• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2006년도 춘계학술대회논문집
• /
• pp.1396-1403
• /
• 2006

This study shows that the system performance of a positioning system composed of a piezoelectric actuator-driven flexure guide depends largely on the preload applied on the flexure guide and the driving input amplitude. We used a flexure guided system that had an original resonant frequency of 54Hz. Our experiment showed that we could increase the driving bandwidth above the original resonant frequency, for a case involving a large preload and a small input amplitude. Results show that there is a specific 'separation frequency' where the response of the moving mass of the flexure system decouples from the response oi the piezoelectric actuator, and this specific separation frequency can be selected by a proper choice of the preload and the input amplitude. To find the separation frequency, sine sweep tests were performed. To confirm the increased system bandwidth frequency, open-loop sine tracking experiments were performed. Test results show that the system responds very well up to 130 Hz frequency higher than the original natural frequency (54Hz).

• 한국소음진동공학회논문집
• /
• 제16권4호
• /
• pp.346-354
• /
• 2006

This study shows that the system performance of a positioning system composed of a piezoelectric actuator-driven flexure guide depends largely on the preload applied on the flexure guide and the driving input amplitude. We used a flexure guided system that had an original resonant frequency of 54 Hz. Our experiment showed that we could increase the driving bandwidth above the original resonant frequency, for a case involving a large preload and a small input amplitude. Results show that there is a specific 'separation frequency' where the response of the moving mass of the flexure system decouples from the response of the piezoelectric actuator, and this specific separation frequency can be selected by a proper choice of the preload and the input amplitude. To find the separation frequency, sine sweep tests were performed. To confirm the increased system bandwidth frequency, open-loop sine tracking experiments were performed. Test results show that the system responds very well up to 130 Hz frequency higher than the original natural frequency (54 Hz).

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 2005년도 춘계학술대회 논문집
• /
• pp.81-86
• /
• 2005

As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement to the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• 한국지능시스템학회:학술대회논문집
• /
• 한국퍼지및지능시스템학회 1998년도 추계학술대회 학술발표 논문집
• /
• pp.568-576
• /
• 1998

In this thesis discuss with a flexible robotic finger design and controller which is used for the micro flexible robotic finger. So, miniaturization, precision, controller for the control of grasping force and actuator were needed. And, even if we develop a new actuator and controller, in order to use on real system, we must considerate of a many side problem. In a force control of micro flexible finger for grasping an object, the fingertip's vibration was more important task of accuracy control. And, controller were adopt the PD/PI mixed type fuzzy controller. The controller were consist of two part, one is a PD type fuzzy controller for increase the rising time response, the other is a PI type fuzzy controller for decrease of steady-state error. Especially, in a PD type fuzzy controller, we used only seven rules. And, for a PI controller, we adopt a reset factor for the control of input values. so, we have overcome the exceed of controller's input range. For the estimate of ontroller's utility and usefulness, we have experiment and computer simulation of three cases. First, we consider of unit force grasping control for a task object, which is 0.03N. Second, bounding grasping force control which is add to a sinusoidal force on the unit force. At this cases the task force is (0.03+0.01 sin wt N). And consider of following of rectangular forces.

• 한국소음진동공학회논문집
• /
• 제15권11호
• /
• pp.1295-1302
• /
• 2005

This paper shows experimental evaluation results of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors as like explained in detail in Ref. (5). First, the fabrication methods were explained. Second, as the static Properties of the Planar scanner. we evaluated the maximum travel range & crosstalk. Also, we presented the correcting method for crosstalk using electric circuits finally. as the dynamic properties of the planar scanner, we evaluated the first resonant frequency. Also, we presented the actual AFM(atomic force microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that properties of the proposed planar scanner are well enough to be used in SPM applications like AFM.

• 한국소음진동공학회:학술대회논문집
• /
• 한국소음진동공학회 2005년도 추계학술대회논문집
• /
• pp.879-882
• /
• 2005

This paper shows a method for design of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors. In the design of flexure guides, the Castigliano's theorem was used to find the stiffness of the guide. The motion amplifying mechanism was used in the piezoelectric actuator to achieve a large travel range. We found theoretically the travel range of the total system and verified using the commercial FEM(Finite element method) program. The maximum travel range of the planar scanner is above than 140 $\mu$m. The 3 axis positioning capability was verified by the mode analysis using the FEM program. Moreover, we presented the actual AFM(Atomic Force Microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that the properties of the proposed planar scanner is well enough to be used in SPM applications like AFM.

