed. The proposed models are experimentally verified and the experimental results show high correspondence with theoretical and simulated values. The inch-worm type focusing actuator enable a large stroke with 7.79 mm/sec with 10kHz and 10V.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.12
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• pp.88-94
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• 2007

A flexure hinge-based compliant stage driven by stack-type piezoelectric elements has high precision motion but small operational range due to the characteristics of the piezoelectric element. Since the common flexure hinges can be broken by excessive deflection when the displacement is amplified by a high amplification ratio, a flexure hinge mechanism for large deflection is required. A cartwheel-type flexure hinge has an advantage of larger deflection compared with the common flexure hinges. This study presents a rotation stage with cartwheel-type flexure hinges driven by a stack-type piezoelectric element. The characteristics and the performance of the rotation stage are described by the terms of principal resonance frequency, amplification ratio of rotational displacement, maximum rotational displacement and block moment, in which the terms are analyzed by geometric parameters of the rotation stage. The analyzed results will be used as the guideline of the design of the rotation stage.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.7 s.100
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• pp.878-884
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• 2005

This paper presents an algorithm for the precision motion control based on the dynamic characteristics of piezoelectric actuators in the inchworm. The dynamic characteristics are identified by the frequency domain modeling technique using the experimental data. For the motion control, the hysteresis behavior is compensated by the inverse hysteresis model. The dynamic stiffness of an inchworm is generally low compared to its driving condition, so mechanical vibration may degenerate the motion accuracy of the inchworm. The Sliding mode controller and the Kalman filter are designed for motion control of the inch-worm.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.630-637
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• 2003

This paper proposes a new modeling scheme to describe the hysteresis and the dynamic characteristics of piezoelectric actuators in the inchworm and develops a control algorithm for the precision motion control. From the analysis of piezoelectric actuator behaviors, the hysteresis can be described by the functions of a maximum input voltage. The dynamic characteristics are also identified by the frequency domain modeling technique based on the experimental data. For the motion control, the hysteresis behavior is compensated by the inverse hysteresis model. The dynamic stiffness of an inchworm is generally low compared to its driving condition, so mechanical vibration may degenerate the motion accuracy of the inchworm. Therefore, the sliding mode control and the Kalman filter are developed for the precision motion control of the inch-warm. To demonstrate the effectiveness of the proposed modeling schemes and control algorithm, experiment validations are performed.

• Journal of the Korean Society for Precision Engineering
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• v.12 no.7
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• pp.26-31
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• 1995

A new actuating mechanism suitable for a micro positioning device is developed using piezo-electric elements. The actuator can make a step movement of 0.5 .mu. m up to 3.5 .mu. m. The step size can be adjusted on demand. By repeating this step action, long distance movement is achieved. Precise positioning can be obtained by combining the coarse motion with the maximum step size and fine motion. Two types of fine motion have been proposed for a driving method. Firstly, feedback control bases on PID is applied. The experimental results for the two method are presented.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.4
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• pp.64-71
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• 2001

In general, precise linear actuators using piezoelectric element are driven by friction force. Exact understanding of friction plays an important role in analysis and control of a motor. In this research, we designed a precise linear actuator using piezoelectric elements and observed its dynamic characteristics. By varying phase angle difference and amplitudes of the sinusoidal waves that are driving inputs, we can know that it is possible to control moving direction and distance of the slider. As preload is increased, its moving distance is decreased. And also, we have modeled a precise linear actuator using stick slip friction models such as classical, Karnopp. and reset integrator. Finally, by comparing the results of simulation and experiment, it was verified that the model is well designed.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.24 no.11
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• pp.2723-2731
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• 2000

Ultrasonic motors(USM) has been emerging as one type actuators, which possess many advantages such as high torque, low weight, compact size and no magnetic field generation. In spite of these features, there are several problems to be solved, which are temperature rise in case of long term operation, non -linearity, and hysteresis. Among these, hysteresis cause the most serious problem in force/torque control applications. To cope with this paper we propose a new PWM driving method which can be applied to force/torque control applications. To cope with this problem, in this paper we propose a new PWM driving method which can applied to force/torque control of USM. To verify the proposed method, an experimental setup was built and several experiments were performed.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.3
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• pp.152-157
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• 2001

An ultraprecision rotary motor is developed using inchworm motion of two belts actuated by elongation of piezoelectric elements. A symmetric lever mechanism with flexure hinges is designed to connect belts with piezoelectric elements. The lever mechanism is used not only to amplify the elongation of piezoelectric element but also to minimize the numbers of components and the effort for assembly. By experiment, the rotational angle by one cycle is varied from $0.2{\times}10-4 rad to 9.76{\times}10-4$ rad depending on input signal amplitude. Further, the motor has the capability of getting more precise rotational resolution by enlarging the radius of the rotor.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.18 no.2
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• pp.228-233
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• 2009

An ultra-precision stage is used in many industrial areas such as precision machine tools or semiconductor apparatus. These stages used to be driven by piezoelectric actuators in order to obtain ultra precision positioning resolution. Piezoelectric actuator can be moved fast in nanometer resolution. However, it has relatively large non-linear characteristics like hysteresis and creep curve. Although several kinds of control techniques have been developed, controller design method is still complicated. In this paper fuzzy control rules are developed intuitively. In order to verify the performance a series of experiments were conducted and the results were compared with those of the PID controller case.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.4
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• pp.140-147
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• 2008

This paper represents an ultra precision rotational device where the smooth impact drive mechanism (SIDM) is utilized as driving mechanism. Linear motions of piezoelectric elements are converted to the rotational motion of disk by frictional forces generated between the rotational disk and the friction part that is attached to the piezoelectric element. This device was designed to drive the rotational disk using slip-slip motion mechanism instead of stick-slip motion mechanism occurred in conventional impact drive mechanism. Experimental results show that the angular velocity is increased in proportion to the magnitude and frequency of supplied voltage to piezoelectric element and decreased as the preload is increased. In our device, the smooth rotational motion was obtained when the driving frequency has been reached to 500Hz under the driving voltage of 100V.