• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1864-1869
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• 2003

A novel piezoelectric micropump using active check valves in place of conventional passive check valves in inlet and outlet has been proposed and investigated. It actively controls open/close motion of check valves using piezoelectric actuator for expansion/contraction of pump chamber. In this paper, bi-directional flow characteristics and load characteristics are experimentally investigated using an adequate timing control for valve closing motion with a prototype micropump fabricated with the effective size of $17{\times}8{\times}11mm^{3}$. From the experimental results, it is ascertained that optimal values of phase shift against voltage to drive pump chamber for realization of a miniaturized but powerful micropump, are $15^{\circ}$ in inlet check valve and $195^{\circ}$ in outlet. Based on the obtained results, a sheet-type active shuttle valve that has a unified valve-body for inlet and outlet check valves is proposed. A micropump with the effective size of $10{\times}10{\times}10mm^{3}$ is fabricated and basic characteristics are experimentally investigated.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.91-91
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• 2009

Piezoelectric micro-pump should contain the physical running parts like check valves for acquiring the unilateral motion of fluid from the alternating motion of actuators. But the check valves raise many problems such as abrasion or exhaustive destruction by the recursive mechanical displacement To solve these problems, we propose a novle type piezoelectric valveless micro-pump using peristaltic motion due to the traveling wave excitation. Proposed pump model is consisted of two piezoelectric ceramic plates, elastic metal body, caps for covering flow path, rubber rings for sealing tightly and disk springs for the pressurization of pump body.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.159-159
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• 2009

Existence of physical moving parts (ex. check valve) produces several problems (mechanical abrasion, deterioration of reliability, limited temperature performances etc.) in driving pumps. To overcome such problems, we proposed a valveless piezoelectric micro-pump which has new type volume transferring mechanism. The proposed micro-pump has a double faced disk type vibrator that can generate peristaltic motion formed by traveling wave in each surface of a disk. This type of micro-pump is able to apply to a fluid supply system that provides two different kinds of fluid simultaneously. In this paper, we propose a simple and novel design of piezoelectric micro-pump that is peristaltically by piezoelectric actuators and allows the removal of the need for valves of other physically moving parts. The finite elements analysis on the proposed pump model was carried out to verify its operation principle using the commercial analysis software.