• 한국산학기술학회논문지
• /
• 제15권4호
• /
• pp.1879-1884
• /
• 2014

최근 미세접합 기술이 다양한 사회에서 주목받고 있다. 미세접합 기술은 레이저 접합 초음파 접합 등이 있다. 그러나 미세 접합의 연구가 많이 부족한 실정이다. 이에 본 논문에서는 초음파 접합장치 구동 시 열평형 상태에서 압전소자에 열영향을 최소화하기 위해 냉각관을 설계하였다. 또한 냉각관이 설계된 초음파 접합 장치를 이용하여 접합 실험을 실시하였다. 다꾸찌 실험계획법을 이용하여 실험을 실시하였으며, 기초실험을 통해 공정변수와 반응 변수를 설정하였다. 접합 실험의 신뢰도를 검증하기 위하여 접합 계면의 미세조직을 관찰하였고, 인장실험을 통해 접합 강도를 확인하였다.

• 센서학회지
• /
• 제12권6호
• /
• pp.265-272
• /
• 2003

본 논문은 파이렉스 #7740 유리 박막을 이용한 MEMS용 MLCA (Multi Layer Ceramic Actuator)와 Si기판의 양극접합 특성에 관한 것이다. 최적의 RF 마그네트론 스피터링 조건 (Ar 100%, input power $1\;W/cm^2$)하에서 MLCA기판위에 파이렉스 #7740 유리의 특성을 갖는 박막을 증착하였다. $450^{\circ}C$에서 1시간 열처리한 다음, -760 mmHg, 600V 그리고 $400^{\circ}C$에서 1시간동안 양극접합했다. 그 다음에 Si 다이어프램을 제조한 후, MLCA/Si 접합계면과 MLCA 구동을 통한 Si 다이어프램 변위특성을 분석 및 평가하였다. 다이어프램 형상에 따라 정밀한 변위 세어가 가능했으며 0.05-0.08 %FS의 우수한 선형성을 나타내었다. 또한, 측정동안 접합계면 균열이나 계면분리가 일어나지 않았다. 따라서, MLCA/Si기판 양각접합기술은 고성능 압전 MEMS 소자 제작공정에 유용하게 사용가능할 것이다.

• 한국전기전자재료학회논문지
• /
• 제28권2호
• /
• pp.69-74
• /
• 2015

Recently, energy harvesting technology is increasing due to the fossil fuel shortages. Energy harvesting is generating electrical energy from wasted energies as sunlight, wind, waves, pressure, and vibration etc. Energy harvesting is one of the alternatives of fossil fuel. One of the energy harvesting technologies, the piezoelectric energy harvesting has been actively studied. Piezoelectric generating uses a positive piezoelectric effect which produces electrical energy when mechanical vibration is applied to the piezoelectric device. Piezoelectric energy harvesting has an advantage in that it is relatively not affected by weather, area and place. Also, stable and sustainable energy generation is possible. However, the output power is relatively low, so in this paper, newly designed honeycomb shaped piezoelectric energy harvesting device for increasing a generating efficiency. The output characteristics of the piezoelectric harvesting device were analyzed according to the change of parameters by using the finite element method analysis program. One model which has high output voltage was selected and a prototype of the honeycomb shaped piezoelectric harvesting device was fabricated. Experimental results from the fabricated device were compared to the analyzed results. After the AC-DC converting, the power of one honeycomb shaped piezoelectric energy harvesting device was measured 2.3[mW] at road resistance 5.1[$K{\Omega}$]. And output power was increased the number of harvesting device when piezoelectric energy harvesting device were connected in series and parallel.

• 비파괴검사학회지
• /
• 제33권1호
• /
• pp.54-62
• /
• 2013

본 연구는 비접촉 무전원 표면탄성파(surface acoustic wave, SAW) 온도센서를 개발하기 위하여 수행되었다. 단일전극 구조의 IDT(inter-digital transducer)와 434 MHz의 공진주파수를 가지는 SAW 소자를 $128^{\circ}$ rot-X $LiNbO_3$ 압전기판위에 반도체 공정으로 제작하였다. SAW 온도센서의 음향 반사판에 따른 반사 신호의 특성을 분석하기 위하여 다양한 형태의 음향 반사판을 제작하여 표면탄성파 신호의 반사특성을 분석한 결과 빗살형 전극형태의 반사판이 가장 양호한 반사특성을 나타내었다. SAW 온도센서를 구동하기 위한 신호를 송신하고 온도에 따른 SAW 센서의 출력신호를 수신하기 위하여 다이폴 안테나와 마이크로프로세서에 기반한 무선 송수신 시스템을 제작하였다. $40{\sim}80^{\circ}C$의 온도 범위에서 개발된 SAW 온도센서와 무선 송수신 시스템을 평가한 결과 온도증가에 따라 SAW 온도센서의 공진 주파수가 선형적으로 감소하였으며 결정계수가 0.99 이상으로 정확한 무선 온도측정이 가능한 것으로 나타났다.